Initializing planner! Corners (tracking_z=1) ll x=125.945, y=73.243, z=-15.203 ul x=126.619, y=98.191, z=-14.949 lr x=160.743, y=72.450, z=-15.101 Bounding box x: 125.945 to 160.743 z: -15.203 to -14.949 y: 72.450 to 98.191 per_col xs (0, 200), ys (125.94525, 160.49525) per_row xs (0, 143), ys (125.94525, 126.61925) per_col xs (0, 200), ys (-15.203, -15.101) per_row xs (0, 143), ys (-15.203, -14.949) per_col xs (0, 200), ys (73.24325, 72.45025) per_row xs (0, 143), ys (73.24325, 97.94324999999999) Planner pipeline: odict_keys(['points-xy3p', 'kinematics', 'image-capture', 'image-save']) Running planner Generated by pyuscope on 2026-06-16 23:30:01 General notes: Pixel counts are for final scaled image as written to disk XY3P Ideally taking 28792.4 pictures (200.475 X 143.621) but actually taking 28944 (201 X 144), 99.5% efficient Axis x 0.000000 to 34.806535 Ideal overlap: 0.300000, actual 0.301838 full delta: 34.806535 view: 960 pix border: 0.000000 Axis y 0.000000 to 24.956603 Ideal overlap: 0.300000, actual 0.301855 full delta: 24.956603 view: 960 pix border: 0.000000 Pano size (requested/actual): mm: 34.807 x, 24.957 y => 868.7 mm2 pix: 135008 x, 96802 y => 13.1 GP Image size: mm: 0.247 x, 0.247 y => 0.1 mm2 pix: 960 x, 960 y => 0.9 MP Step 1: raw sensor pixels: 1280w x 960h Step 2: crop {'top': 0, 'bottom': 0, 'left': 160, 'right': 160} Step 3: apply scalar 1.00 Step 4: final sensor pixels: 960w x 960h Derived: Ideal pictures: 200.5 x, 143.6 y => 28792.4 Actual pictures: 201 x, 144 y => 28944 Generated positions: 28944 step: 0.173 x, 0.173 y tsettle_motion: 1.300 tsettle_hdr: 0.600 Output dir: data/scan/2026-06-17_03-30-01_waferspace1a Output extension: .jpg XY3P: 1 / 28944 @ c=0, r=143, X126.069 Y73.367 Z-15.203 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r143.jpg 1 / 28944, ETA: 49:38:50.2898 @ 0.161937 items / sec XY3P: 2 / 28944 @ c=1, r=143, X126.242 Y73.363 Z-15.202 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r143.jpg 2 / 28944, ETA: 33:40:49.7998 @ 0.238697 items / sec XY3P: 3 / 28944 @ c=2, r=143, X126.415 Y73.359 Z-15.202 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r143.jpg 3 / 28944, ETA: 28:51:45.9086 @ 0.278531 items / sec XY3P: 4 / 28944 @ c=3, r=143, X126.587 Y73.355 Z-15.201 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r143.jpg 4 / 28944, ETA: 26:27:42.4708 @ 0.303792 items / sec XY3P: 5 / 28944 @ c=4, r=143, X126.760 Y73.351 Z-15.201 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r143.jpg 5 / 28944, ETA: 25:01:49.4123 @ 0.321154 items / sec XY3P: 6 / 28944 @ c=5, r=143, X126.933 Y73.347 Z-15.200 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r143.jpg 6 / 28944, ETA: 24:03:46.9400 @ 0.334053 items / sec XY3P: 7 / 28944 @ c=6, r=143, X127.106 Y73.343 Z-15.200 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r143.jpg 7 / 28944, ETA: 23:22:39.8481 @ 0.343834 items / sec XY3P: 8 / 28944 @ c=7, r=143, X127.278 Y73.339 Z-15.199 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r143.jpg 8 / 28944, ETA: 22:51:52.3000 @ 0.351539 items / sec XY3P: 9 / 28944 @ c=8, r=143, X127.451 Y73.335 Z-15.199 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r143.jpg 9 / 28944, ETA: 22:27:47.1360 @ 0.357809 items / sec XY3P: 10 / 28944 @ c=9, r=143, X127.624 Y73.331 Z-15.198 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r143.jpg 10 / 28944, ETA: 22:08:34.0907 @ 0.362972 items / sec XY3P: 11 / 28944 @ c=10, r=143, X127.797 Y73.327 Z-15.198 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r143.jpg 11 / 28944, ETA: 21:52:49.9952 @ 0.367310 items / sec XY3P: 12 / 28944 @ c=11, r=143, X127.969 Y73.323 Z-15.197 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r143.jpg 12 / 28944, ETA: 21:39:59.6074 @ 0.370925 items / sec XY3P: 13 / 28944 @ c=12, r=143, X128.142 Y73.319 Z-15.197 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r143.jpg 13 / 28944, ETA: 21:28:41.1167 @ 0.374167 items / sec XY3P: 14 / 28944 @ c=13, r=143, X128.315 Y73.315 Z-15.196 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r143.jpg 14 / 28944, ETA: 21:19:06.5356 @ 0.376955 items / sec XY3P: 15 / 28944 @ c=14, r=143, X128.488 Y73.311 Z-15.196 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r143.jpg 15 / 28944, ETA: 21:10:50.8474 @ 0.379393 items / sec XY3P: 16 / 28944 @ c=15, r=143, X128.660 Y73.308 Z-15.195 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r143.jpg 16 / 28944, ETA: 21:03:37.6789 @ 0.381547 items / sec XY3P: 17 / 28944 @ c=16, r=143, X128.833 Y73.304 Z-15.195 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r143.jpg 17 / 28944, ETA: 20:57:25.3418 @ 0.383417 items / sec XY3P: 18 / 28944 @ c=17, r=143, X129.006 Y73.300 Z-15.194 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r143.jpg 18 / 28944, ETA: 20:51:35.6720 @ 0.385189 items / sec XY3P: 19 / 28944 @ c=18, r=143, X129.179 Y73.296 Z-15.194 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r143.jpg 19 / 28944, ETA: 20:46:37.0723 @ 0.386713 items / sec XY3P: 20 / 28944 @ c=19, r=143, X129.351 Y73.292 Z-15.193 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r143.jpg 20 / 28944, ETA: 20:42:01.8146 @ 0.388128 items / sec XY3P: 21 / 28944 @ c=20, r=143, X129.524 Y73.288 Z-15.193 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r143.jpg 21 / 28944, ETA: 20:37:43.7163 @ 0.389463 items / sec XY3P: 22 / 28944 @ c=21, r=143, X129.697 Y73.284 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r143.jpg 22 / 28944, ETA: 20:29:36.4500 @ 0.392022 items / sec XY3P: 23 / 28944 @ c=22, r=143, X129.870 Y73.280 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r143.jpg 23 / 28944, ETA: 20:26:18.8698 @ 0.393061 items / sec XY3P: 24 / 28944 @ c=23, r=143, X130.042 Y73.276 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r143.jpg 24 / 28944, ETA: 20:23:28.3196 @ 0.393961 items / sec XY3P: 25 / 28944 @ c=24, r=143, X130.215 Y73.272 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r143.jpg 25 / 28944, ETA: 20:20:33.8516 @ 0.394886 items / sec XY3P: 26 / 28944 @ c=25, r=143, X130.388 Y73.268 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r143.jpg 26 / 28944, ETA: 20:18:02.0490 @ 0.395692 items / sec XY3P: 27 / 28944 @ c=26, r=143, X130.560 Y73.264 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r143.jpg 27 / 28944, ETA: 20:15:41.1439 @ 0.396443 items / sec XY3P: 28 / 28944 @ c=27, r=143, X130.733 Y73.260 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r143.jpg 28 / 28944, ETA: 20:13:28.0875 @ 0.397154 items / sec XY3P: 29 / 28944 @ c=28, r=143, X130.906 Y73.256 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r143.jpg 29 / 28944, ETA: 20:11:24.6115 @ 0.397815 items / sec XY3P: 30 / 28944 @ c=29, r=143, X131.079 Y73.252 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r143.jpg 30 / 28944, ETA: 20:09:30.6368 @ 0.398426 items / sec XY3P: 31 / 28944 @ c=30, r=143, X131.251 Y73.248 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r143.jpg 31 / 28944, ETA: 20:07:42.9046 @ 0.399004 items / sec XY3P: 32 / 28944 @ c=31, r=143, X131.424 Y73.244 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r143.jpg 32 / 28944, ETA: 20:06:08.8015 @ 0.399509 items / sec XY3P: 33 / 28944 @ c=32, r=143, X131.597 Y73.240 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r143.jpg 33 / 28944, ETA: 20:04:28.0128 @ 0.400053 items / sec XY3P: 34 / 28944 @ c=33, r=143, X131.770 Y73.236 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r143.jpg 34 / 28944, ETA: 20:02:56.3748 @ 0.400547 items / sec XY3P: 35 / 28944 @ c=34, r=143, X131.942 Y73.232 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r143.jpg 35 / 28944, ETA: 20:01:32.7234 @ 0.400997 items / sec XY3P: 36 / 28944 @ c=35, r=143, X132.115 Y73.228 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r143.jpg 36 / 28944, ETA: 20:00:12.3202 @ 0.401431 items / sec XY3P: 37 / 28944 @ c=36, r=143, X132.288 Y73.224 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r143.jpg 37 / 28944, ETA: 19:58:58.3261 @ 0.401830 items / sec XY3P: 38 / 28944 @ c=37, r=143, X132.461 Y73.220 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r143.jpg 38 / 28944, ETA: 19:57:44.9288 @ 0.402227 items / sec XY3P: 39 / 28944 @ c=38, r=143, X132.633 Y73.216 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r143.jpg 39 / 28944, ETA: 19:56:36.2080 @ 0.402598 items / sec XY3P: 40 / 28944 @ c=39, r=143, X132.806 Y73.212 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r143.jpg 40 / 28944, ETA: 19:53:07.0857 @ 0.403760 items / sec XY3P: 41 / 28944 @ c=40, r=143, X132.979 Y73.208 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r143.jpg 41 / 28944, ETA: 19:52:08.7999 @ 0.404075 items / sec XY3P: 42 / 28944 @ c=41, r=143, X133.152 Y73.204 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r143.jpg 42 / 28944, ETA: 19:51:14.8211 @ 0.404366 items / sec XY3P: 43 / 28944 @ c=42, r=143, X133.325 Y73.200 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r143.jpg 43 / 28944, ETA: 19:50:19.7650 @ 0.404664 items / sec XY3P: 44 / 28944 @ c=43, r=143, X133.497 Y73.197 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r143.jpg 44 / 28944, ETA: 19:49:28.4566 @ 0.404941 items / sec XY3P: 45 / 28944 @ c=44, r=143, X133.670 Y73.193 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r143.jpg 45 / 28944, ETA: 19:48:39.5790 @ 0.405204 items / sec XY3P: 46 / 28944 @ c=45, r=143, X133.843 Y73.189 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r143.jpg 46 / 28944, ETA: 19:47:52.8854 @ 0.405456 items / sec XY3P: 47 / 28944 @ c=46, r=143, X134.016 Y73.185 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r143.jpg 47 / 28944, ETA: 19:47:08.9453 @ 0.405692 items / sec XY3P: 48 / 28944 @ c=47, r=143, X134.188 Y73.181 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r143.jpg 48 / 28944, ETA: 19:46:24.5537 @ 0.405931 items / sec XY3P: 49 / 28944 @ c=48, r=143, X134.361 Y73.177 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r143.jpg 49 / 28944, ETA: 19:45:43.2039 @ 0.406153 items / sec XY3P: 50 / 28944 @ c=49, r=143, X134.534 Y73.173 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r143.jpg 50 / 28944, ETA: 19:45:03.2501 @ 0.406367 items / sec XY3P: 51 / 28944 @ c=50, r=143, X134.707 Y73.169 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r143.jpg 51 / 28944, ETA: 19:44:28.9804 @ 0.406549 items / sec XY3P: 52 / 28944 @ c=51, r=143, X134.879 Y73.165 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r143.jpg 52 / 28944, ETA: 19:43:48.9578 @ 0.406764 items / sec XY3P: 53 / 28944 @ c=52, r=143, X135.052 Y73.161 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r143.jpg 53 / 28944, ETA: 19:43:12.9388 @ 0.406956 items / sec XY3P: 54 / 28944 @ c=53, r=143, X135.225 Y73.157 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r143.jpg 54 / 28944, ETA: 19:42:41.8640 @ 0.407120 items / sec XY3P: 55 / 28944 @ c=54, r=143, X135.398 Y73.153 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r143.jpg 55 / 28944, ETA: 19:42:07.9220 @ 0.407301 items / sec XY3P: 56 / 28944 @ c=55, r=143, X135.570 Y73.149 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r143.jpg 56 / 28944, ETA: 19:41:33.1282 @ 0.407487 items / sec XY3P: 57 / 28944 @ c=56, r=143, X135.743 Y73.145 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r143.jpg 57 / 28944, ETA: 19:41:01.1341 @ 0.407656 items / sec XY3P: 58 / 28944 @ c=57, r=143, X135.916 Y73.141 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r143.jpg 58 / 28944, ETA: 19:40:30.2461 @ 0.407820 items / sec XY3P: 59 / 28944 @ c=58, r=143, X136.089 Y73.137 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r143.jpg 59 / 28944, ETA: 19:40:01.0211 @ 0.407974 items / sec XY3P: 60 / 28944 @ c=59, r=143, X136.261 Y73.133 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r143.jpg 60 / 28944, ETA: 19:39:32.4631 @ 0.408125 items / sec XY3P: 61 / 28944 @ c=60, r=143, X136.434 Y73.129 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r143.jpg 61 / 28944, ETA: 19:39:06.1423 @ 0.408263 items / sec XY3P: 62 / 28944 @ c=61, r=143, X136.607 Y73.125 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r143.jpg 62 / 28944, ETA: 19:38:38.4003 @ 0.408409 items / sec XY3P: 63 / 28944 @ c=62, r=143, X136.780 Y73.121 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r143.jpg 63 / 28944, ETA: 19:38:12.4429 @ 0.408544 items / sec XY3P: 64 / 28944 @ c=63, r=143, X136.952 Y73.117 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r143.jpg 64 / 28944, ETA: 19:37:47.1582 @ 0.408676 items / sec XY3P: 65 / 28944 @ c=64, r=143, X137.125 Y73.113 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r143.jpg 65 / 28944, ETA: 19:37:22.5780 @ 0.408804 items / sec XY3P: 66 / 28944 @ c=65, r=143, X137.298 Y73.109 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r143.jpg 66 / 28944, ETA: 19:36:59.6232 @ 0.408923 items / sec XY3P: 67 / 28944 @ c=66, r=143, X137.471 Y73.105 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r143.jpg 67 / 28944, ETA: 19:36:35.6978 @ 0.409048 items / sec XY3P: 68 / 28944 @ c=67, r=143, X137.643 Y73.101 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r143.jpg 68 / 28944, ETA: 19:36:13.0513 @ 0.409165 items / sec XY3P: 69 / 28944 @ c=68, r=143, X137.816 Y73.097 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r143.jpg 69 / 28944, ETA: 19:35:51.1687 @ 0.409277 items / sec XY3P: 70 / 28944 @ c=69, r=143, X137.989 Y73.093 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r143.jpg 70 / 28944, ETA: 19:35:29.4270 @ 0.409389 items / sec XY3P: 71 / 28944 @ c=70, r=143, X138.161 Y73.089 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r143.jpg 71 / 28944, ETA: 19:35:09.4399 @ 0.409491 items / sec XY3P: 72 / 28944 @ c=71, r=143, X138.334 Y73.085 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r143.jpg 72 / 28944, ETA: 19:34:48.2431 @ 0.409600 items / sec XY3P: 73 / 28944 @ c=72, r=143, X138.507 Y73.082 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r143.jpg 73 / 28944, ETA: 19:34:28.3687 @ 0.409702 items / sec XY3P: 74 / 28944 @ c=73, r=143, X138.680 Y73.078 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r143.jpg 74 / 28944, ETA: 19:34:09.1138 @ 0.409799 items / sec XY3P: 75 / 28944 @ c=74, r=143, X138.852 Y73.074 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r143.jpg 75 / 28944, ETA: 19:33:51.6488 @ 0.409887 items / sec XY3P: 76 / 28944 @ c=75, r=143, X139.025 Y73.070 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r143.jpg 76 / 28944, ETA: 19:33:31.9731 @ 0.409987 items / sec XY3P: 77 / 28944 @ c=76, r=143, X139.198 Y73.066 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r143.jpg 77 / 28944, ETA: 19:31:58.4446 @ 0.410518 items / sec XY3P: 78 / 28944 @ c=77, r=143, X139.371 Y73.062 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r143.jpg 78 / 28944, ETA: 19:30:27.7389 @ 0.411034 items / sec XY3P: 79 / 28944 @ c=78, r=143, X139.543 Y73.058 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r143.jpg 79 / 28944, ETA: 19:30:12.3143 @ 0.411110 items / sec XY3P: 80 / 28944 @ c=79, r=143, X139.716 Y73.054 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r143.jpg 80 / 28944, ETA: 19:29:57.8034 @ 0.411181 items / sec XY3P: 81 / 28944 @ c=80, r=143, X139.889 Y73.050 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r143.jpg 81 / 28944, ETA: 19:29:42.1444 @ 0.411258 items / sec XY3P: 82 / 28944 @ c=81, r=143, X140.062 Y73.046 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r143.jpg 82 / 28944, ETA: 19:29:27.7689 @ 0.411328 items / sec XY3P: 83 / 28944 @ c=82, r=143, X140.234 Y73.042 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r143.jpg 83 / 28944, ETA: 19:29:13.7842 @ 0.411396 items / sec XY3P: 84 / 28944 @ c=83, r=143, X140.407 Y73.038 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r143.jpg 84 / 28944, ETA: 19:28:59.8401 @ 0.411464 items / sec XY3P: 85 / 28944 @ c=84, r=143, X140.580 Y73.034 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r143.jpg 85 / 28944, ETA: 19:28:46.5970 @ 0.411527 items / sec XY3P: 86 / 28944 @ c=85, r=143, X140.753 Y73.030 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r143.jpg 86 / 28944, ETA: 19:28:32.6993 @ 0.411594 items / sec XY3P: 87 / 28944 @ c=86, r=143, X140.925 Y73.026 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r143.jpg 87 / 28944, ETA: 19:28:19.6603 @ 0.411657 items / sec XY3P: 88 / 28944 @ c=87, r=143, X141.098 Y73.022 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r143.jpg 88 / 28944, ETA: 19:28:06.5514 @ 0.411720 items / sec XY3P: 89 / 28944 @ c=88, r=143, X141.271 Y73.018 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r143.jpg 89 / 28944, ETA: 19:26:49.2282 @ 0.412160 items / sec XY3P: 90 / 28944 @ c=89, r=143, X141.444 Y73.014 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r143.jpg 90 / 28944, ETA: 19:26:37.8773 @ 0.412212 items / sec XY3P: 91 / 28944 @ c=90, r=143, X141.617 Y73.010 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r143.jpg 91 / 28944, ETA: 19:26:25.8538 @ 0.412269 items / sec XY3P: 92 / 28944 @ c=91, r=143, X141.789 Y73.006 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r143.jpg 92 / 28944, ETA: 19:26:14.4408 @ 0.412322 items / sec XY3P: 93 / 28944 @ c=92, r=143, X141.962 Y73.002 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r143.jpg 93 / 28944, ETA: 19:26:03.5465 @ 0.412372 items / sec XY3P: 94 / 28944 @ c=93, r=143, X142.135 Y72.998 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r143.jpg 94 / 28944, ETA: 19:25:52.6852 @ 0.412422 items / sec XY3P: 95 / 28944 @ c=94, r=143, X142.308 Y72.994 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r143.jpg 95 / 28944, ETA: 19:24:41.2650 @ 0.412829 items / sec XY3P: 96 / 28944 @ c=95, r=143, X142.480 Y72.990 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r143.jpg 96 / 28944, ETA: 19:24:31.2824 @ 0.412873 items / sec XY3P: 97 / 28944 @ c=96, r=143, X142.653 Y72.986 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r143.jpg 97 / 28944, ETA: 19:23:22.0946 @ 0.413268 items / sec XY3P: 98 / 28944 @ c=97, r=143, X142.826 Y72.982 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r143.jpg 98 / 28944, ETA: 19:23:12.8066 @ 0.413309 items / sec XY3P: 99 / 28944 @ c=98, r=143, X142.999 Y72.978 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r143.jpg 99 / 28944, ETA: 19:23:04.6722 @ 0.413343 items / sec XY3P: 100 / 28944 @ c=99, r=143, X143.171 Y72.974 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r143.jpg 100 / 28944, ETA: 19:22:55.2045 @ 0.413385 items / sec XY3P: 101 / 28944 @ c=100, r=143, X143.344 Y72.971 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r143.jpg 101 / 28944, ETA: 19:22:48.3508 @ 0.413411 items / sec XY3P: 102 / 28944 @ c=101, r=143, X143.517 Y72.967 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r143.jpg 102 / 28944, ETA: 19:22:38.1555 @ 0.413457 items / sec XY3P: 103 / 28944 @ c=102, r=143, X143.690 Y72.963 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r143.jpg 103 / 28944, ETA: 19:22:29.5699 @ 0.413494 items / sec XY3P: 104 / 28944 @ c=103, r=143, X143.862 Y72.959 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r143.jpg 104 / 28944, ETA: 19:22:21.9388 @ 0.413524 items / sec XY3P: 105 / 28944 @ c=104, r=143, X144.035 Y72.955 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r143.jpg 105 / 28944, ETA: 19:22:13.3168 @ 0.413561 items / sec XY3P: 106 / 28944 @ c=105, r=143, X144.208 Y72.951 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r143.jpg 106 / 28944, ETA: 19:22:05.2775 @ 0.413595 items / sec XY3P: 107 / 28944 @ c=106, r=143, X144.381 Y72.947 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r143.jpg 107 / 28944, ETA: 19:21:57.1409 @ 0.413629 items / sec XY3P: 108 / 28944 @ c=107, r=143, X144.553 Y72.943 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r143.jpg 108 / 28944, ETA: 19:21:49.2570 @ 0.413661 items / sec XY3P: 109 / 28944 @ c=108, r=143, X144.726 Y72.939 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r143.jpg 109 / 28944, ETA: 19:21:42.2314 @ 0.413688 items / sec XY3P: 110 / 28944 @ c=109, r=143, X144.899 Y72.935 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r143.jpg 110 / 28944, ETA: 19:21:34.0881 @ 0.413722 items / sec XY3P: 111 / 28944 @ c=110, r=143, X145.072 Y72.931 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r143.jpg 111 / 28944, ETA: 19:21:26.4317 @ 0.413753 items / sec XY3P: 112 / 28944 @ c=111, r=143, X145.244 Y72.927 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r143.jpg 112 / 28944, ETA: 19:21:19.1621 @ 0.413782 items / sec XY3P: 113 / 28944 @ c=112, r=143, X145.417 Y72.923 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r143.jpg 113 / 28944, ETA: 19:21:11.5757 @ 0.413813 items / sec XY3P: 114 / 28944 @ c=113, r=143, X145.590 Y72.919 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r143.jpg 114 / 28944, ETA: 19:20:15.5063 @ 0.414132 items / sec XY3P: 115 / 28944 @ c=114, r=143, X145.762 Y72.915 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r143.jpg 115 / 28944, ETA: 19:20:08.5978 @ 0.414159 items / sec XY3P: 116 / 28944 @ c=115, r=143, X145.935 Y72.911 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r143.jpg 116 / 28944, ETA: 19:20:00.3396 @ 0.414193 items / sec XY3P: 117 / 28944 @ c=116, r=143, X146.108 Y72.907 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r143.jpg 117 / 28944, ETA: 19:19:55.2187 @ 0.414209 items / sec XY3P: 118 / 28944 @ c=117, r=143, X146.281 Y72.903 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r143.jpg 118 / 28944, ETA: 19:19:47.5264 @ 0.414241 items / sec XY3P: 119 / 28944 @ c=118, r=143, X146.453 Y72.899 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r143.jpg 119 / 28944, ETA: 19:19:42.1880 @ 0.414258 items / sec XY3P: 120 / 28944 @ c=119, r=143, X146.626 Y72.895 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r143.jpg 120 / 28944, ETA: 19:19:35.7410 @ 0.414282 items / sec XY3P: 121 / 28944 @ c=120, r=143, X146.799 Y72.891 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r143.jpg 121 / 28944, ETA: 19:19:27.8576 @ 0.414315 items / sec XY3P: 122 / 28944 @ c=121, r=143, X146.972 Y72.887 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r143.jpg 122 / 28944, ETA: 19:19:21.5965 @ 0.414338 items / sec XY3P: 123 / 28944 @ c=122, r=143, X147.144 Y72.883 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r143.jpg 123 / 28944, ETA: 19:19:15.8147 @ 0.414358 items / sec XY3P: 124 / 28944 @ c=123, r=143, X147.317 Y72.879 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r143.jpg 124 / 28944, ETA: 19:19:09.5366 @ 0.414381 items / sec XY3P: 125 / 28944 @ c=124, r=143, X147.490 Y72.875 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r143.jpg 125 / 28944, ETA: 19:19:03.2236 @ 0.414404 items / sec XY3P: 126 / 28944 @ c=125, r=143, X147.663 Y72.871 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r143.jpg 126 / 28944, ETA: 19:18:11.5391 @ 0.414698 items / sec XY3P: 127 / 28944 @ c=126, r=143, X147.835 Y72.867 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r143.jpg 127 / 28944, ETA: 19:18:06.9137 @ 0.414711 items / sec XY3P: 128 / 28944 @ c=127, r=143, X148.008 Y72.863 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r143.jpg 128 / 28944, ETA: 19:18:02.0517 @ 0.414726 items / sec XY3P: 129 / 28944 @ c=128, r=143, X148.181 Y72.859 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r143.jpg 129 / 28944, ETA: 19:17:56.6224 @ 0.414744 items / sec XY3P: 130 / 28944 @ c=129, r=143, X148.354 Y72.856 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r143.jpg 130 / 28944, ETA: 19:17:49.2646 @ 0.414773 items / sec XY3P: 131 / 28944 @ c=130, r=143, X148.526 Y72.852 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r143.jpg 131 / 28944, ETA: 19:17:43.7417 @ 0.414792 items / sec XY3P: 132 / 28944 @ c=131, r=143, X148.699 Y72.848 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r143.jpg 132 / 28944, ETA: 19:16:55.2994 @ 0.415067 items / sec XY3P: 133 / 28944 @ c=132, r=143, X148.872 Y72.844 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r143.jpg 133 / 28944, ETA: 19:16:49.7365 @ 0.415086 items / sec XY3P: 134 / 28944 @ c=133, r=143, X149.045 Y72.840 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r143.jpg 134 / 28944, ETA: 19:16:02.1656 @ 0.415356 items / sec XY3P: 135 / 28944 @ c=134, r=143, X149.218 Y72.836 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r143.jpg 135 / 28944, ETA: 19:15:57.1573 @ 0.415372 items / sec XY3P: 136 / 28944 @ c=135, r=143, X149.390 Y72.832 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r143.jpg 136 / 28944, ETA: 19:15:53.1320 @ 0.415381 items / sec XY3P: 137 / 28944 @ c=136, r=143, X149.563 Y72.828 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r143.jpg 137 / 28944, ETA: 19:15:48.4451 @ 0.415395 items / sec XY3P: 138 / 28944 @ c=137, r=143, X149.736 Y72.824 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r143.jpg 138 / 28944, ETA: 19:15:43.8015 @ 0.415408 items / sec XY3P: 139 / 28944 @ c=138, r=143, X149.909 Y72.820 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r143.jpg 139 / 28944, ETA: 19:15:39.2337 @ 0.415421 items / sec XY3P: 140 / 28944 @ c=139, r=143, X150.081 Y72.816 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r143.jpg 140 / 28944, ETA: 19:15:34.7041 @ 0.415434 items / sec XY3P: 141 / 28944 @ c=140, r=143, X150.254 Y72.812 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r143.jpg 141 / 28944, ETA: 19:15:30.6813 @ 0.415444 items / sec XY3P: 142 / 28944 @ c=141, r=143, X150.427 Y72.808 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r143.jpg 142 / 28944, ETA: 19:15:25.8959 @ 0.415458 items / sec XY3P: 143 / 28944 @ c=142, r=143, X150.600 Y72.804 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r143.jpg 143 / 28944, ETA: 19:15:21.6653 @ 0.415469 items / sec XY3P: 144 / 28944 @ c=143, r=143, X150.772 Y72.800 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r143.jpg 144 / 28944, ETA: 19:14:37.2634 @ 0.415721 items / sec XY3P: 145 / 28944 @ c=144, r=143, X150.945 Y72.796 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r143.jpg 145 / 28944, ETA: 19:14:33.3193 @ 0.415730 items / sec XY3P: 146 / 28944 @ c=145, r=143, X151.118 Y72.792 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r143.jpg 146 / 28944, ETA: 19:14:29.7304 @ 0.415737 items / sec XY3P: 147 / 28944 @ c=146, r=143, X151.291 Y72.788 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r143.jpg 147 / 28944, ETA: 19:14:25.3343 @ 0.415749 items / sec XY3P: 148 / 28944 @ c=147, r=143, X151.463 Y72.784 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r143.jpg 148 / 28944, ETA: 19:14:21.3590 @ 0.415759 items / sec XY3P: 149 / 28944 @ c=148, r=143, X151.636 Y72.780 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r143.jpg 149 / 28944, ETA: 19:14:17.3502 @ 0.415768 items / sec XY3P: 150 / 28944 @ c=149, r=143, X151.809 Y72.776 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r143.jpg 150 / 28944, ETA: 19:14:13.5104 @ 0.415777 items / sec XY3P: 151 / 28944 @ c=150, r=143, X151.982 Y72.772 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r143.jpg 151 / 28944, ETA: 19:13:31.5162 @ 0.416015 items / sec XY3P: 152 / 28944 @ c=151, r=143, X152.154 Y72.768 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r143.jpg 152 / 28944, ETA: 19:13:27.8728 @ 0.416022 items / sec XY3P: 153 / 28944 @ c=152, r=143, X152.327 Y72.764 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r143.jpg 153 / 28944, ETA: 19:12:46.6261 @ 0.416256 items / sec XY3P: 154 / 28944 @ c=153, r=143, X152.500 Y72.760 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r143.jpg 154 / 28944, ETA: 19:12:43.2389 @ 0.416262 items / sec XY3P: 155 / 28944 @ c=154, r=143, X152.673 Y72.756 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r143.jpg 155 / 28944, ETA: 19:12:41.3535 @ 0.416258 items / sec XY3P: 156 / 28944 @ c=155, r=143, X152.845 Y72.752 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r143.jpg 156 / 28944, ETA: 19:12:36.5772 @ 0.416273 items / sec XY3P: 157 / 28944 @ c=156, r=143, X153.018 Y72.748 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r143.jpg 157 / 28944, ETA: 19:12:33.2148 @ 0.416279 items / sec XY3P: 158 / 28944 @ c=157, r=143, X153.191 Y72.744 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r143.jpg 158 / 28944, ETA: 19:12:29.9153 @ 0.416284 items / sec XY3P: 159 / 28944 @ c=158, r=143, X153.363 Y72.741 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r143.jpg 159 / 28944, ETA: 19:12:26.6488 @ 0.416289 items / sec XY3P: 160 / 28944 @ c=159, r=143, X153.536 Y72.737 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r143.jpg 160 / 28944, ETA: 19:12:23.8863 @ 0.416291 items / sec XY3P: 161 / 28944 @ c=160, r=143, X153.709 Y72.733 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r143.jpg 161 / 28944, ETA: 19:12:20.1726 @ 0.416299 items / sec XY3P: 162 / 28944 @ c=161, r=143, X153.882 Y72.729 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r143.jpg 162 / 28944, ETA: 19:12:16.8440 @ 0.416305 items / sec XY3P: 163 / 28944 @ c=162, r=143, X154.054 Y72.725 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r143.jpg 163 / 28944, ETA: 19:12:13.5738 @ 0.416310 items / sec XY3P: 164 / 28944 @ c=163, r=143, X154.227 Y72.721 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r143.jpg 164 / 28944, ETA: 19:12:10.3966 @ 0.416315 items / sec XY3P: 165 / 28944 @ c=164, r=143, X154.400 Y72.717 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r143.jpg 165 / 28944, ETA: 19:12:07.3917 @ 0.416318 items / sec XY3P: 166 / 28944 @ c=165, r=143, X154.573 Y72.713 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r143.jpg 166 / 28944, ETA: 19:12:03.8710 @ 0.416325 items / sec XY3P: 167 / 28944 @ c=166, r=143, X154.745 Y72.709 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r143.jpg 167 / 28944, ETA: 19:12:00.9889 @ 0.416328 items / sec XY3P: 168 / 28944 @ c=167, r=143, X154.918 Y72.705 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r143.jpg 168 / 28944, ETA: 19:11:57.5166 @ 0.416334 items / sec XY3P: 169 / 28944 @ c=168, r=143, X155.091 Y72.701 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r143.jpg 169 / 28944, ETA: 19:11:55.5014 @ 0.416332 items / sec XY3P: 170 / 28944 @ c=169, r=143, X155.264 Y72.697 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r143.jpg 170 / 28944, ETA: 19:11:51.4500 @ 0.416342 items / sec XY3P: 171 / 28944 @ c=170, r=143, X155.436 Y72.693 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r143.jpg 171 / 28944, ETA: 19:11:14.2851 @ 0.416552 items / sec XY3P: 172 / 28944 @ c=171, r=143, X155.609 Y72.689 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r143.jpg 172 / 28944, ETA: 19:11:11.3517 @ 0.416555 items / sec XY3P: 173 / 28944 @ c=172, r=143, X155.782 Y72.685 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r143.jpg 173 / 28944, ETA: 19:11:08.3248 @ 0.416559 items / sec XY3P: 174 / 28944 @ c=173, r=143, X155.955 Y72.681 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r143.jpg 174 / 28944, ETA: 19:11:05.6687 @ 0.416560 items / sec XY3P: 175 / 28944 @ c=174, r=143, X156.127 Y72.677 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r143.jpg 175 / 28944, ETA: 19:11:02.4779 @ 0.416565 items / sec XY3P: 176 / 28944 @ c=175, r=143, X156.300 Y72.673 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r143.jpg 176 / 28944, ETA: 19:10:59.6892 @ 0.416567 items / sec XY3P: 177 / 28944 @ c=176, r=143, X156.473 Y72.669 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r143.jpg 177 / 28944, ETA: 19:10:56.6201 @ 0.416571 items / sec XY3P: 178 / 28944 @ c=177, r=143, X156.646 Y72.665 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r143.jpg 178 / 28944, ETA: 19:10:53.5798 @ 0.416575 items / sec XY3P: 179 / 28944 @ c=178, r=143, X156.819 Y72.661 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r143.jpg 179 / 28944, ETA: 19:10:51.0783 @ 0.416576 items / sec XY3P: 180 / 28944 @ c=179, r=143, X156.991 Y72.657 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r143.jpg 180 / 28944, ETA: 19:10:47.8327 @ 0.416581 items / sec XY3P: 181 / 28944 @ c=180, r=143, X157.164 Y72.653 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r143.jpg 181 / 28944, ETA: 19:10:44.9263 @ 0.416584 items / sec XY3P: 182 / 28944 @ c=181, r=143, X157.337 Y72.649 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r143.jpg 182 / 28944, ETA: 19:10:41.9800 @ 0.416587 items / sec XY3P: 183 / 28944 @ c=182, r=143, X157.510 Y72.645 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r143.jpg 183 / 28944, ETA: 19:10:07.6770 @ 0.416780 items / sec XY3P: 184 / 28944 @ c=183, r=143, X157.682 Y72.641 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r143.jpg 184 / 28944, ETA: 19:10:05.1539 @ 0.416780 items / sec XY3P: 185 / 28944 @ c=184, r=143, X157.855 Y72.637 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r143.jpg 185 / 28944, ETA: 19:10:02.1202 @ 0.416784 items / sec XY3P: 186 / 28944 @ c=185, r=143, X158.028 Y72.633 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r143.jpg 186 / 28944, ETA: 19:09:59.6569 @ 0.416785 items / sec XY3P: 187 / 28944 @ c=186, r=143, X158.201 Y72.630 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r143.jpg 187 / 28944, ETA: 19:09:56.8836 @ 0.416787 items / sec XY3P: 188 / 28944 @ c=187, r=143, X158.373 Y72.626 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r143.jpg 188 / 28944, ETA: 19:09:54.0170 @ 0.416790 items / sec XY3P: 189 / 28944 @ c=188, r=143, X158.546 Y72.622 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r143.jpg 189 / 28944, ETA: 19:09:20.9339 @ 0.416975 items / sec XY3P: 190 / 28944 @ c=189, r=143, X158.719 Y72.618 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r143.jpg 190 / 28944, ETA: 19:08:48.1745 @ 0.417159 items / sec XY3P: 191 / 28944 @ c=190, r=143, X158.892 Y72.614 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r143.jpg 191 / 28944, ETA: 19:08:45.7559 @ 0.417159 items / sec XY3P: 192 / 28944 @ c=191, r=143, X159.064 Y72.610 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r143.jpg 192 / 28944, ETA: 19:08:43.3541 @ 0.417159 items / sec XY3P: 193 / 28944 @ c=192, r=143, X159.237 Y72.606 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r143.jpg 193 / 28944, ETA: 19:09:11.1223 @ 0.416977 items / sec XY3P: 194 / 28944 @ c=193, r=143, X159.410 Y72.602 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r143.jpg 194 / 28944, ETA: 19:09:08.1229 @ 0.416980 items / sec XY3P: 195 / 28944 @ c=194, r=143, X159.583 Y72.598 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r143.jpg 195 / 28944, ETA: 19:09:05.7586 @ 0.416980 items / sec XY3P: 196 / 28944 @ c=195, r=143, X159.755 Y72.594 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r143.jpg 196 / 28944, ETA: 19:09:03.2219 @ 0.416981 items / sec XY3P: 197 / 28944 @ c=196, r=143, X159.928 Y72.590 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r143.jpg 197 / 28944, ETA: 19:09:00.6459 @ 0.416982 items / sec XY3P: 198 / 28944 @ c=197, r=143, X160.101 Y72.586 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r143.jpg 198 / 28944, ETA: 19:08:58.5528 @ 0.416980 items / sec XY3P: 199 / 28944 @ c=198, r=143, X160.274 Y72.582 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r143.jpg 199 / 28944, ETA: 19:08:55.6963 @ 0.416983 items / sec XY3P: 200 / 28944 @ c=199, r=143, X160.446 Y72.578 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r143.jpg 200 / 28944, ETA: 19:08:53.2500 @ 0.416983 items / sec XY3P: 201 / 28944 @ c=200, r=143, X160.619 Y72.574 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r143.jpg 201 / 28944, ETA: 19:08:51.0738 @ 0.416982 items / sec XY3P: 202 / 28944 @ c=200, r=142, X160.624 Y72.747 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r142.jpg 202 / 28944, ETA: 19:08:48.9435 @ 0.416980 items / sec XY3P: 203 / 28944 @ c=199, r=142, X160.451 Y72.751 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r142.jpg 203 / 28944, ETA: 19:08:45.7524 @ 0.416985 items / sec XY3P: 204 / 28944 @ c=198, r=142, X160.278 Y72.755 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r142.jpg 204 / 28944, ETA: 19:08:43.0187 @ 0.416987 items / sec XY3P: 205 / 28944 @ c=197, r=142, X160.105 Y72.759 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r142.jpg 205 / 28944, ETA: 19:08:40.7132 @ 0.416986 items / sec XY3P: 206 / 28944 @ c=196, r=142, X159.933 Y72.763 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r142.jpg 206 / 28944, ETA: 19:08:37.9396 @ 0.416989 items / sec XY3P: 207 / 28944 @ c=195, r=142, X159.760 Y72.767 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r142.jpg 207 / 28944, ETA: 19:08:35.4690 @ 0.416989 items / sec XY3P: 208 / 28944 @ c=194, r=142, X159.587 Y72.771 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r142.jpg 208 / 28944, ETA: 19:08:33.0356 @ 0.416989 items / sec XY3P: 209 / 28944 @ c=193, r=142, X159.414 Y72.774 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r142.jpg 209 / 28944, ETA: 19:08:30.3898 @ 0.416991 items / sec XY3P: 210 / 28944 @ c=192, r=142, X159.242 Y72.778 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r142.jpg 210 / 28944, ETA: 19:08:28.6932 @ 0.416987 items / sec XY3P: 211 / 28944 @ c=191, r=142, X159.069 Y72.782 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r142.jpg 211 / 28944, ETA: 19:08:25.3478 @ 0.416992 items / sec XY3P: 212 / 28944 @ c=190, r=142, X158.896 Y72.786 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r142.jpg 212 / 28944, ETA: 19:08:22.8439 @ 0.416993 items / sec XY3P: 213 / 28944 @ c=189, r=142, X158.723 Y72.790 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r142.jpg 213 / 28944, ETA: 19:08:20.7291 @ 0.416991 items / sec XY3P: 214 / 28944 @ c=188, r=142, X158.551 Y72.794 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r142.jpg 214 / 28944, ETA: 19:08:17.8410 @ 0.416994 items / sec XY3P: 215 / 28944 @ c=187, r=142, X158.378 Y72.798 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r142.jpg 215 / 28944, ETA: 19:08:15.7284 @ 0.416992 items / sec XY3P: 216 / 28944 @ c=186, r=142, X158.205 Y72.802 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r142.jpg 216 / 28944, ETA: 19:08:12.7573 @ 0.416996 items / sec XY3P: 217 / 28944 @ c=185, r=142, X158.032 Y72.806 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r142.jpg 217 / 28944, ETA: 19:08:10.2720 @ 0.416996 items / sec XY3P: 218 / 28944 @ c=184, r=142, X157.860 Y72.810 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r142.jpg 218 / 28944, ETA: 19:08:08.0182 @ 0.416996 items / sec XY3P: 219 / 28944 @ c=183, r=142, X157.687 Y72.814 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r142.jpg 219 / 28944, ETA: 19:08:05.2559 @ 0.416998 items / sec XY3P: 220 / 28944 @ c=182, r=142, X157.514 Y72.818 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r142.jpg 220 / 28944, ETA: 19:08:02.7431 @ 0.416998 items / sec XY3P: 221 / 28944 @ c=181, r=142, X157.341 Y72.822 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r142.jpg 221 / 28944, ETA: 19:08:00.2495 @ 0.416999 items / sec XY3P: 222 / 28944 @ c=180, r=142, X157.169 Y72.826 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r142.jpg 222 / 28944, ETA: 19:07:57.6872 @ 0.417000 items / sec XY3P: 223 / 28944 @ c=179, r=142, X156.996 Y72.830 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r142.jpg 223 / 28944, ETA: 19:07:55.5550 @ 0.416998 items / sec XY3P: 224 / 28944 @ c=178, r=142, X156.823 Y72.834 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r142.jpg 224 / 28944, ETA: 19:07:52.7307 @ 0.417001 items / sec XY3P: 225 / 28944 @ c=177, r=142, X156.650 Y72.838 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r142.jpg 225 / 28944, ETA: 19:07:50.3074 @ 0.417001 items / sec XY3P: 226 / 28944 @ c=176, r=142, X156.478 Y72.842 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r142.jpg 226 / 28944, ETA: 19:07:47.6849 @ 0.417003 items / sec XY3P: 227 / 28944 @ c=175, r=142, X156.305 Y72.846 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r142.jpg 227 / 28944, ETA: 19:07:45.2454 @ 0.417003 items / sec XY3P: 228 / 28944 @ c=174, r=142, X156.132 Y72.850 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r142.jpg 228 / 28944, ETA: 19:07:43.0106 @ 0.417002 items / sec XY3P: 229 / 28944 @ c=173, r=142, X155.959 Y72.854 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r142.jpg 229 / 28944, ETA: 19:07:40.2483 @ 0.417004 items / sec XY3P: 230 / 28944 @ c=172, r=142, X155.787 Y72.858 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r142.jpg 230 / 28944, ETA: 19:07:37.6645 @ 0.417005 items / sec XY3P: 231 / 28944 @ c=171, r=142, X155.614 Y72.862 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r142.jpg 231 / 28944, ETA: 19:07:35.3147 @ 0.417005 items / sec XY3P: 232 / 28944 @ c=170, r=142, X155.441 Y72.866 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r142.jpg 232 / 28944, ETA: 19:07:33.5198 @ 0.417001 items / sec XY3P: 233 / 28944 @ c=169, r=142, X155.268 Y72.870 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r142.jpg 233 / 28944, ETA: 19:07:30.5381 @ 0.417005 items / sec XY3P: 234 / 28944 @ c=168, r=142, X155.096 Y72.874 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r142.jpg 234 / 28944, ETA: 19:07:27.7820 @ 0.417007 items / sec XY3P: 235 / 28944 @ c=167, r=142, X154.923 Y72.878 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r142.jpg 235 / 28944, ETA: 19:07:25.1684 @ 0.417008 items / sec XY3P: 236 / 28944 @ c=166, r=142, X154.750 Y72.882 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r142.jpg 236 / 28944, ETA: 19:07:22.6939 @ 0.417009 items / sec XY3P: 237 / 28944 @ c=165, r=142, X154.577 Y72.886 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r142.jpg 237 / 28944, ETA: 19:07:21.0268 @ 0.417004 items / sec XY3P: 238 / 28944 @ c=164, r=142, X154.405 Y72.889 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r142.jpg 238 / 28944, ETA: 19:07:18.0138 @ 0.417008 items / sec XY3P: 239 / 28944 @ c=163, r=142, X154.232 Y72.893 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r142.jpg 239 / 28944, ETA: 19:07:15.3372 @ 0.417010 items / sec XY3P: 240 / 28944 @ c=162, r=142, X154.059 Y72.897 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r142.jpg 240 / 28944, ETA: 19:07:12.8897 @ 0.417010 items / sec XY3P: 241 / 28944 @ c=161, r=142, X153.886 Y72.901 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r142.jpg 241 / 28944, ETA: 19:07:10.3257 @ 0.417011 items / sec XY3P: 242 / 28944 @ c=160, r=142, X153.714 Y72.905 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r142.jpg 242 / 28944, ETA: 19:07:07.8391 @ 0.417011 items / sec XY3P: 243 / 28944 @ c=159, r=142, X153.541 Y72.909 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r142.jpg 243 / 28944, ETA: 19:07:05.5210 @ 0.417011 items / sec XY3P: 244 / 28944 @ c=158, r=142, X153.368 Y72.913 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r142.jpg 244 / 28944, ETA: 19:07:02.8911 @ 0.417012 items / sec XY3P: 245 / 28944 @ c=157, r=142, X153.195 Y72.917 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r142.jpg 245 / 28944, ETA: 19:07:00.4012 @ 0.417013 items / sec XY3P: 246 / 28944 @ c=156, r=142, X153.023 Y72.921 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r142.jpg 246 / 28944, ETA: 19:06:57.9108 @ 0.417014 items / sec XY3P: 247 / 28944 @ c=155, r=142, X152.850 Y72.925 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r142.jpg 247 / 28944, ETA: 19:06:55.4269 @ 0.417014 items / sec XY3P: 248 / 28944 @ c=154, r=142, X152.677 Y72.929 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r142.jpg 248 / 28944, ETA: 19:06:53.1593 @ 0.417013 items / sec XY3P: 249 / 28944 @ c=153, r=142, X152.504 Y72.933 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r142.jpg 249 / 28944, ETA: 19:06:27.4625 @ 0.417155 items / sec XY3P: 250 / 28944 @ c=152, r=142, X152.332 Y72.937 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r142.jpg 250 / 28944, ETA: 19:06:25.0775 @ 0.417154 items / sec XY3P: 251 / 28944 @ c=151, r=142, X152.159 Y72.941 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r142.jpg 251 / 28944, ETA: 19:06:22.5744 @ 0.417155 items / sec XY3P: 252 / 28944 @ c=150, r=142, X151.986 Y72.945 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r142.jpg 252 / 28944, ETA: 19:06:20.4774 @ 0.417153 items / sec XY3P: 253 / 28944 @ c=149, r=142, X151.813 Y72.949 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r142.jpg 253 / 28944, ETA: 19:06:17.8692 @ 0.417155 items / sec XY3P: 254 / 28944 @ c=148, r=142, X151.641 Y72.953 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r142.jpg 254 / 28944, ETA: 19:06:15.4636 @ 0.417155 items / sec XY3P: 255 / 28944 @ c=147, r=142, X151.468 Y72.957 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r142.jpg 255 / 28944, ETA: 19:06:13.0775 @ 0.417155 items / sec XY3P: 256 / 28944 @ c=146, r=142, X151.295 Y72.961 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r142.jpg 256 / 28944, ETA: 19:05:48.3144 @ 0.417290 items / sec XY3P: 257 / 28944 @ c=145, r=142, X151.122 Y72.965 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r142.jpg 257 / 28944, ETA: 19:05:46.2732 @ 0.417288 items / sec XY3P: 258 / 28944 @ c=144, r=142, X150.950 Y72.969 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r142.jpg 258 / 28944, ETA: 19:05:43.7369 @ 0.417289 items / sec XY3P: 259 / 28944 @ c=143, r=142, X150.777 Y72.973 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r142.jpg 259 / 28944, ETA: 19:05:41.4007 @ 0.417289 items / sec XY3P: 260 / 28944 @ c=142, r=142, X150.604 Y72.977 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r142.jpg 260 / 28944, ETA: 19:05:39.1117 @ 0.417288 items / sec XY3P: 261 / 28944 @ c=141, r=142, X150.431 Y72.981 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r142.jpg 261 / 28944, ETA: 19:05:36.8149 @ 0.417287 items / sec XY3P: 262 / 28944 @ c=140, r=142, X150.259 Y72.985 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r142.jpg 262 / 28944, ETA: 19:05:34.7691 @ 0.417285 items / sec XY3P: 263 / 28944 @ c=139, r=142, X150.086 Y72.989 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r142.jpg 263 / 28944, ETA: 19:05:32.1597 @ 0.417286 items / sec XY3P: 264 / 28944 @ c=138, r=142, X149.913 Y72.993 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r142.jpg 264 / 28944, ETA: 19:05:29.8943 @ 0.417286 items / sec XY3P: 265 / 28944 @ c=137, r=142, X149.740 Y72.997 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r142.jpg 265 / 28944, ETA: 19:05:27.5715 @ 0.417285 items / sec XY3P: 266 / 28944 @ c=136, r=142, X149.568 Y73.000 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r142.jpg 266 / 28944, ETA: 19:05:25.3358 @ 0.417284 items / sec XY3P: 267 / 28944 @ c=135, r=142, X149.395 Y73.004 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r142.jpg 267 / 28944, ETA: 19:05:23.1654 @ 0.417283 items / sec XY3P: 268 / 28944 @ c=134, r=142, X149.222 Y73.008 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r142.jpg 268 / 28944, ETA: 19:05:20.6464 @ 0.417284 items / sec XY3P: 269 / 28944 @ c=133, r=142, X149.049 Y73.012 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r142.jpg 269 / 28944, ETA: 19:05:18.3908 @ 0.417283 items / sec XY3P: 270 / 28944 @ c=132, r=142, X148.877 Y73.016 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r142.jpg 270 / 28944, ETA: 19:05:15.9856 @ 0.417283 items / sec XY3P: 271 / 28944 @ c=131, r=142, X148.704 Y73.020 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r142.jpg 271 / 28944, ETA: 19:05:13.7020 @ 0.417282 items / sec XY3P: 272 / 28944 @ c=130, r=142, X148.531 Y73.024 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r142.jpg 272 / 28944, ETA: 19:05:11.7113 @ 0.417280 items / sec XY3P: 273 / 28944 @ c=129, r=142, X148.358 Y73.028 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r142.jpg 273 / 28944, ETA: 19:05:09.2085 @ 0.417280 items / sec XY3P: 274 / 28944 @ c=128, r=142, X148.186 Y73.032 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r142.jpg 274 / 28944, ETA: 19:05:07.4488 @ 0.417276 items / sec XY3P: 275 / 28944 @ c=127, r=142, X148.013 Y73.036 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r142.jpg 275 / 28944, ETA: 19:05:04.9937 @ 0.417277 items / sec XY3P: 276 / 28944 @ c=126, r=142, X147.840 Y73.040 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r142.jpg 276 / 28944, ETA: 19:05:02.2929 @ 0.417279 items / sec XY3P: 277 / 28944 @ c=125, r=142, X147.667 Y73.044 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r142.jpg 277 / 28944, ETA: 19:05:01.1766 @ 0.417271 items / sec XY3P: 278 / 28944 @ c=124, r=142, X147.495 Y73.048 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r142.jpg 278 / 28944, ETA: 19:04:57.5384 @ 0.417278 items / sec XY3P: 279 / 28944 @ c=123, r=142, X147.322 Y73.052 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r142.jpg 279 / 28944, ETA: 19:04:55.2046 @ 0.417278 items / sec XY3P: 280 / 28944 @ c=122, r=142, X147.149 Y73.056 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r142.jpg 280 / 28944, ETA: 19:04:52.8378 @ 0.417278 items / sec XY3P: 281 / 28944 @ c=121, r=142, X146.976 Y73.060 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r142.jpg 281 / 28944, ETA: 19:04:50.7584 @ 0.417276 items / sec XY3P: 282 / 28944 @ c=120, r=142, X146.804 Y73.064 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r142.jpg 282 / 28944, ETA: 19:04:48.2515 @ 0.417277 items / sec XY3P: 283 / 28944 @ c=119, r=142, X146.631 Y73.068 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r142.jpg 283 / 28944, ETA: 19:04:45.9616 @ 0.417276 items / sec XY3P: 284 / 28944 @ c=118, r=142, X146.458 Y73.072 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r142.jpg 284 / 28944, ETA: 19:04:43.7093 @ 0.417275 items / sec XY3P: 285 / 28944 @ c=117, r=142, X146.285 Y73.076 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r142.jpg 285 / 28944, ETA: 19:04:41.3327 @ 0.417275 items / sec XY3P: 286 / 28944 @ c=116, r=142, X146.113 Y73.080 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r142.jpg 286 / 28944, ETA: 19:04:39.1193 @ 0.417274 items / sec XY3P: 287 / 28944 @ c=115, r=142, X145.940 Y73.084 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r142.jpg 287 / 28944, ETA: 19:04:36.6490 @ 0.417274 items / sec XY3P: 288 / 28944 @ c=114, r=142, X145.767 Y73.088 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r142.jpg 288 / 28944, ETA: 19:04:34.3267 @ 0.417274 items / sec XY3P: 289 / 28944 @ c=113, r=142, X145.594 Y73.092 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r142.jpg 289 / 28944, ETA: 19:04:32.0444 @ 0.417273 items / sec XY3P: 290 / 28944 @ c=112, r=142, X145.422 Y73.096 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r142.jpg 290 / 28944, ETA: 19:04:29.6712 @ 0.417273 items / sec XY3P: 291 / 28944 @ c=111, r=142, X145.249 Y73.100 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r142.jpg 291 / 28944, ETA: 19:04:27.5145 @ 0.417272 items / sec XY3P: 292 / 28944 @ c=110, r=142, X145.076 Y73.104 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r142.jpg 292 / 28944, ETA: 19:04:25.0370 @ 0.417272 items / sec XY3P: 293 / 28944 @ c=109, r=142, X144.903 Y73.108 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r142.jpg 293 / 28944, ETA: 19:04:22.7436 @ 0.417271 items / sec XY3P: 294 / 28944 @ c=108, r=142, X144.731 Y73.112 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r142.jpg 294 / 28944, ETA: 19:04:20.3653 @ 0.417271 items / sec XY3P: 295 / 28944 @ c=107, r=142, X144.558 Y73.115 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r142.jpg 295 / 28944, ETA: 19:04:18.0750 @ 0.417271 items / sec XY3P: 296 / 28944 @ c=106, r=142, X144.385 Y73.119 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r142.jpg 296 / 28944, ETA: 19:04:15.9543 @ 0.417269 items / sec XY3P: 297 / 28944 @ c=105, r=142, X144.212 Y73.123 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r142.jpg 297 / 28944, ETA: 19:04:13.3802 @ 0.417270 items / sec XY3P: 298 / 28944 @ c=104, r=142, X144.040 Y73.127 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r142.jpg 298 / 28944, ETA: 19:04:11.0908 @ 0.417269 items / sec XY3P: 299 / 28944 @ c=103, r=142, X143.867 Y73.131 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r142.jpg 299 / 28944, ETA: 19:04:08.7651 @ 0.417269 items / sec XY3P: 300 / 28944 @ c=102, r=142, X143.694 Y73.135 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r142.jpg 300 / 28944, ETA: 19:04:06.4472 @ 0.417268 items / sec XY3P: 301 / 28944 @ c=101, r=142, X143.521 Y73.139 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r142.jpg 301 / 28944, ETA: 19:04:04.2246 @ 0.417267 items / sec XY3P: 302 / 28944 @ c=100, r=142, X143.349 Y73.143 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r142.jpg 302 / 28944, ETA: 19:04:01.6980 @ 0.417268 items / sec XY3P: 303 / 28944 @ c=99, r=142, X143.176 Y73.147 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r142.jpg 303 / 28944, ETA: 19:03:59.4805 @ 0.417267 items / sec XY3P: 304 / 28944 @ c=98, r=142, X143.003 Y73.151 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r142.jpg 304 / 28944, ETA: 19:03:57.1185 @ 0.417267 items / sec XY3P: 305 / 28944 @ c=97, r=142, X142.830 Y73.155 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r142.jpg 305 / 28944, ETA: 19:03:54.7936 @ 0.417266 items / sec XY3P: 306 / 28944 @ c=96, r=142, X142.658 Y73.159 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r142.jpg 306 / 28944, ETA: 19:03:52.6009 @ 0.417265 items / sec XY3P: 307 / 28944 @ c=95, r=142, X142.485 Y73.163 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r142.jpg 307 / 28944, ETA: 19:03:50.1580 @ 0.417266 items / sec XY3P: 308 / 28944 @ c=94, r=142, X142.312 Y73.167 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r142.jpg 308 / 28944, ETA: 19:03:47.7231 @ 0.417266 items / sec XY3P: 309 / 28944 @ c=93, r=142, X142.139 Y73.171 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r142.jpg 309 / 28944, ETA: 19:03:45.5626 @ 0.417264 items / sec XY3P: 310 / 28944 @ c=92, r=142, X141.967 Y73.175 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r142.jpg 310 / 28944, ETA: 19:03:43.1182 @ 0.417265 items / sec XY3P: 311 / 28944 @ c=91, r=142, X141.794 Y73.179 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r142.jpg 311 / 28944, ETA: 19:03:40.9899 @ 0.417263 items / sec XY3P: 312 / 28944 @ c=90, r=142, X141.621 Y73.183 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r142.jpg 312 / 28944, ETA: 19:03:38.5031 @ 0.417264 items / sec XY3P: 313 / 28944 @ c=89, r=142, X141.448 Y73.187 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r142.jpg 313 / 28944, ETA: 19:03:36.1350 @ 0.417263 items / sec XY3P: 314 / 28944 @ c=88, r=142, X141.276 Y73.191 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r142.jpg 314 / 28944, ETA: 19:03:33.8269 @ 0.417263 items / sec XY3P: 315 / 28944 @ c=87, r=142, X141.103 Y73.195 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r142.jpg 315 / 28944, ETA: 19:03:31.3545 @ 0.417263 items / sec XY3P: 316 / 28944 @ c=86, r=142, X140.930 Y73.199 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r142.jpg 316 / 28944, ETA: 19:03:29.2908 @ 0.417261 items / sec XY3P: 317 / 28944 @ c=85, r=142, X140.757 Y73.203 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r142.jpg 317 / 28944, ETA: 19:03:26.8224 @ 0.417262 items / sec XY3P: 318 / 28944 @ c=84, r=142, X140.585 Y73.207 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r142.jpg 318 / 28944, ETA: 19:03:24.4621 @ 0.417261 items / sec XY3P: 319 / 28944 @ c=83, r=142, X140.412 Y73.211 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r142.jpg 319 / 28944, ETA: 19:03:22.1308 @ 0.417261 items / sec XY3P: 320 / 28944 @ c=82, r=142, X140.239 Y73.215 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r142.jpg 320 / 28944, ETA: 19:03:19.7413 @ 0.417261 items / sec XY3P: 321 / 28944 @ c=81, r=142, X140.066 Y73.219 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r142.jpg 321 / 28944, ETA: 19:03:17.6293 @ 0.417259 items / sec XY3P: 322 / 28944 @ c=80, r=142, X139.894 Y73.223 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r142.jpg 322 / 28944, ETA: 19:03:15.1462 @ 0.417260 items / sec XY3P: 323 / 28944 @ c=79, r=142, X139.721 Y73.226 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r142.jpg 323 / 28944, ETA: 19:03:12.7706 @ 0.417260 items / sec XY3P: 324 / 28944 @ c=78, r=142, X139.548 Y73.230 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r142.jpg 324 / 28944, ETA: 19:03:10.4743 @ 0.417259 items / sec XY3P: 325 / 28944 @ c=77, r=142, X139.375 Y73.234 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r142.jpg 325 / 28944, ETA: 19:03:08.1167 @ 0.417259 items / sec XY3P: 326 / 28944 @ c=76, r=142, X139.203 Y73.238 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r142.jpg 326 / 28944, ETA: 19:03:06.4850 @ 0.417254 items / sec XY3P: 327 / 28944 @ c=75, r=142, X139.030 Y73.242 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r142.jpg 327 / 28944, ETA: 19:03:03.4666 @ 0.417258 items / sec XY3P: 328 / 28944 @ c=74, r=142, X138.857 Y73.246 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r142.jpg 328 / 28944, ETA: 19:03:01.1131 @ 0.417258 items / sec XY3P: 329 / 28944 @ c=73, r=142, X138.684 Y73.250 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r142.jpg 329 / 28944, ETA: 19:02:58.9065 @ 0.417257 items / sec XY3P: 330 / 28944 @ c=72, r=142, X138.512 Y73.254 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r142.jpg 330 / 28944, ETA: 19:02:56.4438 @ 0.417257 items / sec XY3P: 331 / 28944 @ c=71, r=142, X138.339 Y73.258 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r142.jpg 331 / 28944, ETA: 19:02:37.5961 @ 0.417357 items / sec XY3P: 332 / 28944 @ c=70, r=142, X138.166 Y73.262 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r142.jpg 332 / 28944, ETA: 19:02:34.5372 @ 0.417361 items / sec XY3P: 333 / 28944 @ c=69, r=142, X137.993 Y73.266 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r142.jpg 333 / 28944, ETA: 19:02:32.1889 @ 0.417361 items / sec XY3P: 334 / 28944 @ c=68, r=142, X137.821 Y73.270 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r142.jpg 334 / 28944, ETA: 19:02:29.9824 @ 0.417360 items / sec XY3P: 335 / 28944 @ c=67, r=142, X137.648 Y73.274 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r142.jpg 335 / 28944, ETA: 19:02:27.6854 @ 0.417359 items / sec XY3P: 336 / 28944 @ c=66, r=142, X137.475 Y73.278 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r142.jpg 336 / 28944, ETA: 19:02:25.5183 @ 0.417358 items / sec XY3P: 337 / 28944 @ c=65, r=142, X137.302 Y73.282 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r142.jpg 337 / 28944, ETA: 19:02:23.0740 @ 0.417358 items / sec XY3P: 338 / 28944 @ c=64, r=142, X137.130 Y73.286 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r142.jpg 338 / 28944, ETA: 19:02:20.8721 @ 0.417357 items / sec XY3P: 339 / 28944 @ c=63, r=142, X136.957 Y73.290 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r142.jpg 339 / 28944, ETA: 19:02:18.5046 @ 0.417357 items / sec XY3P: 340 / 28944 @ c=62, r=142, X136.784 Y73.294 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r142.jpg 340 / 28944, ETA: 19:02:16.2421 @ 0.417356 items / sec XY3P: 341 / 28944 @ c=61, r=142, X136.611 Y73.298 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r142.jpg 341 / 28944, ETA: 19:01:57.7061 @ 0.417454 items / sec XY3P: 342 / 28944 @ c=60, r=142, X136.439 Y73.302 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r142.jpg 342 / 28944, ETA: 19:01:54.8780 @ 0.417457 items / sec XY3P: 343 / 28944 @ c=59, r=142, X136.266 Y73.306 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r142.jpg 343 / 28944, ETA: 19:01:52.6885 @ 0.417456 items / sec XY3P: 344 / 28944 @ c=58, r=142, X136.093 Y73.310 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r142.jpg 344 / 28944, ETA: 19:01:50.4179 @ 0.417455 items / sec XY3P: 345 / 28944 @ c=57, r=142, X135.920 Y73.314 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r142.jpg 345 / 28944, ETA: 19:01:48.3932 @ 0.417452 items / sec XY3P: 346 / 28944 @ c=56, r=142, X135.748 Y73.318 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r142.jpg 346 / 28944, ETA: 19:01:45.9711 @ 0.417453 items / sec XY3P: 347 / 28944 @ c=55, r=142, X135.575 Y73.322 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r142.jpg 347 / 28944, ETA: 19:01:43.8450 @ 0.417451 items / sec XY3P: 348 / 28944 @ c=54, r=142, X135.402 Y73.326 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r142.jpg 348 / 28944, ETA: 19:01:41.8615 @ 0.417449 items / sec XY3P: 349 / 28944 @ c=53, r=142, X135.229 Y73.330 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r142.jpg 349 / 28944, ETA: 19:01:39.1322 @ 0.417451 items / sec XY3P: 350 / 28944 @ c=52, r=142, X135.057 Y73.334 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r142.jpg 350 / 28944, ETA: 19:01:37.1146 @ 0.417448 items / sec XY3P: 351 / 28944 @ c=51, r=142, X134.884 Y73.338 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r142.jpg 351 / 28944, ETA: 19:01:34.7584 @ 0.417448 items / sec XY3P: 352 / 28944 @ c=50, r=142, X134.711 Y73.341 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r142.jpg 352 / 28944, ETA: 19:01:32.4239 @ 0.417448 items / sec XY3P: 353 / 28944 @ c=49, r=142, X134.538 Y73.345 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r142.jpg 353 / 28944, ETA: 19:01:30.2256 @ 0.417446 items / sec XY3P: 354 / 28944 @ c=48, r=142, X134.366 Y73.349 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r142.jpg 354 / 28944, ETA: 19:01:27.8829 @ 0.417446 items / sec XY3P: 355 / 28944 @ c=47, r=142, X134.193 Y73.353 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r142.jpg 355 / 28944, ETA: 19:01:25.8352 @ 0.417444 items / sec XY3P: 356 / 28944 @ c=46, r=142, X134.020 Y73.357 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r142.jpg 356 / 28944, ETA: 19:01:23.4000 @ 0.417444 items / sec XY3P: 357 / 28944 @ c=45, r=142, X133.847 Y73.361 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r142.jpg 357 / 28944, ETA: 19:01:21.1660 @ 0.417443 items / sec XY3P: 358 / 28944 @ c=44, r=142, X133.675 Y73.365 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r142.jpg 358 / 28944, ETA: 19:01:18.9246 @ 0.417442 items / sec XY3P: 359 / 28944 @ c=43, r=142, X133.502 Y73.369 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r142.jpg 359 / 28944, ETA: 19:01:16.5800 @ 0.417442 items / sec XY3P: 360 / 28944 @ c=42, r=142, X133.329 Y73.373 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r142.jpg 360 / 28944, ETA: 19:01:14.5451 @ 0.417440 items / sec XY3P: 361 / 28944 @ c=41, r=142, X133.156 Y73.377 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r142.jpg 361 / 28944, ETA: 19:01:12.0593 @ 0.417440 items / sec XY3P: 362 / 28944 @ c=40, r=142, X132.984 Y73.381 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r142.jpg 362 / 28944, ETA: 19:01:09.8769 @ 0.417439 items / sec XY3P: 363 / 28944 @ c=39, r=142, X132.811 Y73.385 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r142.jpg 363 / 28944, ETA: 19:01:07.6163 @ 0.417438 items / sec XY3P: 364 / 28944 @ c=38, r=142, X132.638 Y73.389 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r142.jpg 364 / 28944, ETA: 19:01:05.2532 @ 0.417438 items / sec XY3P: 365 / 28944 @ c=37, r=142, X132.465 Y73.393 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r142.jpg 365 / 28944, ETA: 19:01:03.2222 @ 0.417436 items / sec XY3P: 366 / 28944 @ c=36, r=142, X132.293 Y73.397 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r142.jpg 366 / 28944, ETA: 19:01:00.8145 @ 0.417436 items / sec XY3P: 367 / 28944 @ c=35, r=142, X132.120 Y73.401 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r142.jpg 367 / 28944, ETA: 19:00:58.5145 @ 0.417435 items / sec XY3P: 368 / 28944 @ c=34, r=142, X131.947 Y73.405 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r142.jpg 368 / 28944, ETA: 19:00:56.2379 @ 0.417435 items / sec XY3P: 369 / 28944 @ c=33, r=142, X131.774 Y73.409 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r142.jpg 369 / 28944, ETA: 19:00:54.0221 @ 0.417433 items / sec XY3P: 370 / 28944 @ c=32, r=142, X131.602 Y73.413 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r142.jpg 370 / 28944, ETA: 19:00:51.8903 @ 0.417432 items / sec XY3P: 371 / 28944 @ c=31, r=142, X131.429 Y73.417 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r142.jpg 371 / 28944, ETA: 19:00:49.5003 @ 0.417432 items / sec XY3P: 372 / 28944 @ c=30, r=142, X131.256 Y73.421 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r142.jpg 372 / 28944, ETA: 19:00:47.2148 @ 0.417431 items / sec XY3P: 373 / 28944 @ c=29, r=142, X131.083 Y73.425 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r142.jpg 373 / 28944, ETA: 19:00:44.9784 @ 0.417430 items / sec XY3P: 374 / 28944 @ c=28, r=142, X130.911 Y73.429 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r142.jpg 374 / 28944, ETA: 19:00:42.6699 @ 0.417430 items / sec XY3P: 375 / 28944 @ c=27, r=142, X130.738 Y73.433 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r142.jpg 375 / 28944, ETA: 19:00:40.5158 @ 0.417428 items / sec XY3P: 376 / 28944 @ c=26, r=142, X130.565 Y73.437 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r142.jpg 376 / 28944, ETA: 19:00:38.1785 @ 0.417428 items / sec XY3P: 377 / 28944 @ c=25, r=142, X130.392 Y73.441 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r142.jpg 377 / 28944, ETA: 19:00:35.8415 @ 0.417427 items / sec XY3P: 378 / 28944 @ c=24, r=142, X130.220 Y73.445 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r142.jpg 378 / 28944, ETA: 19:00:33.5546 @ 0.417427 items / sec XY3P: 379 / 28944 @ c=23, r=142, X130.047 Y73.449 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r142.jpg 379 / 28944, ETA: 19:00:31.3601 @ 0.417426 items / sec XY3P: 380 / 28944 @ c=22, r=142, X129.874 Y73.452 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r142.jpg 380 / 28944, ETA: 19:00:29.2324 @ 0.417424 items / sec XY3P: 381 / 28944 @ c=21, r=142, X129.701 Y73.456 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r142.jpg 381 / 28944, ETA: 19:00:26.7732 @ 0.417424 items / sec XY3P: 382 / 28944 @ c=20, r=142, X129.529 Y73.460 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r142.jpg 382 / 28944, ETA: 19:00:24.4268 @ 0.417424 items / sec XY3P: 383 / 28944 @ c=19, r=142, X129.356 Y73.464 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r142.jpg 383 / 28944, ETA: 19:00:22.2480 @ 0.417423 items / sec XY3P: 384 / 28944 @ c=18, r=142, X129.183 Y73.468 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r142.jpg 384 / 28944, ETA: 19:00:19.9522 @ 0.417422 items / sec XY3P: 385 / 28944 @ c=17, r=142, X129.010 Y73.472 Z-15.193 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r142.jpg 385 / 28944, ETA: 19:00:17.8417 @ 0.417420 items / sec XY3P: 386 / 28944 @ c=16, r=142, X128.838 Y73.476 Z-15.193 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r142.jpg 386 / 28944, ETA: 19:00:15.3781 @ 0.417421 items / sec XY3P: 387 / 28944 @ c=15, r=142, X128.665 Y73.480 Z-15.194 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r142.jpg 387 / 28944, ETA: 19:00:13.1130 @ 0.417420 items / sec XY3P: 388 / 28944 @ c=14, r=142, X128.492 Y73.484 Z-15.194 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r142.jpg 388 / 28944, ETA: 19:00:10.8801 @ 0.417419 items / sec XY3P: 389 / 28944 @ c=13, r=142, X128.319 Y73.488 Z-15.195 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r142.jpg 389 / 28944, ETA: 19:00:08.5246 @ 0.417419 items / sec XY3P: 390 / 28944 @ c=12, r=142, X128.147 Y73.492 Z-15.195 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r142.jpg 390 / 28944, ETA: 19:00:06.4190 @ 0.417417 items / sec XY3P: 391 / 28944 @ c=11, r=142, X127.974 Y73.496 Z-15.196 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r142.jpg 391 / 28944, ETA: 19:00:04.0223 @ 0.417417 items / sec XY3P: 392 / 28944 @ c=10, r=142, X127.801 Y73.500 Z-15.196 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r142.jpg 392 / 28944, ETA: 19:00:01.7417 @ 0.417416 items / sec XY3P: 393 / 28944 @ c=9, r=142, X127.628 Y73.504 Z-15.197 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r142.jpg 393 / 28944, ETA: 18:59:59.4756 @ 0.417415 items / sec XY3P: 394 / 28944 @ c=8, r=142, X127.456 Y73.508 Z-15.197 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r142.jpg 394 / 28944, ETA: 18:59:57.1981 @ 0.417415 items / sec XY3P: 395 / 28944 @ c=7, r=142, X127.283 Y73.512 Z-15.198 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r142.jpg 395 / 28944, ETA: 18:59:55.0220 @ 0.417413 items / sec XY3P: 396 / 28944 @ c=6, r=142, X127.110 Y73.516 Z-15.198 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r142.jpg 396 / 28944, ETA: 18:59:52.5700 @ 0.417414 items / sec XY3P: 397 / 28944 @ c=5, r=142, X126.937 Y73.520 Z-15.199 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r142.jpg 397 / 28944, ETA: 18:59:50.3087 @ 0.417413 items / sec XY3P: 398 / 28944 @ c=4, r=142, X126.765 Y73.524 Z-15.199 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r142.jpg 398 / 28944, ETA: 18:59:48.0302 @ 0.417412 items / sec XY3P: 399 / 28944 @ c=3, r=142, X126.592 Y73.528 Z-15.200 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r142.jpg 399 / 28944, ETA: 18:59:45.7440 @ 0.417412 items / sec XY3P: 400 / 28944 @ c=2, r=142, X126.419 Y73.532 Z-15.200 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r142.jpg 400 / 28944, ETA: 18:59:43.6143 @ 0.417410 items / sec XY3P: 401 / 28944 @ c=1, r=142, X126.246 Y73.536 Z-15.201 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r142.jpg 401 / 28944, ETA: 18:59:41.1991 @ 0.417410 items / sec XY3P: 402 / 28944 @ c=0, r=142, X126.074 Y73.540 Z-15.201 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r142.jpg 402 / 28944, ETA: 18:59:38.8918 @ 0.417410 items / sec XY3P: 403 / 28944 @ c=0, r=141, X126.078 Y73.712 Z-15.199 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r141.jpg 403 / 28944, ETA: 18:59:36.5374 @ 0.417409 items / sec XY3P: 404 / 28944 @ c=1, r=141, X126.251 Y73.708 Z-15.199 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r141.jpg 404 / 28944, ETA: 18:59:34.3045 @ 0.417408 items / sec XY3P: 405 / 28944 @ c=2, r=141, X126.424 Y73.705 Z-15.198 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r141.jpg 405 / 28944, ETA: 18:59:32.1540 @ 0.417407 items / sec XY3P: 406 / 28944 @ c=3, r=141, X126.597 Y73.701 Z-15.198 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r141.jpg 406 / 28944, ETA: 18:59:29.7233 @ 0.417407 items / sec XY3P: 407 / 28944 @ c=4, r=141, X126.769 Y73.697 Z-15.197 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r141.jpg 407 / 28944, ETA: 18:59:27.4674 @ 0.417406 items / sec XY3P: 408 / 28944 @ c=5, r=141, X126.942 Y73.693 Z-15.197 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r141.jpg 408 / 28944, ETA: 18:59:25.1467 @ 0.417406 items / sec XY3P: 409 / 28944 @ c=6, r=141, X127.115 Y73.689 Z-15.196 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r141.jpg 409 / 28944, ETA: 18:59:22.8364 @ 0.417405 items / sec XY3P: 410 / 28944 @ c=7, r=141, X127.288 Y73.685 Z-15.196 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r141.jpg 410 / 28944, ETA: 18:59:20.6924 @ 0.417404 items / sec XY3P: 411 / 28944 @ c=8, r=141, X127.460 Y73.681 Z-15.195 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r141.jpg 411 / 28944, ETA: 18:59:18.2791 @ 0.417404 items / sec XY3P: 412 / 28944 @ c=9, r=141, X127.633 Y73.677 Z-15.195 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r141.jpg 412 / 28944, ETA: 18:59:02.1088 @ 0.417488 items / sec XY3P: 413 / 28944 @ c=10, r=141, X127.806 Y73.673 Z-15.194 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r141.jpg 413 / 28944, ETA: 18:58:59.9047 @ 0.417487 items / sec XY3P: 414 / 28944 @ c=11, r=141, X127.979 Y73.669 Z-15.194 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r141.jpg 414 / 28944, ETA: 18:58:57.7329 @ 0.417485 items / sec XY3P: 415 / 28944 @ c=12, r=141, X128.151 Y73.665 Z-15.193 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r141.jpg 415 / 28944, ETA: 18:58:55.3769 @ 0.417485 items / sec XY3P: 416 / 28944 @ c=13, r=141, X128.324 Y73.661 Z-15.193 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r141.jpg 416 / 28944, ETA: 18:58:53.1462 @ 0.417484 items / sec XY3P: 417 / 28944 @ c=14, r=141, X128.497 Y73.657 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r141.jpg 417 / 28944, ETA: 18:58:50.9314 @ 0.417483 items / sec XY3P: 418 / 28944 @ c=15, r=141, X128.670 Y73.653 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r141.jpg 418 / 28944, ETA: 18:58:48.6433 @ 0.417482 items / sec XY3P: 419 / 28944 @ c=16, r=141, X128.842 Y73.649 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r141.jpg 419 / 28944, ETA: 18:58:46.5654 @ 0.417480 items / sec XY3P: 420 / 28944 @ c=17, r=141, X129.015 Y73.645 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r141.jpg 420 / 28944, ETA: 18:58:44.4135 @ 0.417479 items / sec XY3P: 421 / 28944 @ c=18, r=141, X129.188 Y73.641 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r141.jpg 421 / 28944, ETA: 18:58:42.1149 @ 0.417478 items / sec XY3P: 422 / 28944 @ c=19, r=141, X129.361 Y73.637 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r141.jpg 422 / 28944, ETA: 18:58:39.5493 @ 0.417479 items / sec XY3P: 423 / 28944 @ c=20, r=141, X129.533 Y73.633 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r141.jpg 423 / 28944, ETA: 18:58:37.2800 @ 0.417479 items / sec XY3P: 424 / 28944 @ c=21, r=141, X129.706 Y73.629 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r141.jpg 424 / 28944, ETA: 18:58:35.1358 @ 0.417477 items / sec XY3P: 425 / 28944 @ c=22, r=141, X129.879 Y73.625 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r141.jpg 425 / 28944, ETA: 18:58:32.7429 @ 0.417477 items / sec XY3P: 426 / 28944 @ c=23, r=141, X130.052 Y73.621 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r141.jpg 426 / 28944, ETA: 18:58:30.4593 @ 0.417476 items / sec XY3P: 427 / 28944 @ c=24, r=141, X130.224 Y73.617 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r141.jpg 427 / 28944, ETA: 18:58:28.2321 @ 0.417475 items / sec XY3P: 428 / 28944 @ c=25, r=141, X130.397 Y73.613 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r141.jpg 428 / 28944, ETA: 18:58:25.9687 @ 0.417474 items / sec XY3P: 429 / 28944 @ c=26, r=141, X130.570 Y73.609 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r141.jpg 429 / 28944, ETA: 18:58:23.8082 @ 0.417473 items / sec XY3P: 430 / 28944 @ c=27, r=141, X130.743 Y73.605 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r141.jpg 430 / 28944, ETA: 18:58:21.3993 @ 0.417473 items / sec XY3P: 431 / 28944 @ c=28, r=141, X130.915 Y73.601 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r141.jpg 431 / 28944, ETA: 18:58:05.9079 @ 0.417553 items / sec XY3P: 432 / 28944 @ c=29, r=141, X131.088 Y73.597 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r141.jpg 432 / 28944, ETA: 18:58:03.6997 @ 0.417552 items / sec XY3P: 433 / 28944 @ c=30, r=141, X131.261 Y73.594 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r141.jpg 433 / 28944, ETA: 18:58:01.5559 @ 0.417551 items / sec XY3P: 434 / 28944 @ c=31, r=141, X131.434 Y73.590 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r141.jpg 434 / 28944, ETA: 18:57:59.2163 @ 0.417550 items / sec XY3P: 435 / 28944 @ c=32, r=141, X131.606 Y73.586 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r141.jpg 435 / 28944, ETA: 18:57:57.5064 @ 0.417546 items / sec XY3P: 436 / 28944 @ c=33, r=141, X131.779 Y73.582 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r141.jpg 436 / 28944, ETA: 18:57:54.7329 @ 0.417548 items / sec XY3P: 437 / 28944 @ c=34, r=141, X131.952 Y73.578 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r141.jpg 437 / 28944, ETA: 18:57:52.4898 @ 0.417547 items / sec XY3P: 438 / 28944 @ c=35, r=141, X132.125 Y73.574 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r141.jpg 438 / 28944, ETA: 18:57:50.3386 @ 0.417546 items / sec XY3P: 439 / 28944 @ c=36, r=141, X132.297 Y73.570 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r141.jpg 439 / 28944, ETA: 18:57:47.9870 @ 0.417546 items / sec XY3P: 440 / 28944 @ c=37, r=141, X132.470 Y73.566 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r141.jpg 440 / 28944, ETA: 18:57:45.7497 @ 0.417545 items / sec XY3P: 441 / 28944 @ c=38, r=141, X132.643 Y73.562 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r141.jpg 441 / 28944, ETA: 18:57:43.8942 @ 0.417541 items / sec XY3P: 442 / 28944 @ c=39, r=141, X132.816 Y73.558 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r141.jpg 442 / 28944, ETA: 18:57:41.6781 @ 0.417540 items / sec XY3P: 443 / 28944 @ c=40, r=141, X132.988 Y73.554 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r141.jpg 443 / 28944, ETA: 18:57:39.0566 @ 0.417542 items / sec XY3P: 444 / 28944 @ c=41, r=141, X133.161 Y73.550 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r141.jpg 444 / 28944, ETA: 18:57:36.8145 @ 0.417541 items / sec XY3P: 445 / 28944 @ c=42, r=141, X133.334 Y73.546 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r141.jpg 445 / 28944, ETA: 18:57:34.5153 @ 0.417540 items / sec XY3P: 446 / 28944 @ c=43, r=141, X133.507 Y73.542 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r141.jpg 446 / 28944, ETA: 18:57:32.2593 @ 0.417539 items / sec XY3P: 447 / 28944 @ c=44, r=141, X133.679 Y73.538 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r141.jpg 447 / 28944, ETA: 18:57:30.0229 @ 0.417538 items / sec XY3P: 448 / 28944 @ c=45, r=141, X133.852 Y73.534 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r141.jpg 448 / 28944, ETA: 18:57:27.8732 @ 0.417537 items / sec XY3P: 449 / 28944 @ c=46, r=141, X134.025 Y73.530 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r141.jpg 449 / 28944, ETA: 18:57:12.9193 @ 0.417614 items / sec XY3P: 450 / 28944 @ c=47, r=141, X134.198 Y73.526 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r141.jpg 450 / 28944, ETA: 18:56:57.9754 @ 0.417690 items / sec XY3P: 451 / 28944 @ c=48, r=141, X134.370 Y73.522 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r141.jpg 451 / 28944, ETA: 18:56:55.7342 @ 0.417690 items / sec XY3P: 452 / 28944 @ c=49, r=141, X134.543 Y73.518 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r141.jpg 452 / 28944, ETA: 18:56:53.6669 @ 0.417688 items / sec XY3P: 453 / 28944 @ c=50, r=141, X134.716 Y73.514 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r141.jpg 453 / 28944, ETA: 18:56:51.4105 @ 0.417687 items / sec XY3P: 454 / 28944 @ c=51, r=141, X134.889 Y73.510 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r141.jpg 454 / 28944, ETA: 18:56:49.2044 @ 0.417686 items / sec XY3P: 455 / 28944 @ c=52, r=141, X135.061 Y73.506 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r141.jpg 455 / 28944, ETA: 18:56:46.9987 @ 0.417684 items / sec XY3P: 456 / 28944 @ c=53, r=141, X135.234 Y73.502 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r141.jpg 456 / 28944, ETA: 18:56:44.7936 @ 0.417683 items / sec XY3P: 457 / 28944 @ c=54, r=141, X135.407 Y73.498 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r141.jpg 457 / 28944, ETA: 18:56:42.6638 @ 0.417682 items / sec XY3P: 458 / 28944 @ c=55, r=141, X135.580 Y73.494 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r141.jpg 458 / 28944, ETA: 18:56:40.3890 @ 0.417681 items / sec XY3P: 459 / 28944 @ c=56, r=141, X135.752 Y73.490 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r141.jpg 459 / 28944, ETA: 18:56:38.1859 @ 0.417680 items / sec XY3P: 460 / 28944 @ c=57, r=141, X135.925 Y73.486 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r141.jpg 460 / 28944, ETA: 18:56:35.9870 @ 0.417679 items / sec XY3P: 461 / 28944 @ c=58, r=141, X136.098 Y73.482 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r141.jpg 461 / 28944, ETA: 18:56:33.7841 @ 0.417677 items / sec XY3P: 462 / 28944 @ c=59, r=141, X136.271 Y73.479 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r141.jpg 462 / 28944, ETA: 18:56:31.6735 @ 0.417676 items / sec XY3P: 463 / 28944 @ c=60, r=141, X136.443 Y73.475 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r141.jpg 463 / 28944, ETA: 18:56:29.7374 @ 0.417673 items / sec XY3P: 464 / 28944 @ c=61, r=141, X136.616 Y73.471 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r141.jpg 464 / 28944, ETA: 18:56:27.1460 @ 0.417674 items / sec XY3P: 465 / 28944 @ c=62, r=141, X136.789 Y73.467 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r141.jpg 465 / 28944, ETA: 18:56:24.9764 @ 0.417673 items / sec XY3P: 466 / 28944 @ c=63, r=141, X136.962 Y73.463 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r141.jpg 466 / 28944, ETA: 18:56:22.7471 @ 0.417672 items / sec XY3P: 467 / 28944 @ c=64, r=141, X137.134 Y73.459 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r141.jpg 467 / 28944, ETA: 18:56:08.5337 @ 0.417744 items / sec XY3P: 468 / 28944 @ c=65, r=141, X137.307 Y73.455 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r141.jpg 468 / 28944, ETA: 18:56:06.2007 @ 0.417744 items / sec XY3P: 469 / 28944 @ c=66, r=141, X137.480 Y73.451 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r141.jpg 469 / 28944, ETA: 18:55:51.8323 @ 0.417817 items / sec XY3P: 470 / 28944 @ c=67, r=141, X137.653 Y73.447 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r141.jpg 470 / 28944, ETA: 18:55:49.6971 @ 0.417816 items / sec XY3P: 471 / 28944 @ c=68, r=141, X137.825 Y73.443 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r141.jpg 471 / 28944, ETA: 18:55:47.6269 @ 0.417814 items / sec XY3P: 472 / 28944 @ c=69, r=141, X137.998 Y73.439 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r141.jpg 472 / 28944, ETA: 18:55:45.3714 @ 0.417813 items / sec XY3P: 473 / 28944 @ c=70, r=141, X138.171 Y73.435 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r141.jpg 473 / 28944, ETA: 18:55:43.2169 @ 0.417811 items / sec XY3P: 474 / 28944 @ c=71, r=141, X138.344 Y73.431 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r141.jpg 474 / 28944, ETA: 18:55:41.0530 @ 0.417810 items / sec XY3P: 475 / 28944 @ c=72, r=141, X138.516 Y73.427 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r141.jpg 475 / 28944, ETA: 18:55:38.8649 @ 0.417809 items / sec XY3P: 476 / 28944 @ c=73, r=141, X138.689 Y73.423 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r141.jpg 476 / 28944, ETA: 18:55:36.7681 @ 0.417807 items / sec XY3P: 477 / 28944 @ c=74, r=141, X138.862 Y73.419 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r141.jpg 477 / 28944, ETA: 18:55:34.5317 @ 0.417806 items / sec XY3P: 478 / 28944 @ c=75, r=141, X139.035 Y73.415 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r141.jpg 478 / 28944, ETA: 18:55:32.3776 @ 0.417804 items / sec XY3P: 479 / 28944 @ c=76, r=141, X139.207 Y73.411 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r141.jpg 479 / 28944, ETA: 18:55:30.2102 @ 0.417803 items / sec XY3P: 480 / 28944 @ c=77, r=141, X139.380 Y73.407 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r141.jpg 480 / 28944, ETA: 18:55:28.0364 @ 0.417802 items / sec XY3P: 481 / 28944 @ c=78, r=141, X139.553 Y73.403 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r141.jpg 481 / 28944, ETA: 18:55:25.9641 @ 0.417800 items / sec XY3P: 482 / 28944 @ c=79, r=141, X139.726 Y73.399 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r141.jpg 482 / 28944, ETA: 18:55:23.6802 @ 0.417799 items / sec XY3P: 483 / 28944 @ c=80, r=141, X139.898 Y73.395 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r141.jpg 483 / 28944, ETA: 18:55:21.4951 @ 0.417798 items / sec XY3P: 484 / 28944 @ c=81, r=141, X140.071 Y73.391 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r141.jpg 484 / 28944, ETA: 18:55:19.3729 @ 0.417796 items / sec XY3P: 485 / 28944 @ c=82, r=141, X140.244 Y73.387 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r141.jpg 485 / 28944, ETA: 18:55:17.1766 @ 0.417795 items / sec XY3P: 486 / 28944 @ c=83, r=141, X140.417 Y73.383 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r141.jpg 486 / 28944, ETA: 18:55:03.4596 @ 0.417864 items / sec XY3P: 487 / 28944 @ c=84, r=141, X140.589 Y73.379 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r141.jpg 487 / 28944, ETA: 18:54:49.4463 @ 0.417936 items / sec XY3P: 488 / 28944 @ c=85, r=141, X140.762 Y73.375 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r141.jpg 488 / 28944, ETA: 18:54:47.3745 @ 0.417934 items / sec XY3P: 489 / 28944 @ c=86, r=141, X140.935 Y73.371 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r141.jpg 489 / 28944, ETA: 18:54:45.2299 @ 0.417932 items / sec XY3P: 490 / 28944 @ c=87, r=141, X141.108 Y73.367 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r141.jpg 490 / 28944, ETA: 18:54:43.1459 @ 0.417930 items / sec XY3P: 491 / 28944 @ c=88, r=141, X141.280 Y73.364 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r141.jpg 491 / 28944, ETA: 18:54:41.3462 @ 0.417927 items / sec XY3P: 492 / 28944 @ c=89, r=141, X141.453 Y73.360 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r141.jpg 492 / 28944, ETA: 18:54:38.8846 @ 0.417927 items / sec XY3P: 493 / 28944 @ c=90, r=141, X141.626 Y73.356 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r141.jpg 493 / 28944, ETA: 18:54:36.8913 @ 0.417924 items / sec XY3P: 494 / 28944 @ c=91, r=141, X141.799 Y73.352 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r141.jpg 494 / 28944, ETA: 18:54:34.7149 @ 0.417923 items / sec XY3P: 495 / 28944 @ c=92, r=141, X141.971 Y73.348 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r141.jpg 495 / 28944, ETA: 18:54:32.9474 @ 0.417919 items / sec XY3P: 496 / 28944 @ c=93, r=141, X142.144 Y73.344 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r141.jpg 496 / 28944, ETA: 18:54:30.2988 @ 0.417921 items / sec XY3P: 497 / 28944 @ c=94, r=141, X142.317 Y73.340 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r141.jpg 497 / 28944, ETA: 18:54:28.1808 @ 0.417919 items / sec XY3P: 498 / 28944 @ c=95, r=141, X142.490 Y73.336 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r141.jpg 498 / 28944, ETA: 18:54:26.1564 @ 0.417917 items / sec XY3P: 499 / 28944 @ c=96, r=141, X142.662 Y73.332 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r141.jpg 499 / 28944, ETA: 18:54:23.8894 @ 0.417916 items / sec XY3P: 500 / 28944 @ c=97, r=141, X142.835 Y73.328 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r141.jpg 500 / 28944, ETA: 18:54:21.8496 @ 0.417914 items / sec XY3P: 501 / 28944 @ c=98, r=141, X143.008 Y73.324 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r141.jpg 501 / 28944, ETA: 18:54:19.5631 @ 0.417913 items / sec XY3P: 502 / 28944 @ c=99, r=141, X143.181 Y73.320 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r141.jpg 502 / 28944, ETA: 18:54:17.4649 @ 0.417912 items / sec XY3P: 503 / 28944 @ c=100, r=141, X143.353 Y73.316 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r141.jpg 503 / 28944, ETA: 18:54:15.3077 @ 0.417910 items / sec XY3P: 504 / 28944 @ c=101, r=141, X143.526 Y73.312 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r141.jpg 504 / 28944, ETA: 18:54:02.0189 @ 0.417977 items / sec XY3P: 505 / 28944 @ c=102, r=141, X143.699 Y73.308 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r141.jpg 505 / 28944, ETA: 18:53:48.5111 @ 0.418045 items / sec XY3P: 506 / 28944 @ c=103, r=141, X143.872 Y73.304 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r141.jpg 506 / 28944, ETA: 18:53:35.2457 @ 0.418112 items / sec XY3P: 507 / 28944 @ c=104, r=141, X144.044 Y73.300 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r141.jpg 507 / 28944, ETA: 18:53:33.4813 @ 0.418108 items / sec XY3P: 508 / 28944 @ c=105, r=141, X144.217 Y73.296 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r141.jpg 508 / 28944, ETA: 18:53:31.1356 @ 0.418108 items / sec XY3P: 509 / 28944 @ c=106, r=141, X144.390 Y73.292 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r141.jpg 509 / 28944, ETA: 18:53:28.9790 @ 0.418107 items / sec XY3P: 510 / 28944 @ c=107, r=141, X144.563 Y73.288 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r141.jpg 510 / 28944, ETA: 18:53:38.0475 @ 0.418036 items / sec XY3P: 511 / 28944 @ c=108, r=141, X144.735 Y73.284 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r141.jpg 511 / 28944, ETA: 18:53:35.9088 @ 0.418035 items / sec XY3P: 512 / 28944 @ c=109, r=141, X144.908 Y73.280 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r141.jpg 512 / 28944, ETA: 18:53:33.8000 @ 0.418033 items / sec XY3P: 513 / 28944 @ c=110, r=141, X145.081 Y73.276 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r141.jpg 513 / 28944, ETA: 18:53:32.0359 @ 0.418029 items / sec XY3P: 514 / 28944 @ c=111, r=141, X145.254 Y73.272 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r141.jpg 514 / 28944, ETA: 18:53:29.6768 @ 0.418029 items / sec XY3P: 515 / 28944 @ c=112, r=141, X145.426 Y73.268 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r141.jpg 515 / 28944, ETA: 18:53:27.4828 @ 0.418028 items / sec XY3P: 516 / 28944 @ c=113, r=141, X145.599 Y73.264 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r141.jpg 516 / 28944, ETA: 18:53:25.7079 @ 0.418024 items / sec XY3P: 517 / 28944 @ c=114, r=141, X145.772 Y73.260 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r141.jpg 517 / 28944, ETA: 18:53:23.2172 @ 0.418024 items / sec XY3P: 518 / 28944 @ c=115, r=141, X145.945 Y73.256 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r141.jpg 518 / 28944, ETA: 18:53:21.1311 @ 0.418022 items / sec XY3P: 519 / 28944 @ c=116, r=141, X146.117 Y73.253 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r141.jpg 519 / 28944, ETA: 18:53:19.4702 @ 0.418018 items / sec XY3P: 520 / 28944 @ c=117, r=141, X146.290 Y73.249 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r141.jpg 520 / 28944, ETA: 18:53:17.2873 @ 0.418017 items / sec XY3P: 521 / 28944 @ c=118, r=141, X146.463 Y73.245 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r141.jpg 521 / 28944, ETA: 18:53:14.8019 @ 0.418017 items / sec XY3P: 522 / 28944 @ c=119, r=141, X146.636 Y73.241 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r141.jpg 522 / 28944, ETA: 18:53:12.6907 @ 0.418016 items / sec XY3P: 523 / 28944 @ c=120, r=141, X146.808 Y73.237 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r141.jpg 523 / 28944, ETA: 18:52:59.7949 @ 0.418080 items / sec XY3P: 524 / 28944 @ c=121, r=141, X146.981 Y73.233 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r141.jpg 524 / 28944, ETA: 18:52:46.7532 @ 0.418146 items / sec XY3P: 525 / 28944 @ c=122, r=141, X147.154 Y73.229 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r141.jpg 525 / 28944, ETA: 18:52:33.8586 @ 0.418210 items / sec XY3P: 526 / 28944 @ c=123, r=141, X147.327 Y73.225 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r141.jpg 526 / 28944, ETA: 18:52:31.7807 @ 0.418208 items / sec XY3P: 527 / 28944 @ c=124, r=141, X147.499 Y73.221 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r141.jpg 527 / 28944, ETA: 18:52:29.8318 @ 0.418206 items / sec XY3P: 528 / 28944 @ c=125, r=141, X147.672 Y73.217 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r141.jpg 528 / 28944, ETA: 18:52:28.0076 @ 0.418202 items / sec XY3P: 529 / 28944 @ c=126, r=141, X147.845 Y73.213 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r141.jpg 529 / 28944, ETA: 18:52:25.6028 @ 0.418202 items / sec XY3P: 530 / 28944 @ c=127, r=141, X148.018 Y73.209 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r141.jpg 530 / 28944, ETA: 18:52:23.5130 @ 0.418200 items / sec XY3P: 531 / 28944 @ c=128, r=141, X148.190 Y73.205 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r141.jpg 531 / 28944, ETA: 18:52:21.4835 @ 0.418198 items / sec XY3P: 532 / 28944 @ c=129, r=141, X148.363 Y73.201 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r141.jpg 532 / 28944, ETA: 18:52:19.5465 @ 0.418195 items / sec XY3P: 533 / 28944 @ c=130, r=141, X148.536 Y73.197 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r141.jpg 533 / 28944, ETA: 18:52:17.3335 @ 0.418194 items / sec XY3P: 534 / 28944 @ c=131, r=141, X148.709 Y73.193 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r141.jpg 534 / 28944, ETA: 18:52:15.2407 @ 0.418192 items / sec XY3P: 535 / 28944 @ c=132, r=141, X148.881 Y73.189 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r141.jpg 535 / 28944, ETA: 18:52:13.2077 @ 0.418190 items / sec XY3P: 536 / 28944 @ c=133, r=141, X149.054 Y73.185 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r141.jpg 536 / 28944, ETA: 18:52:11.1253 @ 0.418188 items / sec XY3P: 537 / 28944 @ c=134, r=141, X149.227 Y73.181 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r141.jpg 537 / 28944, ETA: 18:52:09.1017 @ 0.418186 items / sec XY3P: 538 / 28944 @ c=135, r=141, X149.400 Y73.177 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r141.jpg 538 / 28944, ETA: 18:52:06.9624 @ 0.418184 items / sec XY3P: 539 / 28944 @ c=136, r=141, X149.572 Y73.173 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r141.jpg 539 / 28944, ETA: 18:52:04.9041 @ 0.418182 items / sec XY3P: 540 / 28944 @ c=137, r=141, X149.745 Y73.169 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r141.jpg 540 / 28944, ETA: 18:52:02.8041 @ 0.418181 items / sec XY3P: 541 / 28944 @ c=138, r=141, X149.918 Y73.165 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r141.jpg 541 / 28944, ETA: 18:52:00.7365 @ 0.418179 items / sec XY3P: 542 / 28944 @ c=139, r=141, X150.091 Y73.161 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r141.jpg 542 / 28944, ETA: 18:51:48.3241 @ 0.418240 items / sec XY3P: 543 / 28944 @ c=140, r=141, X150.263 Y73.157 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r141.jpg 543 / 28944, ETA: 18:51:46.1414 @ 0.418239 items / sec XY3P: 544 / 28944 @ c=141, r=141, X150.436 Y73.153 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r141.jpg 544 / 28944, ETA: 18:51:44.0707 @ 0.418237 items / sec XY3P: 545 / 28944 @ c=142, r=141, X150.609 Y73.149 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r141.jpg 545 / 28944, ETA: 18:51:42.0157 @ 0.418235 items / sec XY3P: 546 / 28944 @ c=143, r=141, X150.782 Y73.145 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r141.jpg 546 / 28944, ETA: 18:51:39.9279 @ 0.418233 items / sec XY3P: 547 / 28944 @ c=144, r=141, X150.954 Y73.141 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r141.jpg 547 / 28944, ETA: 18:51:38.2943 @ 0.418228 items / sec XY3P: 548 / 28944 @ c=145, r=141, X151.127 Y73.138 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r141.jpg 548 / 28944, ETA: 18:51:35.8190 @ 0.418229 items / sec XY3P: 549 / 28944 @ c=146, r=141, X151.300 Y73.134 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r141.jpg 549 / 28944, ETA: 18:51:33.7242 @ 0.418227 items / sec XY3P: 550 / 28944 @ c=147, r=141, X151.473 Y73.130 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r141.jpg 550 / 28944, ETA: 18:51:31.6159 @ 0.418225 items / sec XY3P: 551 / 28944 @ c=148, r=141, X151.645 Y73.126 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r141.jpg 551 / 28944, ETA: 18:51:29.6050 @ 0.418223 items / sec XY3P: 552 / 28944 @ c=149, r=141, X151.818 Y73.122 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r141.jpg 552 / 28944, ETA: 18:51:27.6203 @ 0.418221 items / sec XY3P: 553 / 28944 @ c=150, r=141, X151.991 Y73.118 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r141.jpg 553 / 28944, ETA: 18:51:25.4263 @ 0.418219 items / sec XY3P: 554 / 28944 @ c=151, r=141, X152.164 Y73.114 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r141.jpg 554 / 28944, ETA: 18:51:23.3484 @ 0.418217 items / sec XY3P: 555 / 28944 @ c=152, r=141, X152.336 Y73.110 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r141.jpg 555 / 28944, ETA: 18:51:21.3019 @ 0.418215 items / sec XY3P: 556 / 28944 @ c=153, r=141, X152.509 Y73.106 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r141.jpg 556 / 28944, ETA: 18:51:19.2229 @ 0.418213 items / sec XY3P: 557 / 28944 @ c=154, r=141, X152.682 Y73.102 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r141.jpg 557 / 28944, ETA: 18:51:17.2495 @ 0.418211 items / sec XY3P: 558 / 28944 @ c=155, r=141, X152.855 Y73.098 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r141.jpg 558 / 28944, ETA: 18:51:15.0967 @ 0.418209 items / sec XY3P: 559 / 28944 @ c=156, r=141, X153.027 Y73.094 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r141.jpg 559 / 28944, ETA: 18:51:12.9711 @ 0.418208 items / sec XY3P: 560 / 28944 @ c=157, r=141, X153.200 Y73.090 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r141.jpg 560 / 28944, ETA: 18:51:01.1047 @ 0.418266 items / sec XY3P: 561 / 28944 @ c=158, r=141, X153.373 Y73.086 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r141.jpg 561 / 28944, ETA: 18:50:58.7839 @ 0.418266 items / sec XY3P: 562 / 28944 @ c=159, r=141, X153.546 Y73.082 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r141.jpg 562 / 28944, ETA: 18:50:46.5305 @ 0.418326 items / sec XY3P: 563 / 28944 @ c=160, r=141, X153.718 Y73.078 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r141.jpg 563 / 28944, ETA: 18:50:44.5275 @ 0.418324 items / sec XY3P: 564 / 28944 @ c=161, r=141, X153.891 Y73.074 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r141.jpg 564 / 28944, ETA: 18:50:42.4299 @ 0.418322 items / sec XY3P: 565 / 28944 @ c=162, r=141, X154.064 Y73.070 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r141.jpg 565 / 28944, ETA: 18:50:40.4524 @ 0.418320 items / sec XY3P: 566 / 28944 @ c=163, r=141, X154.237 Y73.066 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r141.jpg 566 / 28944, ETA: 18:50:38.5100 @ 0.418317 items / sec XY3P: 567 / 28944 @ c=164, r=141, X154.409 Y73.062 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r141.jpg 567 / 28944, ETA: 18:50:36.3156 @ 0.418316 items / sec XY3P: 568 / 28944 @ c=165, r=141, X154.582 Y73.058 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r141.jpg 568 / 28944, ETA: 18:50:34.3865 @ 0.418313 items / sec XY3P: 569 / 28944 @ c=166, r=141, X154.755 Y73.054 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r141.jpg 569 / 28944, ETA: 18:50:32.4548 @ 0.418310 items / sec XY3P: 570 / 28944 @ c=167, r=141, X154.928 Y73.050 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r141.jpg 570 / 28944, ETA: 18:50:30.2127 @ 0.418309 items / sec XY3P: 571 / 28944 @ c=168, r=141, X155.100 Y73.046 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r141.jpg 571 / 28944, ETA: 18:50:28.0482 @ 0.418308 items / sec XY3P: 572 / 28944 @ c=169, r=141, X155.273 Y73.042 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r141.jpg 572 / 28944, ETA: 18:50:26.1085 @ 0.418305 items / sec XY3P: 573 / 28944 @ c=170, r=141, X155.446 Y73.038 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r141.jpg 573 / 28944, ETA: 18:50:23.9397 @ 0.418304 items / sec XY3P: 574 / 28944 @ c=171, r=141, X155.619 Y73.034 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r141.jpg 574 / 28944, ETA: 18:50:21.8983 @ 0.418301 items / sec XY3P: 575 / 28944 @ c=172, r=141, X155.791 Y73.030 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r141.jpg 575 / 28944, ETA: 18:50:19.9569 @ 0.418299 items / sec XY3P: 576 / 28944 @ c=173, r=141, X155.964 Y73.027 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r141.jpg 576 / 28944, ETA: 18:50:17.7718 @ 0.418297 items / sec XY3P: 577 / 28944 @ c=174, r=141, X156.137 Y73.023 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r141.jpg 577 / 28944, ETA: 18:50:15.8239 @ 0.418295 items / sec XY3P: 578 / 28944 @ c=175, r=141, X156.310 Y73.019 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r141.jpg 578 / 28944, ETA: 18:50:13.6120 @ 0.418294 items / sec XY3P: 579 / 28944 @ c=176, r=141, X156.482 Y73.015 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r141.jpg 579 / 28944, ETA: 18:50:01.7784 @ 0.418352 items / sec XY3P: 580 / 28944 @ c=177, r=141, X156.655 Y73.011 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r141.jpg 580 / 28944, ETA: 18:49:49.9707 @ 0.418410 items / sec XY3P: 581 / 28944 @ c=178, r=141, X156.828 Y73.007 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r141.jpg 581 / 28944, ETA: 18:49:38.2278 @ 0.418468 items / sec XY3P: 582 / 28944 @ c=179, r=141, X157.001 Y73.003 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r141.jpg 582 / 28944, ETA: 18:49:36.1418 @ 0.418466 items / sec XY3P: 583 / 28944 @ c=180, r=141, X157.173 Y72.999 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r141.jpg 583 / 28944, ETA: 18:49:34.1531 @ 0.418463 items / sec XY3P: 584 / 28944 @ c=181, r=141, X157.346 Y72.995 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r141.jpg 584 / 28944, ETA: 18:49:32.1942 @ 0.418461 items / sec XY3P: 585 / 28944 @ c=182, r=141, X157.519 Y72.991 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r141.jpg 585 / 28944, ETA: 18:49:30.0992 @ 0.418459 items / sec XY3P: 586 / 28944 @ c=183, r=141, X157.692 Y72.987 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r141.jpg 586 / 28944, ETA: 18:49:28.0485 @ 0.418457 items / sec XY3P: 587 / 28944 @ c=184, r=141, X157.864 Y72.983 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r141.jpg 587 / 28944, ETA: 18:49:25.9791 @ 0.418455 items / sec XY3P: 588 / 28944 @ c=185, r=141, X158.037 Y72.979 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r141.jpg 588 / 28944, ETA: 18:49:24.0351 @ 0.418452 items / sec XY3P: 589 / 28944 @ c=186, r=141, X158.210 Y72.975 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r141.jpg 589 / 28944, ETA: 18:49:22.1267 @ 0.418449 items / sec XY3P: 590 / 28944 @ c=187, r=141, X158.383 Y72.971 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r141.jpg 590 / 28944, ETA: 18:49:19.9565 @ 0.418448 items / sec XY3P: 591 / 28944 @ c=188, r=141, X158.555 Y72.967 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r141.jpg 591 / 28944, ETA: 18:49:17.9184 @ 0.418446 items / sec XY3P: 592 / 28944 @ c=189, r=141, X158.728 Y72.963 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r141.jpg 592 / 28944, ETA: 18:49:15.8837 @ 0.418443 items / sec XY3P: 593 / 28944 @ c=190, r=141, X158.901 Y72.959 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r141.jpg 593 / 28944, ETA: 18:49:13.8599 @ 0.418441 items / sec XY3P: 594 / 28944 @ c=191, r=141, X159.074 Y72.955 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r141.jpg 594 / 28944, ETA: 18:49:11.9356 @ 0.418438 items / sec XY3P: 595 / 28944 @ c=192, r=141, X159.246 Y72.951 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r141.jpg 595 / 28944, ETA: 18:49:09.7815 @ 0.418437 items / sec XY3P: 596 / 28944 @ c=193, r=141, X159.419 Y72.947 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r141.jpg 596 / 28944, ETA: 18:49:07.7468 @ 0.418435 items / sec XY3P: 597 / 28944 @ c=194, r=141, X159.592 Y72.943 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r141.jpg 597 / 28944, ETA: 18:49:05.7340 @ 0.418432 items / sec XY3P: 598 / 28944 @ c=195, r=141, X159.765 Y72.939 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r141.jpg 598 / 28944, ETA: 18:48:54.3485 @ 0.418488 items / sec XY3P: 599 / 28944 @ c=196, r=141, X159.937 Y72.935 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r141.jpg 599 / 28944, ETA: 18:48:42.7225 @ 0.418545 items / sec XY3P: 600 / 28944 @ c=197, r=141, X160.110 Y72.931 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r141.jpg 600 / 28944, ETA: 18:48:40.7635 @ 0.418542 items / sec XY3P: 601 / 28944 @ c=198, r=141, X160.283 Y72.927 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r141.jpg 601 / 28944, ETA: 18:48:29.2752 @ 0.418598 items / sec XY3P: 602 / 28944 @ c=199, r=141, X160.456 Y72.923 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r141.jpg 602 / 28944, ETA: 18:48:27.3276 @ 0.418596 items / sec XY3P: 603 / 28944 @ c=200, r=141, X160.628 Y72.919 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r141.jpg 603 / 28944, ETA: 18:48:25.2977 @ 0.418594 items / sec XY3P: 604 / 28944 @ c=200, r=140, X160.633 Y73.092 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r140.jpg 604 / 28944, ETA: 18:48:23.2651 @ 0.418591 items / sec XY3P: 605 / 28944 @ c=199, r=140, X160.460 Y73.096 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r140.jpg 605 / 28944, ETA: 18:48:21.2712 @ 0.418589 items / sec XY3P: 606 / 28944 @ c=198, r=140, X160.288 Y73.100 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r140.jpg 606 / 28944, ETA: 18:48:19.3086 @ 0.418586 items / sec XY3P: 607 / 28944 @ c=197, r=140, X160.115 Y73.104 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r140.jpg 607 / 28944, ETA: 18:48:17.3507 @ 0.418584 items / sec XY3P: 608 / 28944 @ c=196, r=140, X159.942 Y73.108 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r140.jpg 608 / 28944, ETA: 18:48:15.2743 @ 0.418582 items / sec XY3P: 609 / 28944 @ c=195, r=140, X159.769 Y73.112 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r140.jpg 609 / 28944, ETA: 18:48:13.2240 @ 0.418580 items / sec XY3P: 610 / 28944 @ c=194, r=140, X159.597 Y73.116 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r140.jpg 610 / 28944, ETA: 18:48:11.2746 @ 0.418577 items / sec XY3P: 611 / 28944 @ c=193, r=140, X159.424 Y73.120 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r140.jpg 611 / 28944, ETA: 18:48:09.2762 @ 0.418574 items / sec XY3P: 612 / 28944 @ c=192, r=140, X159.251 Y73.124 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r140.jpg 612 / 28944, ETA: 18:48:07.3351 @ 0.418572 items / sec XY3P: 613 / 28944 @ c=191, r=140, X159.078 Y73.128 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r140.jpg 613 / 28944, ETA: 18:48:05.5326 @ 0.418568 items / sec XY3P: 614 / 28944 @ c=190, r=140, X158.906 Y73.132 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r140.jpg 614 / 28944, ETA: 18:48:03.3394 @ 0.418567 items / sec XY3P: 615 / 28944 @ c=189, r=140, X158.733 Y73.136 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r140.jpg 615 / 28944, ETA: 18:48:01.2215 @ 0.418565 items / sec XY3P: 616 / 28944 @ c=188, r=140, X158.560 Y73.140 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r140.jpg 616 / 28944, ETA: 18:47:59.1638 @ 0.418563 items / sec XY3P: 617 / 28944 @ c=187, r=140, X158.387 Y73.144 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r140.jpg 617 / 28944, ETA: 18:47:57.2614 @ 0.418560 items / sec XY3P: 618 / 28944 @ c=186, r=140, X158.215 Y73.148 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r140.jpg 618 / 28944, ETA: 18:47:45.9864 @ 0.418615 items / sec XY3P: 619 / 28944 @ c=185, r=140, X158.042 Y73.152 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r140.jpg 619 / 28944, ETA: 18:47:44.0347 @ 0.418612 items / sec XY3P: 620 / 28944 @ c=184, r=140, X157.869 Y73.156 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r140.jpg 620 / 28944, ETA: 18:47:42.0197 @ 0.418610 items / sec XY3P: 621 / 28944 @ c=183, r=140, X157.696 Y73.160 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r140.jpg 621 / 28944, ETA: 18:47:40.0112 @ 0.418608 items / sec XY3P: 622 / 28944 @ c=182, r=140, X157.524 Y73.164 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r140.jpg 622 / 28944, ETA: 18:47:38.0795 @ 0.418605 items / sec XY3P: 623 / 28944 @ c=181, r=140, X157.351 Y73.168 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r140.jpg 623 / 28944, ETA: 18:47:35.9973 @ 0.418603 items / sec XY3P: 624 / 28944 @ c=180, r=140, X157.178 Y73.171 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r140.jpg 624 / 28944, ETA: 18:47:34.0072 @ 0.418600 items / sec XY3P: 625 / 28944 @ c=179, r=140, X157.005 Y73.175 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r140.jpg 625 / 28944, ETA: 18:47:31.9411 @ 0.418598 items / sec XY3P: 626 / 28944 @ c=178, r=140, X156.833 Y73.179 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r140.jpg 626 / 28944, ETA: 18:47:29.9323 @ 0.418596 items / sec XY3P: 627 / 28944 @ c=177, r=140, X156.660 Y73.183 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r140.jpg 627 / 28944, ETA: 18:47:28.0398 @ 0.418593 items / sec XY3P: 628 / 28944 @ c=176, r=140, X156.487 Y73.187 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r140.jpg 628 / 28944, ETA: 18:47:25.9362 @ 0.418591 items / sec XY3P: 629 / 28944 @ c=175, r=140, X156.314 Y73.191 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r140.jpg 629 / 28944, ETA: 18:47:23.8995 @ 0.418589 items / sec XY3P: 630 / 28944 @ c=174, r=140, X156.142 Y73.195 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r140.jpg 630 / 28944, ETA: 18:47:21.8867 @ 0.418587 items / sec XY3P: 631 / 28944 @ c=173, r=140, X155.969 Y73.199 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r140.jpg 631 / 28944, ETA: 18:47:20.1550 @ 0.418583 items / sec XY3P: 632 / 28944 @ c=172, r=140, X155.796 Y73.203 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r140.jpg 632 / 28944, ETA: 18:47:17.9019 @ 0.418582 items / sec XY3P: 633 / 28944 @ c=171, r=140, X155.623 Y73.207 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r140.jpg 633 / 28944, ETA: 18:47:15.8490 @ 0.418580 items / sec XY3P: 634 / 28944 @ c=170, r=140, X155.451 Y73.211 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r140.jpg 634 / 28944, ETA: 18:47:13.8304 @ 0.418578 items / sec XY3P: 635 / 28944 @ c=169, r=140, X155.278 Y73.215 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r140.jpg 635 / 28944, ETA: 18:47:11.7994 @ 0.418575 items / sec XY3P: 636 / 28944 @ c=168, r=140, X155.105 Y73.219 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r140.jpg 636 / 28944, ETA: 18:47:09.7622 @ 0.418573 items / sec XY3P: 637 / 28944 @ c=167, r=140, X154.932 Y73.223 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r140.jpg 637 / 28944, ETA: 18:47:07.8738 @ 0.418570 items / sec XY3P: 638 / 28944 @ c=166, r=140, X154.760 Y73.227 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r140.jpg 638 / 28944, ETA: 18:47:05.7177 @ 0.418569 items / sec XY3P: 639 / 28944 @ c=165, r=140, X154.587 Y73.231 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r140.jpg 639 / 28944, ETA: 18:47:03.7036 @ 0.418566 items / sec XY3P: 640 / 28944 @ c=164, r=140, X154.414 Y73.235 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r140.jpg 640 / 28944, ETA: 18:47:01.6743 @ 0.418564 items / sec XY3P: 641 / 28944 @ c=163, r=140, X154.241 Y73.239 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r140.jpg 641 / 28944, ETA: 18:46:59.7603 @ 0.418561 items / sec XY3P: 642 / 28944 @ c=162, r=140, X154.069 Y73.243 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r140.jpg 642 / 28944, ETA: 18:46:57.8764 @ 0.418558 items / sec XY3P: 643 / 28944 @ c=161, r=140, X153.896 Y73.247 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r140.jpg 643 / 28944, ETA: 18:46:55.8477 @ 0.418556 items / sec XY3P: 644 / 28944 @ c=160, r=140, X153.723 Y73.251 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r140.jpg 644 / 28944, ETA: 18:46:53.9484 @ 0.418553 items / sec XY3P: 645 / 28944 @ c=159, r=140, X153.550 Y73.255 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r140.jpg 645 / 28944, ETA: 18:46:51.5087 @ 0.418553 items / sec XY3P: 646 / 28944 @ c=158, r=140, X153.378 Y73.259 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r140.jpg 646 / 28944, ETA: 18:46:49.6090 @ 0.418550 items / sec XY3P: 647 / 28944 @ c=157, r=140, X153.205 Y73.263 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r140.jpg 647 / 28944, ETA: 18:46:47.4489 @ 0.418549 items / sec XY3P: 648 / 28944 @ c=156, r=140, X153.032 Y73.267 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r140.jpg 648 / 28944, ETA: 18:46:45.3936 @ 0.418546 items / sec XY3P: 649 / 28944 @ c=155, r=140, X152.859 Y73.271 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r140.jpg 649 / 28944, ETA: 18:46:43.3633 @ 0.418544 items / sec XY3P: 650 / 28944 @ c=154, r=140, X152.687 Y73.275 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r140.jpg 650 / 28944, ETA: 18:46:41.2852 @ 0.418542 items / sec XY3P: 651 / 28944 @ c=153, r=140, X152.514 Y73.279 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r140.jpg 651 / 28944, ETA: 18:46:39.3983 @ 0.418539 items / sec XY3P: 652 / 28944 @ c=152, r=140, X152.341 Y73.283 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r140.jpg 652 / 28944, ETA: 18:46:37.2306 @ 0.418538 items / sec XY3P: 653 / 28944 @ c=151, r=140, X152.168 Y73.286 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r140.jpg 653 / 28944, ETA: 18:46:35.1424 @ 0.418536 items / sec XY3P: 654 / 28944 @ c=150, r=140, X151.996 Y73.290 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r140.jpg 654 / 28944, ETA: 18:46:33.1470 @ 0.418534 items / sec XY3P: 655 / 28944 @ c=149, r=140, X151.823 Y73.294 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r140.jpg 655 / 28944, ETA: 18:46:31.1234 @ 0.418531 items / sec XY3P: 656 / 28944 @ c=148, r=140, X151.650 Y73.298 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r140.jpg 656 / 28944, ETA: 18:46:20.8393 @ 0.418580 items / sec XY3P: 657 / 28944 @ c=147, r=140, X151.477 Y73.302 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r140.jpg 657 / 28944, ETA: 18:46:18.4333 @ 0.418580 items / sec XY3P: 658 / 28944 @ c=146, r=140, X151.305 Y73.306 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r140.jpg 658 / 28944, ETA: 18:46:16.3920 @ 0.418578 items / sec XY3P: 659 / 28944 @ c=145, r=140, X151.132 Y73.310 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r140.jpg 659 / 28944, ETA: 18:46:14.3477 @ 0.418576 items / sec XY3P: 660 / 28944 @ c=144, r=140, X150.959 Y73.314 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r140.jpg 660 / 28944, ETA: 18:46:12.3048 @ 0.418574 items / sec XY3P: 661 / 28944 @ c=143, r=140, X150.786 Y73.318 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r140.jpg 661 / 28944, ETA: 18:46:10.3312 @ 0.418571 items / sec XY3P: 662 / 28944 @ c=142, r=140, X150.614 Y73.322 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r140.jpg 662 / 28944, ETA: 18:46:08.2054 @ 0.418570 items / sec XY3P: 663 / 28944 @ c=141, r=140, X150.441 Y73.326 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r140.jpg 663 / 28944, ETA: 18:46:06.1918 @ 0.418567 items / sec XY3P: 664 / 28944 @ c=140, r=140, X150.268 Y73.330 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r140.jpg 664 / 28944, ETA: 18:46:04.1512 @ 0.418565 items / sec XY3P: 665 / 28944 @ c=139, r=140, X150.095 Y73.334 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r140.jpg 665 / 28944, ETA: 18:46:02.1074 @ 0.418563 items / sec XY3P: 666 / 28944 @ c=138, r=140, X149.923 Y73.338 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r140.jpg 666 / 28944, ETA: 18:45:51.5830 @ 0.418613 items / sec XY3P: 667 / 28944 @ c=137, r=140, X149.750 Y73.342 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r140.jpg 667 / 28944, ETA: 18:45:49.5402 @ 0.418611 items / sec XY3P: 668 / 28944 @ c=136, r=140, X149.577 Y73.346 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r140.jpg 668 / 28944, ETA: 18:45:47.5132 @ 0.418609 items / sec XY3P: 669 / 28944 @ c=135, r=140, X149.404 Y73.350 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r140.jpg 669 / 28944, ETA: 18:45:45.4861 @ 0.418607 items / sec XY3P: 670 / 28944 @ c=134, r=140, X149.232 Y73.354 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r140.jpg 670 / 28944, ETA: 18:45:43.5054 @ 0.418604 items / sec XY3P: 671 / 28944 @ c=133, r=140, X149.059 Y73.358 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r140.jpg 671 / 28944, ETA: 18:45:41.6586 @ 0.418601 items / sec XY3P: 672 / 28944 @ c=132, r=140, X148.886 Y73.362 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r140.jpg 672 / 28944, ETA: 18:45:39.3734 @ 0.418600 items / sec XY3P: 673 / 28944 @ c=131, r=140, X148.713 Y73.366 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r140.jpg 673 / 28944, ETA: 18:45:37.3345 @ 0.418598 items / sec XY3P: 674 / 28944 @ c=130, r=140, X148.541 Y73.370 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r140.jpg 674 / 28944, ETA: 18:45:35.3098 @ 0.418596 items / sec XY3P: 675 / 28944 @ c=129, r=140, X148.368 Y73.374 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r140.jpg 675 / 28944, ETA: 18:45:33.3295 @ 0.418593 items / sec XY3P: 676 / 28944 @ c=128, r=140, X148.195 Y73.378 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r140.jpg 676 / 28944, ETA: 18:45:31.2114 @ 0.418592 items / sec XY3P: 677 / 28944 @ c=127, r=140, X148.022 Y73.382 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r140.jpg 677 / 28944, ETA: 18:45:29.1596 @ 0.418590 items / sec XY3P: 678 / 28944 @ c=126, r=140, X147.850 Y73.386 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r140.jpg 678 / 28944, ETA: 18:45:27.3743 @ 0.418586 items / sec XY3P: 679 / 28944 @ c=125, r=140, X147.677 Y73.390 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r140.jpg 679 / 28944, ETA: 18:45:25.1000 @ 0.418585 items / sec XY3P: 680 / 28944 @ c=124, r=140, X147.504 Y73.394 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r140.jpg 680 / 28944, ETA: 18:45:23.1107 @ 0.418583 items / sec XY3P: 681 / 28944 @ c=123, r=140, X147.331 Y73.397 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r140.jpg 681 / 28944, ETA: 18:45:20.9929 @ 0.418581 items / sec XY3P: 682 / 28944 @ c=122, r=140, X147.159 Y73.401 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r140.jpg 682 / 28944, ETA: 18:45:18.9395 @ 0.418579 items / sec XY3P: 683 / 28944 @ c=121, r=140, X146.986 Y73.405 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r140.jpg 683 / 28944, ETA: 18:45:16.8960 @ 0.418577 items / sec XY3P: 684 / 28944 @ c=120, r=140, X146.813 Y73.409 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r140.jpg 684 / 28944, ETA: 18:45:14.8408 @ 0.418575 items / sec XY3P: 685 / 28944 @ c=119, r=140, X146.640 Y73.413 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r140.jpg 685 / 28944, ETA: 18:45:13.1247 @ 0.418570 items / sec XY3P: 686 / 28944 @ c=118, r=140, X146.468 Y73.417 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r140.jpg 686 / 28944, ETA: 18:45:10.7610 @ 0.418570 items / sec XY3P: 687 / 28944 @ c=117, r=140, X146.295 Y73.421 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r140.jpg 687 / 28944, ETA: 18:45:08.6899 @ 0.418568 items / sec XY3P: 688 / 28944 @ c=116, r=140, X146.122 Y73.425 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r140.jpg 688 / 28944, ETA: 18:45:06.6298 @ 0.418566 items / sec XY3P: 689 / 28944 @ c=115, r=140, X145.949 Y73.429 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r140.jpg 689 / 28944, ETA: 18:45:04.5808 @ 0.418564 items / sec XY3P: 690 / 28944 @ c=114, r=140, X145.777 Y73.433 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r140.jpg 690 / 28944, ETA: 18:45:02.5984 @ 0.418562 items / sec XY3P: 691 / 28944 @ c=113, r=140, X145.604 Y73.437 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r140.jpg 691 / 28944, ETA: 18:45:00.4842 @ 0.418560 items / sec XY3P: 692 / 28944 @ c=112, r=140, X145.431 Y73.441 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r140.jpg 692 / 28944, ETA: 18:44:58.6753 @ 0.418556 items / sec XY3P: 693 / 28944 @ c=111, r=140, X145.258 Y73.445 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r140.jpg 693 / 28944, ETA: 18:44:56.3525 @ 0.418556 items / sec XY3P: 694 / 28944 @ c=110, r=140, X145.086 Y73.449 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r140.jpg 694 / 28944, ETA: 18:44:54.3053 @ 0.418554 items / sec XY3P: 695 / 28944 @ c=109, r=140, X144.913 Y73.453 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r140.jpg 695 / 28944, ETA: 18:44:52.3383 @ 0.418551 items / sec XY3P: 696 / 28944 @ c=108, r=140, X144.740 Y73.457 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r140.jpg 696 / 28944, ETA: 18:44:50.1755 @ 0.418550 items / sec XY3P: 697 / 28944 @ c=107, r=140, X144.567 Y73.461 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r140.jpg 697 / 28944, ETA: 18:44:48.1075 @ 0.418548 items / sec XY3P: 698 / 28944 @ c=106, r=140, X144.395 Y73.465 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r140.jpg 698 / 28944, ETA: 18:44:45.9908 @ 0.418546 items / sec XY3P: 699 / 28944 @ c=105, r=140, X144.222 Y73.469 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r140.jpg 699 / 28944, ETA: 18:44:44.2439 @ 0.418542 items / sec XY3P: 700 / 28944 @ c=104, r=140, X144.049 Y73.473 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r140.jpg 700 / 28944, ETA: 18:44:41.9639 @ 0.418541 items / sec XY3P: 701 / 28944 @ c=103, r=140, X143.876 Y73.477 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r140.jpg 701 / 28944, ETA: 18:44:31.7968 @ 0.418590 items / sec XY3P: 702 / 28944 @ c=102, r=140, X143.704 Y73.481 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r140.jpg 702 / 28944, ETA: 18:44:29.9903 @ 0.418586 items / sec XY3P: 703 / 28944 @ c=101, r=140, X143.531 Y73.485 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r140.jpg 703 / 28944, ETA: 18:44:27.6759 @ 0.418586 items / sec XY3P: 704 / 28944 @ c=100, r=140, X143.358 Y73.489 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r140.jpg 704 / 28944, ETA: 18:44:25.6366 @ 0.418583 items / sec XY3P: 705 / 28944 @ c=99, r=140, X143.185 Y73.493 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r140.jpg 705 / 28944, ETA: 18:44:23.6477 @ 0.418581 items / sec XY3P: 706 / 28944 @ c=98, r=140, X143.013 Y73.497 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r140.jpg 706 / 28944, ETA: 18:44:13.5058 @ 0.418629 items / sec XY3P: 707 / 28944 @ c=97, r=140, X142.840 Y73.501 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r140.jpg 707 / 28944, ETA: 18:44:11.4840 @ 0.418627 items / sec XY3P: 708 / 28944 @ c=96, r=140, X142.667 Y73.505 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r140.jpg 708 / 28944, ETA: 18:44:09.4131 @ 0.418625 items / sec XY3P: 709 / 28944 @ c=95, r=140, X142.494 Y73.509 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r140.jpg 709 / 28944, ETA: 18:44:07.4308 @ 0.418622 items / sec XY3P: 710 / 28944 @ c=94, r=140, X142.322 Y73.512 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r140.jpg 710 / 28944, ETA: 18:44:05.3208 @ 0.418621 items / sec XY3P: 711 / 28944 @ c=93, r=140, X142.149 Y73.516 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r140.jpg 711 / 28944, ETA: 18:44:03.2520 @ 0.418619 items / sec XY3P: 712 / 28944 @ c=92, r=140, X141.976 Y73.520 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r140.jpg 712 / 28944, ETA: 18:44:01.2272 @ 0.418616 items / sec XY3P: 713 / 28944 @ c=91, r=140, X141.803 Y73.524 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r140.jpg 713 / 28944, ETA: 18:43:59.1709 @ 0.418614 items / sec XY3P: 714 / 28944 @ c=90, r=140, X141.631 Y73.528 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r140.jpg 714 / 28944, ETA: 18:43:57.2642 @ 0.418611 items / sec XY3P: 715 / 28944 @ c=89, r=140, X141.458 Y73.532 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r140.jpg 715 / 28944, ETA: 18:43:55.1609 @ 0.418610 items / sec XY3P: 716 / 28944 @ c=88, r=140, X141.285 Y73.536 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r140.jpg 716 / 28944, ETA: 18:43:45.3479 @ 0.418656 items / sec XY3P: 717 / 28944 @ c=87, r=140, X141.112 Y73.540 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r140.jpg 717 / 28944, ETA: 18:43:43.0387 @ 0.418655 items / sec XY3P: 718 / 28944 @ c=86, r=140, X140.940 Y73.544 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r140.jpg 718 / 28944, ETA: 18:43:41.0859 @ 0.418652 items / sec XY3P: 719 / 28944 @ c=85, r=140, X140.767 Y73.548 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r140.jpg 719 / 28944, ETA: 18:43:39.0273 @ 0.418650 items / sec XY3P: 720 / 28944 @ c=84, r=140, X140.594 Y73.552 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r140.jpg 720 / 28944, ETA: 18:43:36.9159 @ 0.418649 items / sec XY3P: 721 / 28944 @ c=83, r=140, X140.421 Y73.556 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r140.jpg 721 / 28944, ETA: 18:43:34.9162 @ 0.418646 items / sec XY3P: 722 / 28944 @ c=82, r=140, X140.249 Y73.560 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r140.jpg 722 / 28944, ETA: 18:43:32.8202 @ 0.418644 items / sec XY3P: 723 / 28944 @ c=81, r=140, X140.076 Y73.564 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r140.jpg 723 / 28944, ETA: 18:43:30.8421 @ 0.418642 items / sec XY3P: 724 / 28944 @ c=80, r=140, X139.903 Y73.568 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r140.jpg 724 / 28944, ETA: 18:43:28.6749 @ 0.418640 items / sec XY3P: 725 / 28944 @ c=79, r=140, X139.730 Y73.572 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r140.jpg 725 / 28944, ETA: 18:43:26.6664 @ 0.418638 items / sec XY3P: 726 / 28944 @ c=78, r=140, X139.558 Y73.576 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r140.jpg 726 / 28944, ETA: 18:43:24.6079 @ 0.418636 items / sec XY3P: 727 / 28944 @ c=77, r=140, X139.385 Y73.580 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r140.jpg 727 / 28944, ETA: 18:43:22.5556 @ 0.418634 items / sec XY3P: 728 / 28944 @ c=76, r=140, X139.212 Y73.584 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r140.jpg 728 / 28944, ETA: 18:43:20.5425 @ 0.418632 items / sec XY3P: 729 / 28944 @ c=75, r=140, X139.039 Y73.588 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r140.jpg 729 / 28944, ETA: 18:43:18.4040 @ 0.418630 items / sec XY3P: 730 / 28944 @ c=74, r=140, X138.867 Y73.592 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r140.jpg 730 / 28944, ETA: 18:43:16.3543 @ 0.418628 items / sec XY3P: 731 / 28944 @ c=73, r=140, X138.694 Y73.596 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r140.jpg 731 / 28944, ETA: 18:43:14.2949 @ 0.418626 items / sec XY3P: 732 / 28944 @ c=72, r=140, X138.521 Y73.600 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r140.jpg 732 / 28944, ETA: 18:43:12.2472 @ 0.418624 items / sec XY3P: 733 / 28944 @ c=71, r=140, X138.348 Y73.604 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r140.jpg 733 / 28944, ETA: 18:43:10.2593 @ 0.418621 items / sec XY3P: 734 / 28944 @ c=70, r=140, X138.176 Y73.608 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r140.jpg 734 / 28944, ETA: 18:43:08.0983 @ 0.418620 items / sec XY3P: 735 / 28944 @ c=69, r=140, X138.003 Y73.612 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r140.jpg 735 / 28944, ETA: 18:43:06.0589 @ 0.418618 items / sec XY3P: 736 / 28944 @ c=68, r=140, X137.830 Y73.616 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r140.jpg 736 / 28944, ETA: 18:43:03.9806 @ 0.418616 items / sec XY3P: 737 / 28944 @ c=67, r=140, X137.657 Y73.620 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r140.jpg 737 / 28944, ETA: 18:43:01.9420 @ 0.418614 items / sec XY3P: 738 / 28944 @ c=66, r=140, X137.485 Y73.623 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r140.jpg 738 / 28944, ETA: 18:43:07.7233 @ 0.418563 items / sec XY3P: 739 / 28944 @ c=65, r=140, X137.312 Y73.627 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r140.jpg 739 / 28944, ETA: 18:43:05.4982 @ 0.418562 items / sec XY3P: 740 / 28944 @ c=64, r=140, X137.139 Y73.631 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r140.jpg 740 / 28944, ETA: 18:43:03.3515 @ 0.418560 items / sec XY3P: 741 / 28944 @ c=63, r=140, X136.966 Y73.635 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r140.jpg 741 / 28944, ETA: 18:43:01.2470 @ 0.418559 items / sec XY3P: 742 / 28944 @ c=62, r=140, X136.794 Y73.639 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r140.jpg 742 / 28944, ETA: 18:42:59.1734 @ 0.418557 items / sec XY3P: 743 / 28944 @ c=61, r=140, X136.621 Y73.643 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r140.jpg 743 / 28944, ETA: 18:42:57.0585 @ 0.418555 items / sec XY3P: 744 / 28944 @ c=60, r=140, X136.448 Y73.647 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r140.jpg 744 / 28944, ETA: 18:42:55.0825 @ 0.418552 items / sec XY3P: 745 / 28944 @ c=59, r=140, X136.275 Y73.651 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r140.jpg 745 / 28944, ETA: 18:42:53.1815 @ 0.418549 items / sec XY3P: 746 / 28944 @ c=58, r=140, X136.103 Y73.655 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r140.jpg 746 / 28944, ETA: 18:42:50.8422 @ 0.418549 items / sec XY3P: 747 / 28944 @ c=57, r=140, X135.930 Y73.659 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r140.jpg 747 / 28944, ETA: 18:42:48.9903 @ 0.418546 items / sec XY3P: 748 / 28944 @ c=56, r=140, X135.757 Y73.663 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r140.jpg 748 / 28944, ETA: 18:42:46.6734 @ 0.418545 items / sec XY3P: 749 / 28944 @ c=55, r=140, X135.584 Y73.667 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r140.jpg 749 / 28944, ETA: 18:42:44.8927 @ 0.418541 items / sec XY3P: 750 / 28944 @ c=54, r=140, X135.412 Y73.671 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r140.jpg 750 / 28944, ETA: 18:42:42.4843 @ 0.418542 items / sec XY3P: 751 / 28944 @ c=53, r=140, X135.239 Y73.675 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r140.jpg 751 / 28944, ETA: 18:42:40.4203 @ 0.418540 items / sec XY3P: 752 / 28944 @ c=52, r=140, X135.066 Y73.679 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r140.jpg 752 / 28944, ETA: 18:42:38.3275 @ 0.418538 items / sec XY3P: 753 / 28944 @ c=51, r=140, X134.893 Y73.683 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r140.jpg 753 / 28944, ETA: 18:42:36.2331 @ 0.418536 items / sec XY3P: 754 / 28944 @ c=50, r=140, X134.721 Y73.687 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r140.jpg 754 / 28944, ETA: 18:42:34.2469 @ 0.418533 items / sec XY3P: 755 / 28944 @ c=49, r=140, X134.548 Y73.691 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r140.jpg 755 / 28944, ETA: 18:42:32.0536 @ 0.418532 items / sec XY3P: 756 / 28944 @ c=48, r=140, X134.375 Y73.695 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r140.jpg 756 / 28944, ETA: 18:42:29.9625 @ 0.418530 items / sec XY3P: 757 / 28944 @ c=47, r=140, X134.202 Y73.699 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r140.jpg 757 / 28944, ETA: 18:42:27.8476 @ 0.418529 items / sec XY3P: 758 / 28944 @ c=46, r=140, X134.030 Y73.703 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r140.jpg 758 / 28944, ETA: 18:42:25.8141 @ 0.418526 items / sec XY3P: 759 / 28944 @ c=45, r=140, X133.857 Y73.707 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r140.jpg 759 / 28944, ETA: 18:42:23.7105 @ 0.418525 items / sec XY3P: 760 / 28944 @ c=44, r=140, X133.684 Y73.711 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r140.jpg 760 / 28944, ETA: 18:42:21.5911 @ 0.418523 items / sec XY3P: 761 / 28944 @ c=43, r=140, X133.511 Y73.715 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r140.jpg 761 / 28944, ETA: 18:42:19.5026 @ 0.418521 items / sec XY3P: 762 / 28944 @ c=42, r=140, X133.339 Y73.719 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r140.jpg 762 / 28944, ETA: 18:42:17.3721 @ 0.418519 items / sec XY3P: 763 / 28944 @ c=41, r=140, X133.166 Y73.723 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r140.jpg 763 / 28944, ETA: 18:42:15.3225 @ 0.418517 items / sec XY3P: 764 / 28944 @ c=40, r=140, X132.993 Y73.727 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r140.jpg 764 / 28944, ETA: 18:42:13.2423 @ 0.418515 items / sec XY3P: 765 / 28944 @ c=39, r=140, X132.820 Y73.731 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r140.jpg 765 / 28944, ETA: 18:42:11.0827 @ 0.418514 items / sec XY3P: 766 / 28944 @ c=38, r=140, X132.648 Y73.735 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r140.jpg 766 / 28944, ETA: 18:42:08.9907 @ 0.418512 items / sec XY3P: 767 / 28944 @ c=37, r=140, X132.475 Y73.738 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r140.jpg 767 / 28944, ETA: 18:42:06.8790 @ 0.418510 items / sec XY3P: 768 / 28944 @ c=36, r=140, X132.302 Y73.742 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r140.jpg 768 / 28944, ETA: 18:41:57.5214 @ 0.418554 items / sec XY3P: 769 / 28944 @ c=35, r=140, X132.129 Y73.746 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r140.jpg 769 / 28944, ETA: 18:41:55.3932 @ 0.418552 items / sec XY3P: 770 / 28944 @ c=34, r=140, X131.957 Y73.750 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r140.jpg 770 / 28944, ETA: 18:41:53.2819 @ 0.418550 items / sec XY3P: 771 / 28944 @ c=33, r=140, X131.784 Y73.754 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r140.jpg 771 / 28944, ETA: 18:41:51.1758 @ 0.418549 items / sec XY3P: 772 / 28944 @ c=32, r=140, X131.611 Y73.758 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r140.jpg 772 / 28944, ETA: 18:41:49.0819 @ 0.418547 items / sec XY3P: 773 / 28944 @ c=31, r=140, X131.438 Y73.762 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r140.jpg 773 / 28944, ETA: 18:41:47.0256 @ 0.418545 items / sec XY3P: 774 / 28944 @ c=30, r=140, X131.266 Y73.766 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r140.jpg 774 / 28944, ETA: 18:41:44.9123 @ 0.418543 items / sec XY3P: 775 / 28944 @ c=29, r=140, X131.093 Y73.770 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r140.jpg 775 / 28944, ETA: 18:41:42.8194 @ 0.418541 items / sec XY3P: 776 / 28944 @ c=28, r=140, X130.920 Y73.774 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r140.jpg 776 / 28944, ETA: 18:41:40.7000 @ 0.418539 items / sec XY3P: 777 / 28944 @ c=27, r=140, X130.747 Y73.778 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r140.jpg 777 / 28944, ETA: 18:41:38.5969 @ 0.418538 items / sec XY3P: 778 / 28944 @ c=26, r=140, X130.575 Y73.782 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r140.jpg 778 / 28944, ETA: 18:41:29.3562 @ 0.418580 items / sec XY3P: 779 / 28944 @ c=25, r=140, X130.402 Y73.786 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r140.jpg 779 / 28944, ETA: 18:41:27.1674 @ 0.418579 items / sec XY3P: 780 / 28944 @ c=24, r=140, X130.229 Y73.790 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r140.jpg 780 / 28944, ETA: 18:41:25.0890 @ 0.418577 items / sec XY3P: 781 / 28944 @ c=23, r=140, X130.056 Y73.794 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r140.jpg 781 / 28944, ETA: 18:41:22.9942 @ 0.418575 items / sec XY3P: 782 / 28944 @ c=22, r=140, X129.884 Y73.798 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r140.jpg 782 / 28944, ETA: 18:41:20.8606 @ 0.418574 items / sec XY3P: 783 / 28944 @ c=21, r=140, X129.711 Y73.802 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r140.jpg 783 / 28944, ETA: 18:41:18.8573 @ 0.418571 items / sec XY3P: 784 / 28944 @ c=20, r=140, X129.538 Y73.806 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r140.jpg 784 / 28944, ETA: 18:41:16.7119 @ 0.418570 items / sec XY3P: 785 / 28944 @ c=19, r=140, X129.365 Y73.810 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r140.jpg 785 / 28944, ETA: 18:41:14.6052 @ 0.418568 items / sec XY3P: 786 / 28944 @ c=18, r=140, X129.193 Y73.814 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r140.jpg 786 / 28944, ETA: 18:41:12.5323 @ 0.418566 items / sec XY3P: 787 / 28944 @ c=17, r=140, X129.020 Y73.818 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r140.jpg 787 / 28944, ETA: 18:41:10.4559 @ 0.418564 items / sec XY3P: 788 / 28944 @ c=16, r=140, X128.847 Y73.822 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r140.jpg 788 / 28944, ETA: 18:41:08.4433 @ 0.418562 items / sec XY3P: 789 / 28944 @ c=15, r=140, X128.674 Y73.826 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r140.jpg 789 / 28944, ETA: 18:41:06.3742 @ 0.418560 items / sec XY3P: 790 / 28944 @ c=14, r=140, X128.502 Y73.830 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r140.jpg 790 / 28944, ETA: 18:41:04.1098 @ 0.418559 items / sec XY3P: 791 / 28944 @ c=13, r=140, X128.329 Y73.834 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r140.jpg 791 / 28944, ETA: 18:41:02.0253 @ 0.418557 items / sec XY3P: 792 / 28944 @ c=12, r=140, X128.156 Y73.838 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r140.jpg 792 / 28944, ETA: 18:40:59.9744 @ 0.418555 items / sec XY3P: 793 / 28944 @ c=11, r=140, X127.983 Y73.842 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r140.jpg 793 / 28944, ETA: 18:40:57.8089 @ 0.418554 items / sec XY3P: 794 / 28944 @ c=10, r=140, X127.811 Y73.846 Z-15.193 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r140.jpg 794 / 28944, ETA: 18:40:55.9238 @ 0.418550 items / sec XY3P: 795 / 28944 @ c=9, r=140, X127.638 Y73.849 Z-15.193 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r140.jpg 795 / 28944, ETA: 18:40:53.6144 @ 0.418550 items / sec XY3P: 796 / 28944 @ c=8, r=140, X127.465 Y73.853 Z-15.194 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r140.jpg 796 / 28944, ETA: 18:40:44.4479 @ 0.418592 items / sec XY3P: 797 / 28944 @ c=7, r=140, X127.292 Y73.857 Z-15.194 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r140.jpg 797 / 28944, ETA: 18:40:42.4030 @ 0.418590 items / sec XY3P: 798 / 28944 @ c=6, r=140, X127.120 Y73.861 Z-15.195 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r140.jpg 798 / 28944, ETA: 18:40:40.4974 @ 0.418587 items / sec XY3P: 799 / 28944 @ c=5, r=140, X126.947 Y73.865 Z-15.195 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r140.jpg 799 / 28944, ETA: 18:40:38.1536 @ 0.418587 items / sec XY3P: 800 / 28944 @ c=4, r=140, X126.774 Y73.869 Z-15.196 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r140.jpg 800 / 28944, ETA: 18:40:36.0723 @ 0.418585 items / sec XY3P: 801 / 28944 @ c=3, r=140, X126.601 Y73.873 Z-15.196 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r140.jpg 801 / 28944, ETA: 18:40:33.9517 @ 0.418583 items / sec XY3P: 802 / 28944 @ c=2, r=140, X126.429 Y73.877 Z-15.197 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r140.jpg 802 / 28944, ETA: 18:40:31.9174 @ 0.418581 items / sec XY3P: 803 / 28944 @ c=1, r=140, X126.256 Y73.881 Z-15.197 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r140.jpg 803 / 28944, ETA: 18:40:29.7972 @ 0.418579 items / sec XY3P: 804 / 28944 @ c=0, r=140, X126.083 Y73.885 Z-15.198 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r140.jpg 804 / 28944, ETA: 18:40:27.6575 @ 0.418578 items / sec XY3P: 805 / 28944 @ c=0, r=139, X126.088 Y74.058 Z-15.196 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r139.jpg 805 / 28944, ETA: 18:40:25.5544 @ 0.418576 items / sec XY3P: 806 / 28944 @ c=1, r=139, X126.261 Y74.054 Z-15.195 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r139.jpg 806 / 28944, ETA: 18:40:23.4330 @ 0.418574 items / sec XY3P: 807 / 28944 @ c=2, r=139, X126.433 Y74.050 Z-15.195 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r139.jpg 807 / 28944, ETA: 18:40:21.4171 @ 0.418572 items / sec XY3P: 808 / 28944 @ c=3, r=139, X126.606 Y74.046 Z-15.194 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r139.jpg 808 / 28944, ETA: 18:40:19.2454 @ 0.418571 items / sec XY3P: 809 / 28944 @ c=4, r=139, X126.779 Y74.042 Z-15.194 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r139.jpg 809 / 28944, ETA: 18:40:17.1418 @ 0.418569 items / sec XY3P: 810 / 28944 @ c=5, r=139, X126.952 Y74.038 Z-15.193 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r139.jpg 810 / 28944, ETA: 18:40:15.0446 @ 0.418567 items / sec XY3P: 811 / 28944 @ c=6, r=139, X127.124 Y74.034 Z-15.193 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r139.jpg 811 / 28944, ETA: 18:40:12.9247 @ 0.418565 items / sec XY3P: 812 / 28944 @ c=7, r=139, X127.297 Y74.030 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r139.jpg 812 / 28944, ETA: 18:40:10.8856 @ 0.418563 items / sec XY3P: 813 / 28944 @ c=8, r=139, X127.470 Y74.026 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r139.jpg 813 / 28944, ETA: 18:40:08.7112 @ 0.418562 items / sec XY3P: 814 / 28944 @ c=9, r=139, X127.643 Y74.022 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r139.jpg 814 / 28944, ETA: 18:40:06.6131 @ 0.418560 items / sec XY3P: 815 / 28944 @ c=10, r=139, X127.815 Y74.018 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r139.jpg 815 / 28944, ETA: 18:40:04.5055 @ 0.418558 items / sec XY3P: 816 / 28944 @ c=11, r=139, X127.988 Y74.014 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r139.jpg 816 / 28944, ETA: 18:40:02.3758 @ 0.418557 items / sec XY3P: 817 / 28944 @ c=12, r=139, X128.161 Y74.010 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r139.jpg 817 / 28944, ETA: 18:40:00.4066 @ 0.418554 items / sec XY3P: 818 / 28944 @ c=13, r=139, X128.334 Y74.006 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r139.jpg 818 / 28944, ETA: 18:39:58.1767 @ 0.418553 items / sec XY3P: 819 / 28944 @ c=14, r=139, X128.506 Y74.002 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r139.jpg 819 / 28944, ETA: 18:39:56.0472 @ 0.418551 items / sec XY3P: 820 / 28944 @ c=15, r=139, X128.679 Y73.998 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r139.jpg 820 / 28944, ETA: 18:39:53.9409 @ 0.418550 items / sec XY3P: 821 / 28944 @ c=16, r=139, X128.852 Y73.994 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r139.jpg 821 / 28944, ETA: 18:39:51.8336 @ 0.418548 items / sec XY3P: 822 / 28944 @ c=17, r=139, X129.025 Y73.991 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r139.jpg 822 / 28944, ETA: 18:39:42.8743 @ 0.418589 items / sec XY3P: 823 / 28944 @ c=18, r=139, X129.197 Y73.987 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r139.jpg 823 / 28944, ETA: 18:39:33.9437 @ 0.418630 items / sec XY3P: 824 / 28944 @ c=19, r=139, X129.370 Y73.983 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r139.jpg 824 / 28944, ETA: 18:39:31.8569 @ 0.418628 items / sec XY3P: 825 / 28944 @ c=20, r=139, X129.543 Y73.979 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r139.jpg 825 / 28944, ETA: 18:39:29.7450 @ 0.418626 items / sec XY3P: 826 / 28944 @ c=21, r=139, X129.716 Y73.975 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r139.jpg 826 / 28944, ETA: 18:39:27.7081 @ 0.418624 items / sec XY3P: 827 / 28944 @ c=22, r=139, X129.888 Y73.971 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r139.jpg 827 / 28944, ETA: 18:39:25.5608 @ 0.418622 items / sec XY3P: 828 / 28944 @ c=23, r=139, X130.061 Y73.967 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r139.jpg 828 / 28944, ETA: 18:39:23.4960 @ 0.418620 items / sec XY3P: 829 / 28944 @ c=24, r=139, X130.234 Y73.963 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r139.jpg 829 / 28944, ETA: 18:39:21.3574 @ 0.418619 items / sec XY3P: 830 / 28944 @ c=25, r=139, X130.407 Y73.959 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r139.jpg 830 / 28944, ETA: 18:39:19.2422 @ 0.418617 items / sec XY3P: 831 / 28944 @ c=26, r=139, X130.579 Y73.955 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r139.jpg 831 / 28944, ETA: 18:39:17.2365 @ 0.418615 items / sec XY3P: 832 / 28944 @ c=27, r=139, X130.752 Y73.951 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r139.jpg 832 / 28944, ETA: 18:39:15.0490 @ 0.418613 items / sec XY3P: 833 / 28944 @ c=28, r=139, X130.925 Y73.947 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r139.jpg 833 / 28944, ETA: 18:39:12.9398 @ 0.418612 items / sec XY3P: 834 / 28944 @ c=29, r=139, X131.098 Y73.943 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r139.jpg 834 / 28944, ETA: 18:39:10.8381 @ 0.418610 items / sec XY3P: 835 / 28944 @ c=30, r=139, X131.270 Y73.939 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r139.jpg 835 / 28944, ETA: 18:39:08.7897 @ 0.418608 items / sec XY3P: 836 / 28944 @ c=31, r=139, X131.443 Y73.935 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r139.jpg 836 / 28944, ETA: 18:39:06.6835 @ 0.418606 items / sec XY3P: 837 / 28944 @ c=32, r=139, X131.616 Y73.931 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r139.jpg 837 / 28944, ETA: 18:39:04.5180 @ 0.418605 items / sec XY3P: 838 / 28944 @ c=33, r=139, X131.789 Y73.927 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r139.jpg 838 / 28944, ETA: 18:39:02.3966 @ 0.418603 items / sec XY3P: 839 / 28944 @ c=34, r=139, X131.961 Y73.923 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r139.jpg 839 / 28944, ETA: 18:39:00.2974 @ 0.418601 items / sec XY3P: 840 / 28944 @ c=35, r=139, X132.134 Y73.919 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r139.jpg 840 / 28944, ETA: 18:38:58.1843 @ 0.418599 items / sec XY3P: 841 / 28944 @ c=36, r=139, X132.307 Y73.915 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r139.jpg 841 / 28944, ETA: 18:38:49.3960 @ 0.418639 items / sec XY3P: 842 / 28944 @ c=37, r=139, X132.480 Y73.911 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r139.jpg 842 / 28944, ETA: 18:38:47.2908 @ 0.418637 items / sec XY3P: 843 / 28944 @ c=38, r=139, X132.652 Y73.907 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r139.jpg 843 / 28944, ETA: 18:38:45.1933 @ 0.418636 items / sec XY3P: 844 / 28944 @ c=39, r=139, X132.825 Y73.903 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r139.jpg 844 / 28944, ETA: 18:38:43.0963 @ 0.418634 items / sec XY3P: 845 / 28944 @ c=40, r=139, X132.998 Y73.899 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r139.jpg 845 / 28944, ETA: 18:38:41.0354 @ 0.418632 items / sec XY3P: 846 / 28944 @ c=41, r=139, X133.171 Y73.895 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r139.jpg 846 / 28944, ETA: 18:38:38.8754 @ 0.418630 items / sec XY3P: 847 / 28944 @ c=42, r=139, X133.343 Y73.891 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r139.jpg 847 / 28944, ETA: 18:38:36.7760 @ 0.418629 items / sec XY3P: 848 / 28944 @ c=43, r=139, X133.516 Y73.887 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r139.jpg 848 / 28944, ETA: 18:38:34.6692 @ 0.418627 items / sec XY3P: 849 / 28944 @ c=44, r=139, X133.689 Y73.883 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r139.jpg 849 / 28944, ETA: 18:38:32.5894 @ 0.418625 items / sec XY3P: 850 / 28944 @ c=45, r=139, X133.862 Y73.879 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r139.jpg 850 / 28944, ETA: 18:38:30.4988 @ 0.418623 items / sec XY3P: 851 / 28944 @ c=46, r=139, X134.034 Y73.876 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r139.jpg 851 / 28944, ETA: 18:38:28.3521 @ 0.418622 items / sec XY3P: 852 / 28944 @ c=47, r=139, X134.207 Y73.872 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r139.jpg 852 / 28944, ETA: 18:38:26.2414 @ 0.418620 items / sec XY3P: 853 / 28944 @ c=48, r=139, X134.380 Y73.868 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r139.jpg 853 / 28944, ETA: 18:38:24.1212 @ 0.418618 items / sec XY3P: 854 / 28944 @ c=49, r=139, X134.553 Y73.864 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r139.jpg 854 / 28944, ETA: 18:38:22.0063 @ 0.418616 items / sec XY3P: 855 / 28944 @ c=50, r=139, X134.725 Y73.860 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r139.jpg 855 / 28944, ETA: 18:38:19.9418 @ 0.418614 items / sec XY3P: 856 / 28944 @ c=51, r=139, X134.898 Y73.856 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r139.jpg 856 / 28944, ETA: 18:38:17.7649 @ 0.418613 items / sec XY3P: 857 / 28944 @ c=52, r=139, X135.071 Y73.852 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r139.jpg 857 / 28944, ETA: 18:38:15.6856 @ 0.418611 items / sec XY3P: 858 / 28944 @ c=53, r=139, X135.244 Y73.848 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r139.jpg 858 / 28944, ETA: 18:38:13.6046 @ 0.418609 items / sec XY3P: 859 / 28944 @ c=54, r=139, X135.416 Y73.844 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r139.jpg 859 / 28944, ETA: 18:38:04.9393 @ 0.418648 items / sec XY3P: 860 / 28944 @ c=55, r=139, X135.589 Y73.840 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r139.jpg 860 / 28944, ETA: 18:37:56.2993 @ 0.418687 items / sec XY3P: 861 / 28944 @ c=56, r=139, X135.762 Y73.836 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r139.jpg 861 / 28944, ETA: 18:37:54.1788 @ 0.418686 items / sec XY3P: 862 / 28944 @ c=57, r=139, X135.935 Y73.832 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r139.jpg 862 / 28944, ETA: 18:37:52.1706 @ 0.418683 items / sec XY3P: 863 / 28944 @ c=58, r=139, X136.107 Y73.828 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r139.jpg 863 / 28944, ETA: 18:37:50.1597 @ 0.418681 items / sec XY3P: 864 / 28944 @ c=59, r=139, X136.280 Y73.824 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r139.jpg 864 / 28944, ETA: 18:37:47.9532 @ 0.418680 items / sec XY3P: 865 / 28944 @ c=60, r=139, X136.453 Y73.820 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r139.jpg 865 / 28944, ETA: 18:37:45.7791 @ 0.418679 items / sec XY3P: 866 / 28944 @ c=61, r=139, X136.626 Y73.816 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r139.jpg 866 / 28944, ETA: 18:37:43.7270 @ 0.418676 items / sec XY3P: 867 / 28944 @ c=62, r=139, X136.798 Y73.812 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r139.jpg 867 / 28944, ETA: 18:37:41.5650 @ 0.418675 items / sec XY3P: 868 / 28944 @ c=63, r=139, X136.971 Y73.808 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r139.jpg 868 / 28944, ETA: 18:37:39.4751 @ 0.418673 items / sec XY3P: 869 / 28944 @ c=64, r=139, X137.144 Y73.804 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r139.jpg 869 / 28944, ETA: 18:37:37.4030 @ 0.418671 items / sec XY3P: 870 / 28944 @ c=65, r=139, X137.317 Y73.800 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r139.jpg 870 / 28944, ETA: 18:37:35.2434 @ 0.418670 items / sec XY3P: 871 / 28944 @ c=66, r=139, X137.489 Y73.796 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r139.jpg 871 / 28944, ETA: 18:37:33.1517 @ 0.418668 items / sec XY3P: 872 / 28944 @ c=67, r=139, X137.662 Y73.792 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r139.jpg 872 / 28944, ETA: 18:37:31.0405 @ 0.418666 items / sec XY3P: 873 / 28944 @ c=68, r=139, X137.835 Y73.788 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r139.jpg 873 / 28944, ETA: 18:37:28.9379 @ 0.418664 items / sec XY3P: 874 / 28944 @ c=69, r=139, X138.008 Y73.784 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r139.jpg 874 / 28944, ETA: 18:37:26.8850 @ 0.418662 items / sec XY3P: 875 / 28944 @ c=70, r=139, X138.180 Y73.780 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r139.jpg 875 / 28944, ETA: 18:37:24.9088 @ 0.418660 items / sec XY3P: 876 / 28944 @ c=71, r=139, X138.353 Y73.776 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r139.jpg 876 / 28944, ETA: 18:37:22.5957 @ 0.418659 items / sec XY3P: 877 / 28944 @ c=72, r=139, X138.526 Y73.772 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r139.jpg 877 / 28944, ETA: 18:37:14.0965 @ 0.418697 items / sec XY3P: 878 / 28944 @ c=73, r=139, X138.699 Y73.768 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r139.jpg 878 / 28944, ETA: 18:37:05.6714 @ 0.418735 items / sec XY3P: 879 / 28944 @ c=74, r=139, X138.871 Y73.764 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r139.jpg 879 / 28944, ETA: 18:36:57.1400 @ 0.418773 items / sec XY3P: 880 / 28944 @ c=75, r=139, X139.044 Y73.761 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r139.jpg 880 / 28944, ETA: 18:36:55.0617 @ 0.418772 items / sec XY3P: 881 / 28944 @ c=76, r=139, X139.217 Y73.757 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r139.jpg 881 / 28944, ETA: 18:36:52.9526 @ 0.418770 items / sec XY3P: 882 / 28944 @ c=77, r=139, X139.390 Y73.753 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r139.jpg 882 / 28944, ETA: 18:36:51.1066 @ 0.418766 items / sec XY3P: 883 / 28944 @ c=78, r=139, X139.562 Y73.749 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r139.jpg 883 / 28944, ETA: 18:36:48.7714 @ 0.418766 items / sec XY3P: 884 / 28944 @ c=79, r=139, X139.735 Y73.745 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r139.jpg 884 / 28944, ETA: 18:36:46.6844 @ 0.418764 items / sec XY3P: 885 / 28944 @ c=80, r=139, X139.908 Y73.741 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r139.jpg 885 / 28944, ETA: 18:36:44.5866 @ 0.418762 items / sec XY3P: 886 / 28944 @ c=81, r=139, X140.081 Y73.737 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r139.jpg 886 / 28944, ETA: 18:36:42.5024 @ 0.418760 items / sec XY3P: 887 / 28944 @ c=82, r=139, X140.253 Y73.733 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r139.jpg 887 / 28944, ETA: 18:36:40.4458 @ 0.418758 items / sec XY3P: 888 / 28944 @ c=83, r=139, X140.426 Y73.729 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r139.jpg 888 / 28944, ETA: 18:36:38.3029 @ 0.418757 items / sec XY3P: 889 / 28944 @ c=84, r=139, X140.599 Y73.725 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r139.jpg 889 / 28944, ETA: 18:36:36.4094 @ 0.418754 items / sec XY3P: 890 / 28944 @ c=85, r=139, X140.772 Y73.721 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r139.jpg 890 / 28944, ETA: 18:36:34.1002 @ 0.418753 items / sec XY3P: 891 / 28944 @ c=86, r=139, X140.944 Y73.717 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r139.jpg 891 / 28944, ETA: 18:36:32.0128 @ 0.418751 items / sec XY3P: 892 / 28944 @ c=87, r=139, X141.117 Y73.713 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r139.jpg 892 / 28944, ETA: 18:36:29.9700 @ 0.418749 items / sec XY3P: 893 / 28944 @ c=88, r=139, X141.290 Y73.709 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r139.jpg 893 / 28944, ETA: 18:36:27.8120 @ 0.418748 items / sec XY3P: 894 / 28944 @ c=89, r=139, X141.463 Y73.705 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r139.jpg 894 / 28944, ETA: 18:36:25.7083 @ 0.418746 items / sec XY3P: 895 / 28944 @ c=90, r=139, X141.635 Y73.701 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r139.jpg 895 / 28944, ETA: 18:36:23.6251 @ 0.418744 items / sec XY3P: 896 / 28944 @ c=91, r=139, X141.808 Y73.697 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r139.jpg 896 / 28944, ETA: 18:36:15.2669 @ 0.418781 items / sec XY3P: 897 / 28944 @ c=92, r=139, X141.981 Y73.693 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r139.jpg 897 / 28944, ETA: 18:36:06.9134 @ 0.418819 items / sec XY3P: 898 / 28944 @ c=93, r=139, X142.154 Y73.689 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r139.jpg 898 / 28944, ETA: 18:35:58.5956 @ 0.418856 items / sec XY3P: 899 / 28944 @ c=94, r=139, X142.326 Y73.685 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r139.jpg 899 / 28944, ETA: 18:35:56.5085 @ 0.418854 items / sec XY3P: 900 / 28944 @ c=95, r=139, X142.499 Y73.681 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r139.jpg 900 / 28944, ETA: 18:35:54.3971 @ 0.418852 items / sec XY3P: 901 / 28944 @ c=96, r=139, X142.672 Y73.677 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r139.jpg 901 / 28944, ETA: 18:35:52.4192 @ 0.418850 items / sec XY3P: 902 / 28944 @ c=97, r=139, X142.845 Y73.673 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r139.jpg 902 / 28944, ETA: 18:35:50.2683 @ 0.418848 items / sec XY3P: 903 / 28944 @ c=98, r=139, X143.017 Y73.669 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r139.jpg 903 / 28944, ETA: 18:35:48.1431 @ 0.418847 items / sec XY3P: 904 / 28944 @ c=99, r=139, X143.190 Y73.665 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r139.jpg 904 / 28944, ETA: 18:35:46.0951 @ 0.418844 items / sec XY3P: 905 / 28944 @ c=100, r=139, X143.363 Y73.661 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r139.jpg 905 / 28944, ETA: 18:35:43.9969 @ 0.418843 items / sec XY3P: 906 / 28944 @ c=101, r=139, X143.536 Y73.657 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r139.jpg 906 / 28944, ETA: 18:35:41.9750 @ 0.418840 items / sec XY3P: 907 / 28944 @ c=102, r=139, X143.708 Y73.653 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r139.jpg 907 / 28944, ETA: 18:35:39.8176 @ 0.418839 items / sec XY3P: 908 / 28944 @ c=103, r=139, X143.881 Y73.650 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r139.jpg 908 / 28944, ETA: 18:35:37.7564 @ 0.418837 items / sec XY3P: 909 / 28944 @ c=104, r=139, X144.054 Y73.646 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r139.jpg 909 / 28944, ETA: 18:35:29.6800 @ 0.418872 items / sec XY3P: 910 / 28944 @ c=105, r=139, X144.227 Y73.642 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r139.jpg 910 / 28944, ETA: 18:35:27.6754 @ 0.418870 items / sec XY3P: 911 / 28944 @ c=106, r=139, X144.399 Y73.638 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r139.jpg 911 / 28944, ETA: 18:35:25.3194 @ 0.418870 items / sec XY3P: 912 / 28944 @ c=107, r=139, X144.572 Y73.634 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r139.jpg 912 / 28944, ETA: 18:35:23.2394 @ 0.418868 items / sec XY3P: 913 / 28944 @ c=108, r=139, X144.745 Y73.630 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r139.jpg 913 / 28944, ETA: 18:35:21.1545 @ 0.418866 items / sec XY3P: 914 / 28944 @ c=109, r=139, X144.918 Y73.626 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r139.jpg 914 / 28944, ETA: 18:35:19.0655 @ 0.418864 items / sec XY3P: 915 / 28944 @ c=110, r=139, X145.090 Y73.622 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r139.jpg 915 / 28944, ETA: 18:35:10.9269 @ 0.418900 items / sec XY3P: 916 / 28944 @ c=111, r=139, X145.263 Y73.618 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r139.jpg 916 / 28944, ETA: 18:35:02.6831 @ 0.418937 items / sec XY3P: 917 / 28944 @ c=112, r=139, X145.436 Y73.614 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r139.jpg 917 / 28944, ETA: 18:35:00.6046 @ 0.418935 items / sec XY3P: 918 / 28944 @ c=113, r=139, X145.609 Y73.610 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r139.jpg 918 / 28944, ETA: 18:34:58.5254 @ 0.418933 items / sec XY3P: 919 / 28944 @ c=114, r=139, X145.781 Y73.606 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r139.jpg 919 / 28944, ETA: 18:34:56.4973 @ 0.418931 items / sec XY3P: 920 / 28944 @ c=115, r=139, X145.954 Y73.602 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r139.jpg 920 / 28944, ETA: 18:34:54.3588 @ 0.418929 items / sec XY3P: 921 / 28944 @ c=116, r=139, X146.127 Y73.598 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r139.jpg 921 / 28944, ETA: 18:34:52.3110 @ 0.418927 items / sec XY3P: 922 / 28944 @ c=117, r=139, X146.300 Y73.594 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r139.jpg 922 / 28944, ETA: 18:34:50.2275 @ 0.418925 items / sec XY3P: 923 / 28944 @ c=118, r=139, X146.472 Y73.590 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r139.jpg 923 / 28944, ETA: 18:34:48.1595 @ 0.418923 items / sec XY3P: 924 / 28944 @ c=119, r=139, X146.645 Y73.586 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r139.jpg 924 / 28944, ETA: 18:34:46.1308 @ 0.418921 items / sec XY3P: 925 / 28944 @ c=120, r=139, X146.818 Y73.582 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r139.jpg 925 / 28944, ETA: 18:34:44.0011 @ 0.418919 items / sec XY3P: 926 / 28944 @ c=121, r=139, X146.991 Y73.578 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r139.jpg 926 / 28944, ETA: 18:34:41.9363 @ 0.418917 items / sec XY3P: 927 / 28944 @ c=122, r=139, X147.163 Y73.574 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r139.jpg 927 / 28944, ETA: 18:34:39.8143 @ 0.418916 items / sec XY3P: 928 / 28944 @ c=123, r=139, X147.336 Y73.570 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r139.jpg 928 / 28944, ETA: 18:34:37.7552 @ 0.418914 items / sec XY3P: 929 / 28944 @ c=124, r=139, X147.509 Y73.566 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r139.jpg 929 / 28944, ETA: 18:34:35.7299 @ 0.418911 items / sec XY3P: 930 / 28944 @ c=125, r=139, X147.682 Y73.562 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r139.jpg 930 / 28944, ETA: 18:34:33.5684 @ 0.418910 items / sec XY3P: 931 / 28944 @ c=126, r=139, X147.854 Y73.558 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r139.jpg 931 / 28944, ETA: 18:34:31.5209 @ 0.418908 items / sec XY3P: 932 / 28944 @ c=127, r=139, X148.027 Y73.554 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r139.jpg 932 / 28944, ETA: 18:34:29.4298 @ 0.418906 items / sec XY3P: 933 / 28944 @ c=128, r=139, X148.200 Y73.550 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r139.jpg 933 / 28944, ETA: 18:34:21.3660 @ 0.418941 items / sec XY3P: 934 / 28944 @ c=129, r=139, X148.373 Y73.546 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r139.jpg 934 / 28944, ETA: 18:34:13.2813 @ 0.418977 items / sec XY3P: 935 / 28944 @ c=130, r=139, X148.545 Y73.542 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r139.jpg 935 / 28944, ETA: 18:34:05.2382 @ 0.419013 items / sec XY3P: 936 / 28944 @ c=131, r=139, X148.718 Y73.538 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r139.jpg 936 / 28944, ETA: 18:34:03.2549 @ 0.419010 items / sec XY3P: 937 / 28944 @ c=132, r=139, X148.891 Y73.535 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r139.jpg 937 / 28944, ETA: 18:34:01.2939 @ 0.419007 items / sec XY3P: 938 / 28944 @ c=133, r=139, X149.064 Y73.531 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r139.jpg 938 / 28944, ETA: 18:33:59.0112 @ 0.419007 items / sec XY3P: 939 / 28944 @ c=134, r=139, X149.236 Y73.527 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r139.jpg 939 / 28944, ETA: 18:33:56.9500 @ 0.419005 items / sec XY3P: 940 / 28944 @ c=135, r=139, X149.409 Y73.523 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r139.jpg 940 / 28944, ETA: 18:33:55.0753 @ 0.419002 items / sec XY3P: 941 / 28944 @ c=136, r=139, X149.582 Y73.519 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r139.jpg 941 / 28944, ETA: 18:33:52.8127 @ 0.419001 items / sec XY3P: 942 / 28944 @ c=137, r=139, X149.755 Y73.515 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r139.jpg 942 / 28944, ETA: 18:33:50.9699 @ 0.418997 items / sec XY3P: 943 / 28944 @ c=138, r=139, X149.927 Y73.511 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r139.jpg 943 / 28944, ETA: 18:33:48.6752 @ 0.418997 items / sec XY3P: 944 / 28944 @ c=139, r=139, X150.100 Y73.507 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r139.jpg 944 / 28944, ETA: 18:33:46.5917 @ 0.418995 items / sec XY3P: 945 / 28944 @ c=140, r=139, X150.273 Y73.503 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r139.jpg 945 / 28944, ETA: 18:33:44.5305 @ 0.418993 items / sec XY3P: 946 / 28944 @ c=141, r=139, X150.446 Y73.499 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r139.jpg 946 / 28944, ETA: 18:33:42.4422 @ 0.418991 items / sec XY3P: 947 / 28944 @ c=142, r=139, X150.618 Y73.495 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r139.jpg 947 / 28944, ETA: 18:33:40.4035 @ 0.418989 items / sec XY3P: 948 / 28944 @ c=143, r=139, X150.791 Y73.491 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r139.jpg 948 / 28944, ETA: 18:33:38.3088 @ 0.418987 items / sec XY3P: 949 / 28944 @ c=144, r=139, X150.964 Y73.487 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r139.jpg 949 / 28944, ETA: 18:33:36.2211 @ 0.418985 items / sec XY3P: 950 / 28944 @ c=145, r=139, X151.137 Y73.483 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r139.jpg 950 / 28944, ETA: 18:33:34.1522 @ 0.418983 items / sec XY3P: 951 / 28944 @ c=146, r=139, X151.309 Y73.479 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r139.jpg 951 / 28944, ETA: 18:33:32.0765 @ 0.418981 items / sec XY3P: 952 / 28944 @ c=147, r=139, X151.482 Y73.475 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r139.jpg 952 / 28944, ETA: 18:33:30.0355 @ 0.418979 items / sec XY3P: 953 / 28944 @ c=148, r=139, X151.655 Y73.471 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r139.jpg 953 / 28944, ETA: 18:33:22.0486 @ 0.419014 items / sec XY3P: 954 / 28944 @ c=149, r=139, X151.828 Y73.467 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r139.jpg 954 / 28944, ETA: 18:33:14.1241 @ 0.419049 items / sec XY3P: 955 / 28944 @ c=150, r=139, X152.000 Y73.463 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r139.jpg 955 / 28944, ETA: 18:33:12.0508 @ 0.419047 items / sec XY3P: 956 / 28944 @ c=151, r=139, X152.173 Y73.459 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r139.jpg 956 / 28944, ETA: 18:33:10.0088 @ 0.419045 items / sec XY3P: 957 / 28944 @ c=152, r=139, X152.346 Y73.455 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r139.jpg 957 / 28944, ETA: 18:33:07.9141 @ 0.419043 items / sec XY3P: 958 / 28944 @ c=153, r=139, X152.519 Y73.451 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r139.jpg 958 / 28944, ETA: 18:33:05.8239 @ 0.419041 items / sec XY3P: 959 / 28944 @ c=154, r=139, X152.691 Y73.447 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r139.jpg 959 / 28944, ETA: 18:33:03.7791 @ 0.419039 items / sec XY3P: 960 / 28944 @ c=155, r=139, X152.864 Y73.443 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r139.jpg 960 / 28944, ETA: 18:33:01.7103 @ 0.419037 items / sec XY3P: 961 / 28944 @ c=156, r=139, X153.037 Y73.439 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r139.jpg 961 / 28944, ETA: 18:32:59.6882 @ 0.419035 items / sec XY3P: 962 / 28944 @ c=157, r=139, X153.210 Y73.435 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r139.jpg 962 / 28944, ETA: 18:32:57.5611 @ 0.419033 items / sec XY3P: 963 / 28944 @ c=158, r=139, X153.382 Y73.431 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r139.jpg 963 / 28944, ETA: 18:32:55.4700 @ 0.419031 items / sec XY3P: 964 / 28944 @ c=159, r=139, X153.555 Y73.427 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r139.jpg 964 / 28944, ETA: 18:32:53.4208 @ 0.419029 items / sec XY3P: 965 / 28944 @ c=160, r=139, X153.728 Y73.424 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r139.jpg 965 / 28944, ETA: 18:32:51.3414 @ 0.419027 items / sec XY3P: 966 / 28944 @ c=161, r=139, X153.901 Y73.420 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r139.jpg 966 / 28944, ETA: 18:32:49.3113 @ 0.419025 items / sec XY3P: 967 / 28944 @ c=162, r=139, X154.073 Y73.416 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r139.jpg 967 / 28944, ETA: 18:32:47.2054 @ 0.419023 items / sec XY3P: 968 / 28944 @ c=163, r=139, X154.246 Y73.412 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r139.jpg 968 / 28944, ETA: 18:32:45.1435 @ 0.419021 items / sec XY3P: 969 / 28944 @ c=164, r=139, X154.419 Y73.408 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r139.jpg 969 / 28944, ETA: 18:32:43.0462 @ 0.419019 items / sec XY3P: 970 / 28944 @ c=165, r=139, X154.592 Y73.404 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r139.jpg 970 / 28944, ETA: 18:32:40.9603 @ 0.419017 items / sec XY3P: 971 / 28944 @ c=166, r=139, X154.764 Y73.400 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r139.jpg 971 / 28944, ETA: 18:32:38.9550 @ 0.419015 items / sec XY3P: 972 / 28944 @ c=167, r=139, X154.937 Y73.396 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r139.jpg 972 / 28944, ETA: 18:32:31.0500 @ 0.419050 items / sec XY3P: 973 / 28944 @ c=168, r=139, X155.110 Y73.392 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r139.jpg 973 / 28944, ETA: 18:32:23.2562 @ 0.419084 items / sec XY3P: 974 / 28944 @ c=169, r=139, X155.283 Y73.388 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r139.jpg 974 / 28944, ETA: 18:32:21.1773 @ 0.419082 items / sec XY3P: 975 / 28944 @ c=170, r=139, X155.455 Y73.384 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r139.jpg 975 / 28944, ETA: 18:32:19.1532 @ 0.419079 items / sec XY3P: 976 / 28944 @ c=171, r=139, X155.628 Y73.380 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r139.jpg 976 / 28944, ETA: 18:32:17.0497 @ 0.419078 items / sec XY3P: 977 / 28944 @ c=172, r=139, X155.801 Y73.376 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r139.jpg 977 / 28944, ETA: 18:32:14.9750 @ 0.419076 items / sec XY3P: 978 / 28944 @ c=173, r=139, X155.974 Y73.372 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r139.jpg 978 / 28944, ETA: 18:32:12.9179 @ 0.419074 items / sec XY3P: 979 / 28944 @ c=174, r=139, X156.146 Y73.368 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r139.jpg 979 / 28944, ETA: 18:32:10.8411 @ 0.419072 items / sec XY3P: 980 / 28944 @ c=175, r=139, X156.319 Y73.364 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r139.jpg 980 / 28944, ETA: 18:32:08.8203 @ 0.419069 items / sec XY3P: 981 / 28944 @ c=176, r=139, X156.492 Y73.360 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r139.jpg 981 / 28944, ETA: 18:32:06.6715 @ 0.419068 items / sec XY3P: 982 / 28944 @ c=177, r=139, X156.665 Y73.356 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r139.jpg 982 / 28944, ETA: 18:32:04.6107 @ 0.419066 items / sec XY3P: 983 / 28944 @ c=178, r=139, X156.837 Y73.352 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r139.jpg 983 / 28944, ETA: 18:32:02.5474 @ 0.419064 items / sec XY3P: 984 / 28944 @ c=179, r=139, X157.010 Y73.348 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r139.jpg 984 / 28944, ETA: 18:32:00.4610 @ 0.419062 items / sec XY3P: 985 / 28944 @ c=180, r=139, X157.183 Y73.344 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r139.jpg 985 / 28944, ETA: 18:31:58.4423 @ 0.419060 items / sec XY3P: 986 / 28944 @ c=181, r=139, X157.356 Y73.340 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r139.jpg 986 / 28944, ETA: 18:31:56.4334 @ 0.419057 items / sec XY3P: 987 / 28944 @ c=182, r=139, X157.528 Y73.336 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r139.jpg 987 / 28944, ETA: 18:31:54.2536 @ 0.419056 items / sec XY3P: 988 / 28944 @ c=183, r=139, X157.701 Y73.332 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r139.jpg 988 / 28944, ETA: 18:31:52.1557 @ 0.419054 items / sec XY3P: 989 / 28944 @ c=184, r=139, X157.874 Y73.328 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r139.jpg 989 / 28944, ETA: 18:31:44.4539 @ 0.419087 items / sec XY3P: 990 / 28944 @ c=185, r=139, X158.047 Y73.324 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r139.jpg 990 / 28944, ETA: 18:31:36.7332 @ 0.419121 items / sec XY3P: 991 / 28944 @ c=186, r=139, X158.219 Y73.320 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r139.jpg 991 / 28944, ETA: 18:31:34.6679 @ 0.419119 items / sec XY3P: 992 / 28944 @ c=187, r=139, X158.392 Y73.316 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r139.jpg 992 / 28944, ETA: 18:31:26.9822 @ 0.419152 items / sec XY3P: 993 / 28944 @ c=188, r=139, X158.565 Y73.312 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r139.jpg 993 / 28944, ETA: 18:31:25.0861 @ 0.419149 items / sec XY3P: 994 / 28944 @ c=189, r=139, X158.738 Y73.309 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r139.jpg 994 / 28944, ETA: 18:31:22.8945 @ 0.419148 items / sec XY3P: 995 / 28944 @ c=190, r=139, X158.910 Y73.305 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r139.jpg 995 / 28944, ETA: 18:31:20.7792 @ 0.419146 items / sec XY3P: 996 / 28944 @ c=191, r=139, X159.083 Y73.301 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r139.jpg 996 / 28944, ETA: 18:31:18.6801 @ 0.419144 items / sec XY3P: 997 / 28944 @ c=192, r=139, X159.256 Y73.297 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r139.jpg 997 / 28944, ETA: 18:31:16.6487 @ 0.419142 items / sec XY3P: 998 / 28944 @ c=193, r=139, X159.429 Y73.293 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r139.jpg 998 / 28944, ETA: 18:31:14.5669 @ 0.419140 items / sec XY3P: 999 / 28944 @ c=194, r=139, X159.601 Y73.289 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r139.jpg 999 / 28944, ETA: 18:31:12.5997 @ 0.419138 items / sec XY3P: 1000 / 28944 @ c=195, r=139, X159.774 Y73.285 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r139.jpg 1000 / 28944, ETA: 18:31:10.4515 @ 0.419136 items / sec XY3P: 1001 / 28944 @ c=196, r=139, X159.947 Y73.281 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r139.jpg 1001 / 28944, ETA: 18:31:08.4086 @ 0.419134 items / sec XY3P: 1002 / 28944 @ c=197, r=139, X160.120 Y73.277 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r139.jpg 1002 / 28944, ETA: 18:31:06.3129 @ 0.419132 items / sec XY3P: 1003 / 28944 @ c=198, r=139, X160.292 Y73.273 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r139.jpg 1003 / 28944, ETA: 18:31:04.2491 @ 0.419130 items / sec XY3P: 1004 / 28944 @ c=199, r=139, X160.465 Y73.269 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r139.jpg 1004 / 28944, ETA: 18:31:02.2253 @ 0.419128 items / sec XY3P: 1005 / 28944 @ c=200, r=139, X160.638 Y73.265 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r139.jpg 1005 / 28944, ETA: 18:31:00.1134 @ 0.419126 items / sec XY3P: 1006 / 28944 @ c=200, r=138, X160.643 Y73.438 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r138.jpg 1006 / 28944, ETA: 18:30:58.2246 @ 0.419123 items / sec XY3P: 1007 / 28944 @ c=199, r=138, X160.470 Y73.442 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r138.jpg 1007 / 28944, ETA: 18:30:55.9740 @ 0.419122 items / sec XY3P: 1008 / 28944 @ c=198, r=138, X160.297 Y73.446 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r138.jpg 1008 / 28944, ETA: 18:30:54.1219 @ 0.419119 items / sec XY3P: 1009 / 28944 @ c=197, r=138, X160.124 Y73.450 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r138.jpg 1009 / 28944, ETA: 18:30:51.8875 @ 0.419118 items / sec XY3P: 1010 / 28944 @ c=196, r=138, X159.952 Y73.453 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r138.jpg 1010 / 28944, ETA: 18:30:49.8273 @ 0.419116 items / sec XY3P: 1011 / 28944 @ c=195, r=138, X159.779 Y73.457 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r138.jpg 1011 / 28944, ETA: 18:30:47.8535 @ 0.419113 items / sec XY3P: 1012 / 28944 @ c=194, r=138, X159.606 Y73.461 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r138.jpg 1012 / 28944, ETA: 18:30:45.5971 @ 0.419112 items / sec XY3P: 1013 / 28944 @ c=193, r=138, X159.433 Y73.465 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r138.jpg 1013 / 28944, ETA: 18:30:43.5731 @ 0.419110 items / sec XY3P: 1014 / 28944 @ c=192, r=138, X159.261 Y73.469 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r138.jpg 1014 / 28944, ETA: 18:30:41.4564 @ 0.419108 items / sec XY3P: 1015 / 28944 @ c=191, r=138, X159.088 Y73.473 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r138.jpg 1015 / 28944, ETA: 18:30:39.3698 @ 0.419107 items / sec XY3P: 1016 / 28944 @ c=190, r=138, X158.915 Y73.477 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r138.jpg 1016 / 28944, ETA: 18:30:37.3045 @ 0.419105 items / sec XY3P: 1017 / 28944 @ c=189, r=138, X158.742 Y73.481 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r138.jpg 1017 / 28944, ETA: 18:30:35.2533 @ 0.419102 items / sec XY3P: 1018 / 28944 @ c=188, r=138, X158.570 Y73.485 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r138.jpg 1018 / 28944, ETA: 18:30:33.2021 @ 0.419100 items / sec XY3P: 1019 / 28944 @ c=187, r=138, X158.397 Y73.489 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r138.jpg 1019 / 28944, ETA: 18:30:31.0770 @ 0.419099 items / sec XY3P: 1020 / 28944 @ c=186, r=138, X158.224 Y73.493 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r138.jpg 1020 / 28944, ETA: 18:30:28.9933 @ 0.419097 items / sec XY3P: 1021 / 28944 @ c=185, r=138, X158.051 Y73.497 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r138.jpg 1021 / 28944, ETA: 18:30:26.9076 @ 0.419095 items / sec XY3P: 1022 / 28944 @ c=184, r=138, X157.879 Y73.501 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r138.jpg 1022 / 28944, ETA: 18:30:24.8320 @ 0.419093 items / sec XY3P: 1023 / 28944 @ c=183, r=138, X157.706 Y73.505 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r138.jpg 1023 / 28944, ETA: 18:30:22.7853 @ 0.419091 items / sec XY3P: 1024 / 28944 @ c=182, r=138, X157.533 Y73.509 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r138.jpg 1024 / 28944, ETA: 18:30:20.8319 @ 0.419088 items / sec XY3P: 1025 / 28944 @ c=181, r=138, X157.360 Y73.513 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r138.jpg 1025 / 28944, ETA: 18:30:18.5854 @ 0.419087 items / sec XY3P: 1026 / 28944 @ c=180, r=138, X157.188 Y73.517 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r138.jpg 1026 / 28944, ETA: 18:30:16.5025 @ 0.419085 items / sec XY3P: 1027 / 28944 @ c=179, r=138, X157.015 Y73.521 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r138.jpg 1027 / 28944, ETA: 18:30:14.4429 @ 0.419083 items / sec XY3P: 1028 / 28944 @ c=178, r=138, X156.842 Y73.525 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r138.jpg 1028 / 28944, ETA: 18:30:12.3728 @ 0.419081 items / sec XY3P: 1029 / 28944 @ c=177, r=138, X156.669 Y73.529 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r138.jpg 1029 / 28944, ETA: 18:30:10.2348 @ 0.419080 items / sec XY3P: 1030 / 28944 @ c=176, r=138, X156.497 Y73.533 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r138.jpg 1030 / 28944, ETA: 18:30:08.1564 @ 0.419078 items / sec XY3P: 1031 / 28944 @ c=175, r=138, X156.324 Y73.537 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r138.jpg 1031 / 28944, ETA: 18:30:06.0749 @ 0.419076 items / sec XY3P: 1032 / 28944 @ c=174, r=138, X156.151 Y73.541 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r138.jpg 1032 / 28944, ETA: 18:30:03.9807 @ 0.419074 items / sec XY3P: 1033 / 28944 @ c=173, r=138, X155.978 Y73.545 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r138.jpg 1033 / 28944, ETA: 18:29:56.5463 @ 0.419106 items / sec XY3P: 1034 / 28944 @ c=172, r=138, X155.806 Y73.549 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r138.jpg 1034 / 28944, ETA: 18:29:54.4110 @ 0.419104 items / sec XY3P: 1035 / 28944 @ c=171, r=138, X155.633 Y73.553 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r138.jpg 1035 / 28944, ETA: 18:29:52.4868 @ 0.419101 items / sec XY3P: 1036 / 28944 @ c=170, r=138, X155.460 Y73.557 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r138.jpg 1036 / 28944, ETA: 18:29:50.2200 @ 0.419101 items / sec XY3P: 1037 / 28944 @ c=169, r=138, X155.287 Y73.561 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r138.jpg 1037 / 28944, ETA: 18:29:48.1598 @ 0.419099 items / sec XY3P: 1038 / 28944 @ c=168, r=138, X155.115 Y73.565 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r138.jpg 1038 / 28944, ETA: 18:29:40.7420 @ 0.419130 items / sec XY3P: 1039 / 28944 @ c=167, r=138, X154.942 Y73.568 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r138.jpg 1039 / 28944, ETA: 18:29:38.6328 @ 0.419128 items / sec XY3P: 1040 / 28944 @ c=166, r=138, X154.769 Y73.572 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r138.jpg 1040 / 28944, ETA: 18:29:36.5459 @ 0.419127 items / sec XY3P: 1041 / 28944 @ c=165, r=138, X154.596 Y73.576 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r138.jpg 1041 / 28944, ETA: 18:29:34.4485 @ 0.419125 items / sec XY3P: 1042 / 28944 @ c=164, r=138, X154.424 Y73.580 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r138.jpg 1042 / 28944, ETA: 18:29:32.4318 @ 0.419122 items / sec XY3P: 1043 / 28944 @ c=163, r=138, X154.251 Y73.584 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r138.jpg 1043 / 28944, ETA: 18:29:30.2651 @ 0.419121 items / sec XY3P: 1044 / 28944 @ c=162, r=138, X154.078 Y73.588 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r138.jpg 1044 / 28944, ETA: 18:29:28.2059 @ 0.419119 items / sec XY3P: 1045 / 28944 @ c=161, r=138, X153.905 Y73.592 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r138.jpg 1045 / 28944, ETA: 18:29:26.1172 @ 0.419117 items / sec XY3P: 1046 / 28944 @ c=160, r=138, X153.733 Y73.596 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r138.jpg 1046 / 28944, ETA: 18:29:18.7181 @ 0.419149 items / sec XY3P: 1047 / 28944 @ c=159, r=138, X153.560 Y73.600 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r138.jpg 1047 / 28944, ETA: 18:29:16.6673 @ 0.419147 items / sec XY3P: 1048 / 28944 @ c=158, r=138, X153.387 Y73.604 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r138.jpg 1048 / 28944, ETA: 18:29:09.2360 @ 0.419178 items / sec XY3P: 1049 / 28944 @ c=157, r=138, X153.214 Y73.608 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r138.jpg 1049 / 28944, ETA: 18:29:07.1529 @ 0.419176 items / sec XY3P: 1050 / 28944 @ c=156, r=138, X153.042 Y73.612 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r138.jpg 1050 / 28944, ETA: 18:29:05.0803 @ 0.419174 items / sec XY3P: 1051 / 28944 @ c=155, r=138, X152.869 Y73.616 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r138.jpg 1051 / 28944, ETA: 18:29:03.0523 @ 0.419172 items / sec XY3P: 1052 / 28944 @ c=154, r=138, X152.696 Y73.620 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r138.jpg 1052 / 28944, ETA: 18:29:00.9171 @ 0.419171 items / sec XY3P: 1053 / 28944 @ c=153, r=138, X152.523 Y73.624 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r138.jpg 1053 / 28944, ETA: 18:28:58.8432 @ 0.419169 items / sec XY3P: 1054 / 28944 @ c=152, r=138, X152.351 Y73.628 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r138.jpg 1054 / 28944, ETA: 18:28:56.7619 @ 0.419167 items / sec XY3P: 1055 / 28944 @ c=151, r=138, X152.178 Y73.632 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r138.jpg 1055 / 28944, ETA: 18:28:54.7011 @ 0.419165 items / sec XY3P: 1056 / 28944 @ c=150, r=138, X152.005 Y73.636 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r138.jpg 1056 / 28944, ETA: 18:28:52.8331 @ 0.419161 items / sec XY3P: 1057 / 28944 @ c=149, r=138, X151.832 Y73.640 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r138.jpg 1057 / 28944, ETA: 18:28:50.5364 @ 0.419161 items / sec XY3P: 1058 / 28944 @ c=148, r=138, X151.660 Y73.644 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r138.jpg 1058 / 28944, ETA: 18:28:48.4507 @ 0.419159 items / sec XY3P: 1059 / 28944 @ c=147, r=138, X151.487 Y73.648 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r138.jpg 1059 / 28944, ETA: 18:28:46.3556 @ 0.419157 items / sec XY3P: 1060 / 28944 @ c=146, r=138, X151.314 Y73.652 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r138.jpg 1060 / 28944, ETA: 18:28:44.2772 @ 0.419155 items / sec XY3P: 1061 / 28944 @ c=145, r=138, X151.141 Y73.656 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r138.jpg 1061 / 28944, ETA: 18:28:42.2647 @ 0.419153 items / sec XY3P: 1062 / 28944 @ c=144, r=138, X150.969 Y73.660 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r138.jpg 1062 / 28944, ETA: 18:28:40.1205 @ 0.419151 items / sec XY3P: 1063 / 28944 @ c=143, r=138, X150.796 Y73.664 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r138.jpg 1063 / 28944, ETA: 18:28:38.1966 @ 0.419148 items / sec XY3P: 1064 / 28944 @ c=142, r=138, X150.623 Y73.668 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r138.jpg 1064 / 28944, ETA: 18:28:35.9538 @ 0.419148 items / sec XY3P: 1065 / 28944 @ c=141, r=138, X150.450 Y73.672 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r138.jpg 1065 / 28944, ETA: 18:28:33.8645 @ 0.419146 items / sec XY3P: 1066 / 28944 @ c=140, r=138, X150.278 Y73.676 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r138.jpg 1066 / 28944, ETA: 18:28:26.6060 @ 0.419176 items / sec XY3P: 1067 / 28944 @ c=139, r=138, X150.105 Y73.680 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r138.jpg 1067 / 28944, ETA: 18:28:24.5083 @ 0.419175 items / sec XY3P: 1068 / 28944 @ c=138, r=138, X149.932 Y73.683 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r138.jpg 1068 / 28944, ETA: 18:28:22.3767 @ 0.419173 items / sec XY3P: 1069 / 28944 @ c=137, r=138, X149.759 Y73.687 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r138.jpg 1069 / 28944, ETA: 18:28:20.3116 @ 0.419171 items / sec XY3P: 1070 / 28944 @ c=136, r=138, X149.587 Y73.691 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r138.jpg 1070 / 28944, ETA: 18:28:18.1985 @ 0.419169 items / sec XY3P: 1071 / 28944 @ c=135, r=138, X149.414 Y73.695 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r138.jpg 1071 / 28944, ETA: 18:28:16.1990 @ 0.419167 items / sec XY3P: 1072 / 28944 @ c=134, r=138, X149.241 Y73.699 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r138.jpg 1072 / 28944, ETA: 18:28:14.0569 @ 0.419165 items / sec XY3P: 1073 / 28944 @ c=133, r=138, X149.068 Y73.703 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r138.jpg 1073 / 28944, ETA: 18:28:11.9749 @ 0.419163 items / sec XY3P: 1074 / 28944 @ c=132, r=138, X148.896 Y73.707 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r138.jpg 1074 / 28944, ETA: 18:28:09.8849 @ 0.419162 items / sec XY3P: 1075 / 28944 @ c=131, r=138, X148.723 Y73.711 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r138.jpg 1075 / 28944, ETA: 18:28:07.7792 @ 0.419160 items / sec XY3P: 1076 / 28944 @ c=130, r=138, X148.550 Y73.715 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r138.jpg 1076 / 28944, ETA: 18:28:05.7675 @ 0.419157 items / sec XY3P: 1077 / 28944 @ c=129, r=138, X148.377 Y73.719 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r138.jpg 1077 / 28944, ETA: 18:28:03.6323 @ 0.419156 items / sec XY3P: 1078 / 28944 @ c=128, r=138, X148.205 Y73.723 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r138.jpg 1078 / 28944, ETA: 18:28:01.6912 @ 0.419153 items / sec XY3P: 1079 / 28944 @ c=127, r=138, X148.032 Y73.727 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r138.jpg 1079 / 28944, ETA: 18:27:59.4506 @ 0.419152 items / sec XY3P: 1080 / 28944 @ c=126, r=138, X147.859 Y73.731 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r138.jpg 1080 / 28944, ETA: 18:27:57.3591 @ 0.419150 items / sec XY3P: 1081 / 28944 @ c=125, r=138, X147.686 Y73.735 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r138.jpg 1081 / 28944, ETA: 18:27:55.4064 @ 0.419147 items / sec XY3P: 1082 / 28944 @ c=124, r=138, X147.514 Y73.739 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r138.jpg 1082 / 28944, ETA: 18:27:53.1703 @ 0.419147 items / sec XY3P: 1083 / 28944 @ c=123, r=138, X147.341 Y73.743 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r138.jpg 1083 / 28944, ETA: 18:27:51.1309 @ 0.419144 items / sec XY3P: 1084 / 28944 @ c=122, r=138, X147.168 Y73.747 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r138.jpg 1084 / 28944, ETA: 18:27:49.1258 @ 0.419142 items / sec XY3P: 1085 / 28944 @ c=121, r=138, X146.995 Y73.751 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r138.jpg 1085 / 28944, ETA: 18:27:46.9207 @ 0.419141 items / sec XY3P: 1086 / 28944 @ c=120, r=138, X146.823 Y73.755 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r138.jpg 1086 / 28944, ETA: 18:27:44.8092 @ 0.419139 items / sec XY3P: 1087 / 28944 @ c=119, r=138, X146.650 Y73.759 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r138.jpg 1087 / 28944, ETA: 18:27:42.7521 @ 0.419137 items / sec XY3P: 1088 / 28944 @ c=118, r=138, X146.477 Y73.763 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r138.jpg 1088 / 28944, ETA: 18:27:40.6262 @ 0.419135 items / sec XY3P: 1089 / 28944 @ c=117, r=138, X146.304 Y73.767 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r138.jpg 1089 / 28944, ETA: 18:27:38.5296 @ 0.419134 items / sec XY3P: 1090 / 28944 @ c=116, r=138, X146.132 Y73.771 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r138.jpg 1090 / 28944, ETA: 18:27:36.4824 @ 0.419131 items / sec XY3P: 1091 / 28944 @ c=115, r=138, X145.959 Y73.775 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r138.jpg 1091 / 28944, ETA: 18:27:34.3170 @ 0.419130 items / sec XY3P: 1092 / 28944 @ c=114, r=138, X145.786 Y73.779 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r138.jpg 1092 / 28944, ETA: 18:27:32.2369 @ 0.419128 items / sec XY3P: 1093 / 28944 @ c=113, r=138, X145.613 Y73.783 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r138.jpg 1093 / 28944, ETA: 18:27:30.1500 @ 0.419126 items / sec XY3P: 1094 / 28944 @ c=112, r=138, X145.441 Y73.787 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r138.jpg 1094 / 28944, ETA: 18:27:28.0518 @ 0.419124 items / sec XY3P: 1095 / 28944 @ c=111, r=138, X145.268 Y73.791 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r138.jpg 1095 / 28944, ETA: 18:27:26.0039 @ 0.419122 items / sec XY3P: 1096 / 28944 @ c=110, r=138, X145.095 Y73.794 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r138.jpg 1096 / 28944, ETA: 18:27:18.9586 @ 0.419152 items / sec XY3P: 1097 / 28944 @ c=109, r=138, X144.922 Y73.798 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r138.jpg 1097 / 28944, ETA: 18:27:16.6738 @ 0.419151 items / sec XY3P: 1098 / 28944 @ c=108, r=138, X144.750 Y73.802 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r138.jpg 1098 / 28944, ETA: 18:27:14.5903 @ 0.419149 items / sec XY3P: 1099 / 28944 @ c=107, r=138, X144.577 Y73.806 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r138.jpg 1099 / 28944, ETA: 18:27:12.4985 @ 0.419147 items / sec XY3P: 1100 / 28944 @ c=106, r=138, X144.404 Y73.810 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r138.jpg 1100 / 28944, ETA: 18:27:10.4314 @ 0.419145 items / sec XY3P: 1101 / 28944 @ c=105, r=138, X144.231 Y73.814 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r138.jpg 1101 / 28944, ETA: 18:27:08.3257 @ 0.419143 items / sec XY3P: 1102 / 28944 @ c=104, r=138, X144.059 Y73.818 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r138.jpg 1102 / 28944, ETA: 18:27:06.2141 @ 0.419142 items / sec XY3P: 1103 / 28944 @ c=103, r=138, X143.886 Y73.822 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r138.jpg 1103 / 28944, ETA: 18:27:04.1199 @ 0.419140 items / sec XY3P: 1104 / 28944 @ c=102, r=138, X143.713 Y73.826 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r138.jpg 1104 / 28944, ETA: 18:27:02.0179 @ 0.419138 items / sec XY3P: 1105 / 28944 @ c=101, r=138, X143.540 Y73.830 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r138.jpg 1105 / 28944, ETA: 18:26:59.9647 @ 0.419136 items / sec XY3P: 1106 / 28944 @ c=100, r=138, X143.368 Y73.834 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r138.jpg 1106 / 28944, ETA: 18:26:57.8030 @ 0.419135 items / sec XY3P: 1107 / 28944 @ c=99, r=138, X143.195 Y73.838 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r138.jpg 1107 / 28944, ETA: 18:26:55.7087 @ 0.419133 items / sec XY3P: 1108 / 28944 @ c=98, r=138, X143.022 Y73.842 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r138.jpg 1108 / 28944, ETA: 18:26:53.6154 @ 0.419131 items / sec XY3P: 1109 / 28944 @ c=97, r=138, X142.849 Y73.846 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r138.jpg 1109 / 28944, ETA: 18:26:51.5048 @ 0.419129 items / sec XY3P: 1110 / 28944 @ c=96, r=138, X142.677 Y73.850 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r138.jpg 1110 / 28944, ETA: 18:26:49.4755 @ 0.419127 items / sec XY3P: 1111 / 28944 @ c=95, r=138, X142.504 Y73.854 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r138.jpg 1111 / 28944, ETA: 18:26:47.2977 @ 0.419126 items / sec XY3P: 1112 / 28944 @ c=94, r=138, X142.331 Y73.858 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r138.jpg 1112 / 28944, ETA: 18:26:45.2068 @ 0.419124 items / sec XY3P: 1113 / 28944 @ c=93, r=138, X142.158 Y73.862 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r138.jpg 1113 / 28944, ETA: 18:26:43.1138 @ 0.419122 items / sec XY3P: 1114 / 28944 @ c=92, r=138, X141.986 Y73.866 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r138.jpg 1114 / 28944, ETA: 18:26:40.9888 @ 0.419120 items / sec XY3P: 1115 / 28944 @ c=91, r=138, X141.813 Y73.870 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r138.jpg 1115 / 28944, ETA: 18:26:38.9538 @ 0.419118 items / sec XY3P: 1116 / 28944 @ c=90, r=138, X141.640 Y73.874 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r138.jpg 1116 / 28944, ETA: 18:26:36.7910 @ 0.419117 items / sec XY3P: 1117 / 28944 @ c=89, r=138, X141.467 Y73.878 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r138.jpg 1117 / 28944, ETA: 18:26:34.6930 @ 0.419115 items / sec XY3P: 1118 / 28944 @ c=88, r=138, X141.295 Y73.882 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r138.jpg 1118 / 28944, ETA: 18:26:32.5845 @ 0.419113 items / sec XY3P: 1119 / 28944 @ c=87, r=138, X141.122 Y73.886 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r138.jpg 1119 / 28944, ETA: 18:26:30.5028 @ 0.419111 items / sec XY3P: 1120 / 28944 @ c=86, r=138, X140.949 Y73.890 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r138.jpg 1120 / 28944, ETA: 18:26:28.4352 @ 0.419109 items / sec XY3P: 1121 / 28944 @ c=85, r=138, X140.776 Y73.894 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r138.jpg 1121 / 28944, ETA: 18:26:26.2518 @ 0.419108 items / sec XY3P: 1122 / 28944 @ c=84, r=138, X140.604 Y73.898 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r138.jpg 1122 / 28944, ETA: 18:26:24.1611 @ 0.419106 items / sec XY3P: 1123 / 28944 @ c=83, r=138, X140.431 Y73.902 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r138.jpg 1123 / 28944, ETA: 18:26:22.0511 @ 0.419104 items / sec XY3P: 1124 / 28944 @ c=82, r=138, X140.258 Y73.906 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r138.jpg 1124 / 28944, ETA: 18:26:20.1060 @ 0.419101 items / sec XY3P: 1125 / 28944 @ c=81, r=138, X140.085 Y73.909 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r138.jpg 1125 / 28944, ETA: 18:26:17.8921 @ 0.419100 items / sec XY3P: 1126 / 28944 @ c=80, r=138, X139.913 Y73.913 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r138.jpg 1126 / 28944, ETA: 18:26:10.7953 @ 0.419130 items / sec XY3P: 1127 / 28944 @ c=79, r=138, X139.740 Y73.917 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r138.jpg 1127 / 28944, ETA: 18:26:08.8549 @ 0.419127 items / sec XY3P: 1128 / 28944 @ c=78, r=138, X139.567 Y73.921 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r138.jpg 1128 / 28944, ETA: 18:26:06.5826 @ 0.419127 items / sec XY3P: 1129 / 28944 @ c=77, r=138, X139.394 Y73.925 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r138.jpg 1129 / 28944, ETA: 18:26:04.5262 @ 0.419125 items / sec XY3P: 1130 / 28944 @ c=76, r=138, X139.222 Y73.929 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r138.jpg 1130 / 28944, ETA: 18:26:02.5186 @ 0.419122 items / sec XY3P: 1131 / 28944 @ c=75, r=138, X139.049 Y73.933 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r138.jpg 1131 / 28944, ETA: 18:26:00.2661 @ 0.419121 items / sec XY3P: 1132 / 28944 @ c=74, r=138, X138.876 Y73.937 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r138.jpg 1132 / 28944, ETA: 18:25:58.2877 @ 0.419119 items / sec XY3P: 1133 / 28944 @ c=73, r=138, X138.703 Y73.941 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r138.jpg 1133 / 28944, ETA: 18:25:56.0387 @ 0.419118 items / sec XY3P: 1134 / 28944 @ c=72, r=138, X138.531 Y73.945 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r138.jpg 1134 / 28944, ETA: 18:25:54.1275 @ 0.419115 items / sec XY3P: 1135 / 28944 @ c=71, r=138, X138.358 Y73.949 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r138.jpg 1135 / 28944, ETA: 18:25:51.8322 @ 0.419114 items / sec XY3P: 1136 / 28944 @ c=70, r=138, X138.185 Y73.953 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r138.jpg 1136 / 28944, ETA: 18:25:49.7253 @ 0.419113 items / sec XY3P: 1137 / 28944 @ c=69, r=138, X138.012 Y73.957 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r138.jpg 1137 / 28944, ETA: 18:25:47.7573 @ 0.419110 items / sec XY3P: 1138 / 28944 @ c=68, r=138, X137.840 Y73.961 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r138.jpg 1138 / 28944, ETA: 18:25:45.5039 @ 0.419109 items / sec XY3P: 1139 / 28944 @ c=67, r=138, X137.667 Y73.965 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r138.jpg 1139 / 28944, ETA: 18:25:43.5896 @ 0.419106 items / sec XY3P: 1140 / 28944 @ c=66, r=138, X137.494 Y73.969 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r138.jpg 1140 / 28944, ETA: 18:25:41.2827 @ 0.419106 items / sec XY3P: 1141 / 28944 @ c=65, r=138, X137.321 Y73.973 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r138.jpg 1141 / 28944, ETA: 18:25:39.1559 @ 0.419104 items / sec XY3P: 1142 / 28944 @ c=64, r=138, X137.149 Y73.977 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r138.jpg 1142 / 28944, ETA: 18:25:37.1691 @ 0.419101 items / sec XY3P: 1143 / 28944 @ c=63, r=138, X136.976 Y73.981 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r138.jpg 1143 / 28944, ETA: 18:25:34.9265 @ 0.419100 items / sec XY3P: 1144 / 28944 @ c=62, r=138, X136.803 Y73.985 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r138.jpg 1144 / 28944, ETA: 18:25:32.8549 @ 0.419098 items / sec XY3P: 1145 / 28944 @ c=61, r=138, X136.630 Y73.989 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r138.jpg 1145 / 28944, ETA: 18:25:30.6988 @ 0.419097 items / sec XY3P: 1146 / 28944 @ c=60, r=138, X136.458 Y73.993 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r138.jpg 1146 / 28944, ETA: 18:25:28.5898 @ 0.419095 items / sec XY3P: 1147 / 28944 @ c=59, r=138, X136.285 Y73.997 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r138.jpg 1147 / 28944, ETA: 18:25:26.4636 @ 0.419094 items / sec XY3P: 1148 / 28944 @ c=58, r=138, X136.112 Y74.001 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r138.jpg 1148 / 28944, ETA: 18:25:24.3658 @ 0.419092 items / sec XY3P: 1149 / 28944 @ c=57, r=138, X135.939 Y74.005 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r138.jpg 1149 / 28944, ETA: 18:25:22.2995 @ 0.419090 items / sec XY3P: 1150 / 28944 @ c=56, r=138, X135.767 Y74.009 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r138.jpg 1150 / 28944, ETA: 18:25:20.1216 @ 0.419088 items / sec XY3P: 1151 / 28944 @ c=55, r=138, X135.594 Y74.013 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r138.jpg 1151 / 28944, ETA: 18:25:18.0076 @ 0.419087 items / sec XY3P: 1152 / 28944 @ c=54, r=138, X135.421 Y74.017 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r138.jpg 1152 / 28944, ETA: 18:25:15.8636 @ 0.419085 items / sec XY3P: 1153 / 28944 @ c=53, r=138, X135.248 Y74.020 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r138.jpg 1153 / 28944, ETA: 18:25:13.7606 @ 0.419083 items / sec XY3P: 1154 / 28944 @ c=52, r=138, X135.076 Y74.024 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r138.jpg 1154 / 28944, ETA: 18:25:11.7090 @ 0.419081 items / sec XY3P: 1155 / 28944 @ c=51, r=138, X134.903 Y74.028 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r138.jpg 1155 / 28944, ETA: 18:25:09.5430 @ 0.419080 items / sec XY3P: 1156 / 28944 @ c=50, r=138, X134.730 Y74.032 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r138.jpg 1156 / 28944, ETA: 18:25:07.4450 @ 0.419078 items / sec XY3P: 1157 / 28944 @ c=49, r=138, X134.557 Y74.036 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r138.jpg 1157 / 28944, ETA: 18:25:05.4038 @ 0.419076 items / sec XY3P: 1158 / 28944 @ c=48, r=138, X134.385 Y74.040 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r138.jpg 1158 / 28944, ETA: 18:25:03.3307 @ 0.419074 items / sec XY3P: 1159 / 28944 @ c=47, r=138, X134.212 Y74.044 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r138.jpg 1159 / 28944, ETA: 18:25:01.0994 @ 0.419073 items / sec XY3P: 1160 / 28944 @ c=46, r=138, X134.039 Y74.048 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r138.jpg 1160 / 28944, ETA: 18:24:58.9424 @ 0.419072 items / sec XY3P: 1161 / 28944 @ c=45, r=138, X133.866 Y74.052 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r138.jpg 1161 / 28944, ETA: 18:24:56.8057 @ 0.419070 items / sec XY3P: 1162 / 28944 @ c=44, r=138, X133.694 Y74.056 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r138.jpg 1162 / 28944, ETA: 18:24:54.6982 @ 0.419068 items / sec XY3P: 1163 / 28944 @ c=43, r=138, X133.521 Y74.060 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r138.jpg 1163 / 28944, ETA: 18:24:47.9996 @ 0.419095 items / sec XY3P: 1164 / 28944 @ c=42, r=138, X133.348 Y74.064 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r138.jpg 1164 / 28944, ETA: 18:24:45.6816 @ 0.419095 items / sec XY3P: 1165 / 28944 @ c=41, r=138, X133.175 Y74.068 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r138.jpg 1165 / 28944, ETA: 18:24:43.5385 @ 0.419093 items / sec XY3P: 1166 / 28944 @ c=40, r=138, X133.003 Y74.072 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r138.jpg 1166 / 28944, ETA: 18:24:41.4528 @ 0.419092 items / sec XY3P: 1167 / 28944 @ c=39, r=138, X132.830 Y74.076 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r138.jpg 1167 / 28944, ETA: 18:24:39.3074 @ 0.419090 items / sec XY3P: 1168 / 28944 @ c=38, r=138, X132.657 Y74.080 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r138.jpg 1168 / 28944, ETA: 18:24:37.2117 @ 0.419088 items / sec XY3P: 1169 / 28944 @ c=37, r=138, X132.484 Y74.084 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r138.jpg 1169 / 28944, ETA: 18:24:35.0711 @ 0.419087 items / sec XY3P: 1170 / 28944 @ c=36, r=138, X132.312 Y74.088 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r138.jpg 1170 / 28944, ETA: 18:24:33.1103 @ 0.419084 items / sec XY3P: 1171 / 28944 @ c=35, r=138, X132.139 Y74.092 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r138.jpg 1171 / 28944, ETA: 18:24:30.8201 @ 0.419083 items / sec XY3P: 1172 / 28944 @ c=34, r=138, X131.966 Y74.096 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r138.jpg 1172 / 28944, ETA: 18:24:28.6930 @ 0.419082 items / sec XY3P: 1173 / 28944 @ c=33, r=138, X131.793 Y74.100 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r138.jpg 1173 / 28944, ETA: 18:24:26.6028 @ 0.419080 items / sec XY3P: 1174 / 28944 @ c=32, r=138, X131.621 Y74.104 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r138.jpg 1174 / 28944, ETA: 18:24:24.4656 @ 0.419078 items / sec XY3P: 1175 / 28944 @ c=31, r=138, X131.448 Y74.108 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r138.jpg 1175 / 28944, ETA: 18:24:22.3307 @ 0.419077 items / sec XY3P: 1176 / 28944 @ c=30, r=138, X131.275 Y74.112 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r138.jpg 1176 / 28944, ETA: 18:24:20.2156 @ 0.419075 items / sec XY3P: 1177 / 28944 @ c=29, r=138, X131.102 Y74.116 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r138.jpg 1177 / 28944, ETA: 18:24:18.0810 @ 0.419073 items / sec XY3P: 1178 / 28944 @ c=28, r=138, X130.930 Y74.120 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r138.jpg 1178 / 28944, ETA: 18:24:15.9833 @ 0.419072 items / sec XY3P: 1179 / 28944 @ c=27, r=138, X130.757 Y74.124 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r138.jpg 1179 / 28944, ETA: 18:24:13.8124 @ 0.419070 items / sec XY3P: 1180 / 28944 @ c=26, r=138, X130.584 Y74.128 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r138.jpg 1180 / 28944, ETA: 18:24:11.7046 @ 0.419068 items / sec XY3P: 1181 / 28944 @ c=25, r=138, X130.411 Y74.132 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r138.jpg 1181 / 28944, ETA: 18:24:09.5735 @ 0.419067 items / sec XY3P: 1182 / 28944 @ c=24, r=138, X130.239 Y74.135 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r138.jpg 1182 / 28944, ETA: 18:24:07.4485 @ 0.419065 items / sec XY3P: 1183 / 28944 @ c=23, r=138, X130.066 Y74.139 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r138.jpg 1183 / 28944, ETA: 18:24:05.3329 @ 0.419063 items / sec XY3P: 1184 / 28944 @ c=22, r=138, X129.893 Y74.143 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r138.jpg 1184 / 28944, ETA: 18:24:03.1862 @ 0.419062 items / sec XY3P: 1185 / 28944 @ c=21, r=138, X129.720 Y74.147 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r138.jpg 1185 / 28944, ETA: 18:24:01.0557 @ 0.419060 items / sec XY3P: 1186 / 28944 @ c=20, r=138, X129.548 Y74.151 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r138.jpg 1186 / 28944, ETA: 18:23:58.9134 @ 0.419059 items / sec XY3P: 1187 / 28944 @ c=19, r=138, X129.375 Y74.155 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r138.jpg 1187 / 28944, ETA: 18:23:56.7988 @ 0.419057 items / sec XY3P: 1188 / 28944 @ c=18, r=138, X129.202 Y74.159 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r138.jpg 1188 / 28944, ETA: 18:23:54.6929 @ 0.419055 items / sec XY3P: 1189 / 28944 @ c=17, r=138, X129.029 Y74.163 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r138.jpg 1189 / 28944, ETA: 18:23:52.5446 @ 0.419054 items / sec XY3P: 1190 / 28944 @ c=16, r=138, X128.857 Y74.167 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r138.jpg 1190 / 28944, ETA: 18:23:50.4039 @ 0.419052 items / sec XY3P: 1191 / 28944 @ c=15, r=138, X128.684 Y74.171 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r138.jpg 1191 / 28944, ETA: 18:23:48.2797 @ 0.419051 items / sec XY3P: 1192 / 28944 @ c=14, r=138, X128.511 Y74.175 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r138.jpg 1192 / 28944, ETA: 18:23:46.1488 @ 0.419049 items / sec XY3P: 1193 / 28944 @ c=13, r=138, X128.338 Y74.179 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r138.jpg 1193 / 28944, ETA: 18:23:44.1899 @ 0.419046 items / sec XY3P: 1194 / 28944 @ c=12, r=138, X128.166 Y74.183 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r138.jpg 1194 / 28944, ETA: 18:23:41.8710 @ 0.419046 items / sec XY3P: 1195 / 28944 @ c=11, r=138, X127.993 Y74.187 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r138.jpg 1195 / 28944, ETA: 18:23:39.7464 @ 0.419044 items / sec XY3P: 1196 / 28944 @ c=10, r=138, X127.820 Y74.191 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r138.jpg 1196 / 28944, ETA: 18:23:37.6130 @ 0.419043 items / sec XY3P: 1197 / 28944 @ c=9, r=138, X127.647 Y74.195 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r138.jpg 1197 / 28944, ETA: 18:23:35.4775 @ 0.419041 items / sec XY3P: 1198 / 28944 @ c=8, r=138, X127.475 Y74.199 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r138.jpg 1198 / 28944, ETA: 18:23:33.3812 @ 0.419039 items / sec XY3P: 1199 / 28944 @ c=7, r=138, X127.302 Y74.203 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r138.jpg 1199 / 28944, ETA: 18:23:31.1992 @ 0.419038 items / sec XY3P: 1200 / 28944 @ c=6, r=138, X127.129 Y74.207 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r138.jpg 1200 / 28944, ETA: 18:23:29.2233 @ 0.419035 items / sec XY3P: 1201 / 28944 @ c=5, r=138, X126.956 Y74.211 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r138.jpg 1201 / 28944, ETA: 18:23:26.9354 @ 0.419035 items / sec XY3P: 1202 / 28944 @ c=4, r=138, X126.784 Y74.215 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r138.jpg 1202 / 28944, ETA: 18:23:24.7999 @ 0.419033 items / sec XY3P: 1203 / 28944 @ c=3, r=138, X126.611 Y74.219 Z-15.193 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r138.jpg 1203 / 28944, ETA: 18:23:22.7045 @ 0.419031 items / sec XY3P: 1204 / 28944 @ c=2, r=138, X126.438 Y74.223 Z-15.193 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r138.jpg 1204 / 28944, ETA: 18:23:20.5168 @ 0.419030 items / sec XY3P: 1205 / 28944 @ c=1, r=138, X126.265 Y74.227 Z-15.194 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r138.jpg 1205 / 28944, ETA: 18:23:18.3986 @ 0.419028 items / sec XY3P: 1206 / 28944 @ c=0, r=138, X126.093 Y74.231 Z-15.194 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r138.jpg 1206 / 28944, ETA: 18:23:16.4206 @ 0.419026 items / sec XY3P: 1207 / 28944 @ c=0, r=137, X126.097 Y74.403 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r137.jpg 1207 / 28944, ETA: 18:23:14.2569 @ 0.419024 items / sec XY3P: 1208 / 28944 @ c=1, r=137, X126.270 Y74.399 Z-15.192 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r137.jpg 1208 / 28944, ETA: 18:23:12.0020 @ 0.419023 items / sec XY3P: 1209 / 28944 @ c=2, r=137, X126.443 Y74.395 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r137.jpg 1209 / 28944, ETA: 18:23:09.8247 @ 0.419022 items / sec XY3P: 1210 / 28944 @ c=3, r=137, X126.616 Y74.391 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r137.jpg 1210 / 28944, ETA: 18:23:07.6906 @ 0.419021 items / sec XY3P: 1211 / 28944 @ c=4, r=137, X126.788 Y74.388 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r137.jpg 1211 / 28944, ETA: 18:23:05.5400 @ 0.419019 items / sec XY3P: 1212 / 28944 @ c=5, r=137, X126.961 Y74.384 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r137.jpg 1212 / 28944, ETA: 18:23:03.5698 @ 0.419016 items / sec XY3P: 1213 / 28944 @ c=6, r=137, X127.134 Y74.380 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r137.jpg 1213 / 28944, ETA: 18:23:01.3106 @ 0.419016 items / sec XY3P: 1214 / 28944 @ c=7, r=137, X127.307 Y74.376 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r137.jpg 1214 / 28944, ETA: 18:22:54.5572 @ 0.419043 items / sec XY3P: 1215 / 28944 @ c=8, r=137, X127.479 Y74.372 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r137.jpg 1215 / 28944, ETA: 18:22:47.8619 @ 0.419071 items / sec XY3P: 1216 / 28944 @ c=9, r=137, X127.652 Y74.368 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r137.jpg 1216 / 28944, ETA: 18:22:45.7600 @ 0.419069 items / sec XY3P: 1217 / 28944 @ c=10, r=137, X127.825 Y74.364 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r137.jpg 1217 / 28944, ETA: 18:22:43.6333 @ 0.419067 items / sec XY3P: 1218 / 28944 @ c=11, r=137, X127.998 Y74.360 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r137.jpg 1218 / 28944, ETA: 18:22:41.4579 @ 0.419066 items / sec XY3P: 1219 / 28944 @ c=12, r=137, X128.170 Y74.356 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r137.jpg 1219 / 28944, ETA: 18:22:39.3283 @ 0.419064 items / sec XY3P: 1220 / 28944 @ c=13, r=137, X128.343 Y74.352 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r137.jpg 1220 / 28944, ETA: 18:22:37.1950 @ 0.419063 items / sec XY3P: 1221 / 28944 @ c=14, r=137, X128.516 Y74.348 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r137.jpg 1221 / 28944, ETA: 18:22:35.0533 @ 0.419061 items / sec XY3P: 1222 / 28944 @ c=15, r=137, X128.689 Y74.344 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r137.jpg 1222 / 28944, ETA: 18:22:32.9485 @ 0.419059 items / sec XY3P: 1223 / 28944 @ c=16, r=137, X128.861 Y74.340 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r137.jpg 1223 / 28944, ETA: 18:22:30.7879 @ 0.419058 items / sec XY3P: 1224 / 28944 @ c=17, r=137, X129.034 Y74.336 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r137.jpg 1224 / 28944, ETA: 18:22:28.6473 @ 0.419056 items / sec XY3P: 1225 / 28944 @ c=18, r=137, X129.207 Y74.332 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r137.jpg 1225 / 28944, ETA: 18:22:26.6406 @ 0.419054 items / sec XY3P: 1226 / 28944 @ c=19, r=137, X129.380 Y74.328 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r137.jpg 1226 / 28944, ETA: 18:22:24.3635 @ 0.419053 items / sec XY3P: 1227 / 28944 @ c=20, r=137, X129.552 Y74.324 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r137.jpg 1227 / 28944, ETA: 18:22:22.2653 @ 0.419051 items / sec XY3P: 1228 / 28944 @ c=21, r=137, X129.725 Y74.320 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r137.jpg 1228 / 28944, ETA: 18:22:20.0994 @ 0.419050 items / sec XY3P: 1229 / 28944 @ c=22, r=137, X129.898 Y74.316 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r137.jpg 1229 / 28944, ETA: 18:22:18.0258 @ 0.419048 items / sec XY3P: 1230 / 28944 @ c=23, r=137, X130.071 Y74.312 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r137.jpg 1230 / 28944, ETA: 18:22:15.8570 @ 0.419047 items / sec XY3P: 1231 / 28944 @ c=24, r=137, X130.243 Y74.308 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r137.jpg 1231 / 28944, ETA: 18:22:13.7899 @ 0.419044 items / sec XY3P: 1232 / 28944 @ c=25, r=137, X130.416 Y74.304 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r137.jpg 1232 / 28944, ETA: 18:22:11.5590 @ 0.419044 items / sec XY3P: 1233 / 28944 @ c=26, r=137, X130.589 Y74.300 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r137.jpg 1233 / 28944, ETA: 18:22:09.3841 @ 0.419042 items / sec XY3P: 1234 / 28944 @ c=27, r=137, X130.762 Y74.296 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r137.jpg 1234 / 28944, ETA: 18:22:07.2744 @ 0.419040 items / sec XY3P: 1235 / 28944 @ c=28, r=137, X130.934 Y74.292 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r137.jpg 1235 / 28944, ETA: 18:22:05.0913 @ 0.419039 items / sec XY3P: 1236 / 28944 @ c=29, r=137, X131.107 Y74.288 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r137.jpg 1236 / 28944, ETA: 18:22:02.9443 @ 0.419038 items / sec XY3P: 1237 / 28944 @ c=30, r=137, X131.280 Y74.284 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r137.jpg 1237 / 28944, ETA: 18:22:00.8389 @ 0.419036 items / sec XY3P: 1238 / 28944 @ c=31, r=137, X131.453 Y74.280 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r137.jpg 1238 / 28944, ETA: 18:21:58.6632 @ 0.419034 items / sec XY3P: 1239 / 28944 @ c=32, r=137, X131.625 Y74.276 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r137.jpg 1239 / 28944, ETA: 18:21:56.5165 @ 0.419033 items / sec XY3P: 1240 / 28944 @ c=33, r=137, X131.798 Y74.273 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r137.jpg 1240 / 28944, ETA: 18:21:54.3542 @ 0.419032 items / sec XY3P: 1241 / 28944 @ c=34, r=137, X131.971 Y74.269 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r137.jpg 1241 / 28944, ETA: 18:21:52.2201 @ 0.419030 items / sec XY3P: 1242 / 28944 @ c=35, r=137, X132.144 Y74.265 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r137.jpg 1242 / 28944, ETA: 18:21:50.1275 @ 0.419028 items / sec XY3P: 1243 / 28944 @ c=36, r=137, X132.316 Y74.261 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r137.jpg 1243 / 28944, ETA: 18:21:47.9263 @ 0.419027 items / sec XY3P: 1244 / 28944 @ c=37, r=137, X132.489 Y74.257 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r137.jpg 1244 / 28944, ETA: 18:21:45.7753 @ 0.419025 items / sec XY3P: 1245 / 28944 @ c=38, r=137, X132.662 Y74.253 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r137.jpg 1245 / 28944, ETA: 18:21:43.6329 @ 0.419024 items / sec XY3P: 1246 / 28944 @ c=39, r=137, X132.835 Y74.249 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r137.jpg 1246 / 28944, ETA: 18:21:41.4951 @ 0.419022 items / sec XY3P: 1247 / 28944 @ c=40, r=137, X133.007 Y74.245 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r137.jpg 1247 / 28944, ETA: 18:21:39.4086 @ 0.419020 items / sec XY3P: 1248 / 28944 @ c=41, r=137, X133.180 Y74.241 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r137.jpg 1248 / 28944, ETA: 18:21:37.2047 @ 0.419019 items / sec XY3P: 1249 / 28944 @ c=42, r=137, X133.353 Y74.237 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r137.jpg 1249 / 28944, ETA: 18:21:35.0454 @ 0.419018 items / sec XY3P: 1250 / 28944 @ c=43, r=137, X133.526 Y74.233 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r137.jpg 1250 / 28944, ETA: 18:21:28.4761 @ 0.419044 items / sec XY3P: 1251 / 28944 @ c=44, r=137, X133.698 Y74.229 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r137.jpg 1251 / 28944, ETA: 18:21:21.9498 @ 0.419071 items / sec XY3P: 1252 / 28944 @ c=45, r=137, X133.871 Y74.225 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r137.jpg 1252 / 28944, ETA: 18:21:15.3513 @ 0.419097 items / sec XY3P: 1253 / 28944 @ c=46, r=137, X134.044 Y74.221 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r137.jpg 1253 / 28944, ETA: 18:21:13.2157 @ 0.419096 items / sec XY3P: 1254 / 28944 @ c=47, r=137, X134.217 Y74.217 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r137.jpg 1254 / 28944, ETA: 18:21:11.0679 @ 0.419094 items / sec XY3P: 1255 / 28944 @ c=48, r=137, X134.389 Y74.213 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r137.jpg 1255 / 28944, ETA: 18:21:08.9705 @ 0.419092 items / sec XY3P: 1256 / 28944 @ c=49, r=137, X134.562 Y74.209 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r137.jpg 1256 / 28944, ETA: 18:21:06.7888 @ 0.419091 items / sec XY3P: 1257 / 28944 @ c=50, r=137, X134.735 Y74.205 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r137.jpg 1257 / 28944, ETA: 18:21:04.7794 @ 0.419089 items / sec XY3P: 1258 / 28944 @ c=51, r=137, X134.908 Y74.201 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r137.jpg 1258 / 28944, ETA: 18:21:02.5170 @ 0.419088 items / sec XY3P: 1259 / 28944 @ c=52, r=137, X135.080 Y74.197 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r137.jpg 1259 / 28944, ETA: 18:21:00.3655 @ 0.419086 items / sec XY3P: 1260 / 28944 @ c=53, r=137, X135.253 Y74.193 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r137.jpg 1260 / 28944, ETA: 18:20:58.2608 @ 0.419085 items / sec XY3P: 1261 / 28944 @ c=54, r=137, X135.426 Y74.189 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r137.jpg 1261 / 28944, ETA: 18:20:56.0818 @ 0.419083 items / sec XY3P: 1262 / 28944 @ c=55, r=137, X135.599 Y74.185 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r137.jpg 1262 / 28944, ETA: 18:20:53.9580 @ 0.419082 items / sec XY3P: 1263 / 28944 @ c=56, r=137, X135.771 Y74.181 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r137.jpg 1263 / 28944, ETA: 18:20:51.7845 @ 0.419080 items / sec XY3P: 1264 / 28944 @ c=57, r=137, X135.944 Y74.177 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r137.jpg 1264 / 28944, ETA: 18:20:49.7870 @ 0.419078 items / sec XY3P: 1265 / 28944 @ c=58, r=137, X136.117 Y74.173 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r137.jpg 1265 / 28944, ETA: 18:20:47.5533 @ 0.419077 items / sec XY3P: 1266 / 28944 @ c=59, r=137, X136.290 Y74.169 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r137.jpg 1266 / 28944, ETA: 18:20:45.3628 @ 0.419076 items / sec XY3P: 1267 / 28944 @ c=60, r=137, X136.462 Y74.165 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r137.jpg 1267 / 28944, ETA: 18:20:43.2310 @ 0.419074 items / sec XY3P: 1268 / 28944 @ c=61, r=137, X136.635 Y74.161 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r137.jpg 1268 / 28944, ETA: 18:20:41.0830 @ 0.419072 items / sec XY3P: 1269 / 28944 @ c=62, r=137, X136.808 Y74.158 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r137.jpg 1269 / 28944, ETA: 18:20:34.5720 @ 0.419099 items / sec XY3P: 1270 / 28944 @ c=63, r=137, X136.981 Y74.154 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r137.jpg 1270 / 28944, ETA: 18:20:28.0840 @ 0.419125 items / sec XY3P: 1271 / 28944 @ c=64, r=137, X137.153 Y74.150 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r137.jpg 1271 / 28944, ETA: 18:20:21.6220 @ 0.419151 items / sec XY3P: 1272 / 28944 @ c=65, r=137, X137.326 Y74.146 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r137.jpg 1272 / 28944, ETA: 18:20:19.4592 @ 0.419149 items / sec XY3P: 1273 / 28944 @ c=66, r=137, X137.499 Y74.142 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r137.jpg 1273 / 28944, ETA: 18:20:17.3274 @ 0.419148 items / sec XY3P: 1274 / 28944 @ c=67, r=137, X137.672 Y74.138 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r137.jpg 1274 / 28944, ETA: 18:20:15.2253 @ 0.419146 items / sec XY3P: 1275 / 28944 @ c=68, r=137, X137.844 Y74.134 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r137.jpg 1275 / 28944, ETA: 18:20:13.0769 @ 0.419144 items / sec XY3P: 1276 / 28944 @ c=69, r=137, X138.017 Y74.130 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r137.jpg 1276 / 28944, ETA: 18:20:10.9004 @ 0.419143 items / sec XY3P: 1277 / 28944 @ c=70, r=137, X138.190 Y74.126 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r137.jpg 1277 / 28944, ETA: 18:20:08.7651 @ 0.419141 items / sec XY3P: 1278 / 28944 @ c=71, r=137, X138.363 Y74.122 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r137.jpg 1278 / 28944, ETA: 18:20:06.6312 @ 0.419140 items / sec XY3P: 1279 / 28944 @ c=72, r=137, X138.535 Y74.118 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r137.jpg 1279 / 28944, ETA: 18:20:04.5320 @ 0.419138 items / sec XY3P: 1280 / 28944 @ c=73, r=137, X138.708 Y74.114 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r137.jpg 1280 / 28944, ETA: 18:20:02.3515 @ 0.419137 items / sec XY3P: 1281 / 28944 @ c=74, r=137, X138.881 Y74.110 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r137.jpg 1281 / 28944, ETA: 18:20:00.2121 @ 0.419135 items / sec XY3P: 1282 / 28944 @ c=75, r=137, X139.054 Y74.106 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r137.jpg 1282 / 28944, ETA: 18:19:58.0584 @ 0.419134 items / sec XY3P: 1283 / 28944 @ c=76, r=137, X139.226 Y74.102 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r137.jpg 1283 / 28944, ETA: 18:19:55.9430 @ 0.419132 items / sec XY3P: 1284 / 28944 @ c=77, r=137, X139.399 Y74.098 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r137.jpg 1284 / 28944, ETA: 18:19:53.8336 @ 0.419130 items / sec XY3P: 1285 / 28944 @ c=78, r=137, X139.572 Y74.094 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r137.jpg 1285 / 28944, ETA: 18:19:51.6624 @ 0.419129 items / sec XY3P: 1286 / 28944 @ c=79, r=137, X139.745 Y74.090 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r137.jpg 1286 / 28944, ETA: 18:19:53.8004 @ 0.419100 items / sec XY3P: 1287 / 28944 @ c=80, r=137, X139.917 Y74.086 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r137.jpg 1287 / 28944, ETA: 18:19:51.6733 @ 0.419098 items / sec XY3P: 1288 / 28944 @ c=81, r=137, X140.090 Y74.082 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r137.jpg 1288 / 28944, ETA: 18:19:45.2249 @ 0.419124 items / sec XY3P: 1289 / 28944 @ c=82, r=137, X140.263 Y74.078 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r137.jpg 1289 / 28944, ETA: 18:19:38.7917 @ 0.419150 items / sec XY3P: 1290 / 28944 @ c=83, r=137, X140.436 Y74.074 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r137.jpg 1290 / 28944, ETA: 18:19:36.6571 @ 0.419148 items / sec XY3P: 1291 / 28944 @ c=84, r=137, X140.608 Y74.070 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r137.jpg 1291 / 28944, ETA: 18:19:34.4938 @ 0.419147 items / sec XY3P: 1292 / 28944 @ c=85, r=137, X140.781 Y74.066 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r137.jpg 1292 / 28944, ETA: 18:19:32.3776 @ 0.419145 items / sec XY3P: 1293 / 28944 @ c=86, r=137, X140.954 Y74.062 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r137.jpg 1293 / 28944, ETA: 18:19:30.2749 @ 0.419143 items / sec XY3P: 1294 / 28944 @ c=87, r=137, X141.127 Y74.058 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r137.jpg 1294 / 28944, ETA: 18:19:28.1104 @ 0.419142 items / sec XY3P: 1295 / 28944 @ c=88, r=137, X141.299 Y74.054 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r137.jpg 1295 / 28944, ETA: 18:19:25.9535 @ 0.419140 items / sec XY3P: 1296 / 28944 @ c=89, r=137, X141.472 Y74.050 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r137.jpg 1296 / 28944, ETA: 18:19:23.8139 @ 0.419139 items / sec XY3P: 1297 / 28944 @ c=90, r=137, X141.645 Y74.047 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r137.jpg 1297 / 28944, ETA: 18:19:21.6412 @ 0.419138 items / sec XY3P: 1298 / 28944 @ c=91, r=137, X141.818 Y74.043 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r137.jpg 1298 / 28944, ETA: 18:19:19.5510 @ 0.419136 items / sec XY3P: 1299 / 28944 @ c=92, r=137, X141.990 Y74.039 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r137.jpg 1299 / 28944, ETA: 18:19:17.3822 @ 0.419134 items / sec XY3P: 1300 / 28944 @ c=93, r=137, X142.163 Y74.035 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r137.jpg 1300 / 28944, ETA: 18:19:15.2576 @ 0.419133 items / sec XY3P: 1301 / 28944 @ c=94, r=137, X142.336 Y74.031 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r137.jpg 1301 / 28944, ETA: 18:19:13.1224 @ 0.419131 items / sec XY3P: 1302 / 28944 @ c=95, r=137, X142.509 Y74.027 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r137.jpg 1302 / 28944, ETA: 18:19:10.9691 @ 0.419130 items / sec XY3P: 1303 / 28944 @ c=96, r=137, X142.681 Y74.023 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r137.jpg 1303 / 28944, ETA: 18:19:08.9079 @ 0.419127 items / sec XY3P: 1304 / 28944 @ c=97, r=137, X142.854 Y74.019 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r137.jpg 1304 / 28944, ETA: 18:19:06.7420 @ 0.419126 items / sec XY3P: 1305 / 28944 @ c=98, r=137, X143.027 Y74.015 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r137.jpg 1305 / 28944, ETA: 18:19:04.5014 @ 0.419125 items / sec XY3P: 1306 / 28944 @ c=99, r=137, X143.200 Y74.011 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r137.jpg 1306 / 28944, ETA: 18:19:02.3702 @ 0.419124 items / sec XY3P: 1307 / 28944 @ c=100, r=137, X143.372 Y74.007 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r137.jpg 1307 / 28944, ETA: 18:19:00.2306 @ 0.419122 items / sec XY3P: 1308 / 28944 @ c=101, r=137, X143.545 Y74.003 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r137.jpg 1308 / 28944, ETA: 18:18:58.1380 @ 0.419120 items / sec XY3P: 1309 / 28944 @ c=102, r=137, X143.718 Y73.999 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r137.jpg 1309 / 28944, ETA: 18:18:55.9379 @ 0.419119 items / sec XY3P: 1310 / 28944 @ c=103, r=137, X143.891 Y73.995 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r137.jpg 1310 / 28944, ETA: 18:18:53.7849 @ 0.419117 items / sec XY3P: 1311 / 28944 @ c=104, r=137, X144.063 Y73.991 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r137.jpg 1311 / 28944, ETA: 18:18:51.6304 @ 0.419116 items / sec XY3P: 1312 / 28944 @ c=105, r=137, X144.236 Y73.987 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r137.jpg 1312 / 28944, ETA: 18:18:49.4752 @ 0.419115 items / sec XY3P: 1313 / 28944 @ c=106, r=137, X144.409 Y73.983 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r137.jpg 1313 / 28944, ETA: 18:18:47.3823 @ 0.419113 items / sec XY3P: 1314 / 28944 @ c=107, r=137, X144.582 Y73.979 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r137.jpg 1314 / 28944, ETA: 18:18:45.1902 @ 0.419111 items / sec XY3P: 1315 / 28944 @ c=108, r=137, X144.754 Y73.975 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r137.jpg 1315 / 28944, ETA: 18:18:43.0453 @ 0.419110 items / sec XY3P: 1316 / 28944 @ c=109, r=137, X144.927 Y73.971 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r137.jpg 1316 / 28944, ETA: 18:18:40.8989 @ 0.419108 items / sec XY3P: 1317 / 28944 @ c=110, r=137, X145.100 Y73.967 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r137.jpg 1317 / 28944, ETA: 18:18:38.7478 @ 0.419107 items / sec XY3P: 1318 / 28944 @ c=111, r=137, X145.273 Y73.963 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r137.jpg 1318 / 28944, ETA: 18:18:36.6272 @ 0.419105 items / sec XY3P: 1319 / 28944 @ c=112, r=137, X145.445 Y73.959 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r137.jpg 1319 / 28944, ETA: 18:18:34.4242 @ 0.419104 items / sec XY3P: 1320 / 28944 @ c=113, r=137, X145.618 Y73.955 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r137.jpg 1320 / 28944, ETA: 18:18:32.4132 @ 0.419102 items / sec XY3P: 1321 / 28944 @ c=114, r=137, X145.791 Y73.951 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r137.jpg 1321 / 28944, ETA: 18:18:30.1413 @ 0.419101 items / sec XY3P: 1322 / 28944 @ c=115, r=137, X145.964 Y73.947 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r137.jpg 1322 / 28944, ETA: 18:18:27.9881 @ 0.419099 items / sec XY3P: 1323 / 28944 @ c=116, r=137, X146.136 Y73.943 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r137.jpg 1323 / 28944, ETA: 18:18:25.8700 @ 0.419098 items / sec XY3P: 1324 / 28944 @ c=117, r=137, X146.309 Y73.939 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r137.jpg 1324 / 28944, ETA: 18:18:23.6774 @ 0.419096 items / sec XY3P: 1325 / 28944 @ c=118, r=137, X146.482 Y73.935 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r137.jpg 1325 / 28944, ETA: 18:18:17.3682 @ 0.419121 items / sec XY3P: 1326 / 28944 @ c=119, r=137, X146.655 Y73.932 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r137.jpg 1326 / 28944, ETA: 18:18:11.0441 @ 0.419146 items / sec XY3P: 1327 / 28944 @ c=120, r=137, X146.827 Y73.928 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r137.jpg 1327 / 28944, ETA: 18:18:04.7434 @ 0.419171 items / sec XY3P: 1328 / 28944 @ c=121, r=137, X147.000 Y73.924 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r137.jpg 1328 / 28944, ETA: 18:18:02.6010 @ 0.419170 items / sec XY3P: 1329 / 28944 @ c=122, r=137, X147.173 Y73.920 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r137.jpg 1329 / 28944, ETA: 18:18:00.4479 @ 0.419168 items / sec XY3P: 1330 / 28944 @ c=123, r=137, X147.346 Y73.916 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r137.jpg 1330 / 28944, ETA: 18:17:58.4325 @ 0.419166 items / sec XY3P: 1331 / 28944 @ c=124, r=137, X147.518 Y73.912 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r137.jpg 1331 / 28944, ETA: 18:17:56.1926 @ 0.419165 items / sec XY3P: 1332 / 28944 @ c=125, r=137, X147.691 Y73.908 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r137.jpg 1332 / 28944, ETA: 18:17:54.1414 @ 0.419163 items / sec XY3P: 1333 / 28944 @ c=126, r=137, X147.864 Y73.904 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r137.jpg 1333 / 28944, ETA: 18:17:51.8743 @ 0.419162 items / sec XY3P: 1334 / 28944 @ c=127, r=137, X148.037 Y73.900 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r137.jpg 1334 / 28944, ETA: 18:17:49.7321 @ 0.419161 items / sec XY3P: 1335 / 28944 @ c=128, r=137, X148.209 Y73.896 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r137.jpg 1335 / 28944, ETA: 18:17:47.5807 @ 0.419159 items / sec XY3P: 1336 / 28944 @ c=129, r=137, X148.382 Y73.892 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r137.jpg 1336 / 28944, ETA: 18:17:45.4688 @ 0.419157 items / sec XY3P: 1337 / 28944 @ c=130, r=137, X148.555 Y73.888 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r137.jpg 1337 / 28944, ETA: 18:17:43.2999 @ 0.419156 items / sec XY3P: 1338 / 28944 @ c=131, r=137, X148.728 Y73.884 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r137.jpg 1338 / 28944, ETA: 18:17:41.1338 @ 0.419155 items / sec XY3P: 1339 / 28944 @ c=132, r=137, X148.900 Y73.880 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r137.jpg 1339 / 28944, ETA: 18:17:39.1116 @ 0.419152 items / sec XY3P: 1340 / 28944 @ c=133, r=137, X149.073 Y73.876 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r137.jpg 1340 / 28944, ETA: 18:17:36.8461 @ 0.419152 items / sec XY3P: 1341 / 28944 @ c=134, r=137, X149.246 Y73.872 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r137.jpg 1341 / 28944, ETA: 18:17:34.7357 @ 0.419150 items / sec XY3P: 1342 / 28944 @ c=135, r=137, X149.419 Y73.868 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r137.jpg 1342 / 28944, ETA: 18:17:32.5485 @ 0.419149 items / sec XY3P: 1343 / 28944 @ c=136, r=137, X149.591 Y73.864 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r137.jpg 1343 / 28944, ETA: 18:17:30.3982 @ 0.419147 items / sec XY3P: 1344 / 28944 @ c=137, r=137, X149.764 Y73.860 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r137.jpg 1344 / 28944, ETA: 18:17:24.1457 @ 0.419172 items / sec XY3P: 1345 / 28944 @ c=138, r=137, X149.937 Y73.856 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r137.jpg 1345 / 28944, ETA: 18:17:17.9371 @ 0.419196 items / sec XY3P: 1346 / 28944 @ c=139, r=137, X150.110 Y73.852 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r137.jpg 1346 / 28944, ETA: 18:17:15.7534 @ 0.419195 items / sec XY3P: 1347 / 28944 @ c=140, r=137, X150.282 Y73.848 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r137.jpg 1347 / 28944, ETA: 18:17:13.6080 @ 0.419193 items / sec XY3P: 1348 / 28944 @ c=141, r=137, X150.455 Y73.844 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r137.jpg 1348 / 28944, ETA: 18:17:11.5831 @ 0.419191 items / sec XY3P: 1349 / 28944 @ c=142, r=137, X150.628 Y73.840 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r137.jpg 1349 / 28944, ETA: 18:17:09.3135 @ 0.419190 items / sec XY3P: 1350 / 28944 @ c=143, r=137, X150.801 Y73.836 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r137.jpg 1350 / 28944, ETA: 18:17:07.2091 @ 0.419188 items / sec XY3P: 1351 / 28944 @ c=144, r=137, X150.973 Y73.832 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r137.jpg 1351 / 28944, ETA: 18:17:05.0275 @ 0.419187 items / sec XY3P: 1352 / 28944 @ c=145, r=137, X151.146 Y73.828 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r137.jpg 1352 / 28944, ETA: 18:17:02.8792 @ 0.419186 items / sec XY3P: 1353 / 28944 @ c=146, r=137, X151.319 Y73.824 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r137.jpg 1353 / 28944, ETA: 18:17:00.7659 @ 0.419184 items / sec XY3P: 1354 / 28944 @ c=147, r=137, X151.492 Y73.821 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r137.jpg 1354 / 28944, ETA: 18:16:58.5939 @ 0.419182 items / sec XY3P: 1355 / 28944 @ c=148, r=137, X151.664 Y73.817 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r137.jpg 1355 / 28944, ETA: 18:16:56.4727 @ 0.419181 items / sec XY3P: 1356 / 28944 @ c=149, r=137, X151.837 Y73.813 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r137.jpg 1356 / 28944, ETA: 18:16:54.2884 @ 0.419179 items / sec XY3P: 1357 / 28944 @ c=150, r=137, X152.010 Y73.809 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r137.jpg 1357 / 28944, ETA: 18:16:52.1401 @ 0.419178 items / sec XY3P: 1358 / 28944 @ c=151, r=137, X152.183 Y73.805 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r137.jpg 1358 / 28944, ETA: 18:16:49.9743 @ 0.419177 items / sec XY3P: 1359 / 28944 @ c=152, r=137, X152.355 Y73.801 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r137.jpg 1359 / 28944, ETA: 18:16:47.8314 @ 0.419175 items / sec XY3P: 1360 / 28944 @ c=153, r=137, X152.528 Y73.797 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r137.jpg 1360 / 28944, ETA: 18:16:45.8371 @ 0.419173 items / sec XY3P: 1361 / 28944 @ c=154, r=137, X152.701 Y73.793 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r137.jpg 1361 / 28944, ETA: 18:16:43.5377 @ 0.419172 items / sec XY3P: 1362 / 28944 @ c=155, r=137, X152.874 Y73.789 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r137.jpg 1362 / 28944, ETA: 18:16:41.3808 @ 0.419171 items / sec XY3P: 1363 / 28944 @ c=156, r=137, X153.046 Y73.785 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r137.jpg 1363 / 28944, ETA: 18:16:35.1880 @ 0.419195 items / sec XY3P: 1364 / 28944 @ c=157, r=137, X153.219 Y73.781 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r137.jpg 1364 / 28944, ETA: 18:16:29.0372 @ 0.419219 items / sec XY3P: 1365 / 28944 @ c=158, r=137, X153.392 Y73.777 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r137.jpg 1365 / 28944, ETA: 18:16:26.8520 @ 0.419218 items / sec XY3P: 1366 / 28944 @ c=159, r=137, X153.565 Y73.773 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r137.jpg 1366 / 28944, ETA: 18:16:24.6940 @ 0.419216 items / sec XY3P: 1367 / 28944 @ c=160, r=137, X153.737 Y73.769 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r137.jpg 1367 / 28944, ETA: 18:16:22.5614 @ 0.419214 items / sec XY3P: 1368 / 28944 @ c=161, r=137, X153.910 Y73.765 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r137.jpg 1368 / 28944, ETA: 18:16:20.4139 @ 0.419213 items / sec XY3P: 1369 / 28944 @ c=162, r=137, X154.083 Y73.761 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r137.jpg 1369 / 28944, ETA: 18:16:18.3121 @ 0.419211 items / sec XY3P: 1370 / 28944 @ c=163, r=137, X154.256 Y73.757 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r137.jpg 1370 / 28944, ETA: 18:16:16.1273 @ 0.419210 items / sec XY3P: 1371 / 28944 @ c=164, r=137, X154.428 Y73.753 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r137.jpg 1371 / 28944, ETA: 18:16:13.9729 @ 0.419208 items / sec XY3P: 1372 / 28944 @ c=165, r=137, X154.601 Y73.749 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r137.jpg 1372 / 28944, ETA: 18:16:11.8266 @ 0.419207 items / sec XY3P: 1373 / 28944 @ c=166, r=137, X154.774 Y73.745 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r137.jpg 1373 / 28944, ETA: 18:16:09.6601 @ 0.419205 items / sec XY3P: 1374 / 28944 @ c=167, r=137, X154.947 Y73.741 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r137.jpg 1374 / 28944, ETA: 18:16:07.5371 @ 0.419204 items / sec XY3P: 1375 / 28944 @ c=168, r=137, X155.119 Y73.737 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r137.jpg 1375 / 28944, ETA: 18:16:05.3943 @ 0.419202 items / sec XY3P: 1376 / 28944 @ c=169, r=137, X155.292 Y73.733 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r137.jpg 1376 / 28944, ETA: 18:16:03.3785 @ 0.419200 items / sec XY3P: 1377 / 28944 @ c=170, r=137, X155.465 Y73.729 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r137.jpg 1377 / 28944, ETA: 18:16:01.1248 @ 0.419199 items / sec XY3P: 1378 / 28944 @ c=171, r=137, X155.638 Y73.725 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r137.jpg 1378 / 28944, ETA: 18:15:59.0188 @ 0.419197 items / sec XY3P: 1379 / 28944 @ c=172, r=137, X155.810 Y73.721 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r137.jpg 1379 / 28944, ETA: 18:15:56.9896 @ 0.419195 items / sec XY3P: 1380 / 28944 @ c=173, r=137, X155.983 Y73.717 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r137.jpg 1380 / 28944, ETA: 18:15:54.6045 @ 0.419195 items / sec XY3P: 1381 / 28944 @ c=174, r=137, X156.156 Y73.713 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r137.jpg 1381 / 28944, ETA: 18:15:52.4892 @ 0.419193 items / sec XY3P: 1382 / 28944 @ c=175, r=137, X156.329 Y73.709 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r137.jpg 1382 / 28944, ETA: 18:15:50.3441 @ 0.419192 items / sec XY3P: 1383 / 28944 @ c=176, r=137, X156.501 Y73.706 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r137.jpg 1383 / 28944, ETA: 18:15:48.1897 @ 0.419190 items / sec XY3P: 1384 / 28944 @ c=177, r=137, X156.674 Y73.702 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r137.jpg 1384 / 28944, ETA: 18:15:46.0725 @ 0.419189 items / sec XY3P: 1385 / 28944 @ c=178, r=137, X156.847 Y73.698 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r137.jpg 1385 / 28944, ETA: 18:15:43.8809 @ 0.419187 items / sec XY3P: 1386 / 28944 @ c=179, r=137, X157.020 Y73.694 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r137.jpg 1386 / 28944, ETA: 18:15:41.7210 @ 0.419186 items / sec XY3P: 1387 / 28944 @ c=180, r=137, X157.192 Y73.690 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r137.jpg 1387 / 28944, ETA: 18:15:39.5603 @ 0.419184 items / sec XY3P: 1388 / 28944 @ c=181, r=137, X157.365 Y73.686 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r137.jpg 1388 / 28944, ETA: 18:15:37.4148 @ 0.419183 items / sec XY3P: 1389 / 28944 @ c=182, r=137, X157.538 Y73.682 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r137.jpg 1389 / 28944, ETA: 18:15:35.2936 @ 0.419181 items / sec XY3P: 1390 / 28944 @ c=183, r=137, X157.711 Y73.678 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r137.jpg 1390 / 28944, ETA: 18:15:33.1019 @ 0.419180 items / sec XY3P: 1391 / 28944 @ c=184, r=137, X157.883 Y73.674 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r137.jpg 1391 / 28944, ETA: 18:15:30.9547 @ 0.419178 items / sec XY3P: 1392 / 28944 @ c=185, r=137, X158.056 Y73.670 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r137.jpg 1392 / 28944, ETA: 18:15:28.8020 @ 0.419177 items / sec XY3P: 1393 / 28944 @ c=186, r=137, X158.229 Y73.666 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r137.jpg 1393 / 28944, ETA: 18:15:26.6454 @ 0.419176 items / sec XY3P: 1394 / 28944 @ c=187, r=137, X158.402 Y73.662 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r137.jpg 1394 / 28944, ETA: 18:15:24.5121 @ 0.419174 items / sec XY3P: 1395 / 28944 @ c=188, r=137, X158.574 Y73.658 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r137.jpg 1395 / 28944, ETA: 18:15:22.3320 @ 0.419173 items / sec XY3P: 1396 / 28944 @ c=189, r=137, X158.747 Y73.654 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r137.jpg 1396 / 28944, ETA: 18:15:20.1755 @ 0.419171 items / sec XY3P: 1397 / 28944 @ c=190, r=137, X158.920 Y73.650 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r137.jpg 1397 / 28944, ETA: 18:15:18.3041 @ 0.419168 items / sec XY3P: 1398 / 28944 @ c=191, r=137, X159.093 Y73.646 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r137.jpg 1398 / 28944, ETA: 18:15:15.8671 @ 0.419168 items / sec XY3P: 1399 / 28944 @ c=192, r=137, X159.265 Y73.642 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r137.jpg 1399 / 28944, ETA: 18:15:13.7408 @ 0.419167 items / sec XY3P: 1400 / 28944 @ c=193, r=137, X159.438 Y73.638 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r137.jpg 1400 / 28944, ETA: 18:15:11.5577 @ 0.419165 items / sec XY3P: 1401 / 28944 @ c=194, r=137, X159.611 Y73.634 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r137.jpg 1401 / 28944, ETA: 18:15:05.4646 @ 0.419189 items / sec XY3P: 1402 / 28944 @ c=195, r=137, X159.784 Y73.630 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r137.jpg 1402 / 28944, ETA: 18:15:03.3045 @ 0.419187 items / sec XY3P: 1403 / 28944 @ c=196, r=137, X159.956 Y73.626 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r137.jpg 1403 / 28944, ETA: 18:15:01.1611 @ 0.419186 items / sec XY3P: 1404 / 28944 @ c=197, r=137, X160.129 Y73.622 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r137.jpg 1404 / 28944, ETA: 18:14:59.0904 @ 0.419184 items / sec XY3P: 1405 / 28944 @ c=198, r=137, X160.302 Y73.618 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r137.jpg 1405 / 28944, ETA: 18:14:56.8451 @ 0.419183 items / sec XY3P: 1406 / 28944 @ c=199, r=137, X160.475 Y73.614 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r137.jpg 1406 / 28944, ETA: 18:14:54.6844 @ 0.419182 items / sec XY3P: 1407 / 28944 @ c=200, r=137, X160.647 Y73.610 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r137.jpg 1407 / 28944, ETA: 18:14:52.5171 @ 0.419180 items / sec XY3P: 1408 / 28944 @ c=200, r=136, X160.652 Y73.783 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r136.jpg 1408 / 28944, ETA: 18:14:50.3980 @ 0.419178 items / sec XY3P: 1409 / 28944 @ c=199, r=136, X160.479 Y73.787 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r136.jpg 1409 / 28944, ETA: 18:14:48.2020 @ 0.419177 items / sec XY3P: 1410 / 28944 @ c=198, r=136, X160.306 Y73.791 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r136.jpg 1410 / 28944, ETA: 18:14:46.0491 @ 0.419176 items / sec XY3P: 1411 / 28944 @ c=197, r=136, X160.134 Y73.795 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r136.jpg 1411 / 28944, ETA: 18:14:43.8885 @ 0.419174 items / sec XY3P: 1412 / 28944 @ c=196, r=136, X159.961 Y73.799 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r136.jpg 1412 / 28944, ETA: 18:14:41.7258 @ 0.419173 items / sec XY3P: 1413 / 28944 @ c=195, r=136, X159.788 Y73.803 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r136.jpg 1413 / 28944, ETA: 18:14:39.5916 @ 0.419171 items / sec XY3P: 1414 / 28944 @ c=194, r=136, X159.615 Y73.807 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r136.jpg 1414 / 28944, ETA: 18:14:37.4081 @ 0.419170 items / sec XY3P: 1415 / 28944 @ c=193, r=136, X159.443 Y73.811 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r136.jpg 1415 / 28944, ETA: 18:14:35.2365 @ 0.419169 items / sec XY3P: 1416 / 28944 @ c=192, r=136, X159.270 Y73.815 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r136.jpg 1416 / 28944, ETA: 18:14:33.0828 @ 0.419167 items / sec XY3P: 1417 / 28944 @ c=191, r=136, X159.097 Y73.819 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r136.jpg 1417 / 28944, ETA: 18:14:30.9045 @ 0.419166 items / sec XY3P: 1418 / 28944 @ c=190, r=136, X158.924 Y73.823 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r136.jpg 1418 / 28944, ETA: 18:14:28.8267 @ 0.419164 items / sec XY3P: 1419 / 28944 @ c=189, r=136, X158.752 Y73.827 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r136.jpg 1419 / 28944, ETA: 18:14:26.5978 @ 0.419163 items / sec XY3P: 1420 / 28944 @ c=188, r=136, X158.579 Y73.831 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r136.jpg 1420 / 28944, ETA: 18:14:24.4405 @ 0.419161 items / sec XY3P: 1421 / 28944 @ c=187, r=136, X158.406 Y73.835 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r136.jpg 1421 / 28944, ETA: 18:14:22.2809 @ 0.419160 items / sec XY3P: 1422 / 28944 @ c=186, r=136, X158.233 Y73.839 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r136.jpg 1422 / 28944, ETA: 18:14:20.1118 @ 0.419159 items / sec XY3P: 1423 / 28944 @ c=185, r=136, X158.061 Y73.843 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r136.jpg 1423 / 28944, ETA: 18:14:17.9960 @ 0.419157 items / sec XY3P: 1424 / 28944 @ c=184, r=136, X157.888 Y73.847 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r136.jpg 1424 / 28944, ETA: 18:14:15.7808 @ 0.419156 items / sec XY3P: 1425 / 28944 @ c=183, r=136, X157.715 Y73.850 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r136.jpg 1425 / 28944, ETA: 18:14:13.6320 @ 0.419154 items / sec XY3P: 1426 / 28944 @ c=182, r=136, X157.542 Y73.854 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r136.jpg 1426 / 28944, ETA: 18:14:15.3257 @ 0.419128 items / sec XY3P: 1427 / 28944 @ c=181, r=136, X157.370 Y73.858 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r136.jpg 1427 / 28944, ETA: 18:14:13.1587 @ 0.419127 items / sec XY3P: 1428 / 28944 @ c=180, r=136, X157.197 Y73.862 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r136.jpg 1428 / 28944, ETA: 18:14:10.9801 @ 0.419126 items / sec XY3P: 1429 / 28944 @ c=179, r=136, X157.024 Y73.866 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r136.jpg 1429 / 28944, ETA: 18:14:08.8416 @ 0.419124 items / sec XY3P: 1430 / 28944 @ c=178, r=136, X156.851 Y73.870 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r136.jpg 1430 / 28944, ETA: 18:14:06.6427 @ 0.419123 items / sec XY3P: 1431 / 28944 @ c=177, r=136, X156.679 Y73.874 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r136.jpg 1431 / 28944, ETA: 18:14:04.4782 @ 0.419121 items / sec XY3P: 1432 / 28944 @ c=176, r=136, X156.506 Y73.878 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r136.jpg 1432 / 28944, ETA: 18:14:02.3098 @ 0.419120 items / sec XY3P: 1433 / 28944 @ c=175, r=136, X156.333 Y73.882 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r136.jpg 1433 / 28944, ETA: 18:14:00.1353 @ 0.419119 items / sec XY3P: 1434 / 28944 @ c=174, r=136, X156.160 Y73.886 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r136.jpg 1434 / 28944, ETA: 18:13:58.0092 @ 0.419117 items / sec XY3P: 1435 / 28944 @ c=173, r=136, X155.988 Y73.890 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r136.jpg 1435 / 28944, ETA: 18:13:55.7995 @ 0.419116 items / sec XY3P: 1436 / 28944 @ c=172, r=136, X155.815 Y73.894 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r136.jpg 1436 / 28944, ETA: 18:13:53.6100 @ 0.419115 items / sec XY3P: 1437 / 28944 @ c=171, r=136, X155.642 Y73.898 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r136.jpg 1437 / 28944, ETA: 18:13:51.4599 @ 0.419113 items / sec XY3P: 1438 / 28944 @ c=170, r=136, X155.469 Y73.902 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r136.jpg 1438 / 28944, ETA: 18:13:49.2977 @ 0.419112 items / sec XY3P: 1439 / 28944 @ c=169, r=136, X155.297 Y73.906 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r136.jpg 1439 / 28944, ETA: 18:13:47.1643 @ 0.419110 items / sec XY3P: 1440 / 28944 @ c=168, r=136, X155.124 Y73.910 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r136.jpg 1440 / 28944, ETA: 18:13:44.9646 @ 0.419109 items / sec XY3P: 1441 / 28944 @ c=167, r=136, X154.951 Y73.914 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r136.jpg 1441 / 28944, ETA: 18:13:42.7954 @ 0.419107 items / sec XY3P: 1442 / 28944 @ c=166, r=136, X154.778 Y73.918 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r136.jpg 1442 / 28944, ETA: 18:13:40.6233 @ 0.419106 items / sec XY3P: 1443 / 28944 @ c=165, r=136, X154.606 Y73.922 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r136.jpg 1443 / 28944, ETA: 18:13:38.4212 @ 0.419105 items / sec XY3P: 1444 / 28944 @ c=164, r=136, X154.433 Y73.926 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r136.jpg 1444 / 28944, ETA: 18:13:36.2993 @ 0.419103 items / sec XY3P: 1445 / 28944 @ c=163, r=136, X154.260 Y73.930 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r136.jpg 1445 / 28944, ETA: 18:13:34.0980 @ 0.419102 items / sec XY3P: 1446 / 28944 @ c=162, r=136, X154.087 Y73.934 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r136.jpg 1446 / 28944, ETA: 18:13:31.9131 @ 0.419101 items / sec XY3P: 1447 / 28944 @ c=161, r=136, X153.915 Y73.938 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r136.jpg 1447 / 28944, ETA: 18:13:29.7567 @ 0.419099 items / sec XY3P: 1448 / 28944 @ c=160, r=136, X153.742 Y73.942 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r136.jpg 1448 / 28944, ETA: 18:13:23.8248 @ 0.419122 items / sec XY3P: 1449 / 28944 @ c=159, r=136, X153.569 Y73.946 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r136.jpg 1449 / 28944, ETA: 18:13:21.6125 @ 0.419121 items / sec XY3P: 1450 / 28944 @ c=158, r=136, X153.396 Y73.950 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r136.jpg 1450 / 28944, ETA: 18:13:19.4681 @ 0.419119 items / sec XY3P: 1451 / 28944 @ c=157, r=136, X153.224 Y73.954 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r136.jpg 1451 / 28944, ETA: 18:13:17.3383 @ 0.419118 items / sec XY3P: 1452 / 28944 @ c=156, r=136, X153.051 Y73.958 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r136.jpg 1452 / 28944, ETA: 18:13:15.0832 @ 0.419117 items / sec XY3P: 1453 / 28944 @ c=155, r=136, X152.878 Y73.962 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r136.jpg 1453 / 28944, ETA: 18:13:12.9568 @ 0.419115 items / sec XY3P: 1454 / 28944 @ c=154, r=136, X152.705 Y73.965 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r136.jpg 1454 / 28944, ETA: 18:13:10.7653 @ 0.419114 items / sec XY3P: 1455 / 28944 @ c=153, r=136, X152.533 Y73.969 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r136.jpg 1455 / 28944, ETA: 18:13:08.5644 @ 0.419113 items / sec XY3P: 1456 / 28944 @ c=152, r=136, X152.360 Y73.973 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r136.jpg 1456 / 28944, ETA: 18:13:06.4023 @ 0.419111 items / sec XY3P: 1457 / 28944 @ c=151, r=136, X152.187 Y73.977 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r136.jpg 1457 / 28944, ETA: 18:13:04.2381 @ 0.419110 items / sec XY3P: 1458 / 28944 @ c=150, r=136, X152.014 Y73.981 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r136.jpg 1458 / 28944, ETA: 18:13:02.0912 @ 0.419108 items / sec XY3P: 1459 / 28944 @ c=149, r=136, X151.842 Y73.985 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r136.jpg 1459 / 28944, ETA: 18:12:59.8734 @ 0.419107 items / sec XY3P: 1460 / 28944 @ c=148, r=136, X151.669 Y73.989 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r136.jpg 1460 / 28944, ETA: 18:12:57.7102 @ 0.419106 items / sec XY3P: 1461 / 28944 @ c=147, r=136, X151.496 Y73.993 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r136.jpg 1461 / 28944, ETA: 18:12:55.5300 @ 0.419105 items / sec XY3P: 1462 / 28944 @ c=146, r=136, X151.323 Y73.997 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r136.jpg 1462 / 28944, ETA: 18:12:53.3604 @ 0.419103 items / sec XY3P: 1463 / 28944 @ c=145, r=136, X151.151 Y74.001 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r136.jpg 1463 / 28944, ETA: 18:12:51.2204 @ 0.419102 items / sec XY3P: 1464 / 28944 @ c=144, r=136, X150.978 Y74.005 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r136.jpg 1464 / 28944, ETA: 18:12:49.0071 @ 0.419100 items / sec XY3P: 1465 / 28944 @ c=143, r=136, X150.805 Y74.009 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r136.jpg 1465 / 28944, ETA: 18:12:46.8378 @ 0.419099 items / sec XY3P: 1466 / 28944 @ c=142, r=136, X150.632 Y74.013 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r136.jpg 1466 / 28944, ETA: 18:12:44.6396 @ 0.419098 items / sec XY3P: 1467 / 28944 @ c=141, r=136, X150.460 Y74.017 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r136.jpg 1467 / 28944, ETA: 18:12:42.4746 @ 0.419096 items / sec XY3P: 1468 / 28944 @ c=140, r=136, X150.287 Y74.021 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r136.jpg 1468 / 28944, ETA: 18:12:40.3357 @ 0.419095 items / sec XY3P: 1469 / 28944 @ c=139, r=136, X150.114 Y74.025 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r136.jpg 1469 / 28944, ETA: 18:12:38.1211 @ 0.419094 items / sec XY3P: 1470 / 28944 @ c=138, r=136, X149.941 Y74.029 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r136.jpg 1470 / 28944, ETA: 18:12:35.9473 @ 0.419092 items / sec XY3P: 1471 / 28944 @ c=137, r=136, X149.769 Y74.033 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r136.jpg 1471 / 28944, ETA: 18:12:33.7432 @ 0.419091 items / sec XY3P: 1472 / 28944 @ c=136, r=136, X149.596 Y74.037 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r136.jpg 1472 / 28944, ETA: 18:12:31.5914 @ 0.419090 items / sec XY3P: 1473 / 28944 @ c=135, r=136, X149.423 Y74.041 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r136.jpg 1473 / 28944, ETA: 18:12:29.4326 @ 0.419088 items / sec XY3P: 1474 / 28944 @ c=134, r=136, X149.250 Y74.045 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r136.jpg 1474 / 28944, ETA: 18:12:27.2411 @ 0.419087 items / sec XY3P: 1475 / 28944 @ c=133, r=136, X149.078 Y74.049 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r136.jpg 1475 / 28944, ETA: 18:12:25.0590 @ 0.419086 items / sec XY3P: 1476 / 28944 @ c=132, r=136, X148.905 Y74.053 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r136.jpg 1476 / 28944, ETA: 18:12:22.8720 @ 0.419084 items / sec XY3P: 1477 / 28944 @ c=131, r=136, X148.732 Y74.057 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r136.jpg 1477 / 28944, ETA: 18:12:20.7025 @ 0.419083 items / sec XY3P: 1478 / 28944 @ c=130, r=136, X148.559 Y74.061 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r136.jpg 1478 / 28944, ETA: 18:12:18.5494 @ 0.419082 items / sec XY3P: 1479 / 28944 @ c=129, r=136, X148.387 Y74.065 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r136.jpg 1479 / 28944, ETA: 18:12:16.3304 @ 0.419081 items / sec XY3P: 1480 / 28944 @ c=128, r=136, X148.214 Y74.069 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r136.jpg 1480 / 28944, ETA: 18:12:14.1330 @ 0.419079 items / sec XY3P: 1481 / 28944 @ c=127, r=136, X148.041 Y74.073 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r136.jpg 1481 / 28944, ETA: 18:12:11.9660 @ 0.419078 items / sec XY3P: 1482 / 28944 @ c=126, r=136, X147.868 Y74.077 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r136.jpg 1482 / 28944, ETA: 18:12:09.7975 @ 0.419077 items / sec XY3P: 1483 / 28944 @ c=125, r=136, X147.696 Y74.080 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r136.jpg 1483 / 28944, ETA: 18:12:07.6614 @ 0.419075 items / sec XY3P: 1484 / 28944 @ c=124, r=136, X147.523 Y74.084 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r136.jpg 1484 / 28944, ETA: 18:12:05.5516 @ 0.419073 items / sec XY3P: 1485 / 28944 @ c=123, r=136, X147.350 Y74.088 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r136.jpg 1485 / 28944, ETA: 18:12:03.2427 @ 0.419073 items / sec XY3P: 1486 / 28944 @ c=122, r=136, X147.177 Y74.092 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r136.jpg 1486 / 28944, ETA: 18:12:01.0631 @ 0.419071 items / sec XY3P: 1487 / 28944 @ c=121, r=136, X147.005 Y74.096 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r136.jpg 1487 / 28944, ETA: 18:11:58.8689 @ 0.419070 items / sec XY3P: 1488 / 28944 @ c=120, r=136, X146.832 Y74.100 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r136.jpg 1488 / 28944, ETA: 18:11:56.7434 @ 0.419068 items / sec XY3P: 1489 / 28944 @ c=119, r=136, X146.659 Y74.104 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r136.jpg 1489 / 28944, ETA: 18:11:54.5231 @ 0.419067 items / sec XY3P: 1490 / 28944 @ c=118, r=136, X146.486 Y74.108 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r136.jpg 1490 / 28944, ETA: 18:11:52.3358 @ 0.419066 items / sec XY3P: 1491 / 28944 @ c=117, r=136, X146.314 Y74.112 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r136.jpg 1491 / 28944, ETA: 18:11:50.1498 @ 0.419065 items / sec XY3P: 1492 / 28944 @ c=116, r=136, X146.141 Y74.116 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r136.jpg 1492 / 28944, ETA: 18:11:47.9699 @ 0.419064 items / sec XY3P: 1493 / 28944 @ c=115, r=136, X145.968 Y74.120 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r136.jpg 1493 / 28944, ETA: 18:11:45.8146 @ 0.419062 items / sec XY3P: 1494 / 28944 @ c=114, r=136, X145.795 Y74.124 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r136.jpg 1494 / 28944, ETA: 18:11:43.5930 @ 0.419061 items / sec XY3P: 1495 / 28944 @ c=113, r=136, X145.623 Y74.128 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r136.jpg 1495 / 28944, ETA: 18:11:41.4168 @ 0.419060 items / sec XY3P: 1496 / 28944 @ c=112, r=136, X145.450 Y74.132 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r136.jpg 1496 / 28944, ETA: 18:11:39.2326 @ 0.419058 items / sec XY3P: 1497 / 28944 @ c=111, r=136, X145.277 Y74.136 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r136.jpg 1497 / 28944, ETA: 18:11:37.0430 @ 0.419057 items / sec XY3P: 1498 / 28944 @ c=110, r=136, X145.104 Y74.140 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r136.jpg 1498 / 28944, ETA: 18:11:34.8944 @ 0.419056 items / sec XY3P: 1499 / 28944 @ c=109, r=136, X144.932 Y74.144 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r136.jpg 1499 / 28944, ETA: 18:11:32.6715 @ 0.419055 items / sec XY3P: 1500 / 28944 @ c=108, r=136, X144.759 Y74.148 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r136.jpg 1500 / 28944, ETA: 18:11:30.4887 @ 0.419053 items / sec XY3P: 1501 / 28944 @ c=107, r=136, X144.586 Y74.152 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r136.jpg 1501 / 28944, ETA: 18:11:28.2920 @ 0.419052 items / sec XY3P: 1502 / 28944 @ c=106, r=136, X144.413 Y74.156 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r136.jpg 1502 / 28944, ETA: 18:11:26.1103 @ 0.419051 items / sec XY3P: 1503 / 28944 @ c=105, r=136, X144.241 Y74.160 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r136.jpg 1503 / 28944, ETA: 18:11:23.9592 @ 0.419049 items / sec XY3P: 1504 / 28944 @ c=104, r=136, X144.068 Y74.164 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r136.jpg 1504 / 28944, ETA: 18:11:21.7359 @ 0.419048 items / sec XY3P: 1505 / 28944 @ c=103, r=136, X143.895 Y74.168 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r136.jpg 1505 / 28944, ETA: 18:11:19.5560 @ 0.419047 items / sec XY3P: 1506 / 28944 @ c=102, r=136, X143.722 Y74.172 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r136.jpg 1506 / 28944, ETA: 18:11:17.3594 @ 0.419046 items / sec XY3P: 1507 / 28944 @ c=101, r=136, X143.550 Y74.176 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r136.jpg 1507 / 28944, ETA: 18:11:15.1725 @ 0.419044 items / sec XY3P: 1508 / 28944 @ c=100, r=136, X143.377 Y74.180 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r136.jpg 1508 / 28944, ETA: 18:11:13.0086 @ 0.419043 items / sec XY3P: 1509 / 28944 @ c=99, r=136, X143.204 Y74.184 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r136.jpg 1509 / 28944, ETA: 18:11:10.7921 @ 0.419042 items / sec XY3P: 1510 / 28944 @ c=98, r=136, X143.031 Y74.188 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r136.jpg 1510 / 28944, ETA: 18:11:08.6082 @ 0.419041 items / sec XY3P: 1511 / 28944 @ c=97, r=136, X142.859 Y74.191 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r136.jpg 1511 / 28944, ETA: 18:11:06.4266 @ 0.419039 items / sec XY3P: 1512 / 28944 @ c=96, r=136, X142.686 Y74.195 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r136.jpg 1512 / 28944, ETA: 18:11:04.2124 @ 0.419038 items / sec XY3P: 1513 / 28944 @ c=95, r=136, X142.513 Y74.199 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r136.jpg 1513 / 28944, ETA: 18:11:02.0706 @ 0.419037 items / sec XY3P: 1514 / 28944 @ c=94, r=136, X142.340 Y74.203 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r136.jpg 1514 / 28944, ETA: 18:10:59.8528 @ 0.419035 items / sec XY3P: 1515 / 28944 @ c=93, r=136, X142.168 Y74.207 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r136.jpg 1515 / 28944, ETA: 18:10:57.6450 @ 0.419034 items / sec XY3P: 1516 / 28944 @ c=92, r=136, X141.995 Y74.211 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r136.jpg 1516 / 28944, ETA: 18:10:55.5798 @ 0.419032 items / sec XY3P: 1517 / 28944 @ c=91, r=136, X141.822 Y74.215 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r136.jpg 1517 / 28944, ETA: 18:10:53.2805 @ 0.419032 items / sec XY3P: 1518 / 28944 @ c=90, r=136, X141.649 Y74.219 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r136.jpg 1518 / 28944, ETA: 18:10:51.1263 @ 0.419030 items / sec XY3P: 1519 / 28944 @ c=89, r=136, X141.477 Y74.223 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r136.jpg 1519 / 28944, ETA: 18:10:48.8905 @ 0.419029 items / sec XY3P: 1520 / 28944 @ c=88, r=136, X141.304 Y74.227 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r136.jpg 1520 / 28944, ETA: 18:10:46.7094 @ 0.419028 items / sec XY3P: 1521 / 28944 @ c=87, r=136, X141.131 Y74.231 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r136.jpg 1521 / 28944, ETA: 18:10:44.5183 @ 0.419027 items / sec XY3P: 1522 / 28944 @ c=86, r=136, X140.958 Y74.235 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r136.jpg 1522 / 28944, ETA: 18:10:42.3278 @ 0.419025 items / sec XY3P: 1523 / 28944 @ c=85, r=136, X140.786 Y74.239 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r136.jpg 1523 / 28944, ETA: 18:10:40.1831 @ 0.419024 items / sec XY3P: 1524 / 28944 @ c=84, r=136, X140.613 Y74.243 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r136.jpg 1524 / 28944, ETA: 18:10:37.9939 @ 0.419023 items / sec XY3P: 1525 / 28944 @ c=83, r=136, X140.440 Y74.247 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r136.jpg 1525 / 28944, ETA: 18:10:35.8570 @ 0.419021 items / sec XY3P: 1526 / 28944 @ c=82, r=136, X140.267 Y74.251 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r136.jpg 1526 / 28944, ETA: 18:10:33.5509 @ 0.419021 items / sec XY3P: 1527 / 28944 @ c=81, r=136, X140.095 Y74.255 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r136.jpg 1527 / 28944, ETA: 18:10:31.3863 @ 0.419019 items / sec XY3P: 1528 / 28944 @ c=80, r=136, X139.922 Y74.259 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r136.jpg 1528 / 28944, ETA: 18:10:29.1522 @ 0.419018 items / sec XY3P: 1529 / 28944 @ c=79, r=136, X139.749 Y74.263 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r136.jpg 1529 / 28944, ETA: 18:10:26.9510 @ 0.419017 items / sec XY3P: 1530 / 28944 @ c=78, r=136, X139.576 Y74.267 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r136.jpg 1530 / 28944, ETA: 18:10:24.7758 @ 0.419016 items / sec XY3P: 1531 / 28944 @ c=77, r=136, X139.404 Y74.271 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r136.jpg 1531 / 28944, ETA: 18:10:22.5805 @ 0.419014 items / sec XY3P: 1532 / 28944 @ c=76, r=136, X139.231 Y74.275 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r136.jpg 1532 / 28944, ETA: 18:10:20.4135 @ 0.419013 items / sec XY3P: 1533 / 28944 @ c=75, r=136, X139.058 Y74.279 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r136.jpg 1533 / 28944, ETA: 18:10:18.1855 @ 0.419012 items / sec XY3P: 1534 / 28944 @ c=74, r=136, X138.885 Y74.283 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r136.jpg 1534 / 28944, ETA: 18:10:15.9946 @ 0.419011 items / sec XY3P: 1535 / 28944 @ c=73, r=136, X138.713 Y74.287 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r136.jpg 1535 / 28944, ETA: 18:10:13.7966 @ 0.419009 items / sec XY3P: 1536 / 28944 @ c=72, r=136, X138.540 Y74.291 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r136.jpg 1536 / 28944, ETA: 18:10:11.5900 @ 0.419008 items / sec XY3P: 1537 / 28944 @ c=71, r=136, X138.367 Y74.295 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r136.jpg 1537 / 28944, ETA: 18:10:09.4435 @ 0.419007 items / sec XY3P: 1538 / 28944 @ c=70, r=136, X138.194 Y74.299 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r136.jpg 1538 / 28944, ETA: 18:10:07.2108 @ 0.419006 items / sec XY3P: 1539 / 28944 @ c=69, r=136, X138.022 Y74.303 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r136.jpg 1539 / 28944, ETA: 18:10:05.0127 @ 0.419005 items / sec XY3P: 1540 / 28944 @ c=68, r=136, X137.849 Y74.306 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r136.jpg 1540 / 28944, ETA: 18:10:02.8174 @ 0.419003 items / sec XY3P: 1541 / 28944 @ c=67, r=136, X137.676 Y74.310 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r136.jpg 1541 / 28944, ETA: 18:10:00.6356 @ 0.419002 items / sec XY3P: 1542 / 28944 @ c=66, r=136, X137.503 Y74.314 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r136.jpg 1542 / 28944, ETA: 18:09:58.4426 @ 0.419001 items / sec XY3P: 1543 / 28944 @ c=65, r=136, X137.331 Y74.318 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r136.jpg 1543 / 28944, ETA: 18:09:56.2221 @ 0.419000 items / sec XY3P: 1544 / 28944 @ c=64, r=136, X137.158 Y74.322 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r136.jpg 1544 / 28944, ETA: 18:09:54.0228 @ 0.418999 items / sec XY3P: 1545 / 28944 @ c=63, r=136, X136.985 Y74.326 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r136.jpg 1545 / 28944, ETA: 18:09:51.8321 @ 0.418997 items / sec XY3P: 1546 / 28944 @ c=62, r=136, X136.812 Y74.330 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r136.jpg 1546 / 28944, ETA: 18:09:49.6444 @ 0.418996 items / sec XY3P: 1547 / 28944 @ c=61, r=136, X136.640 Y74.334 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r136.jpg 1547 / 28944, ETA: 18:09:47.4586 @ 0.418995 items / sec XY3P: 1548 / 28944 @ c=60, r=136, X136.467 Y74.338 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r136.jpg 1548 / 28944, ETA: 18:09:45.2368 @ 0.418994 items / sec XY3P: 1549 / 28944 @ c=59, r=136, X136.294 Y74.342 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r136.jpg 1549 / 28944, ETA: 18:09:43.0288 @ 0.418993 items / sec XY3P: 1550 / 28944 @ c=58, r=136, X136.121 Y74.346 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r136.jpg 1550 / 28944, ETA: 18:09:40.9329 @ 0.418991 items / sec XY3P: 1551 / 28944 @ c=57, r=136, X135.949 Y74.350 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r136.jpg 1551 / 28944, ETA: 18:09:38.6291 @ 0.418990 items / sec XY3P: 1552 / 28944 @ c=56, r=136, X135.776 Y74.354 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r136.jpg 1552 / 28944, ETA: 18:09:36.4573 @ 0.418989 items / sec XY3P: 1553 / 28944 @ c=55, r=136, X135.603 Y74.358 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r136.jpg 1553 / 28944, ETA: 18:09:34.2323 @ 0.418988 items / sec XY3P: 1554 / 28944 @ c=54, r=136, X135.430 Y74.362 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r136.jpg 1554 / 28944, ETA: 18:09:32.0244 @ 0.418987 items / sec XY3P: 1555 / 28944 @ c=53, r=136, X135.258 Y74.366 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r136.jpg 1555 / 28944, ETA: 18:09:29.8287 @ 0.418985 items / sec XY3P: 1556 / 28944 @ c=52, r=136, X135.085 Y74.370 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r136.jpg 1556 / 28944, ETA: 18:09:27.6379 @ 0.418984 items / sec XY3P: 1557 / 28944 @ c=51, r=136, X134.912 Y74.374 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r136.jpg 1557 / 28944, ETA: 18:09:25.4522 @ 0.418983 items / sec XY3P: 1558 / 28944 @ c=50, r=136, X134.739 Y74.378 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r136.jpg 1558 / 28944, ETA: 18:09:23.2243 @ 0.418982 items / sec XY3P: 1559 / 28944 @ c=49, r=136, X134.567 Y74.382 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r136.jpg 1559 / 28944, ETA: 18:09:21.1267 @ 0.418980 items / sec XY3P: 1560 / 28944 @ c=48, r=136, X134.394 Y74.386 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r136.jpg 1560 / 28944, ETA: 18:09:18.8249 @ 0.418979 items / sec XY3P: 1561 / 28944 @ c=47, r=136, X134.221 Y74.390 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r136.jpg 1561 / 28944, ETA: 18:09:16.6180 @ 0.418978 items / sec XY3P: 1562 / 28944 @ c=46, r=136, X134.048 Y74.394 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r136.jpg 1562 / 28944, ETA: 18:09:17.9038 @ 0.418955 items / sec XY3P: 1563 / 28944 @ c=45, r=136, X133.876 Y74.398 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r136.jpg 1563 / 28944, ETA: 18:09:15.7440 @ 0.418953 items / sec XY3P: 1564 / 28944 @ c=44, r=136, X133.703 Y74.402 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r136.jpg 1564 / 28944, ETA: 18:09:13.5072 @ 0.418952 items / sec XY3P: 1565 / 28944 @ c=43, r=136, X133.530 Y74.406 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r136.jpg 1565 / 28944, ETA: 18:09:11.3105 @ 0.418951 items / sec XY3P: 1566 / 28944 @ c=42, r=136, X133.357 Y74.410 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r136.jpg 1566 / 28944, ETA: 18:09:09.0998 @ 0.418950 items / sec XY3P: 1567 / 28944 @ c=41, r=136, X133.185 Y74.414 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r136.jpg 1567 / 28944, ETA: 18:09:06.8785 @ 0.418949 items / sec XY3P: 1568 / 28944 @ c=40, r=136, X133.012 Y74.417 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r136.jpg 1568 / 28944, ETA: 18:09:04.7199 @ 0.418947 items / sec XY3P: 1569 / 28944 @ c=39, r=136, X132.839 Y74.421 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r136.jpg 1569 / 28944, ETA: 18:09:02.4625 @ 0.418947 items / sec XY3P: 1570 / 28944 @ c=38, r=136, X132.666 Y74.425 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r136.jpg 1570 / 28944, ETA: 18:09:00.2672 @ 0.418945 items / sec XY3P: 1571 / 28944 @ c=37, r=136, X132.494 Y74.429 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r136.jpg 1571 / 28944, ETA: 18:08:58.0531 @ 0.418944 items / sec XY3P: 1572 / 28944 @ c=36, r=136, X132.321 Y74.433 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r136.jpg 1572 / 28944, ETA: 18:08:55.8518 @ 0.418943 items / sec XY3P: 1573 / 28944 @ c=35, r=136, X132.148 Y74.437 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r136.jpg 1573 / 28944, ETA: 18:08:53.6920 @ 0.418942 items / sec XY3P: 1574 / 28944 @ c=34, r=136, X131.975 Y74.441 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r136.jpg 1574 / 28944, ETA: 18:08:51.4357 @ 0.418941 items / sec XY3P: 1575 / 28944 @ c=33, r=136, X131.803 Y74.445 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r136.jpg 1575 / 28944, ETA: 18:08:49.2258 @ 0.418940 items / sec XY3P: 1576 / 28944 @ c=32, r=136, X131.630 Y74.449 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r136.jpg 1576 / 28944, ETA: 18:08:47.0075 @ 0.418939 items / sec XY3P: 1577 / 28944 @ c=31, r=136, X131.457 Y74.453 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r136.jpg 1577 / 28944, ETA: 18:08:44.9229 @ 0.418937 items / sec XY3P: 1578 / 28944 @ c=30, r=136, X131.284 Y74.457 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r136.jpg 1578 / 28944, ETA: 18:08:42.6348 @ 0.418936 items / sec XY3P: 1579 / 28944 @ c=29, r=136, X131.112 Y74.461 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r136.jpg 1579 / 28944, ETA: 18:08:40.3964 @ 0.418935 items / sec XY3P: 1580 / 28944 @ c=28, r=136, X130.939 Y74.465 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r136.jpg 1580 / 28944, ETA: 18:08:38.1908 @ 0.418934 items / sec XY3P: 1581 / 28944 @ c=27, r=136, X130.766 Y74.469 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r136.jpg 1581 / 28944, ETA: 18:08:35.9812 @ 0.418933 items / sec XY3P: 1582 / 28944 @ c=26, r=136, X130.593 Y74.473 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r136.jpg 1582 / 28944, ETA: 18:08:33.7719 @ 0.418932 items / sec XY3P: 1583 / 28944 @ c=25, r=136, X130.421 Y74.477 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r136.jpg 1583 / 28944, ETA: 18:08:31.6950 @ 0.418930 items / sec XY3P: 1584 / 28944 @ c=24, r=136, X130.248 Y74.481 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r136.jpg 1584 / 28944, ETA: 18:08:29.3562 @ 0.418929 items / sec XY3P: 1585 / 28944 @ c=23, r=136, X130.075 Y74.485 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r136.jpg 1585 / 28944, ETA: 18:08:27.1313 @ 0.418928 items / sec XY3P: 1586 / 28944 @ c=22, r=136, X129.902 Y74.489 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r136.jpg 1586 / 28944, ETA: 18:08:25.0357 @ 0.418926 items / sec XY3P: 1587 / 28944 @ c=21, r=136, X129.730 Y74.493 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r136.jpg 1587 / 28944, ETA: 18:08:22.7167 @ 0.418926 items / sec XY3P: 1588 / 28944 @ c=20, r=136, X129.557 Y74.497 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r136.jpg 1588 / 28944, ETA: 18:08:20.5398 @ 0.418925 items / sec XY3P: 1589 / 28944 @ c=19, r=136, X129.384 Y74.501 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r136.jpg 1589 / 28944, ETA: 18:08:18.2783 @ 0.418924 items / sec XY3P: 1590 / 28944 @ c=18, r=136, X129.211 Y74.505 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r136.jpg 1590 / 28944, ETA: 18:08:16.0632 @ 0.418923 items / sec XY3P: 1591 / 28944 @ c=17, r=136, X129.039 Y74.509 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r136.jpg 1591 / 28944, ETA: 18:08:13.8707 @ 0.418921 items / sec XY3P: 1592 / 28944 @ c=16, r=136, X128.866 Y74.513 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r136.jpg 1592 / 28944, ETA: 18:08:11.6556 @ 0.418920 items / sec XY3P: 1593 / 28944 @ c=15, r=136, X128.693 Y74.517 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r136.jpg 1593 / 28944, ETA: 18:08:09.4817 @ 0.418919 items / sec XY3P: 1594 / 28944 @ c=14, r=136, X128.520 Y74.521 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r136.jpg 1594 / 28944, ETA: 18:08:07.2498 @ 0.418918 items / sec XY3P: 1595 / 28944 @ c=13, r=136, X128.348 Y74.525 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r136.jpg 1595 / 28944, ETA: 18:08:05.0328 @ 0.418917 items / sec XY3P: 1596 / 28944 @ c=12, r=136, X128.175 Y74.529 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r136.jpg 1596 / 28944, ETA: 18:08:02.8169 @ 0.418916 items / sec XY3P: 1597 / 28944 @ c=11, r=136, X128.002 Y74.532 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r136.jpg 1597 / 28944, ETA: 18:08:00.6841 @ 0.418914 items / sec XY3P: 1598 / 28944 @ c=10, r=136, X127.829 Y74.536 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r136.jpg 1598 / 28944, ETA: 18:07:58.5328 @ 0.418913 items / sec XY3P: 1599 / 28944 @ c=9, r=136, X127.657 Y74.540 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r136.jpg 1599 / 28944, ETA: 18:07:56.3205 @ 0.418911 items / sec XY3P: 1600 / 28944 @ c=8, r=136, X127.484 Y74.544 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r136.jpg 1600 / 28944, ETA: 18:07:53.9407 @ 0.418911 items / sec XY3P: 1601 / 28944 @ c=7, r=136, X127.311 Y74.548 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r136.jpg 1601 / 28944, ETA: 18:07:51.7324 @ 0.418910 items / sec XY3P: 1602 / 28944 @ c=6, r=136, X127.138 Y74.552 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r136.jpg 1602 / 28944, ETA: 18:07:49.5220 @ 0.418909 items / sec XY3P: 1603 / 28944 @ c=5, r=136, X126.966 Y74.556 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r136.jpg 1603 / 28944, ETA: 18:07:47.3148 @ 0.418908 items / sec XY3P: 1604 / 28944 @ c=4, r=136, X126.793 Y74.560 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r136.jpg 1604 / 28944, ETA: 18:07:45.0824 @ 0.418907 items / sec XY3P: 1605 / 28944 @ c=3, r=136, X126.620 Y74.564 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r136.jpg 1605 / 28944, ETA: 18:07:42.8789 @ 0.418906 items / sec XY3P: 1606 / 28944 @ c=2, r=136, X126.447 Y74.568 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r136.jpg 1606 / 28944, ETA: 18:07:40.6624 @ 0.418905 items / sec XY3P: 1607 / 28944 @ c=1, r=136, X126.275 Y74.572 Z-15.190 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r136.jpg 1607 / 28944, ETA: 18:07:38.4800 @ 0.418903 items / sec XY3P: 1608 / 28944 @ c=0, r=136, X126.102 Y74.576 Z-15.191 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r136.jpg 1608 / 28944, ETA: 18:07:36.2192 @ 0.418903 items / sec XY3P: 1609 / 28944 @ c=0, r=135, X126.107 Y74.749 Z-15.189 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r135.jpg 1609 / 28944, ETA: 18:07:34.0167 @ 0.418901 items / sec XY3P: 1610 / 28944 @ c=1, r=135, X126.279 Y74.745 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r135.jpg 1610 / 28944, ETA: 18:07:31.8035 @ 0.418900 items / sec XY3P: 1611 / 28944 @ c=2, r=135, X126.452 Y74.741 Z-15.188 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r135.jpg 1611 / 28944, ETA: 18:07:29.6827 @ 0.418899 items / sec XY3P: 1612 / 28944 @ c=3, r=135, X126.625 Y74.737 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r135.jpg 1612 / 28944, ETA: 18:07:27.4102 @ 0.418898 items / sec XY3P: 1613 / 28944 @ c=4, r=135, X126.798 Y74.733 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r135.jpg 1613 / 28944, ETA: 18:07:25.1386 @ 0.418897 items / sec XY3P: 1614 / 28944 @ c=5, r=135, X126.970 Y74.729 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r135.jpg 1614 / 28944, ETA: 18:07:22.9300 @ 0.418896 items / sec XY3P: 1615 / 28944 @ c=6, r=135, X127.143 Y74.725 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r135.jpg 1615 / 28944, ETA: 18:07:20.7131 @ 0.418895 items / sec XY3P: 1616 / 28944 @ c=7, r=135, X127.316 Y74.721 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r135.jpg 1616 / 28944, ETA: 18:07:18.5009 @ 0.418894 items / sec XY3P: 1617 / 28944 @ c=8, r=135, X127.489 Y74.717 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r135.jpg 1617 / 28944, ETA: 18:07:16.3070 @ 0.418893 items / sec XY3P: 1618 / 28944 @ c=9, r=135, X127.661 Y74.713 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r135.jpg 1618 / 28944, ETA: 18:07:14.0508 @ 0.418892 items / sec XY3P: 1619 / 28944 @ c=10, r=135, X127.834 Y74.709 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r135.jpg 1619 / 28944, ETA: 18:07:11.8434 @ 0.418891 items / sec XY3P: 1620 / 28944 @ c=11, r=135, X128.007 Y74.705 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r135.jpg 1620 / 28944, ETA: 18:07:09.6199 @ 0.418889 items / sec XY3P: 1621 / 28944 @ c=12, r=135, X128.180 Y74.701 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r135.jpg 1621 / 28944, ETA: 18:07:07.4141 @ 0.418888 items / sec XY3P: 1622 / 28944 @ c=13, r=135, X128.352 Y74.697 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r135.jpg 1622 / 28944, ETA: 18:07:01.8556 @ 0.418909 items / sec XY3P: 1623 / 28944 @ c=14, r=135, X128.525 Y74.693 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r135.jpg 1623 / 28944, ETA: 18:06:59.6065 @ 0.418908 items / sec XY3P: 1624 / 28944 @ c=15, r=135, X128.698 Y74.689 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r135.jpg 1624 / 28944, ETA: 18:06:54.0259 @ 0.418928 items / sec XY3P: 1625 / 28944 @ c=16, r=135, X128.871 Y74.685 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r135.jpg 1625 / 28944, ETA: 18:06:51.8166 @ 0.418927 items / sec XY3P: 1626 / 28944 @ c=17, r=135, X129.043 Y74.681 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r135.jpg 1626 / 28944, ETA: 18:06:49.6233 @ 0.418926 items / sec XY3P: 1627 / 28944 @ c=18, r=135, X129.216 Y74.677 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r135.jpg 1627 / 28944, ETA: 18:06:47.3712 @ 0.418925 items / sec XY3P: 1628 / 28944 @ c=19, r=135, X129.389 Y74.673 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r135.jpg 1628 / 28944, ETA: 18:06:45.1591 @ 0.418924 items / sec XY3P: 1629 / 28944 @ c=20, r=135, X129.562 Y74.670 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r135.jpg 1629 / 28944, ETA: 18:06:42.9303 @ 0.418923 items / sec XY3P: 1630 / 28944 @ c=21, r=135, X129.734 Y74.666 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r135.jpg 1630 / 28944, ETA: 18:06:40.7321 @ 0.418922 items / sec XY3P: 1631 / 28944 @ c=22, r=135, X129.907 Y74.662 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r135.jpg 1631 / 28944, ETA: 18:06:38.5430 @ 0.418920 items / sec XY3P: 1632 / 28944 @ c=23, r=135, X130.080 Y74.658 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r135.jpg 1632 / 28944, ETA: 18:06:36.2996 @ 0.418919 items / sec XY3P: 1633 / 28944 @ c=24, r=135, X130.253 Y74.654 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r135.jpg 1633 / 28944, ETA: 18:06:34.0851 @ 0.418918 items / sec XY3P: 1634 / 28944 @ c=25, r=135, X130.425 Y74.650 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r135.jpg 1634 / 28944, ETA: 18:06:31.8726 @ 0.418917 items / sec XY3P: 1635 / 28944 @ c=26, r=135, X130.598 Y74.646 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r135.jpg 1635 / 28944, ETA: 18:06:29.6451 @ 0.418916 items / sec XY3P: 1636 / 28944 @ c=27, r=135, X130.771 Y74.642 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r135.jpg 1636 / 28944, ETA: 18:06:27.4625 @ 0.418915 items / sec XY3P: 1637 / 28944 @ c=28, r=135, X130.944 Y74.638 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r135.jpg 1637 / 28944, ETA: 18:06:25.2133 @ 0.418914 items / sec XY3P: 1638 / 28944 @ c=29, r=135, X131.116 Y74.634 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r135.jpg 1638 / 28944, ETA: 18:06:23.1005 @ 0.418912 items / sec XY3P: 1639 / 28944 @ c=30, r=135, X131.289 Y74.630 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r135.jpg 1639 / 28944, ETA: 18:06:20.7752 @ 0.418912 items / sec XY3P: 1640 / 28944 @ c=31, r=135, X131.462 Y74.626 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r135.jpg 1640 / 28944, ETA: 18:06:18.5611 @ 0.418911 items / sec XY3P: 1641 / 28944 @ c=32, r=135, X131.635 Y74.622 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r135.jpg 1641 / 28944, ETA: 18:06:13.0501 @ 0.418931 items / sec XY3P: 1642 / 28944 @ c=33, r=135, X131.807 Y74.618 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r135.jpg 1642 / 28944, ETA: 18:06:07.4772 @ 0.418951 items / sec XY3P: 1643 / 28944 @ c=34, r=135, X131.980 Y74.614 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r135.jpg 1643 / 28944, ETA: 18:06:05.3560 @ 0.418950 items / sec XY3P: 1644 / 28944 @ c=35, r=135, X132.153 Y74.610 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r135.jpg 1644 / 28944, ETA: 18:06:03.0340 @ 0.418949 items / sec XY3P: 1645 / 28944 @ c=36, r=135, X132.326 Y74.606 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r135.jpg 1645 / 28944, ETA: 18:06:00.8568 @ 0.418948 items / sec XY3P: 1646 / 28944 @ c=37, r=135, X132.498 Y74.602 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r135.jpg 1646 / 28944, ETA: 18:05:58.6193 @ 0.418947 items / sec XY3P: 1647 / 28944 @ c=38, r=135, X132.671 Y74.598 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r135.jpg 1647 / 28944, ETA: 18:05:56.3920 @ 0.418946 items / sec XY3P: 1648 / 28944 @ c=39, r=135, X132.844 Y74.594 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r135.jpg 1648 / 28944, ETA: 18:05:54.2002 @ 0.418945 items / sec XY3P: 1649 / 28944 @ c=40, r=135, X133.017 Y74.590 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r135.jpg 1649 / 28944, ETA: 18:05:51.9621 @ 0.418944 items / sec XY3P: 1650 / 28944 @ c=41, r=135, X133.189 Y74.586 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r135.jpg 1650 / 28944, ETA: 18:05:49.7792 @ 0.418942 items / sec XY3P: 1651 / 28944 @ c=42, r=135, X133.362 Y74.582 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r135.jpg 1651 / 28944, ETA: 18:05:47.5419 @ 0.418941 items / sec XY3P: 1652 / 28944 @ c=43, r=135, X133.535 Y74.578 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r135.jpg 1652 / 28944, ETA: 18:05:45.3455 @ 0.418940 items / sec XY3P: 1653 / 28944 @ c=44, r=135, X133.708 Y74.574 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r135.jpg 1653 / 28944, ETA: 18:05:43.0958 @ 0.418939 items / sec XY3P: 1654 / 28944 @ c=45, r=135, X133.880 Y74.570 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r135.jpg 1654 / 28944, ETA: 18:05:40.8858 @ 0.418938 items / sec XY3P: 1655 / 28944 @ c=46, r=135, X134.053 Y74.566 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r135.jpg 1655 / 28944, ETA: 18:05:38.6914 @ 0.418937 items / sec XY3P: 1656 / 28944 @ c=47, r=135, X134.226 Y74.562 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r135.jpg 1656 / 28944, ETA: 18:05:36.4469 @ 0.418936 items / sec XY3P: 1657 / 28944 @ c=48, r=135, X134.399 Y74.558 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r135.jpg 1657 / 28944, ETA: 18:05:34.2355 @ 0.418935 items / sec XY3P: 1658 / 28944 @ c=49, r=135, X134.571 Y74.555 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r135.jpg 1658 / 28944, ETA: 18:05:32.0146 @ 0.418934 items / sec XY3P: 1659 / 28944 @ c=50, r=135, X134.744 Y74.551 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r135.jpg 1659 / 28944, ETA: 18:05:26.5006 @ 0.418954 items / sec XY3P: 1660 / 28944 @ c=51, r=135, X134.917 Y74.547 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r135.jpg 1660 / 28944, ETA: 18:05:21.0103 @ 0.418974 items / sec XY3P: 1661 / 28944 @ c=52, r=135, X135.090 Y74.543 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r135.jpg 1661 / 28944, ETA: 18:05:15.5118 @ 0.418994 items / sec XY3P: 1662 / 28944 @ c=53, r=135, X135.262 Y74.539 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r135.jpg 1662 / 28944, ETA: 18:05:13.2843 @ 0.418993 items / sec XY3P: 1663 / 28944 @ c=54, r=135, X135.435 Y74.535 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r135.jpg 1663 / 28944, ETA: 18:05:11.0841 @ 0.418992 items / sec XY3P: 1664 / 28944 @ c=55, r=135, X135.608 Y74.531 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r135.jpg 1664 / 28944, ETA: 18:05:08.9009 @ 0.418990 items / sec XY3P: 1665 / 28944 @ c=56, r=135, X135.781 Y74.527 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r135.jpg 1665 / 28944, ETA: 18:05:06.6454 @ 0.418989 items / sec XY3P: 1666 / 28944 @ c=57, r=135, X135.953 Y74.523 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r135.jpg 1666 / 28944, ETA: 18:05:04.4484 @ 0.418988 items / sec XY3P: 1667 / 28944 @ c=58, r=135, X136.126 Y74.519 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r135.jpg 1667 / 28944, ETA: 18:05:02.2210 @ 0.418987 items / sec XY3P: 1668 / 28944 @ c=59, r=135, X136.299 Y74.515 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r135.jpg 1668 / 28944, ETA: 18:05:00.0316 @ 0.418986 items / sec XY3P: 1669 / 28944 @ c=60, r=135, X136.472 Y74.511 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r135.jpg 1669 / 28944, ETA: 18:04:57.8362 @ 0.418985 items / sec XY3P: 1670 / 28944 @ c=61, r=135, X136.644 Y74.507 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r135.jpg 1670 / 28944, ETA: 18:04:55.6136 @ 0.418984 items / sec XY3P: 1671 / 28944 @ c=62, r=135, X136.817 Y74.503 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r135.jpg 1671 / 28944, ETA: 18:04:53.4394 @ 0.418982 items / sec XY3P: 1672 / 28944 @ c=63, r=135, X136.990 Y74.499 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r135.jpg 1672 / 28944, ETA: 18:04:51.1491 @ 0.418982 items / sec XY3P: 1673 / 28944 @ c=64, r=135, X137.163 Y74.495 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r135.jpg 1673 / 28944, ETA: 18:04:48.9716 @ 0.418980 items / sec XY3P: 1674 / 28944 @ c=65, r=135, X137.335 Y74.491 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r135.jpg 1674 / 28944, ETA: 18:04:46.7487 @ 0.418979 items / sec XY3P: 1675 / 28944 @ c=66, r=135, X137.508 Y74.487 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r135.jpg 1675 / 28944, ETA: 18:04:44.5039 @ 0.418978 items / sec XY3P: 1676 / 28944 @ c=67, r=135, X137.681 Y74.483 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r135.jpg 1676 / 28944, ETA: 18:04:42.3045 @ 0.418977 items / sec XY3P: 1677 / 28944 @ c=68, r=135, X137.854 Y74.479 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r135.jpg 1677 / 28944, ETA: 18:04:40.0751 @ 0.418976 items / sec XY3P: 1678 / 28944 @ c=69, r=135, X138.026 Y74.475 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r135.jpg 1678 / 28944, ETA: 18:04:37.8874 @ 0.418975 items / sec XY3P: 1679 / 28944 @ c=70, r=135, X138.199 Y74.471 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r135.jpg 1679 / 28944, ETA: 18:04:32.4002 @ 0.418995 items / sec XY3P: 1680 / 28944 @ c=71, r=135, X138.372 Y74.467 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r135.jpg 1680 / 28944, ETA: 18:04:26.9478 @ 0.419015 items / sec XY3P: 1681 / 28944 @ c=72, r=135, X138.545 Y74.463 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r135.jpg 1681 / 28944, ETA: 18:04:24.7349 @ 0.419013 items / sec XY3P: 1682 / 28944 @ c=73, r=135, X138.717 Y74.459 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r135.jpg 1682 / 28944, ETA: 18:04:22.5403 @ 0.419012 items / sec XY3P: 1683 / 28944 @ c=74, r=135, X138.890 Y74.455 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r135.jpg 1683 / 28944, ETA: 18:04:20.2918 @ 0.419011 items / sec XY3P: 1684 / 28944 @ c=75, r=135, X139.063 Y74.451 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r135.jpg 1684 / 28944, ETA: 18:04:18.0937 @ 0.419010 items / sec XY3P: 1685 / 28944 @ c=76, r=135, X139.236 Y74.447 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r135.jpg 1685 / 28944, ETA: 18:04:15.8873 @ 0.419009 items / sec XY3P: 1686 / 28944 @ c=77, r=135, X139.408 Y74.444 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r135.jpg 1686 / 28944, ETA: 18:04:13.6748 @ 0.419008 items / sec XY3P: 1687 / 28944 @ c=78, r=135, X139.581 Y74.440 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r135.jpg 1687 / 28944, ETA: 18:04:11.4841 @ 0.419007 items / sec XY3P: 1688 / 28944 @ c=79, r=135, X139.754 Y74.436 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r135.jpg 1688 / 28944, ETA: 18:04:09.2430 @ 0.419006 items / sec XY3P: 1689 / 28944 @ c=80, r=135, X139.927 Y74.432 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r135.jpg 1689 / 28944, ETA: 18:04:07.0299 @ 0.419005 items / sec XY3P: 1690 / 28944 @ c=81, r=135, X140.099 Y74.428 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r135.jpg 1690 / 28944, ETA: 18:04:04.7932 @ 0.419004 items / sec XY3P: 1691 / 28944 @ c=82, r=135, X140.272 Y74.424 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r135.jpg 1691 / 28944, ETA: 18:04:02.5925 @ 0.419002 items / sec XY3P: 1692 / 28944 @ c=83, r=135, X140.445 Y74.420 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r135.jpg 1692 / 28944, ETA: 18:04:00.4000 @ 0.419001 items / sec XY3P: 1693 / 28944 @ c=84, r=135, X140.618 Y74.416 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r135.jpg 1693 / 28944, ETA: 18:03:58.1675 @ 0.419000 items / sec XY3P: 1694 / 28944 @ c=85, r=135, X140.790 Y74.412 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r135.jpg 1694 / 28944, ETA: 18:03:55.9454 @ 0.418999 items / sec XY3P: 1695 / 28944 @ c=86, r=135, X140.963 Y74.408 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r135.jpg 1695 / 28944, ETA: 18:03:53.7519 @ 0.418998 items / sec XY3P: 1696 / 28944 @ c=87, r=135, X141.136 Y74.404 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r135.jpg 1696 / 28944, ETA: 18:03:51.5156 @ 0.418997 items / sec XY3P: 1697 / 28944 @ c=88, r=135, X141.309 Y74.400 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r135.jpg 1697 / 28944, ETA: 18:03:46.1233 @ 0.419016 items / sec XY3P: 1698 / 28944 @ c=89, r=135, X141.481 Y74.396 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r135.jpg 1698 / 28944, ETA: 18:03:40.6763 @ 0.419036 items / sec XY3P: 1699 / 28944 @ c=90, r=135, X141.654 Y74.392 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r135.jpg 1699 / 28944, ETA: 18:03:35.2544 @ 0.419056 items / sec XY3P: 1700 / 28944 @ c=91, r=135, X141.827 Y74.388 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r135.jpg 1700 / 28944, ETA: 18:03:33.0398 @ 0.419054 items / sec XY3P: 1701 / 28944 @ c=92, r=135, X142.000 Y74.384 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r135.jpg 1701 / 28944, ETA: 18:03:30.8699 @ 0.419053 items / sec XY3P: 1702 / 28944 @ c=93, r=135, X142.172 Y74.380 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r135.jpg 1702 / 28944, ETA: 18:03:28.6230 @ 0.419052 items / sec XY3P: 1703 / 28944 @ c=94, r=135, X142.345 Y74.376 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r135.jpg 1703 / 28944, ETA: 18:03:26.4070 @ 0.419051 items / sec XY3P: 1704 / 28944 @ c=95, r=135, X142.518 Y74.372 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r135.jpg 1704 / 28944, ETA: 18:03:24.1983 @ 0.419050 items / sec XY3P: 1705 / 28944 @ c=96, r=135, X142.691 Y74.368 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r135.jpg 1705 / 28944, ETA: 18:03:21.9890 @ 0.419049 items / sec XY3P: 1706 / 28944 @ c=97, r=135, X142.863 Y74.364 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r135.jpg 1706 / 28944, ETA: 18:03:19.8035 @ 0.419047 items / sec XY3P: 1707 / 28944 @ c=98, r=135, X143.036 Y74.360 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r135.jpg 1707 / 28944, ETA: 18:03:17.5626 @ 0.419046 items / sec XY3P: 1708 / 28944 @ c=99, r=135, X143.209 Y74.356 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r135.jpg 1708 / 28944, ETA: 18:03:15.3516 @ 0.419045 items / sec XY3P: 1709 / 28944 @ c=100, r=135, X143.382 Y74.352 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r135.jpg 1709 / 28944, ETA: 18:03:13.1400 @ 0.419044 items / sec XY3P: 1710 / 28944 @ c=101, r=135, X143.554 Y74.348 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r135.jpg 1710 / 28944, ETA: 18:03:11.0247 @ 0.419042 items / sec XY3P: 1711 / 28944 @ c=102, r=135, X143.727 Y74.344 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r135.jpg 1711 / 28944, ETA: 18:03:08.7496 @ 0.419042 items / sec XY3P: 1712 / 28944 @ c=103, r=135, X143.900 Y74.340 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r135.jpg 1712 / 28944, ETA: 18:03:06.4943 @ 0.419041 items / sec XY3P: 1713 / 28944 @ c=104, r=135, X144.073 Y74.336 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r135.jpg 1713 / 28944, ETA: 18:03:04.2820 @ 0.419040 items / sec XY3P: 1714 / 28944 @ c=105, r=135, X144.245 Y74.332 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r135.jpg 1714 / 28944, ETA: 18:03:02.0725 @ 0.419039 items / sec XY3P: 1715 / 28944 @ c=106, r=135, X144.418 Y74.329 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r135.jpg 1715 / 28944, ETA: 18:02:59.8525 @ 0.419038 items / sec XY3P: 1716 / 28944 @ c=107, r=135, X144.591 Y74.325 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r135.jpg 1716 / 28944, ETA: 18:02:54.4642 @ 0.419057 items / sec XY3P: 1717 / 28944 @ c=108, r=135, X144.764 Y74.321 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r135.jpg 1717 / 28944, ETA: 18:02:49.0930 @ 0.419076 items / sec XY3P: 1718 / 28944 @ c=109, r=135, X144.936 Y74.317 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r135.jpg 1718 / 28944, ETA: 18:02:46.8713 @ 0.419075 items / sec XY3P: 1719 / 28944 @ c=110, r=135, X145.109 Y74.313 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r135.jpg 1719 / 28944, ETA: 18:02:44.6647 @ 0.419074 items / sec XY3P: 1720 / 28944 @ c=111, r=135, X145.282 Y74.309 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r135.jpg 1720 / 28944, ETA: 18:02:42.4867 @ 0.419073 items / sec XY3P: 1721 / 28944 @ c=112, r=135, X145.455 Y74.305 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r135.jpg 1721 / 28944, ETA: 18:02:40.2439 @ 0.419072 items / sec XY3P: 1722 / 28944 @ c=113, r=135, X145.627 Y74.301 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r135.jpg 1722 / 28944, ETA: 18:02:38.0297 @ 0.419071 items / sec XY3P: 1723 / 28944 @ c=114, r=135, X145.800 Y74.297 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r135.jpg 1723 / 28944, ETA: 18:02:35.8208 @ 0.419069 items / sec XY3P: 1724 / 28944 @ c=115, r=135, X145.973 Y74.293 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r135.jpg 1724 / 28944, ETA: 18:02:33.6108 @ 0.419068 items / sec XY3P: 1725 / 28944 @ c=116, r=135, X146.146 Y74.289 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r135.jpg 1725 / 28944, ETA: 18:02:31.4334 @ 0.419067 items / sec XY3P: 1726 / 28944 @ c=117, r=135, X146.318 Y74.285 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r135.jpg 1726 / 28944, ETA: 18:02:29.1907 @ 0.419066 items / sec XY3P: 1727 / 28944 @ c=118, r=135, X146.491 Y74.281 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r135.jpg 1727 / 28944, ETA: 18:02:26.9757 @ 0.419065 items / sec XY3P: 1728 / 28944 @ c=119, r=135, X146.664 Y74.277 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r135.jpg 1728 / 28944, ETA: 18:02:24.8661 @ 0.419063 items / sec XY3P: 1729 / 28944 @ c=120, r=135, X146.837 Y74.273 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r135.jpg 1729 / 28944, ETA: 18:02:22.5479 @ 0.419063 items / sec XY3P: 1730 / 28944 @ c=121, r=135, X147.009 Y74.269 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r135.jpg 1730 / 28944, ETA: 18:02:20.3604 @ 0.419061 items / sec XY3P: 1731 / 28944 @ c=122, r=135, X147.182 Y74.265 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r135.jpg 1731 / 28944, ETA: 18:02:18.1194 @ 0.419060 items / sec XY3P: 1732 / 28944 @ c=123, r=135, X147.355 Y74.261 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r135.jpg 1732 / 28944, ETA: 18:02:15.9925 @ 0.419059 items / sec XY3P: 1733 / 28944 @ c=124, r=135, X147.528 Y74.257 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r135.jpg 1733 / 28944, ETA: 18:02:13.7095 @ 0.419058 items / sec XY3P: 1734 / 28944 @ c=125, r=135, X147.700 Y74.253 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r135.jpg 1734 / 28944, ETA: 18:02:11.4770 @ 0.419057 items / sec XY3P: 1735 / 28944 @ c=126, r=135, X147.873 Y74.249 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r135.jpg 1735 / 28944, ETA: 18:02:06.1394 @ 0.419076 items / sec XY3P: 1736 / 28944 @ c=127, r=135, X148.046 Y74.245 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r135.jpg 1736 / 28944, ETA: 18:02:00.7724 @ 0.419095 items / sec XY3P: 1737 / 28944 @ c=128, r=135, X148.219 Y74.241 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r135.jpg 1737 / 28944, ETA: 18:01:58.5725 @ 0.419094 items / sec XY3P: 1738 / 28944 @ c=129, r=135, X148.391 Y74.237 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r135.jpg 1738 / 28944, ETA: 18:01:56.3619 @ 0.419093 items / sec XY3P: 1739 / 28944 @ c=130, r=135, X148.564 Y74.233 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r135.jpg 1739 / 28944, ETA: 18:01:54.1799 @ 0.419092 items / sec XY3P: 1740 / 28944 @ c=131, r=135, X148.737 Y74.229 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r135.jpg 1740 / 28944, ETA: 18:01:52.0343 @ 0.419090 items / sec XY3P: 1741 / 28944 @ c=132, r=135, X148.910 Y74.225 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r135.jpg 1741 / 28944, ETA: 18:01:49.7270 @ 0.419090 items / sec XY3P: 1742 / 28944 @ c=133, r=135, X149.082 Y74.221 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r135.jpg 1742 / 28944, ETA: 18:01:47.6408 @ 0.419088 items / sec XY3P: 1743 / 28944 @ c=134, r=135, X149.255 Y74.218 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r135.jpg 1743 / 28944, ETA: 18:01:45.3088 @ 0.419087 items / sec XY3P: 1744 / 28944 @ c=135, r=135, X149.428 Y74.214 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r135.jpg 1744 / 28944, ETA: 18:01:43.1442 @ 0.419086 items / sec XY3P: 1745 / 28944 @ c=136, r=135, X149.601 Y74.210 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r135.jpg 1745 / 28944, ETA: 18:01:40.9557 @ 0.419085 items / sec XY3P: 1746 / 28944 @ c=137, r=135, X149.773 Y74.206 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r135.jpg 1746 / 28944, ETA: 18:01:38.6591 @ 0.419084 items / sec XY3P: 1747 / 28944 @ c=138, r=135, X149.946 Y74.202 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r135.jpg 1747 / 28944, ETA: 18:01:36.4622 @ 0.419083 items / sec XY3P: 1748 / 28944 @ c=139, r=135, X150.119 Y74.198 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r135.jpg 1748 / 28944, ETA: 18:01:34.2620 @ 0.419082 items / sec XY3P: 1749 / 28944 @ c=140, r=135, X150.292 Y74.194 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r135.jpg 1749 / 28944, ETA: 18:01:32.0242 @ 0.419081 items / sec XY3P: 1750 / 28944 @ c=141, r=135, X150.464 Y74.190 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r135.jpg 1750 / 28944, ETA: 18:01:29.8041 @ 0.419080 items / sec XY3P: 1751 / 28944 @ c=142, r=135, X150.637 Y74.186 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r135.jpg 1751 / 28944, ETA: 18:01:27.6260 @ 0.419078 items / sec XY3P: 1752 / 28944 @ c=143, r=135, X150.810 Y74.182 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r135.jpg 1752 / 28944, ETA: 18:01:25.3829 @ 0.419077 items / sec XY3P: 1753 / 28944 @ c=144, r=135, X150.983 Y74.178 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r135.jpg 1753 / 28944, ETA: 18:01:20.0848 @ 0.419096 items / sec XY3P: 1754 / 28944 @ c=145, r=135, X151.155 Y74.174 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r135.jpg 1754 / 28944, ETA: 18:01:17.8538 @ 0.419095 items / sec XY3P: 1755 / 28944 @ c=146, r=135, X151.328 Y74.170 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r135.jpg 1755 / 28944, ETA: 18:01:12.5372 @ 0.419114 items / sec XY3P: 1756 / 28944 @ c=147, r=135, X151.501 Y74.166 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r135.jpg 1756 / 28944, ETA: 18:01:10.3345 @ 0.419113 items / sec XY3P: 1757 / 28944 @ c=148, r=135, X151.674 Y74.162 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r135.jpg 1757 / 28944, ETA: 18:01:08.1463 @ 0.419112 items / sec XY3P: 1758 / 28944 @ c=149, r=135, X151.846 Y74.158 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r135.jpg 1758 / 28944, ETA: 18:01:05.9185 @ 0.419111 items / sec XY3P: 1759 / 28944 @ c=150, r=135, X152.019 Y74.154 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r135.jpg 1759 / 28944, ETA: 18:01:03.7118 @ 0.419110 items / sec XY3P: 1760 / 28944 @ c=151, r=135, X152.192 Y74.150 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r135.jpg 1760 / 28944, ETA: 18:01:01.4951 @ 0.419108 items / sec XY3P: 1761 / 28944 @ c=152, r=135, X152.365 Y74.146 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r135.jpg 1761 / 28944, ETA: 18:00:59.2753 @ 0.419107 items / sec XY3P: 1762 / 28944 @ c=153, r=135, X152.537 Y74.142 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r135.jpg 1762 / 28944, ETA: 18:00:57.0759 @ 0.419106 items / sec XY3P: 1763 / 28944 @ c=154, r=135, X152.710 Y74.138 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r135.jpg 1763 / 28944, ETA: 18:00:54.9505 @ 0.419104 items / sec XY3P: 1764 / 28944 @ c=155, r=135, X152.883 Y74.134 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r135.jpg 1764 / 28944, ETA: 18:00:52.6403 @ 0.419104 items / sec XY3P: 1765 / 28944 @ c=156, r=135, X153.056 Y74.130 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r135.jpg 1765 / 28944, ETA: 18:00:50.4264 @ 0.419103 items / sec XY3P: 1766 / 28944 @ c=157, r=135, X153.228 Y74.126 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r135.jpg 1766 / 28944, ETA: 18:00:48.2174 @ 0.419102 items / sec XY3P: 1767 / 28944 @ c=158, r=135, X153.401 Y74.122 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r135.jpg 1767 / 28944, ETA: 18:00:46.0256 @ 0.419100 items / sec XY3P: 1768 / 28944 @ c=159, r=135, X153.574 Y74.118 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r135.jpg 1768 / 28944, ETA: 18:00:43.7832 @ 0.419100 items / sec XY3P: 1769 / 28944 @ c=160, r=135, X153.747 Y74.114 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r135.jpg 1769 / 28944, ETA: 18:00:41.5534 @ 0.419099 items / sec XY3P: 1770 / 28944 @ c=161, r=135, X153.919 Y74.110 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r135.jpg 1770 / 28944, ETA: 18:00:39.3527 @ 0.419097 items / sec XY3P: 1771 / 28944 @ c=162, r=135, X154.092 Y74.106 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r135.jpg 1771 / 28944, ETA: 18:00:37.1413 @ 0.419096 items / sec XY3P: 1772 / 28944 @ c=163, r=135, X154.265 Y74.103 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r135.jpg 1772 / 28944, ETA: 18:00:31.8948 @ 0.419115 items / sec XY3P: 1773 / 28944 @ c=164, r=135, X154.438 Y74.099 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r135.jpg 1773 / 28944, ETA: 18:00:29.6508 @ 0.419114 items / sec XY3P: 1774 / 28944 @ c=165, r=135, X154.610 Y74.095 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r135.jpg 1774 / 28944, ETA: 18:00:27.4360 @ 0.419113 items / sec XY3P: 1775 / 28944 @ c=166, r=135, X154.783 Y74.091 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r135.jpg 1775 / 28944, ETA: 18:00:25.2155 @ 0.419112 items / sec XY3P: 1776 / 28944 @ c=167, r=135, X154.956 Y74.087 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r135.jpg 1776 / 28944, ETA: 18:00:23.0014 @ 0.419110 items / sec XY3P: 1777 / 28944 @ c=168, r=135, X155.129 Y74.083 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r135.jpg 1777 / 28944, ETA: 18:00:20.8260 @ 0.419109 items / sec XY3P: 1778 / 28944 @ c=169, r=135, X155.301 Y74.079 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r135.jpg 1778 / 28944, ETA: 18:00:18.5720 @ 0.419108 items / sec XY3P: 1779 / 28944 @ c=170, r=135, X155.474 Y74.075 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r135.jpg 1779 / 28944, ETA: 18:00:16.3670 @ 0.419107 items / sec XY3P: 1780 / 28944 @ c=171, r=135, X155.647 Y74.071 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r135.jpg 1780 / 28944, ETA: 18:00:14.1354 @ 0.419106 items / sec XY3P: 1781 / 28944 @ c=172, r=135, X155.820 Y74.067 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r135.jpg 1781 / 28944, ETA: 18:00:11.9323 @ 0.419105 items / sec XY3P: 1782 / 28944 @ c=173, r=135, X155.992 Y74.063 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r135.jpg 1782 / 28944, ETA: 18:00:09.7560 @ 0.419104 items / sec XY3P: 1783 / 28944 @ c=174, r=135, X156.165 Y74.059 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r135.jpg 1783 / 28944, ETA: 18:00:07.5047 @ 0.419103 items / sec XY3P: 1784 / 28944 @ c=175, r=135, X156.338 Y74.055 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r135.jpg 1784 / 28944, ETA: 18:00:05.2967 @ 0.419102 items / sec XY3P: 1785 / 28944 @ c=176, r=135, X156.511 Y74.051 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r135.jpg 1785 / 28944, ETA: 18:00:03.0676 @ 0.419101 items / sec XY3P: 1786 / 28944 @ c=177, r=135, X156.683 Y74.047 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r135.jpg 1786 / 28944, ETA: 18:00:00.8598 @ 0.419099 items / sec XY3P: 1787 / 28944 @ c=178, r=135, X156.856 Y74.043 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r135.jpg 1787 / 28944, ETA: 17:59:58.6711 @ 0.419098 items / sec XY3P: 1788 / 28944 @ c=179, r=135, X157.029 Y74.039 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r135.jpg 1788 / 28944, ETA: 17:59:56.4233 @ 0.419097 items / sec XY3P: 1789 / 28944 @ c=180, r=135, X157.202 Y74.035 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r135.jpg 1789 / 28944, ETA: 17:59:54.2137 @ 0.419096 items / sec XY3P: 1790 / 28944 @ c=181, r=135, X157.374 Y74.031 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r135.jpg 1790 / 28944, ETA: 17:59:52.0013 @ 0.419095 items / sec XY3P: 1791 / 28944 @ c=182, r=135, X157.547 Y74.027 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r135.jpg 1791 / 28944, ETA: 17:59:46.7814 @ 0.419113 items / sec XY3P: 1792 / 28944 @ c=183, r=135, X157.720 Y74.023 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r135.jpg 1792 / 28944, ETA: 17:59:41.5040 @ 0.419132 items / sec XY3P: 1793 / 28944 @ c=184, r=135, X157.893 Y74.019 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r135.jpg 1793 / 28944, ETA: 17:59:39.2919 @ 0.419131 items / sec XY3P: 1794 / 28944 @ c=185, r=135, X158.065 Y74.015 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r135.jpg 1794 / 28944, ETA: 17:59:37.0857 @ 0.419130 items / sec XY3P: 1795 / 28944 @ c=186, r=135, X158.238 Y74.011 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r135.jpg 1795 / 28944, ETA: 17:59:34.8577 @ 0.419129 items / sec XY3P: 1796 / 28944 @ c=187, r=135, X158.411 Y74.007 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r135.jpg 1796 / 28944, ETA: 17:59:32.6670 @ 0.419127 items / sec XY3P: 1797 / 28944 @ c=188, r=135, X158.584 Y74.003 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r135.jpg 1797 / 28944, ETA: 17:59:30.4302 @ 0.419126 items / sec XY3P: 1798 / 28944 @ c=189, r=135, X158.756 Y73.999 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r135.jpg 1798 / 28944, ETA: 17:59:28.2194 @ 0.419125 items / sec XY3P: 1799 / 28944 @ c=190, r=135, X158.929 Y73.995 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r135.jpg 1799 / 28944, ETA: 17:59:26.0079 @ 0.419124 items / sec XY3P: 1800 / 28944 @ c=191, r=135, X159.102 Y73.992 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r135.jpg 1800 / 28944, ETA: 17:59:23.7932 @ 0.419123 items / sec XY3P: 1801 / 28944 @ c=192, r=135, X159.275 Y73.988 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r135.jpg 1801 / 28944, ETA: 17:59:21.6081 @ 0.419122 items / sec XY3P: 1802 / 28944 @ c=193, r=135, X159.447 Y73.984 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r135.jpg 1802 / 28944, ETA: 17:59:19.3717 @ 0.419121 items / sec XY3P: 1803 / 28944 @ c=194, r=135, X159.620 Y73.980 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r135.jpg 1803 / 28944, ETA: 17:59:14.1395 @ 0.419139 items / sec XY3P: 1804 / 28944 @ c=195, r=135, X159.793 Y73.976 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r135.jpg 1804 / 28944, ETA: 17:59:11.9270 @ 0.419138 items / sec XY3P: 1805 / 28944 @ c=196, r=135, X159.966 Y73.972 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r135.jpg 1805 / 28944, ETA: 17:59:09.7337 @ 0.419137 items / sec XY3P: 1806 / 28944 @ c=197, r=135, X160.138 Y73.968 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r135.jpg 1806 / 28944, ETA: 17:59:07.4868 @ 0.419136 items / sec XY3P: 1807 / 28944 @ c=198, r=135, X160.311 Y73.964 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r135.jpg 1807 / 28944, ETA: 17:59:05.2668 @ 0.419135 items / sec XY3P: 1808 / 28944 @ c=199, r=135, X160.484 Y73.960 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r135.jpg 1808 / 28944, ETA: 17:59:03.0718 @ 0.419134 items / sec XY3P: 1809 / 28944 @ c=200, r=135, X160.657 Y73.956 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r135.jpg 1809 / 28944, ETA: 17:58:57.8588 @ 0.419152 items / sec XY3P: 1810 / 28944 @ c=200, r=134, X160.661 Y74.129 Z-15.085 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r134.jpg 1810 / 28944, ETA: 17:58:52.6467 @ 0.419170 items / sec XY3P: 1811 / 28944 @ c=199, r=134, X160.489 Y74.133 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r134.jpg 1811 / 28944, ETA: 17:58:50.4354 @ 0.419169 items / sec XY3P: 1812 / 28944 @ c=198, r=134, X160.316 Y74.136 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r134.jpg 1812 / 28944, ETA: 17:58:48.2256 @ 0.419168 items / sec XY3P: 1813 / 28944 @ c=197, r=134, X160.143 Y74.140 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r134.jpg 1813 / 28944, ETA: 17:58:46.0153 @ 0.419167 items / sec XY3P: 1814 / 28944 @ c=196, r=134, X159.970 Y74.144 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r134.jpg 1814 / 28944, ETA: 17:58:43.8271 @ 0.419166 items / sec XY3P: 1815 / 28944 @ c=195, r=134, X159.798 Y74.148 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r134.jpg 1815 / 28944, ETA: 17:58:38.6068 @ 0.419184 items / sec XY3P: 1816 / 28944 @ c=194, r=134, X159.625 Y74.152 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r134.jpg 1816 / 28944, ETA: 17:58:36.4171 @ 0.419183 items / sec XY3P: 1817 / 28944 @ c=193, r=134, X159.452 Y74.156 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r134.jpg 1817 / 28944, ETA: 17:58:34.1979 @ 0.419182 items / sec XY3P: 1818 / 28944 @ c=192, r=134, X159.279 Y74.160 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r134.jpg 1818 / 28944, ETA: 17:58:32.0271 @ 0.419180 items / sec XY3P: 1819 / 28944 @ c=191, r=134, X159.107 Y74.164 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r134.jpg 1819 / 28944, ETA: 17:58:29.8724 @ 0.419179 items / sec XY3P: 1820 / 28944 @ c=190, r=134, X158.934 Y74.168 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r134.jpg 1820 / 28944, ETA: 17:58:27.5383 @ 0.419178 items / sec XY3P: 1821 / 28944 @ c=189, r=134, X158.761 Y74.172 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r134.jpg 1821 / 28944, ETA: 17:58:25.5036 @ 0.419176 items / sec XY3P: 1822 / 28944 @ c=188, r=134, X158.588 Y74.176 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r134.jpg 1822 / 28944, ETA: 17:58:23.1377 @ 0.419176 items / sec XY3P: 1823 / 28944 @ c=187, r=134, X158.416 Y74.180 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r134.jpg 1823 / 28944, ETA: 17:58:20.9369 @ 0.419175 items / sec XY3P: 1824 / 28944 @ c=186, r=134, X158.243 Y74.184 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r134.jpg 1824 / 28944, ETA: 17:58:18.8054 @ 0.419173 items / sec XY3P: 1825 / 28944 @ c=185, r=134, X158.070 Y74.188 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r134.jpg 1825 / 28944, ETA: 17:58:16.4869 @ 0.419173 items / sec XY3P: 1826 / 28944 @ c=184, r=134, X157.897 Y74.192 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r134.jpg 1826 / 28944, ETA: 17:58:14.2610 @ 0.419172 items / sec XY3P: 1827 / 28944 @ c=183, r=134, X157.725 Y74.196 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r134.jpg 1827 / 28944, ETA: 17:58:12.0585 @ 0.419170 items / sec XY3P: 1828 / 28944 @ c=182, r=134, X157.552 Y74.200 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r134.jpg 1828 / 28944, ETA: 17:58:09.9608 @ 0.419169 items / sec XY3P: 1829 / 28944 @ c=181, r=134, X157.379 Y74.204 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r134.jpg 1829 / 28944, ETA: 17:58:07.6290 @ 0.419168 items / sec XY3P: 1830 / 28944 @ c=180, r=134, X157.206 Y74.208 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r134.jpg 1830 / 28944, ETA: 17:58:05.4212 @ 0.419167 items / sec XY3P: 1831 / 28944 @ c=179, r=134, X157.034 Y74.212 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r134.jpg 1831 / 28944, ETA: 17:58:03.2058 @ 0.419166 items / sec XY3P: 1832 / 28944 @ c=178, r=134, X156.861 Y74.216 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r134.jpg 1832 / 28944, ETA: 17:58:00.9857 @ 0.419165 items / sec XY3P: 1833 / 28944 @ c=177, r=134, X156.688 Y74.220 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r134.jpg 1833 / 28944, ETA: 17:57:58.7922 @ 0.419164 items / sec XY3P: 1834 / 28944 @ c=176, r=134, X156.515 Y74.224 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r134.jpg 1834 / 28944, ETA: 17:57:56.5519 @ 0.419163 items / sec XY3P: 1835 / 28944 @ c=175, r=134, X156.343 Y74.228 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r134.jpg 1835 / 28944, ETA: 17:57:54.3418 @ 0.419162 items / sec XY3P: 1836 / 28944 @ c=174, r=134, X156.170 Y74.232 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r134.jpg 1836 / 28944, ETA: 17:57:52.1313 @ 0.419160 items / sec XY3P: 1837 / 28944 @ c=173, r=134, X155.997 Y74.236 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r134.jpg 1837 / 28944, ETA: 17:57:49.9123 @ 0.419159 items / sec XY3P: 1838 / 28944 @ c=172, r=134, X155.824 Y74.240 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r134.jpg 1838 / 28944, ETA: 17:57:47.7147 @ 0.419158 items / sec XY3P: 1839 / 28944 @ c=171, r=134, X155.652 Y74.244 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r134.jpg 1839 / 28944, ETA: 17:57:45.4694 @ 0.419157 items / sec XY3P: 1840 / 28944 @ c=170, r=134, X155.479 Y74.247 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r134.jpg 1840 / 28944, ETA: 17:57:40.3205 @ 0.419175 items / sec XY3P: 1841 / 28944 @ c=169, r=134, X155.306 Y74.251 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r134.jpg 1841 / 28944, ETA: 17:57:38.1032 @ 0.419174 items / sec XY3P: 1842 / 28944 @ c=168, r=134, X155.133 Y74.255 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r134.jpg 1842 / 28944, ETA: 17:57:35.8917 @ 0.419173 items / sec XY3P: 1843 / 28944 @ c=167, r=134, X154.961 Y74.259 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r134.jpg 1843 / 28944, ETA: 17:57:33.7078 @ 0.419172 items / sec XY3P: 1844 / 28944 @ c=166, r=134, X154.788 Y74.263 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r134.jpg 1844 / 28944, ETA: 17:57:31.5531 @ 0.419170 items / sec XY3P: 1845 / 28944 @ c=165, r=134, X154.615 Y74.267 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r134.jpg 1845 / 28944, ETA: 17:57:29.2491 @ 0.419170 items / sec XY3P: 1846 / 28944 @ c=164, r=134, X154.442 Y74.271 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r134.jpg 1846 / 28944, ETA: 17:57:27.0479 @ 0.419168 items / sec XY3P: 1847 / 28944 @ c=163, r=134, X154.270 Y74.275 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r134.jpg 1847 / 28944, ETA: 17:57:24.8163 @ 0.419167 items / sec XY3P: 1848 / 28944 @ c=162, r=134, X154.097 Y74.279 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r134.jpg 1848 / 28944, ETA: 17:57:22.6325 @ 0.419166 items / sec XY3P: 1849 / 28944 @ c=161, r=134, X153.924 Y74.283 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r134.jpg 1849 / 28944, ETA: 17:57:20.3821 @ 0.419165 items / sec XY3P: 1850 / 28944 @ c=160, r=134, X153.751 Y74.287 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r134.jpg 1850 / 28944, ETA: 17:57:18.1611 @ 0.419164 items / sec XY3P: 1851 / 28944 @ c=159, r=134, X153.579 Y74.291 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r134.jpg 1851 / 28944, ETA: 17:57:15.9500 @ 0.419163 items / sec XY3P: 1852 / 28944 @ c=158, r=134, X153.406 Y74.295 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r134.jpg 1852 / 28944, ETA: 17:57:13.7278 @ 0.419162 items / sec XY3P: 1853 / 28944 @ c=157, r=134, X153.233 Y74.299 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r134.jpg 1853 / 28944, ETA: 17:57:11.5549 @ 0.419161 items / sec XY3P: 1854 / 28944 @ c=156, r=134, X153.060 Y74.303 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r134.jpg 1854 / 28944, ETA: 17:57:09.3039 @ 0.419160 items / sec XY3P: 1855 / 28944 @ c=155, r=134, X152.888 Y74.307 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r134.jpg 1855 / 28944, ETA: 17:57:07.1690 @ 0.419158 items / sec XY3P: 1856 / 28944 @ c=154, r=134, X152.715 Y74.311 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r134.jpg 1856 / 28944, ETA: 17:57:04.8662 @ 0.419158 items / sec XY3P: 1857 / 28944 @ c=153, r=134, X152.542 Y74.315 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r134.jpg 1857 / 28944, ETA: 17:57:02.6527 @ 0.419156 items / sec XY3P: 1858 / 28944 @ c=152, r=134, X152.369 Y74.319 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r134.jpg 1858 / 28944, ETA: 17:57:00.4588 @ 0.419155 items / sec XY3P: 1859 / 28944 @ c=151, r=134, X152.197 Y74.323 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r134.jpg 1859 / 28944, ETA: 17:56:58.2136 @ 0.419154 items / sec XY3P: 1860 / 28944 @ c=150, r=134, X152.024 Y74.327 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r134.jpg 1860 / 28944, ETA: 17:56:55.9935 @ 0.419153 items / sec XY3P: 1861 / 28944 @ c=149, r=134, X151.851 Y74.331 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r134.jpg 1861 / 28944, ETA: 17:56:53.7776 @ 0.419152 items / sec XY3P: 1862 / 28944 @ c=148, r=134, X151.678 Y74.335 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r134.jpg 1862 / 28944, ETA: 17:56:51.5481 @ 0.419151 items / sec XY3P: 1863 / 28944 @ c=147, r=134, X151.506 Y74.339 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r134.jpg 1863 / 28944, ETA: 17:56:49.3683 @ 0.419150 items / sec XY3P: 1864 / 28944 @ c=146, r=134, X151.333 Y74.343 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r134.jpg 1864 / 28944, ETA: 17:56:47.1222 @ 0.419149 items / sec XY3P: 1865 / 28944 @ c=145, r=134, X151.160 Y74.347 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r134.jpg 1865 / 28944, ETA: 17:56:44.8931 @ 0.419148 items / sec XY3P: 1866 / 28944 @ c=144, r=134, X150.987 Y74.351 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r134.jpg 1866 / 28944, ETA: 17:56:42.6857 @ 0.419147 items / sec XY3P: 1867 / 28944 @ c=143, r=134, X150.815 Y74.355 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r134.jpg 1867 / 28944, ETA: 17:56:40.4648 @ 0.419146 items / sec XY3P: 1868 / 28944 @ c=142, r=134, X150.642 Y74.359 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r134.jpg 1868 / 28944, ETA: 17:56:38.2709 @ 0.419144 items / sec XY3P: 1869 / 28944 @ c=141, r=134, X150.469 Y74.362 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r134.jpg 1869 / 28944, ETA: 17:56:36.0413 @ 0.419143 items / sec XY3P: 1870 / 28944 @ c=140, r=134, X150.296 Y74.366 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r134.jpg 1870 / 28944, ETA: 17:56:33.7825 @ 0.419143 items / sec XY3P: 1871 / 28944 @ c=139, r=134, X150.124 Y74.370 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r134.jpg 1871 / 28944, ETA: 17:56:31.5833 @ 0.419141 items / sec XY3P: 1872 / 28944 @ c=138, r=134, X149.951 Y74.374 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r134.jpg 1872 / 28944, ETA: 17:56:29.3600 @ 0.419140 items / sec XY3P: 1873 / 28944 @ c=137, r=134, X149.778 Y74.378 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r134.jpg 1873 / 28944, ETA: 17:56:27.1684 @ 0.419139 items / sec XY3P: 1874 / 28944 @ c=136, r=134, X149.605 Y74.382 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r134.jpg 1874 / 28944, ETA: 17:56:24.9243 @ 0.419138 items / sec XY3P: 1875 / 28944 @ c=135, r=134, X149.433 Y74.386 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r134.jpg 1875 / 28944, ETA: 17:56:22.6911 @ 0.419137 items / sec XY3P: 1876 / 28944 @ c=134, r=134, X149.260 Y74.390 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r134.jpg 1876 / 28944, ETA: 17:56:20.4660 @ 0.419136 items / sec XY3P: 1877 / 28944 @ c=133, r=134, X149.087 Y74.394 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r134.jpg 1877 / 28944, ETA: 17:56:18.2513 @ 0.419135 items / sec XY3P: 1878 / 28944 @ c=132, r=134, X148.914 Y74.398 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r134.jpg 1878 / 28944, ETA: 17:56:16.0616 @ 0.419134 items / sec XY3P: 1879 / 28944 @ c=131, r=134, X148.742 Y74.402 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r134.jpg 1879 / 28944, ETA: 17:56:13.8061 @ 0.419133 items / sec XY3P: 1880 / 28944 @ c=130, r=134, X148.569 Y74.406 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r134.jpg 1880 / 28944, ETA: 17:56:11.5663 @ 0.419132 items / sec XY3P: 1881 / 28944 @ c=129, r=134, X148.396 Y74.410 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r134.jpg 1881 / 28944, ETA: 17:56:09.3633 @ 0.419131 items / sec XY3P: 1882 / 28944 @ c=128, r=134, X148.223 Y74.414 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r134.jpg 1882 / 28944, ETA: 17:56:07.1475 @ 0.419130 items / sec XY3P: 1883 / 28944 @ c=127, r=134, X148.051 Y74.418 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r134.jpg 1883 / 28944, ETA: 17:56:04.9414 @ 0.419128 items / sec XY3P: 1884 / 28944 @ c=126, r=134, X147.878 Y74.422 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r134.jpg 1884 / 28944, ETA: 17:56:02.6942 @ 0.419127 items / sec XY3P: 1885 / 28944 @ c=125, r=134, X147.705 Y74.426 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r134.jpg 1885 / 28944, ETA: 17:56:00.4974 @ 0.419126 items / sec XY3P: 1886 / 28944 @ c=124, r=134, X147.532 Y74.430 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r134.jpg 1886 / 28944, ETA: 17:55:58.2460 @ 0.419125 items / sec XY3P: 1887 / 28944 @ c=123, r=134, X147.360 Y74.434 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r134.jpg 1887 / 28944, ETA: 17:55:56.0264 @ 0.419124 items / sec XY3P: 1888 / 28944 @ c=122, r=134, X147.187 Y74.438 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r134.jpg 1888 / 28944, ETA: 17:55:53.8376 @ 0.419123 items / sec XY3P: 1889 / 28944 @ c=121, r=134, X147.014 Y74.442 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r134.jpg 1889 / 28944, ETA: 17:55:51.5901 @ 0.419122 items / sec XY3P: 1890 / 28944 @ c=120, r=134, X146.841 Y74.446 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r134.jpg 1890 / 28944, ETA: 17:55:49.3556 @ 0.419121 items / sec XY3P: 1891 / 28944 @ c=119, r=134, X146.669 Y74.450 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r134.jpg 1891 / 28944, ETA: 17:55:47.1666 @ 0.419120 items / sec XY3P: 1892 / 28944 @ c=118, r=134, X146.496 Y74.454 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r134.jpg 1892 / 28944, ETA: 17:55:44.9952 @ 0.419118 items / sec XY3P: 1893 / 28944 @ c=117, r=134, X146.323 Y74.458 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r134.jpg 1893 / 28944, ETA: 17:55:42.6801 @ 0.419118 items / sec XY3P: 1894 / 28944 @ c=116, r=134, X146.150 Y74.462 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r134.jpg 1894 / 28944, ETA: 17:55:40.4603 @ 0.419117 items / sec XY3P: 1895 / 28944 @ c=115, r=134, X145.978 Y74.466 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r134.jpg 1895 / 28944, ETA: 17:55:38.2481 @ 0.419116 items / sec XY3P: 1896 / 28944 @ c=114, r=134, X145.805 Y74.470 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r134.jpg 1896 / 28944, ETA: 17:55:36.0111 @ 0.419115 items / sec XY3P: 1897 / 28944 @ c=113, r=134, X145.632 Y74.474 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r134.jpg 1897 / 28944, ETA: 17:55:33.8017 @ 0.419114 items / sec XY3P: 1898 / 28944 @ c=112, r=134, X145.459 Y74.477 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r134.jpg 1898 / 28944, ETA: 17:55:31.5732 @ 0.419113 items / sec XY3P: 1899 / 28944 @ c=111, r=134, X145.287 Y74.481 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r134.jpg 1899 / 28944, ETA: 17:55:29.3352 @ 0.419112 items / sec XY3P: 1900 / 28944 @ c=110, r=134, X145.114 Y74.485 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r134.jpg 1900 / 28944, ETA: 17:55:27.1100 @ 0.419111 items / sec XY3P: 1901 / 28944 @ c=109, r=134, X144.941 Y74.489 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r134.jpg 1901 / 28944, ETA: 17:55:24.8908 @ 0.419110 items / sec XY3P: 1902 / 28944 @ c=108, r=134, X144.768 Y74.493 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r134.jpg 1902 / 28944, ETA: 17:55:22.6815 @ 0.419108 items / sec XY3P: 1903 / 28944 @ c=107, r=134, X144.596 Y74.497 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r134.jpg 1903 / 28944, ETA: 17:55:20.4338 @ 0.419108 items / sec XY3P: 1904 / 28944 @ c=106, r=134, X144.423 Y74.501 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r134.jpg 1904 / 28944, ETA: 17:55:18.1963 @ 0.419107 items / sec XY3P: 1905 / 28944 @ c=105, r=134, X144.250 Y74.505 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r134.jpg 1905 / 28944, ETA: 17:55:15.9846 @ 0.419105 items / sec XY3P: 1906 / 28944 @ c=104, r=134, X144.077 Y74.509 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r134.jpg 1906 / 28944, ETA: 17:55:13.8394 @ 0.419104 items / sec XY3P: 1907 / 28944 @ c=103, r=134, X143.905 Y74.513 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r134.jpg 1907 / 28944, ETA: 17:55:11.5588 @ 0.419103 items / sec XY3P: 1908 / 28944 @ c=102, r=134, X143.732 Y74.517 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r134.jpg 1908 / 28944, ETA: 17:55:09.3020 @ 0.419102 items / sec XY3P: 1909 / 28944 @ c=101, r=134, X143.559 Y74.521 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r134.jpg 1909 / 28944, ETA: 17:55:07.0781 @ 0.419101 items / sec XY3P: 1910 / 28944 @ c=100, r=134, X143.386 Y74.525 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r134.jpg 1910 / 28944, ETA: 17:55:04.8463 @ 0.419100 items / sec XY3P: 1911 / 28944 @ c=99, r=134, X143.214 Y74.529 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r134.jpg 1911 / 28944, ETA: 17:55:02.6141 @ 0.419099 items / sec XY3P: 1912 / 28944 @ c=98, r=134, X143.041 Y74.533 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r134.jpg 1912 / 28944, ETA: 17:55:00.4116 @ 0.419098 items / sec XY3P: 1913 / 28944 @ c=97, r=134, X142.868 Y74.537 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r134.jpg 1913 / 28944, ETA: 17:54:58.1611 @ 0.419097 items / sec XY3P: 1914 / 28944 @ c=96, r=134, X142.695 Y74.541 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r134.jpg 1914 / 28944, ETA: 17:54:55.9361 @ 0.419096 items / sec XY3P: 1915 / 28944 @ c=95, r=134, X142.523 Y74.545 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r134.jpg 1915 / 28944, ETA: 17:54:53.7039 @ 0.419095 items / sec XY3P: 1916 / 28944 @ c=94, r=134, X142.350 Y74.549 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r134.jpg 1916 / 28944, ETA: 17:54:51.4713 @ 0.419094 items / sec XY3P: 1917 / 28944 @ c=93, r=134, X142.177 Y74.553 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r134.jpg 1917 / 28944, ETA: 17:54:49.2765 @ 0.419093 items / sec XY3P: 1918 / 28944 @ c=92, r=134, X142.004 Y74.557 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r134.jpg 1918 / 28944, ETA: 17:54:47.1108 @ 0.419091 items / sec XY3P: 1919 / 28944 @ c=91, r=134, X141.832 Y74.561 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r134.jpg 1919 / 28944, ETA: 17:54:44.7933 @ 0.419091 items / sec XY3P: 1920 / 28944 @ c=90, r=134, X141.659 Y74.565 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r134.jpg 1920 / 28944, ETA: 17:54:42.5611 @ 0.419090 items / sec XY3P: 1921 / 28944 @ c=89, r=134, X141.486 Y74.569 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r134.jpg 1921 / 28944, ETA: 17:54:40.3350 @ 0.419089 items / sec XY3P: 1922 / 28944 @ c=88, r=134, X141.313 Y74.573 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r134.jpg 1922 / 28944, ETA: 17:54:38.1236 @ 0.419088 items / sec XY3P: 1923 / 28944 @ c=87, r=134, X141.141 Y74.577 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r134.jpg 1923 / 28944, ETA: 17:54:35.8815 @ 0.419087 items / sec XY3P: 1924 / 28944 @ c=86, r=134, X140.968 Y74.581 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r134.jpg 1924 / 28944, ETA: 17:54:33.6442 @ 0.419086 items / sec XY3P: 1925 / 28944 @ c=85, r=134, X140.795 Y74.585 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r134.jpg 1925 / 28944, ETA: 17:54:31.4969 @ 0.419084 items / sec XY3P: 1926 / 28944 @ c=84, r=134, X140.622 Y74.588 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r134.jpg 1926 / 28944, ETA: 17:54:29.1724 @ 0.419084 items / sec XY3P: 1927 / 28944 @ c=83, r=134, X140.450 Y74.592 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r134.jpg 1927 / 28944, ETA: 17:54:26.9793 @ 0.419083 items / sec XY3P: 1928 / 28944 @ c=82, r=134, X140.277 Y74.596 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r134.jpg 1928 / 28944, ETA: 17:54:24.7239 @ 0.419082 items / sec XY3P: 1929 / 28944 @ c=81, r=134, X140.104 Y74.600 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r134.jpg 1929 / 28944, ETA: 17:54:22.4874 @ 0.419081 items / sec XY3P: 1930 / 28944 @ c=80, r=134, X139.931 Y74.604 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r134.jpg 1930 / 28944, ETA: 17:54:20.2593 @ 0.419080 items / sec XY3P: 1931 / 28944 @ c=79, r=134, X139.759 Y74.608 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r134.jpg 1931 / 28944, ETA: 17:54:18.0199 @ 0.419079 items / sec XY3P: 1932 / 28944 @ c=78, r=134, X139.586 Y74.612 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r134.jpg 1932 / 28944, ETA: 17:54:13.0252 @ 0.419096 items / sec XY3P: 1933 / 28944 @ c=77, r=134, X139.413 Y74.616 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r134.jpg 1933 / 28944, ETA: 17:54:10.7782 @ 0.419095 items / sec XY3P: 1934 / 28944 @ c=76, r=134, X139.240 Y74.620 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r134.jpg 1934 / 28944, ETA: 17:54:08.6321 @ 0.419093 items / sec XY3P: 1935 / 28944 @ c=75, r=134, X139.068 Y74.624 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r134.jpg 1935 / 28944, ETA: 17:54:06.3149 @ 0.419093 items / sec XY3P: 1936 / 28944 @ c=74, r=134, X138.895 Y74.628 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r134.jpg 1936 / 28944, ETA: 17:54:04.0850 @ 0.419092 items / sec XY3P: 1937 / 28944 @ c=73, r=134, X138.722 Y74.632 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r134.jpg 1937 / 28944, ETA: 17:54:01.8794 @ 0.419091 items / sec XY3P: 1938 / 28944 @ c=72, r=134, X138.549 Y74.636 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r134.jpg 1938 / 28944, ETA: 17:53:59.6178 @ 0.419090 items / sec XY3P: 1939 / 28944 @ c=71, r=134, X138.377 Y74.640 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r134.jpg 1939 / 28944, ETA: 17:53:57.3916 @ 0.419089 items / sec XY3P: 1940 / 28944 @ c=70, r=134, X138.204 Y74.644 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r134.jpg 1940 / 28944, ETA: 17:53:55.2441 @ 0.419087 items / sec XY3P: 1941 / 28944 @ c=69, r=134, X138.031 Y74.648 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r134.jpg 1941 / 28944, ETA: 17:53:53.0189 @ 0.419086 items / sec XY3P: 1942 / 28944 @ c=68, r=134, X137.858 Y74.652 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r134.jpg 1942 / 28944, ETA: 17:53:50.7234 @ 0.419086 items / sec XY3P: 1943 / 28944 @ c=67, r=134, X137.686 Y74.656 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r134.jpg 1943 / 28944, ETA: 17:53:48.4683 @ 0.419085 items / sec XY3P: 1944 / 28944 @ c=66, r=134, X137.513 Y74.660 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r134.jpg 1944 / 28944, ETA: 17:53:46.2368 @ 0.419084 items / sec XY3P: 1945 / 28944 @ c=65, r=134, X137.340 Y74.664 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r134.jpg 1945 / 28944, ETA: 17:53:44.0044 @ 0.419083 items / sec XY3P: 1946 / 28944 @ c=64, r=134, X137.167 Y74.668 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r134.jpg 1946 / 28944, ETA: 17:53:41.8604 @ 0.419081 items / sec XY3P: 1947 / 28944 @ c=63, r=134, X136.995 Y74.672 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r134.jpg 1947 / 28944, ETA: 17:53:39.5662 @ 0.419081 items / sec XY3P: 1948 / 28944 @ c=62, r=134, X136.822 Y74.676 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r134.jpg 1948 / 28944, ETA: 17:53:37.4026 @ 0.419079 items / sec XY3P: 1949 / 28944 @ c=61, r=134, X136.649 Y74.680 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r134.jpg 1949 / 28944, ETA: 17:53:35.0698 @ 0.419079 items / sec XY3P: 1950 / 28944 @ c=60, r=134, X136.476 Y74.684 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r134.jpg 1950 / 28944, ETA: 17:53:32.8416 @ 0.419078 items / sec XY3P: 1951 / 28944 @ c=59, r=134, X136.304 Y74.688 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r134.jpg 1951 / 28944, ETA: 17:53:30.6032 @ 0.419077 items / sec XY3P: 1952 / 28944 @ c=58, r=134, X136.131 Y74.692 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r134.jpg 1952 / 28944, ETA: 17:53:28.3986 @ 0.419076 items / sec XY3P: 1953 / 28944 @ c=57, r=134, X135.958 Y74.696 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r134.jpg 1953 / 28944, ETA: 17:53:26.1382 @ 0.419075 items / sec XY3P: 1954 / 28944 @ c=56, r=134, X135.785 Y74.700 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r134.jpg 1954 / 28944, ETA: 17:53:23.9046 @ 0.419074 items / sec XY3P: 1955 / 28944 @ c=55, r=134, X135.613 Y74.703 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r134.jpg 1955 / 28944, ETA: 17:53:21.7533 @ 0.419072 items / sec XY3P: 1956 / 28944 @ c=54, r=134, X135.440 Y74.707 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r134.jpg 1956 / 28944, ETA: 17:53:19.4359 @ 0.419072 items / sec XY3P: 1957 / 28944 @ c=53, r=134, X135.267 Y74.711 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r134.jpg 1957 / 28944, ETA: 17:53:17.2247 @ 0.419071 items / sec XY3P: 1958 / 28944 @ c=52, r=134, X135.094 Y74.715 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r134.jpg 1958 / 28944, ETA: 17:53:14.9678 @ 0.419070 items / sec XY3P: 1959 / 28944 @ c=51, r=134, X134.922 Y74.719 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r134.jpg 1959 / 28944, ETA: 17:53:12.7400 @ 0.419069 items / sec XY3P: 1960 / 28944 @ c=50, r=134, X134.749 Y74.723 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r134.jpg 1960 / 28944, ETA: 17:53:10.4999 @ 0.419068 items / sec XY3P: 1961 / 28944 @ c=49, r=134, X134.576 Y74.727 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r134.jpg 1961 / 28944, ETA: 17:53:08.2705 @ 0.419067 items / sec XY3P: 1962 / 28944 @ c=48, r=134, X134.403 Y74.731 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r134.jpg 1962 / 28944, ETA: 17:53:06.1557 @ 0.419065 items / sec XY3P: 1963 / 28944 @ c=47, r=134, X134.231 Y74.735 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r134.jpg 1963 / 28944, ETA: 17:53:03.8038 @ 0.419065 items / sec XY3P: 1964 / 28944 @ c=46, r=134, X134.058 Y74.739 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r134.jpg 1964 / 28944, ETA: 17:53:01.5897 @ 0.419064 items / sec XY3P: 1965 / 28944 @ c=45, r=134, X133.885 Y74.743 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r134.jpg 1965 / 28944, ETA: 17:52:59.3828 @ 0.419063 items / sec XY3P: 1966 / 28944 @ c=44, r=134, X133.712 Y74.747 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r134.jpg 1966 / 28944, ETA: 17:52:57.1181 @ 0.419062 items / sec XY3P: 1967 / 28944 @ c=43, r=134, X133.540 Y74.751 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r134.jpg 1967 / 28944, ETA: 17:52:54.8516 @ 0.419061 items / sec XY3P: 1968 / 28944 @ c=42, r=134, X133.367 Y74.755 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r134.jpg 1968 / 28944, ETA: 17:52:52.6197 @ 0.419060 items / sec XY3P: 1969 / 28944 @ c=41, r=134, X133.194 Y74.759 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r134.jpg 1969 / 28944, ETA: 17:52:50.4720 @ 0.419059 items / sec XY3P: 1970 / 28944 @ c=40, r=134, X133.021 Y74.763 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r134.jpg 1970 / 28944, ETA: 17:52:48.1506 @ 0.419058 items / sec XY3P: 1971 / 28944 @ c=39, r=134, X132.849 Y74.767 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r134.jpg 1971 / 28944, ETA: 17:52:45.9350 @ 0.419057 items / sec XY3P: 1972 / 28944 @ c=38, r=134, X132.676 Y74.771 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r134.jpg 1972 / 28944, ETA: 17:52:43.6666 @ 0.419056 items / sec XY3P: 1973 / 28944 @ c=37, r=134, X132.503 Y74.775 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r134.jpg 1973 / 28944, ETA: 17:52:41.4432 @ 0.419055 items / sec XY3P: 1974 / 28944 @ c=36, r=134, X132.330 Y74.779 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r134.jpg 1974 / 28944, ETA: 17:52:39.2001 @ 0.419054 items / sec XY3P: 1975 / 28944 @ c=35, r=134, X132.158 Y74.783 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r134.jpg 1975 / 28944, ETA: 17:52:36.9677 @ 0.419053 items / sec XY3P: 1976 / 28944 @ c=34, r=134, X131.985 Y74.787 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r134.jpg 1976 / 28944, ETA: 17:52:34.7549 @ 0.419052 items / sec XY3P: 1977 / 28944 @ c=33, r=134, X131.812 Y74.791 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r134.jpg 1977 / 28944, ETA: 17:52:32.4715 @ 0.419052 items / sec XY3P: 1978 / 28944 @ c=32, r=134, X131.639 Y74.795 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r134.jpg 1978 / 28944, ETA: 17:52:30.2503 @ 0.419050 items / sec XY3P: 1979 / 28944 @ c=31, r=134, X131.467 Y74.799 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r134.jpg 1979 / 28944, ETA: 17:52:28.0143 @ 0.419049 items / sec XY3P: 1980 / 28944 @ c=30, r=134, X131.294 Y74.803 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r134.jpg 1980 / 28944, ETA: 17:52:25.7747 @ 0.419048 items / sec XY3P: 1981 / 28944 @ c=29, r=134, X131.121 Y74.807 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r134.jpg 1981 / 28944, ETA: 17:52:23.5834 @ 0.419047 items / sec XY3P: 1982 / 28944 @ c=28, r=134, X130.948 Y74.811 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r134.jpg 1982 / 28944, ETA: 17:52:21.2993 @ 0.419047 items / sec XY3P: 1983 / 28944 @ c=27, r=134, X130.776 Y74.814 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r134.jpg 1983 / 28944, ETA: 17:52:19.0643 @ 0.419046 items / sec XY3P: 1984 / 28944 @ c=26, r=134, X130.603 Y74.818 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r134.jpg 1984 / 28944, ETA: 17:52:16.8229 @ 0.419045 items / sec XY3P: 1985 / 28944 @ c=25, r=134, X130.430 Y74.822 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r134.jpg 1985 / 28944, ETA: 17:52:14.5863 @ 0.419044 items / sec XY3P: 1986 / 28944 @ c=24, r=134, X130.257 Y74.826 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r134.jpg 1986 / 28944, ETA: 17:52:12.3657 @ 0.419043 items / sec XY3P: 1987 / 28944 @ c=23, r=134, X130.085 Y74.830 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r134.jpg 1987 / 28944, ETA: 17:52:10.1059 @ 0.419042 items / sec XY3P: 1988 / 28944 @ c=22, r=134, X129.912 Y74.834 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r134.jpg 1988 / 28944, ETA: 17:52:07.8650 @ 0.419041 items / sec XY3P: 1989 / 28944 @ c=21, r=134, X129.739 Y74.838 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r134.jpg 1989 / 28944, ETA: 17:52:05.6275 @ 0.419040 items / sec XY3P: 1990 / 28944 @ c=20, r=134, X129.566 Y74.842 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r134.jpg 1990 / 28944, ETA: 17:52:03.3849 @ 0.419039 items / sec XY3P: 1991 / 28944 @ c=19, r=134, X129.394 Y74.846 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r134.jpg 1991 / 28944, ETA: 17:52:01.1766 @ 0.419038 items / sec XY3P: 1992 / 28944 @ c=18, r=134, X129.221 Y74.850 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r134.jpg 1992 / 28944, ETA: 17:51:58.9139 @ 0.419037 items / sec XY3P: 1993 / 28944 @ c=17, r=134, X129.048 Y74.854 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r134.jpg 1993 / 28944, ETA: 17:51:56.6718 @ 0.419036 items / sec XY3P: 1994 / 28944 @ c=16, r=134, X128.875 Y74.858 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r134.jpg 1994 / 28944, ETA: 17:51:54.4310 @ 0.419035 items / sec XY3P: 1995 / 28944 @ c=15, r=134, X128.703 Y74.862 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r134.jpg 1995 / 28944, ETA: 17:51:49.4969 @ 0.419052 items / sec XY3P: 1996 / 28944 @ c=14, r=134, X128.530 Y74.866 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r134.jpg 1996 / 28944, ETA: 17:51:47.3002 @ 0.419050 items / sec XY3P: 1997 / 28944 @ c=13, r=134, X128.357 Y74.870 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r134.jpg 1997 / 28944, ETA: 17:51:45.0207 @ 0.419050 items / sec XY3P: 1998 / 28944 @ c=12, r=134, X128.184 Y74.874 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r134.jpg 1998 / 28944, ETA: 17:51:42.7679 @ 0.419049 items / sec XY3P: 1999 / 28944 @ c=11, r=134, X128.012 Y74.878 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r134.jpg 1999 / 28944, ETA: 17:51:40.5342 @ 0.419048 items / sec XY3P: 2000 / 28944 @ c=10, r=134, X127.839 Y74.882 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r134.jpg 2000 / 28944, ETA: 17:51:38.2905 @ 0.419047 items / sec XY3P: 2001 / 28944 @ c=9, r=134, X127.666 Y74.886 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r134.jpg 2001 / 28944, ETA: 17:51:36.0798 @ 0.419046 items / sec XY3P: 2002 / 28944 @ c=8, r=134, X127.493 Y74.890 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r134.jpg 2002 / 28944, ETA: 17:51:33.8133 @ 0.419045 items / sec XY3P: 2003 / 28944 @ c=7, r=134, X127.321 Y74.894 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r134.jpg 2003 / 28944, ETA: 17:51:31.5696 @ 0.419044 items / sec XY3P: 2004 / 28944 @ c=6, r=134, X127.148 Y74.898 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r134.jpg 2004 / 28944, ETA: 17:51:29.3399 @ 0.419043 items / sec XY3P: 2005 / 28944 @ c=5, r=134, X126.975 Y74.902 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r134.jpg 2005 / 28944, ETA: 17:51:24.4334 @ 0.419059 items / sec XY3P: 2006 / 28944 @ c=4, r=134, X126.802 Y74.906 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r134.jpg 2006 / 28944, ETA: 17:51:22.1833 @ 0.419059 items / sec XY3P: 2007 / 28944 @ c=3, r=134, X126.630 Y74.910 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r134.jpg 2007 / 28944, ETA: 17:51:20.0160 @ 0.419057 items / sec XY3P: 2008 / 28944 @ c=2, r=134, X126.457 Y74.914 Z-15.186 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r134.jpg 2008 / 28944, ETA: 17:51:17.6981 @ 0.419057 items / sec XY3P: 2009 / 28944 @ c=1, r=134, X126.284 Y74.918 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r134.jpg 2009 / 28944, ETA: 17:51:15.4576 @ 0.419056 items / sec XY3P: 2010 / 28944 @ c=0, r=134, X126.111 Y74.922 Z-15.187 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r134.jpg 2010 / 28944, ETA: 17:51:13.2376 @ 0.419055 items / sec XY3P: 2011 / 28944 @ c=0, r=133, X126.116 Y75.094 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r133.jpg 2011 / 28944, ETA: 17:51:10.9731 @ 0.419054 items / sec XY3P: 2012 / 28944 @ c=1, r=133, X126.289 Y75.090 Z-15.185 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r133.jpg 2012 / 28944, ETA: 17:51:08.7448 @ 0.419053 items / sec XY3P: 2013 / 28944 @ c=2, r=133, X126.462 Y75.086 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r133.jpg 2013 / 28944, ETA: 17:51:06.5048 @ 0.419052 items / sec XY3P: 2014 / 28944 @ c=3, r=133, X126.634 Y75.082 Z-15.184 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r133.jpg 2014 / 28944, ETA: 17:51:01.5897 @ 0.419068 items / sec XY3P: 2015 / 28944 @ c=4, r=133, X126.807 Y75.078 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r133.jpg 2015 / 28944, ETA: 17:50:56.7549 @ 0.419084 items / sec XY3P: 2016 / 28944 @ c=5, r=133, X126.980 Y75.074 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r133.jpg 2016 / 28944, ETA: 17:50:54.4414 @ 0.419084 items / sec XY3P: 2017 / 28944 @ c=6, r=133, X127.153 Y75.070 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r133.jpg 2017 / 28944, ETA: 17:50:52.1891 @ 0.419083 items / sec XY3P: 2018 / 28944 @ c=7, r=133, X127.325 Y75.067 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r133.jpg 2018 / 28944, ETA: 17:50:49.9546 @ 0.419082 items / sec XY3P: 2019 / 28944 @ c=8, r=133, X127.498 Y75.063 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r133.jpg 2019 / 28944, ETA: 17:50:47.7487 @ 0.419081 items / sec XY3P: 2020 / 28944 @ c=9, r=133, X127.671 Y75.059 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r133.jpg 2020 / 28944, ETA: 17:50:45.4781 @ 0.419080 items / sec XY3P: 2021 / 28944 @ c=10, r=133, X127.844 Y75.055 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r133.jpg 2021 / 28944, ETA: 17:50:43.2465 @ 0.419079 items / sec XY3P: 2022 / 28944 @ c=11, r=133, X128.016 Y75.051 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r133.jpg 2022 / 28944, ETA: 17:50:41.0105 @ 0.419078 items / sec XY3P: 2023 / 28944 @ c=12, r=133, X128.189 Y75.047 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r133.jpg 2023 / 28944, ETA: 17:50:38.7743 @ 0.419077 items / sec XY3P: 2024 / 28944 @ c=13, r=133, X128.362 Y75.043 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r133.jpg 2024 / 28944, ETA: 17:50:36.5450 @ 0.419076 items / sec XY3P: 2025 / 28944 @ c=14, r=133, X128.535 Y75.039 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r133.jpg 2025 / 28944, ETA: 17:50:34.2852 @ 0.419075 items / sec XY3P: 2026 / 28944 @ c=15, r=133, X128.707 Y75.035 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r133.jpg 2026 / 28944, ETA: 17:50:29.3880 @ 0.419092 items / sec XY3P: 2027 / 28944 @ c=16, r=133, X128.880 Y75.031 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r133.jpg 2027 / 28944, ETA: 17:50:27.1664 @ 0.419091 items / sec XY3P: 2028 / 28944 @ c=17, r=133, X129.053 Y75.027 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r133.jpg 2028 / 28944, ETA: 17:50:24.9160 @ 0.419090 items / sec XY3P: 2029 / 28944 @ c=18, r=133, X129.226 Y75.023 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r133.jpg 2029 / 28944, ETA: 17:50:22.7115 @ 0.419089 items / sec XY3P: 2030 / 28944 @ c=19, r=133, X129.398 Y75.019 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r133.jpg 2030 / 28944, ETA: 17:50:20.4446 @ 0.419088 items / sec XY3P: 2031 / 28944 @ c=20, r=133, X129.571 Y75.015 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r133.jpg 2031 / 28944, ETA: 17:50:18.2125 @ 0.419087 items / sec XY3P: 2032 / 28944 @ c=21, r=133, X129.744 Y75.011 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r133.jpg 2032 / 28944, ETA: 17:50:15.9668 @ 0.419086 items / sec XY3P: 2033 / 28944 @ c=22, r=133, X129.917 Y75.007 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r133.jpg 2033 / 28944, ETA: 17:50:11.1052 @ 0.419102 items / sec XY3P: 2034 / 28944 @ c=23, r=133, X130.089 Y75.003 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r133.jpg 2034 / 28944, ETA: 17:50:06.2095 @ 0.419118 items / sec XY3P: 2035 / 28944 @ c=24, r=133, X130.262 Y74.999 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r133.jpg 2035 / 28944, ETA: 17:50:03.9721 @ 0.419117 items / sec XY3P: 2036 / 28944 @ c=25, r=133, X130.435 Y74.995 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r133.jpg 2036 / 28944, ETA: 17:50:01.7331 @ 0.419116 items / sec XY3P: 2037 / 28944 @ c=26, r=133, X130.608 Y74.991 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r133.jpg 2037 / 28944, ETA: 17:49:59.5132 @ 0.419115 items / sec XY3P: 2038 / 28944 @ c=27, r=133, X130.780 Y74.987 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r133.jpg 2038 / 28944, ETA: 17:49:57.3133 @ 0.419114 items / sec XY3P: 2039 / 28944 @ c=28, r=133, X130.953 Y74.983 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r133.jpg 2039 / 28944, ETA: 17:49:55.0807 @ 0.419113 items / sec XY3P: 2040 / 28944 @ c=29, r=133, X131.126 Y74.979 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r133.jpg 2040 / 28944, ETA: 17:49:52.7846 @ 0.419113 items / sec XY3P: 2041 / 28944 @ c=30, r=133, X131.299 Y74.975 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r133.jpg 2041 / 28944, ETA: 17:49:50.5466 @ 0.419112 items / sec XY3P: 2042 / 28944 @ c=31, r=133, X131.471 Y74.971 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r133.jpg 2042 / 28944, ETA: 17:49:48.3302 @ 0.419110 items / sec XY3P: 2043 / 28944 @ c=32, r=133, X131.644 Y74.967 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r133.jpg 2043 / 28944, ETA: 17:49:46.0701 @ 0.419110 items / sec XY3P: 2044 / 28944 @ c=33, r=133, X131.817 Y74.963 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r133.jpg 2044 / 28944, ETA: 17:49:43.8252 @ 0.419109 items / sec XY3P: 2045 / 28944 @ c=34, r=133, X131.990 Y74.959 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r133.jpg 2045 / 28944, ETA: 17:49:41.5926 @ 0.419108 items / sec XY3P: 2046 / 28944 @ c=35, r=133, X132.162 Y74.955 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r133.jpg 2046 / 28944, ETA: 17:49:39.3556 @ 0.419107 items / sec XY3P: 2047 / 28944 @ c=36, r=133, X132.335 Y74.952 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r133.jpg 2047 / 28944, ETA: 17:49:37.2155 @ 0.419105 items / sec XY3P: 2048 / 28944 @ c=37, r=133, X132.508 Y74.948 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r133.jpg 2048 / 28944, ETA: 17:49:34.8768 @ 0.419105 items / sec XY3P: 2049 / 28944 @ c=38, r=133, X132.681 Y74.944 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r133.jpg 2049 / 28944, ETA: 17:49:32.6510 @ 0.419104 items / sec XY3P: 2050 / 28944 @ c=39, r=133, X132.853 Y74.940 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r133.jpg 2050 / 28944, ETA: 17:49:30.3957 @ 0.419103 items / sec XY3P: 2051 / 28944 @ c=40, r=133, X133.026 Y74.936 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r133.jpg 2051 / 28944, ETA: 17:49:25.5476 @ 0.419119 items / sec XY3P: 2052 / 28944 @ c=41, r=133, X133.199 Y74.932 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r133.jpg 2052 / 28944, ETA: 17:49:20.6896 @ 0.419135 items / sec XY3P: 2053 / 28944 @ c=42, r=133, X133.372 Y74.928 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r133.jpg 2053 / 28944, ETA: 17:49:15.8348 @ 0.419151 items / sec XY3P: 2054 / 28944 @ c=43, r=133, X133.544 Y74.924 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r133.jpg 2054 / 28944, ETA: 17:49:13.6007 @ 0.419150 items / sec XY3P: 2055 / 28944 @ c=44, r=133, X133.717 Y74.920 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r133.jpg 2055 / 28944, ETA: 17:49:11.3729 @ 0.419149 items / sec XY3P: 2056 / 28944 @ c=45, r=133, X133.890 Y74.916 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r133.jpg 2056 / 28944, ETA: 17:49:09.1499 @ 0.419148 items / sec XY3P: 2057 / 28944 @ c=46, r=133, X134.063 Y74.912 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r133.jpg 2057 / 28944, ETA: 17:49:06.8928 @ 0.419147 items / sec XY3P: 2058 / 28944 @ c=47, r=133, X134.235 Y74.908 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r133.jpg 2058 / 28944, ETA: 17:49:04.6556 @ 0.419146 items / sec XY3P: 2059 / 28944 @ c=48, r=133, X134.408 Y74.904 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r133.jpg 2059 / 28944, ETA: 17:49:02.4193 @ 0.419145 items / sec XY3P: 2060 / 28944 @ c=49, r=133, X134.581 Y74.900 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r133.jpg 2060 / 28944, ETA: 17:49:00.2592 @ 0.419144 items / sec XY3P: 2061 / 28944 @ c=50, r=133, X134.754 Y74.896 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r133.jpg 2061 / 28944, ETA: 17:48:57.9669 @ 0.419143 items / sec XY3P: 2062 / 28944 @ c=51, r=133, X134.926 Y74.892 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r133.jpg 2062 / 28944, ETA: 17:48:55.7158 @ 0.419142 items / sec XY3P: 2063 / 28944 @ c=52, r=133, X135.099 Y74.888 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r133.jpg 2063 / 28944, ETA: 17:48:53.4734 @ 0.419141 items / sec XY3P: 2064 / 28944 @ c=53, r=133, X135.272 Y74.884 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r133.jpg 2064 / 28944, ETA: 17:48:51.2377 @ 0.419141 items / sec XY3P: 2065 / 28944 @ c=54, r=133, X135.445 Y74.880 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r133.jpg 2065 / 28944, ETA: 17:48:48.9965 @ 0.419140 items / sec XY3P: 2066 / 28944 @ c=55, r=133, X135.617 Y74.876 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r133.jpg 2066 / 28944, ETA: 17:48:46.7937 @ 0.419138 items / sec XY3P: 2067 / 28944 @ c=56, r=133, X135.790 Y74.872 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r133.jpg 2067 / 28944, ETA: 17:48:44.5185 @ 0.419138 items / sec XY3P: 2068 / 28944 @ c=57, r=133, X135.963 Y74.868 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r133.jpg 2068 / 28944, ETA: 17:48:42.2809 @ 0.419137 items / sec XY3P: 2069 / 28944 @ c=58, r=133, X136.136 Y74.864 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r133.jpg 2069 / 28944, ETA: 17:48:40.0501 @ 0.419136 items / sec XY3P: 2070 / 28944 @ c=59, r=133, X136.308 Y74.860 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r133.jpg 2070 / 28944, ETA: 17:48:35.2387 @ 0.419152 items / sec XY3P: 2071 / 28944 @ c=60, r=133, X136.481 Y74.856 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r133.jpg 2071 / 28944, ETA: 17:48:30.3880 @ 0.419168 items / sec XY3P: 2072 / 28944 @ c=61, r=133, X136.654 Y74.852 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r133.jpg 2072 / 28944, ETA: 17:48:28.1555 @ 0.419167 items / sec XY3P: 2073 / 28944 @ c=62, r=133, X136.827 Y74.848 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r133.jpg 2073 / 28944, ETA: 17:48:25.9255 @ 0.419166 items / sec XY3P: 2074 / 28944 @ c=63, r=133, X136.999 Y74.844 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r133.jpg 2074 / 28944, ETA: 17:48:23.6783 @ 0.419165 items / sec XY3P: 2075 / 28944 @ c=64, r=133, X137.172 Y74.841 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r133.jpg 2075 / 28944, ETA: 17:48:21.5524 @ 0.419163 items / sec XY3P: 2076 / 28944 @ c=65, r=133, X137.345 Y74.837 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r133.jpg 2076 / 28944, ETA: 17:48:19.2116 @ 0.419163 items / sec XY3P: 2077 / 28944 @ c=66, r=133, X137.518 Y74.833 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r133.jpg 2077 / 28944, ETA: 17:48:16.9737 @ 0.419162 items / sec XY3P: 2078 / 28944 @ c=67, r=133, X137.690 Y74.829 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r133.jpg 2078 / 28944, ETA: 17:48:14.7456 @ 0.419161 items / sec XY3P: 2079 / 28944 @ c=68, r=133, X137.863 Y74.825 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r133.jpg 2079 / 28944, ETA: 17:48:12.4990 @ 0.419160 items / sec XY3P: 2080 / 28944 @ c=69, r=133, X138.036 Y74.821 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r133.jpg 2080 / 28944, ETA: 17:48:10.3019 @ 0.419159 items / sec XY3P: 2081 / 28944 @ c=70, r=133, X138.209 Y74.817 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r133.jpg 2081 / 28944, ETA: 17:48:08.0309 @ 0.419158 items / sec XY3P: 2082 / 28944 @ c=71, r=133, X138.381 Y74.813 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r133.jpg 2082 / 28944, ETA: 17:48:05.7875 @ 0.419157 items / sec XY3P: 2083 / 28944 @ c=72, r=133, X138.554 Y74.809 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r133.jpg 2083 / 28944, ETA: 17:48:03.5504 @ 0.419156 items / sec XY3P: 2084 / 28944 @ c=73, r=133, X138.727 Y74.805 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r133.jpg 2084 / 28944, ETA: 17:48:01.3176 @ 0.419155 items / sec XY3P: 2085 / 28944 @ c=74, r=133, X138.900 Y74.801 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r133.jpg 2085 / 28944, ETA: 17:47:59.1062 @ 0.419154 items / sec XY3P: 2086 / 28944 @ c=75, r=133, X139.072 Y74.797 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r133.jpg 2086 / 28944, ETA: 17:47:56.8417 @ 0.419153 items / sec XY3P: 2087 / 28944 @ c=76, r=133, X139.245 Y74.793 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r133.jpg 2087 / 28944, ETA: 17:47:54.6104 @ 0.419152 items / sec XY3P: 2088 / 28944 @ c=77, r=133, X139.418 Y74.789 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r133.jpg 2088 / 28944, ETA: 17:47:52.3643 @ 0.419151 items / sec XY3P: 2089 / 28944 @ c=78, r=133, X139.591 Y74.785 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r133.jpg 2089 / 28944, ETA: 17:47:47.5867 @ 0.419167 items / sec XY3P: 2090 / 28944 @ c=79, r=133, X139.763 Y74.781 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r133.jpg 2090 / 28944, ETA: 17:47:42.7634 @ 0.419183 items / sec XY3P: 2091 / 28944 @ c=80, r=133, X139.936 Y74.777 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r133.jpg 2091 / 28944, ETA: 17:47:40.5070 @ 0.419182 items / sec XY3P: 2092 / 28944 @ c=81, r=133, X140.109 Y74.773 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r133.jpg 2092 / 28944, ETA: 17:47:38.2842 @ 0.419181 items / sec XY3P: 2093 / 28944 @ c=82, r=133, X140.282 Y74.769 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r133.jpg 2093 / 28944, ETA: 17:47:36.0532 @ 0.419180 items / sec XY3P: 2094 / 28944 @ c=83, r=133, X140.454 Y74.765 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r133.jpg 2094 / 28944, ETA: 17:47:33.8357 @ 0.419179 items / sec XY3P: 2095 / 28944 @ c=84, r=133, X140.627 Y74.761 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r133.jpg 2095 / 28944, ETA: 17:47:31.5791 @ 0.419178 items / sec XY3P: 2096 / 28944 @ c=85, r=133, X140.800 Y74.757 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r133.jpg 2096 / 28944, ETA: 17:47:29.3421 @ 0.419177 items / sec XY3P: 2097 / 28944 @ c=86, r=133, X140.973 Y74.753 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r133.jpg 2097 / 28944, ETA: 17:47:27.1061 @ 0.419176 items / sec XY3P: 2098 / 28944 @ c=87, r=133, X141.145 Y74.749 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r133.jpg 2098 / 28944, ETA: 17:47:24.8551 @ 0.419175 items / sec XY3P: 2099 / 28944 @ c=88, r=133, X141.318 Y74.745 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r133.jpg 2099 / 28944, ETA: 17:47:22.6562 @ 0.419174 items / sec XY3P: 2100 / 28944 @ c=89, r=133, X141.491 Y74.741 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r133.jpg 2100 / 28944, ETA: 17:47:20.3894 @ 0.419173 items / sec XY3P: 2101 / 28944 @ c=90, r=133, X141.664 Y74.737 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r133.jpg 2101 / 28944, ETA: 17:47:18.1483 @ 0.419172 items / sec XY3P: 2102 / 28944 @ c=91, r=133, X141.836 Y74.733 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r133.jpg 2102 / 28944, ETA: 17:47:15.9203 @ 0.419171 items / sec XY3P: 2103 / 28944 @ c=92, r=133, X142.009 Y74.729 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r133.jpg 2103 / 28944, ETA: 17:47:13.6807 @ 0.419170 items / sec XY3P: 2104 / 28944 @ c=93, r=133, X142.182 Y74.726 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r133.jpg 2104 / 28944, ETA: 17:47:11.4785 @ 0.419169 items / sec XY3P: 2105 / 28944 @ c=94, r=133, X142.355 Y74.722 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r133.jpg 2105 / 28944, ETA: 17:47:09.1890 @ 0.419168 items / sec XY3P: 2106 / 28944 @ c=95, r=133, X142.527 Y74.718 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r133.jpg 2106 / 28944, ETA: 17:47:06.9740 @ 0.419167 items / sec XY3P: 2107 / 28944 @ c=96, r=133, X142.700 Y74.714 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r133.jpg 2107 / 28944, ETA: 17:47:02.2592 @ 0.419182 items / sec XY3P: 2108 / 28944 @ c=97, r=133, X142.873 Y74.710 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r133.jpg 2108 / 28944, ETA: 17:47:00.0564 @ 0.419181 items / sec XY3P: 2109 / 28944 @ c=98, r=133, X143.046 Y74.706 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r133.jpg 2109 / 28944, ETA: 17:46:57.7089 @ 0.419181 items / sec XY3P: 2110 / 28944 @ c=99, r=133, X143.218 Y74.702 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r133.jpg 2110 / 28944, ETA: 17:46:55.4755 @ 0.419180 items / sec XY3P: 2111 / 28944 @ c=100, r=133, X143.391 Y74.698 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r133.jpg 2111 / 28944, ETA: 17:46:53.2808 @ 0.419179 items / sec XY3P: 2112 / 28944 @ c=101, r=133, X143.564 Y74.694 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r133.jpg 2112 / 28944, ETA: 17:46:51.0437 @ 0.419178 items / sec XY3P: 2113 / 28944 @ c=102, r=133, X143.737 Y74.690 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r133.jpg 2113 / 28944, ETA: 17:46:48.8739 @ 0.419176 items / sec XY3P: 2114 / 28944 @ c=103, r=133, X143.909 Y74.686 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r133.jpg 2114 / 28944, ETA: 17:46:46.5118 @ 0.419176 items / sec XY3P: 2115 / 28944 @ c=104, r=133, X144.082 Y74.682 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r133.jpg 2115 / 28944, ETA: 17:46:44.2824 @ 0.419175 items / sec XY3P: 2116 / 28944 @ c=105, r=133, X144.255 Y74.678 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r133.jpg 2116 / 28944, ETA: 17:46:42.0419 @ 0.419174 items / sec XY3P: 2117 / 28944 @ c=106, r=133, X144.428 Y74.674 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r133.jpg 2117 / 28944, ETA: 17:46:39.8070 @ 0.419173 items / sec XY3P: 2118 / 28944 @ c=107, r=133, X144.600 Y74.670 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r133.jpg 2118 / 28944, ETA: 17:46:37.5895 @ 0.419172 items / sec XY3P: 2119 / 28944 @ c=108, r=133, X144.773 Y74.666 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r133.jpg 2119 / 28944, ETA: 17:46:35.3277 @ 0.419171 items / sec XY3P: 2120 / 28944 @ c=109, r=133, X144.946 Y74.662 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r133.jpg 2120 / 28944, ETA: 17:46:33.0936 @ 0.419170 items / sec XY3P: 2121 / 28944 @ c=110, r=133, X145.119 Y74.658 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r133.jpg 2121 / 28944, ETA: 17:46:30.9245 @ 0.419169 items / sec XY3P: 2122 / 28944 @ c=111, r=133, X145.291 Y74.654 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r133.jpg 2122 / 28944, ETA: 17:46:28.6004 @ 0.419168 items / sec XY3P: 2123 / 28944 @ c=112, r=133, X145.464 Y74.650 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r133.jpg 2123 / 28944, ETA: 17:46:26.3938 @ 0.419167 items / sec XY3P: 2124 / 28944 @ c=113, r=133, X145.637 Y74.646 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r133.jpg 2124 / 28944, ETA: 17:46:24.1285 @ 0.419166 items / sec XY3P: 2125 / 28944 @ c=114, r=133, X145.810 Y74.642 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r133.jpg 2125 / 28944, ETA: 17:46:21.8957 @ 0.419165 items / sec XY3P: 2126 / 28944 @ c=115, r=133, X145.982 Y74.638 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r133.jpg 2126 / 28944, ETA: 17:46:17.1315 @ 0.419181 items / sec XY3P: 2127 / 28944 @ c=116, r=133, X146.155 Y74.634 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r133.jpg 2127 / 28944, ETA: 17:46:12.4011 @ 0.419196 items / sec XY3P: 2128 / 28944 @ c=117, r=133, X146.328 Y74.630 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r133.jpg 2128 / 28944, ETA: 17:46:07.6226 @ 0.419212 items / sec XY3P: 2129 / 28944 @ c=118, r=133, X146.501 Y74.626 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r133.jpg 2129 / 28944, ETA: 17:46:05.3869 @ 0.419211 items / sec XY3P: 2130 / 28944 @ c=119, r=133, X146.673 Y74.622 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r133.jpg 2130 / 28944, ETA: 17:46:03.1458 @ 0.419210 items / sec XY3P: 2131 / 28944 @ c=120, r=133, X146.846 Y74.618 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r133.jpg 2131 / 28944, ETA: 17:46:00.9292 @ 0.419209 items / sec XY3P: 2132 / 28944 @ c=121, r=133, X147.019 Y74.615 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r133.jpg 2132 / 28944, ETA: 17:45:58.6696 @ 0.419208 items / sec XY3P: 2133 / 28944 @ c=122, r=133, X147.192 Y74.611 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r133.jpg 2133 / 28944, ETA: 17:45:56.4405 @ 0.419207 items / sec XY3P: 2134 / 28944 @ c=123, r=133, X147.364 Y74.607 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r133.jpg 2134 / 28944, ETA: 17:45:54.1973 @ 0.419206 items / sec XY3P: 2135 / 28944 @ c=124, r=133, X147.537 Y74.603 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r133.jpg 2135 / 28944, ETA: 17:45:51.9641 @ 0.419205 items / sec XY3P: 2136 / 28944 @ c=125, r=133, X147.710 Y74.599 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r133.jpg 2136 / 28944, ETA: 17:45:49.7463 @ 0.419204 items / sec XY3P: 2137 / 28944 @ c=126, r=133, X147.883 Y74.595 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r133.jpg 2137 / 28944, ETA: 17:45:47.4928 @ 0.419203 items / sec XY3P: 2138 / 28944 @ c=127, r=133, X148.055 Y74.591 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r133.jpg 2138 / 28944, ETA: 17:45:45.2483 @ 0.419202 items / sec XY3P: 2139 / 28944 @ c=128, r=133, X148.228 Y74.587 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r133.jpg 2139 / 28944, ETA: 17:45:43.0875 @ 0.419201 items / sec XY3P: 2140 / 28944 @ c=129, r=133, X148.401 Y74.583 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r133.jpg 2140 / 28944, ETA: 17:45:40.7707 @ 0.419200 items / sec XY3P: 2141 / 28944 @ c=130, r=133, X148.574 Y74.579 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r133.jpg 2141 / 28944, ETA: 17:45:38.6376 @ 0.419199 items / sec XY3P: 2142 / 28944 @ c=131, r=133, X148.746 Y74.575 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r133.jpg 2142 / 28944, ETA: 17:45:36.2964 @ 0.419199 items / sec XY3P: 2143 / 28944 @ c=132, r=133, X148.919 Y74.571 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r133.jpg 2143 / 28944, ETA: 17:45:34.0645 @ 0.419197 items / sec XY3P: 2144 / 28944 @ c=133, r=133, X149.092 Y74.567 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r133.jpg 2144 / 28944, ETA: 17:45:31.8221 @ 0.419197 items / sec XY3P: 2145 / 28944 @ c=134, r=133, X149.265 Y74.563 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r133.jpg 2145 / 28944, ETA: 17:45:27.0855 @ 0.419212 items / sec XY3P: 2146 / 28944 @ c=135, r=133, X149.437 Y74.559 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r133.jpg 2146 / 28944, ETA: 17:45:22.3574 @ 0.419227 items / sec XY3P: 2147 / 28944 @ c=136, r=133, X149.610 Y74.555 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r133.jpg 2147 / 28944, ETA: 17:45:20.1212 @ 0.419226 items / sec XY3P: 2148 / 28944 @ c=137, r=133, X149.783 Y74.551 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r133.jpg 2148 / 28944, ETA: 17:45:17.8804 @ 0.419225 items / sec XY3P: 2149 / 28944 @ c=138, r=133, X149.956 Y74.547 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r133.jpg 2149 / 28944, ETA: 17:45:15.6474 @ 0.419224 items / sec XY3P: 2150 / 28944 @ c=139, r=133, X150.128 Y74.543 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r133.jpg 2150 / 28944, ETA: 17:45:13.4400 @ 0.419223 items / sec XY3P: 2151 / 28944 @ c=140, r=133, X150.301 Y74.539 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r133.jpg 2151 / 28944, ETA: 17:45:11.1683 @ 0.419223 items / sec XY3P: 2152 / 28944 @ c=141, r=133, X150.474 Y74.535 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r133.jpg 2152 / 28944, ETA: 17:45:08.9281 @ 0.419222 items / sec XY3P: 2153 / 28944 @ c=142, r=133, X150.647 Y74.531 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r133.jpg 2153 / 28944, ETA: 17:45:06.6929 @ 0.419221 items / sec XY3P: 2154 / 28944 @ c=143, r=133, X150.819 Y74.527 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r133.jpg 2154 / 28944, ETA: 17:45:04.4559 @ 0.419220 items / sec XY3P: 2155 / 28944 @ c=144, r=133, X150.992 Y74.523 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r133.jpg 2155 / 28944, ETA: 17:45:02.2346 @ 0.419219 items / sec XY3P: 2156 / 28944 @ c=145, r=133, X151.165 Y74.519 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r133.jpg 2156 / 28944, ETA: 17:44:59.9806 @ 0.419218 items / sec XY3P: 2157 / 28944 @ c=146, r=133, X151.338 Y74.515 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r133.jpg 2157 / 28944, ETA: 17:44:57.7475 @ 0.419217 items / sec XY3P: 2158 / 28944 @ c=147, r=133, X151.510 Y74.511 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r133.jpg 2158 / 28944, ETA: 17:44:55.5070 @ 0.419216 items / sec XY3P: 2159 / 28944 @ c=148, r=133, X151.683 Y74.507 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r133.jpg 2159 / 28944, ETA: 17:44:53.3448 @ 0.419214 items / sec XY3P: 2160 / 28944 @ c=149, r=133, X151.856 Y74.503 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r133.jpg 2160 / 28944, ETA: 17:44:51.0451 @ 0.419214 items / sec XY3P: 2161 / 28944 @ c=150, r=133, X152.029 Y74.500 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r133.jpg 2161 / 28944, ETA: 17:44:48.7912 @ 0.419213 items / sec XY3P: 2162 / 28944 @ c=151, r=133, X152.201 Y74.496 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r133.jpg 2162 / 28944, ETA: 17:44:46.5537 @ 0.419212 items / sec XY3P: 2163 / 28944 @ c=152, r=133, X152.374 Y74.492 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r133.jpg 2163 / 28944, ETA: 17:44:41.8450 @ 0.419227 items / sec XY3P: 2164 / 28944 @ c=153, r=133, X152.547 Y74.488 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r133.jpg 2164 / 28944, ETA: 17:44:37.1546 @ 0.419242 items / sec XY3P: 2165 / 28944 @ c=154, r=133, X152.720 Y74.484 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r133.jpg 2165 / 28944, ETA: 17:44:32.4236 @ 0.419258 items / sec XY3P: 2166 / 28944 @ c=155, r=133, X152.892 Y74.480 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r133.jpg 2166 / 28944, ETA: 17:44:30.1891 @ 0.419257 items / sec XY3P: 2167 / 28944 @ c=156, r=133, X153.065 Y74.476 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r133.jpg 2167 / 28944, ETA: 17:44:27.9521 @ 0.419256 items / sec XY3P: 2168 / 28944 @ c=157, r=133, X153.238 Y74.472 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r133.jpg 2168 / 28944, ETA: 17:44:25.7167 @ 0.419255 items / sec XY3P: 2169 / 28944 @ c=158, r=133, X153.411 Y74.468 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r133.jpg 2169 / 28944, ETA: 17:44:23.5011 @ 0.419254 items / sec XY3P: 2170 / 28944 @ c=159, r=133, X153.583 Y74.464 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r133.jpg 2170 / 28944, ETA: 17:44:21.2443 @ 0.419253 items / sec XY3P: 2171 / 28944 @ c=160, r=133, X153.756 Y74.460 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r133.jpg 2171 / 28944, ETA: 17:44:19.0048 @ 0.419252 items / sec XY3P: 2172 / 28944 @ c=161, r=133, X153.929 Y74.456 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r133.jpg 2172 / 28944, ETA: 17:44:16.8498 @ 0.419250 items / sec XY3P: 2173 / 28944 @ c=162, r=133, X154.102 Y74.452 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r133.jpg 2173 / 28944, ETA: 17:44:14.5298 @ 0.419250 items / sec XY3P: 2174 / 28944 @ c=163, r=133, X154.274 Y74.448 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r133.jpg 2174 / 28944, ETA: 17:44:12.3272 @ 0.419249 items / sec XY3P: 2175 / 28944 @ c=164, r=133, X154.447 Y74.444 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r133.jpg 2175 / 28944, ETA: 17:44:10.0671 @ 0.419248 items / sec XY3P: 2176 / 28944 @ c=165, r=133, X154.620 Y74.440 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r133.jpg 2176 / 28944, ETA: 17:44:07.8251 @ 0.419247 items / sec XY3P: 2177 / 28944 @ c=166, r=133, X154.793 Y74.436 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r133.jpg 2177 / 28944, ETA: 17:44:05.5774 @ 0.419246 items / sec XY3P: 2178 / 28944 @ c=167, r=133, X154.965 Y74.432 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r133.jpg 2178 / 28944, ETA: 17:44:03.3485 @ 0.419245 items / sec XY3P: 2179 / 28944 @ c=168, r=133, X155.138 Y74.428 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r133.jpg 2179 / 28944, ETA: 17:44:01.1330 @ 0.419244 items / sec XY3P: 2180 / 28944 @ c=169, r=133, X155.311 Y74.424 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r133.jpg 2180 / 28944, ETA: 17:43:58.8756 @ 0.419243 items / sec XY3P: 2181 / 28944 @ c=170, r=133, X155.484 Y74.420 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r133.jpg 2181 / 28944, ETA: 17:43:56.6333 @ 0.419242 items / sec XY3P: 2182 / 28944 @ c=171, r=133, X155.656 Y74.416 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r133.jpg 2182 / 28944, ETA: 17:43:51.9418 @ 0.419257 items / sec XY3P: 2183 / 28944 @ c=172, r=133, X155.829 Y74.412 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r133.jpg 2183 / 28944, ETA: 17:43:47.2921 @ 0.419272 items / sec XY3P: 2184 / 28944 @ c=173, r=133, X156.002 Y74.408 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r133.jpg 2184 / 28944, ETA: 17:43:42.5848 @ 0.419287 items / sec XY3P: 2185 / 28944 @ c=174, r=133, X156.175 Y74.404 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r133.jpg 2185 / 28944, ETA: 17:43:40.3473 @ 0.419286 items / sec XY3P: 2186 / 28944 @ c=175, r=133, X156.347 Y74.400 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r133.jpg 2186 / 28944, ETA: 17:43:38.1413 @ 0.419285 items / sec XY3P: 2187 / 28944 @ c=176, r=133, X156.520 Y74.396 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r133.jpg 2187 / 28944, ETA: 17:43:35.9894 @ 0.419284 items / sec XY3P: 2188 / 28944 @ c=177, r=133, X156.693 Y74.392 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r133.jpg 2188 / 28944, ETA: 17:43:33.6420 @ 0.419283 items / sec XY3P: 2189 / 28944 @ c=178, r=133, X156.866 Y74.389 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r133.jpg 2189 / 28944, ETA: 17:43:31.4067 @ 0.419282 items / sec XY3P: 2190 / 28944 @ c=179, r=133, X157.038 Y74.385 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r133.jpg 2190 / 28944, ETA: 17:43:29.1614 @ 0.419281 items / sec XY3P: 2191 / 28944 @ c=180, r=133, X157.211 Y74.381 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r133.jpg 2191 / 28944, ETA: 17:43:26.9276 @ 0.419280 items / sec XY3P: 2192 / 28944 @ c=181, r=133, X157.384 Y74.377 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r133.jpg 2192 / 28944, ETA: 17:43:24.7161 @ 0.419279 items / sec XY3P: 2193 / 28944 @ c=182, r=133, X157.557 Y74.373 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r133.jpg 2193 / 28944, ETA: 17:43:22.4580 @ 0.419279 items / sec XY3P: 2194 / 28944 @ c=183, r=133, X157.729 Y74.369 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r133.jpg 2194 / 28944, ETA: 17:43:20.2298 @ 0.419277 items / sec XY3P: 2195 / 28944 @ c=184, r=133, X157.902 Y74.365 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r133.jpg 2195 / 28944, ETA: 17:43:17.9818 @ 0.419277 items / sec XY3P: 2196 / 28944 @ c=185, r=133, X158.075 Y74.361 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r133.jpg 2196 / 28944, ETA: 17:43:15.7533 @ 0.419276 items / sec XY3P: 2197 / 28944 @ c=186, r=133, X158.248 Y74.357 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r133.jpg 2197 / 28944, ETA: 17:43:13.6084 @ 0.419274 items / sec XY3P: 2198 / 28944 @ c=187, r=133, X158.420 Y74.353 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r133.jpg 2198 / 28944, ETA: 17:43:11.2735 @ 0.419274 items / sec XY3P: 2199 / 28944 @ c=188, r=133, X158.593 Y74.349 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r133.jpg 2199 / 28944, ETA: 17:43:09.0378 @ 0.419273 items / sec XY3P: 2200 / 28944 @ c=189, r=133, X158.766 Y74.345 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r133.jpg 2200 / 28944, ETA: 17:43:06.8041 @ 0.419272 items / sec XY3P: 2201 / 28944 @ c=190, r=133, X158.939 Y74.341 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r133.jpg 2201 / 28944, ETA: 17:43:04.5586 @ 0.419271 items / sec XY3P: 2202 / 28944 @ c=191, r=133, X159.111 Y74.337 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r133.jpg 2202 / 28944, ETA: 17:42:59.9707 @ 0.419285 items / sec XY3P: 2203 / 28944 @ c=192, r=133, X159.284 Y74.333 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r133.jpg 2203 / 28944, ETA: 17:42:57.6643 @ 0.419285 items / sec XY3P: 2204 / 28944 @ c=193, r=133, X159.457 Y74.329 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r133.jpg 2204 / 28944, ETA: 17:42:55.4291 @ 0.419284 items / sec XY3P: 2205 / 28944 @ c=194, r=133, X159.630 Y74.325 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r133.jpg 2205 / 28944, ETA: 17:42:53.2010 @ 0.419283 items / sec XY3P: 2206 / 28944 @ c=195, r=133, X159.802 Y74.321 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r133.jpg 2206 / 28944, ETA: 17:42:51.0482 @ 0.419281 items / sec XY3P: 2207 / 28944 @ c=196, r=133, X159.975 Y74.317 Z-15.085 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r133.jpg 2207 / 28944, ETA: 17:42:48.7145 @ 0.419281 items / sec XY3P: 2208 / 28944 @ c=197, r=133, X160.148 Y74.313 Z-15.085 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r133.jpg 2208 / 28944, ETA: 17:42:46.4880 @ 0.419280 items / sec XY3P: 2209 / 28944 @ c=198, r=133, X160.321 Y74.309 Z-15.084 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r133.jpg 2209 / 28944, ETA: 17:42:44.2459 @ 0.419279 items / sec XY3P: 2210 / 28944 @ c=199, r=133, X160.493 Y74.305 Z-15.084 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r133.jpg 2210 / 28944, ETA: 17:42:42.0092 @ 0.419278 items / sec XY3P: 2211 / 28944 @ c=200, r=133, X160.666 Y74.301 Z-15.083 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r133.jpg 2211 / 28944, ETA: 17:42:39.7914 @ 0.419277 items / sec XY3P: 2212 / 28944 @ c=200, r=132, X160.671 Y74.474 Z-15.081 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r132.jpg 2212 / 28944, ETA: 17:42:37.5311 @ 0.419276 items / sec XY3P: 2213 / 28944 @ c=199, r=132, X160.498 Y74.478 Z-15.082 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r132.jpg 2213 / 28944, ETA: 17:42:35.3679 @ 0.419274 items / sec XY3P: 2214 / 28944 @ c=198, r=132, X160.325 Y74.482 Z-15.082 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r132.jpg 2214 / 28944, ETA: 17:42:33.0603 @ 0.419274 items / sec XY3P: 2215 / 28944 @ c=197, r=132, X160.153 Y74.486 Z-15.083 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r132.jpg 2215 / 28944, ETA: 17:42:30.8168 @ 0.419273 items / sec XY3P: 2216 / 28944 @ c=196, r=132, X159.980 Y74.490 Z-15.084 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r132.jpg 2216 / 28944, ETA: 17:42:28.5989 @ 0.419272 items / sec XY3P: 2217 / 28944 @ c=195, r=132, X159.807 Y74.494 Z-15.084 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r132.jpg 2217 / 28944, ETA: 17:42:26.3428 @ 0.419271 items / sec XY3P: 2218 / 28944 @ c=194, r=132, X159.634 Y74.498 Z-15.085 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r132.jpg 2218 / 28944, ETA: 17:42:24.1056 @ 0.419270 items / sec XY3P: 2219 / 28944 @ c=193, r=132, X159.462 Y74.502 Z-15.085 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r132.jpg 2219 / 28944, ETA: 17:42:21.8673 @ 0.419269 items / sec XY3P: 2220 / 28944 @ c=192, r=132, X159.289 Y74.506 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r132.jpg 2220 / 28944, ETA: 17:42:17.2237 @ 0.419284 items / sec XY3P: 2221 / 28944 @ c=191, r=132, X159.116 Y74.510 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r132.jpg 2221 / 28944, ETA: 17:42:15.0058 @ 0.419283 items / sec XY3P: 2222 / 28944 @ c=190, r=132, X158.943 Y74.514 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r132.jpg 2222 / 28944, ETA: 17:42:12.7491 @ 0.419282 items / sec XY3P: 2223 / 28944 @ c=189, r=132, X158.771 Y74.518 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r132.jpg 2223 / 28944, ETA: 17:42:10.5135 @ 0.419281 items / sec XY3P: 2224 / 28944 @ c=188, r=132, X158.598 Y74.522 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r132.jpg 2224 / 28944, ETA: 17:42:08.2697 @ 0.419280 items / sec XY3P: 2225 / 28944 @ c=187, r=132, X158.425 Y74.526 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r132.jpg 2225 / 28944, ETA: 17:42:06.0355 @ 0.419279 items / sec XY3P: 2226 / 28944 @ c=186, r=132, X158.252 Y74.530 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r132.jpg 2226 / 28944, ETA: 17:42:03.8169 @ 0.419278 items / sec XY3P: 2227 / 28944 @ c=185, r=132, X158.080 Y74.533 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r132.jpg 2227 / 28944, ETA: 17:42:03.9439 @ 0.419262 items / sec XY3P: 2228 / 28944 @ c=184, r=132, X157.907 Y74.537 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r132.jpg 2228 / 28944, ETA: 17:42:01.7118 @ 0.419261 items / sec XY3P: 2229 / 28944 @ c=183, r=132, X157.734 Y74.541 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r132.jpg 2229 / 28944, ETA: 17:41:59.4731 @ 0.419260 items / sec XY3P: 2230 / 28944 @ c=182, r=132, X157.561 Y74.545 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r132.jpg 2230 / 28944, ETA: 17:41:54.8230 @ 0.419274 items / sec XY3P: 2231 / 28944 @ c=181, r=132, X157.389 Y74.549 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r132.jpg 2231 / 28944, ETA: 17:41:52.6230 @ 0.419273 items / sec XY3P: 2232 / 28944 @ c=180, r=132, X157.216 Y74.553 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r132.jpg 2232 / 28944, ETA: 17:41:50.3652 @ 0.419272 items / sec XY3P: 2233 / 28944 @ c=179, r=132, X157.043 Y74.557 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r132.jpg 2233 / 28944, ETA: 17:41:48.1265 @ 0.419271 items / sec XY3P: 2234 / 28944 @ c=178, r=132, X156.870 Y74.561 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r132.jpg 2234 / 28944, ETA: 17:41:45.8831 @ 0.419271 items / sec XY3P: 2235 / 28944 @ c=177, r=132, X156.698 Y74.565 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r132.jpg 2235 / 28944, ETA: 17:41:43.6407 @ 0.419270 items / sec XY3P: 2236 / 28944 @ c=176, r=132, X156.525 Y74.569 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r132.jpg 2236 / 28944, ETA: 17:41:41.4982 @ 0.419268 items / sec XY3P: 2237 / 28944 @ c=175, r=132, X156.352 Y74.573 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r132.jpg 2237 / 28944, ETA: 17:41:39.1670 @ 0.419268 items / sec XY3P: 2238 / 28944 @ c=174, r=132, X156.179 Y74.577 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r132.jpg 2238 / 28944, ETA: 17:41:36.9247 @ 0.419267 items / sec XY3P: 2239 / 28944 @ c=173, r=132, X156.007 Y74.581 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r132.jpg 2239 / 28944, ETA: 17:41:34.7513 @ 0.419265 items / sec XY3P: 2240 / 28944 @ c=172, r=132, X155.834 Y74.585 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r132.jpg 2240 / 28944, ETA: 17:41:32.4403 @ 0.419265 items / sec XY3P: 2241 / 28944 @ c=171, r=132, X155.661 Y74.589 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r132.jpg 2241 / 28944, ETA: 17:41:30.2238 @ 0.419264 items / sec XY3P: 2242 / 28944 @ c=170, r=132, X155.488 Y74.593 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r132.jpg 2242 / 28944, ETA: 17:41:27.9620 @ 0.419263 items / sec XY3P: 2243 / 28944 @ c=169, r=132, X155.316 Y74.597 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r132.jpg 2243 / 28944, ETA: 17:41:25.7864 @ 0.419262 items / sec XY3P: 2244 / 28944 @ c=168, r=132, X155.143 Y74.601 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r132.jpg 2244 / 28944, ETA: 17:41:23.4774 @ 0.419261 items / sec XY3P: 2245 / 28944 @ c=167, r=132, X154.970 Y74.605 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r132.jpg 2245 / 28944, ETA: 17:41:21.2446 @ 0.419260 items / sec XY3P: 2246 / 28944 @ c=166, r=132, X154.797 Y74.609 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r132.jpg 2246 / 28944, ETA: 17:41:19.0217 @ 0.419259 items / sec XY3P: 2247 / 28944 @ c=165, r=132, X154.625 Y74.613 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r132.jpg 2247 / 28944, ETA: 17:41:16.7598 @ 0.419258 items / sec XY3P: 2248 / 28944 @ c=164, r=132, X154.452 Y74.617 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r132.jpg 2248 / 28944, ETA: 17:41:14.5090 @ 0.419257 items / sec XY3P: 2249 / 28944 @ c=163, r=132, X154.279 Y74.621 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r132.jpg 2249 / 28944, ETA: 17:41:12.2689 @ 0.419256 items / sec XY3P: 2250 / 28944 @ c=162, r=132, X154.106 Y74.625 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r132.jpg 2250 / 28944, ETA: 17:41:10.1042 @ 0.419255 items / sec XY3P: 2251 / 28944 @ c=161, r=132, X153.934 Y74.629 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r132.jpg 2251 / 28944, ETA: 17:41:07.8082 @ 0.419254 items / sec XY3P: 2252 / 28944 @ c=160, r=132, X153.761 Y74.633 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r132.jpg 2252 / 28944, ETA: 17:41:05.5464 @ 0.419253 items / sec XY3P: 2253 / 28944 @ c=159, r=132, X153.588 Y74.637 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r132.jpg 2253 / 28944, ETA: 17:41:03.3028 @ 0.419253 items / sec XY3P: 2254 / 28944 @ c=158, r=132, X153.415 Y74.641 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r132.jpg 2254 / 28944, ETA: 17:41:01.0616 @ 0.419252 items / sec XY3P: 2255 / 28944 @ c=157, r=132, X153.243 Y74.644 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r132.jpg 2255 / 28944, ETA: 17:40:58.8183 @ 0.419251 items / sec XY3P: 2256 / 28944 @ c=156, r=132, X153.070 Y74.648 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r132.jpg 2256 / 28944, ETA: 17:40:56.5975 @ 0.419250 items / sec XY3P: 2257 / 28944 @ c=155, r=132, X152.897 Y74.652 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r132.jpg 2257 / 28944, ETA: 17:40:54.3646 @ 0.419249 items / sec XY3P: 2258 / 28944 @ c=154, r=132, X152.724 Y74.656 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r132.jpg 2258 / 28944, ETA: 17:40:52.1013 @ 0.419248 items / sec XY3P: 2259 / 28944 @ c=153, r=132, X152.552 Y74.660 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r132.jpg 2259 / 28944, ETA: 17:40:49.9141 @ 0.419246 items / sec XY3P: 2260 / 28944 @ c=152, r=132, X152.379 Y74.664 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r132.jpg 2260 / 28944, ETA: 17:40:47.6880 @ 0.419245 items / sec XY3P: 2261 / 28944 @ c=151, r=132, X152.206 Y74.668 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r132.jpg 2261 / 28944, ETA: 17:40:45.3564 @ 0.419245 items / sec XY3P: 2262 / 28944 @ c=150, r=132, X152.033 Y74.672 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r132.jpg 2262 / 28944, ETA: 17:40:43.1191 @ 0.419244 items / sec XY3P: 2263 / 28944 @ c=149, r=132, X151.861 Y74.676 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r132.jpg 2263 / 28944, ETA: 17:40:40.8848 @ 0.419243 items / sec XY3P: 2264 / 28944 @ c=148, r=132, X151.688 Y74.680 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r132.jpg 2264 / 28944, ETA: 17:40:38.7039 @ 0.419242 items / sec XY3P: 2265 / 28944 @ c=147, r=132, X151.515 Y74.684 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r132.jpg 2265 / 28944, ETA: 17:40:36.4060 @ 0.419241 items / sec XY3P: 2266 / 28944 @ c=146, r=132, X151.342 Y74.688 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r132.jpg 2266 / 28944, ETA: 17:40:34.2221 @ 0.419240 items / sec XY3P: 2267 / 28944 @ c=145, r=132, X151.170 Y74.692 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r132.jpg 2267 / 28944, ETA: 17:40:31.8999 @ 0.419239 items / sec XY3P: 2268 / 28944 @ c=144, r=132, X150.997 Y74.696 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r132.jpg 2268 / 28944, ETA: 17:40:29.6619 @ 0.419238 items / sec XY3P: 2269 / 28944 @ c=143, r=132, X150.824 Y74.700 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r132.jpg 2269 / 28944, ETA: 17:40:27.4139 @ 0.419238 items / sec XY3P: 2270 / 28944 @ c=142, r=132, X150.651 Y74.704 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r132.jpg 2270 / 28944, ETA: 17:40:25.1854 @ 0.419236 items / sec XY3P: 2271 / 28944 @ c=141, r=132, X150.479 Y74.708 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r132.jpg 2271 / 28944, ETA: 17:40:22.9301 @ 0.419236 items / sec XY3P: 2272 / 28944 @ c=140, r=132, X150.306 Y74.712 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r132.jpg 2272 / 28944, ETA: 17:40:20.6782 @ 0.419235 items / sec XY3P: 2273 / 28944 @ c=139, r=132, X150.133 Y74.716 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r132.jpg 2273 / 28944, ETA: 17:40:18.4331 @ 0.419234 items / sec XY3P: 2274 / 28944 @ c=138, r=132, X149.960 Y74.720 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r132.jpg 2274 / 28944, ETA: 17:40:16.1933 @ 0.419233 items / sec XY3P: 2275 / 28944 @ c=137, r=132, X149.788 Y74.724 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r132.jpg 2275 / 28944, ETA: 17:40:14.0369 @ 0.419231 items / sec XY3P: 2276 / 28944 @ c=136, r=132, X149.615 Y74.728 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r132.jpg 2276 / 28944, ETA: 17:40:11.6875 @ 0.419231 items / sec XY3P: 2277 / 28944 @ c=135, r=132, X149.442 Y74.732 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r132.jpg 2277 / 28944, ETA: 17:40:09.4503 @ 0.419230 items / sec XY3P: 2278 / 28944 @ c=134, r=132, X149.269 Y74.736 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r132.jpg 2278 / 28944, ETA: 17:40:07.2065 @ 0.419229 items / sec XY3P: 2279 / 28944 @ c=133, r=132, X149.097 Y74.740 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r132.jpg 2279 / 28944, ETA: 17:40:04.9637 @ 0.419228 items / sec XY3P: 2280 / 28944 @ c=132, r=132, X148.924 Y74.744 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r132.jpg 2280 / 28944, ETA: 17:40:02.7415 @ 0.419227 items / sec XY3P: 2281 / 28944 @ c=131, r=132, X148.751 Y74.748 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r132.jpg 2281 / 28944, ETA: 17:40:00.4608 @ 0.419227 items / sec XY3P: 2282 / 28944 @ c=130, r=132, X148.578 Y74.752 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r132.jpg 2282 / 28944, ETA: 17:39:58.2222 @ 0.419226 items / sec XY3P: 2283 / 28944 @ c=129, r=132, X148.406 Y74.756 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r132.jpg 2283 / 28944, ETA: 17:39:55.9571 @ 0.419225 items / sec XY3P: 2284 / 28944 @ c=128, r=132, X148.233 Y74.759 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r132.jpg 2284 / 28944, ETA: 17:39:53.7306 @ 0.419224 items / sec XY3P: 2285 / 28944 @ c=127, r=132, X148.060 Y74.763 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r132.jpg 2285 / 28944, ETA: 17:39:51.5018 @ 0.419223 items / sec XY3P: 2286 / 28944 @ c=126, r=132, X147.887 Y74.767 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r132.jpg 2286 / 28944, ETA: 17:39:49.2293 @ 0.419222 items / sec XY3P: 2287 / 28944 @ c=125, r=132, X147.715 Y74.771 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r132.jpg 2287 / 28944, ETA: 17:39:46.9902 @ 0.419221 items / sec XY3P: 2288 / 28944 @ c=124, r=132, X147.542 Y74.775 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r132.jpg 2288 / 28944, ETA: 17:39:44.8215 @ 0.419220 items / sec XY3P: 2289 / 28944 @ c=123, r=132, X147.369 Y74.779 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r132.jpg 2289 / 28944, ETA: 17:39:42.4970 @ 0.419219 items / sec XY3P: 2290 / 28944 @ c=122, r=132, X147.196 Y74.783 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r132.jpg 2290 / 28944, ETA: 17:39:40.2755 @ 0.419218 items / sec XY3P: 2291 / 28944 @ c=121, r=132, X147.024 Y74.787 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r132.jpg 2291 / 28944, ETA: 17:39:37.9906 @ 0.419217 items / sec XY3P: 2292 / 28944 @ c=120, r=132, X146.851 Y74.791 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r132.jpg 2292 / 28944, ETA: 17:39:35.7566 @ 0.419216 items / sec XY3P: 2293 / 28944 @ c=119, r=132, X146.678 Y74.795 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r132.jpg 2293 / 28944, ETA: 17:39:33.5065 @ 0.419216 items / sec XY3P: 2294 / 28944 @ c=118, r=132, X146.505 Y74.799 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r132.jpg 2294 / 28944, ETA: 17:39:31.2610 @ 0.419215 items / sec XY3P: 2295 / 28944 @ c=117, r=132, X146.333 Y74.803 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r132.jpg 2295 / 28944, ETA: 17:39:29.0991 @ 0.419213 items / sec XY3P: 2296 / 28944 @ c=116, r=132, X146.160 Y74.807 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r132.jpg 2296 / 28944, ETA: 17:39:26.7660 @ 0.419213 items / sec XY3P: 2297 / 28944 @ c=115, r=132, X145.987 Y74.811 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r132.jpg 2297 / 28944, ETA: 17:39:24.5127 @ 0.419212 items / sec XY3P: 2298 / 28944 @ c=114, r=132, X145.814 Y74.815 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r132.jpg 2298 / 28944, ETA: 17:39:22.2674 @ 0.419211 items / sec XY3P: 2299 / 28944 @ c=113, r=132, X145.642 Y74.819 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r132.jpg 2299 / 28944, ETA: 17:39:20.0896 @ 0.419210 items / sec XY3P: 2300 / 28944 @ c=112, r=132, X145.469 Y74.823 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r132.jpg 2300 / 28944, ETA: 17:39:17.7885 @ 0.419209 items / sec XY3P: 2301 / 28944 @ c=111, r=132, X145.296 Y74.827 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r132.jpg 2301 / 28944, ETA: 17:39:15.5223 @ 0.419208 items / sec XY3P: 2302 / 28944 @ c=110, r=132, X145.123 Y74.831 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r132.jpg 2302 / 28944, ETA: 17:39:13.2775 @ 0.419207 items / sec XY3P: 2303 / 28944 @ c=109, r=132, X144.951 Y74.835 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r132.jpg 2303 / 28944, ETA: 17:39:11.0231 @ 0.419206 items / sec XY3P: 2304 / 28944 @ c=108, r=132, X144.778 Y74.839 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r132.jpg 2304 / 28944, ETA: 17:39:08.7764 @ 0.419206 items / sec XY3P: 2305 / 28944 @ c=107, r=132, X144.605 Y74.843 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r132.jpg 2305 / 28944, ETA: 17:39:04.2481 @ 0.419220 items / sec XY3P: 2306 / 28944 @ c=106, r=132, X144.432 Y74.847 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r132.jpg 2306 / 28944, ETA: 17:39:01.9665 @ 0.419219 items / sec XY3P: 2307 / 28944 @ c=105, r=132, X144.260 Y74.851 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r132.jpg 2307 / 28944, ETA: 17:38:59.7145 @ 0.419218 items / sec XY3P: 2308 / 28944 @ c=104, r=132, X144.087 Y74.855 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r132.jpg 2308 / 28944, ETA: 17:38:57.4783 @ 0.419217 items / sec XY3P: 2309 / 28944 @ c=103, r=132, X143.914 Y74.859 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r132.jpg 2309 / 28944, ETA: 17:38:55.2261 @ 0.419216 items / sec XY3P: 2310 / 28944 @ c=102, r=132, X143.741 Y74.863 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r132.jpg 2310 / 28944, ETA: 17:38:52.9995 @ 0.419215 items / sec XY3P: 2311 / 28944 @ c=101, r=132, X143.569 Y74.867 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r132.jpg 2311 / 28944, ETA: 17:38:50.7280 @ 0.419214 items / sec XY3P: 2312 / 28944 @ c=100, r=132, X143.396 Y74.870 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r132.jpg 2312 / 28944, ETA: 17:38:48.4715 @ 0.419214 items / sec XY3P: 2313 / 28944 @ c=99, r=132, X143.223 Y74.874 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r132.jpg 2313 / 28944, ETA: 17:38:46.2357 @ 0.419213 items / sec XY3P: 2314 / 28944 @ c=98, r=132, X143.050 Y74.878 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r132.jpg 2314 / 28944, ETA: 17:38:43.9789 @ 0.419212 items / sec XY3P: 2315 / 28944 @ c=97, r=132, X142.878 Y74.882 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r132.jpg 2315 / 28944, ETA: 17:38:41.7605 @ 0.419211 items / sec XY3P: 2316 / 28944 @ c=96, r=132, X142.705 Y74.886 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r132.jpg 2316 / 28944, ETA: 17:38:39.4817 @ 0.419210 items / sec XY3P: 2317 / 28944 @ c=95, r=132, X142.532 Y74.890 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r132.jpg 2317 / 28944, ETA: 17:38:37.2219 @ 0.419209 items / sec XY3P: 2318 / 28944 @ c=94, r=132, X142.359 Y74.894 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r132.jpg 2318 / 28944, ETA: 17:38:34.9826 @ 0.419208 items / sec XY3P: 2319 / 28944 @ c=93, r=132, X142.187 Y74.898 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r132.jpg 2319 / 28944, ETA: 17:38:32.7324 @ 0.419207 items / sec XY3P: 2320 / 28944 @ c=92, r=132, X142.014 Y74.902 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r132.jpg 2320 / 28944, ETA: 17:38:30.5138 @ 0.419206 items / sec XY3P: 2321 / 28944 @ c=91, r=132, X141.841 Y74.906 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r132.jpg 2321 / 28944, ETA: 17:38:28.2296 @ 0.419206 items / sec XY3P: 2322 / 28944 @ c=90, r=132, X141.668 Y74.910 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r132.jpg 2322 / 28944, ETA: 17:38:26.0417 @ 0.419204 items / sec XY3P: 2323 / 28944 @ c=89, r=132, X141.496 Y74.914 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r132.jpg 2323 / 28944, ETA: 17:38:23.7351 @ 0.419204 items / sec XY3P: 2324 / 28944 @ c=88, r=132, X141.323 Y74.918 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r132.jpg 2324 / 28944, ETA: 17:38:21.4852 @ 0.419203 items / sec XY3P: 2325 / 28944 @ c=87, r=132, X141.150 Y74.922 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r132.jpg 2325 / 28944, ETA: 17:38:19.2539 @ 0.419202 items / sec XY3P: 2326 / 28944 @ c=86, r=132, X140.977 Y74.926 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r132.jpg 2326 / 28944, ETA: 17:38:16.9814 @ 0.419201 items / sec XY3P: 2327 / 28944 @ c=85, r=132, X140.805 Y74.930 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r132.jpg 2327 / 28944, ETA: 17:38:14.7484 @ 0.419200 items / sec XY3P: 2328 / 28944 @ c=84, r=132, X140.632 Y74.934 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r132.jpg 2328 / 28944, ETA: 17:38:12.4840 @ 0.419199 items / sec XY3P: 2329 / 28944 @ c=83, r=132, X140.459 Y74.938 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r132.jpg 2329 / 28944, ETA: 17:38:10.2946 @ 0.419198 items / sec XY3P: 2330 / 28944 @ c=82, r=132, X140.286 Y74.942 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r132.jpg 2330 / 28944, ETA: 17:38:08.0103 @ 0.419197 items / sec XY3P: 2331 / 28944 @ c=81, r=132, X140.114 Y74.946 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r132.jpg 2331 / 28944, ETA: 17:38:05.7313 @ 0.419197 items / sec XY3P: 2332 / 28944 @ c=80, r=132, X139.941 Y74.950 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r132.jpg 2332 / 28944, ETA: 17:38:03.4917 @ 0.419196 items / sec XY3P: 2333 / 28944 @ c=79, r=132, X139.768 Y74.954 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r132.jpg 2333 / 28944, ETA: 17:38:01.2739 @ 0.419194 items / sec XY3P: 2334 / 28944 @ c=78, r=132, X139.595 Y74.958 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r132.jpg 2334 / 28944, ETA: 17:37:58.9878 @ 0.419194 items / sec XY3P: 2335 / 28944 @ c=77, r=132, X139.423 Y74.962 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r132.jpg 2335 / 28944, ETA: 17:37:56.7142 @ 0.419193 items / sec XY3P: 2336 / 28944 @ c=76, r=132, X139.250 Y74.966 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r132.jpg 2336 / 28944, ETA: 17:37:54.6108 @ 0.419191 items / sec XY3P: 2337 / 28944 @ c=75, r=132, X139.077 Y74.970 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r132.jpg 2337 / 28944, ETA: 17:37:52.2134 @ 0.419191 items / sec XY3P: 2338 / 28944 @ c=74, r=132, X138.904 Y74.974 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r132.jpg 2338 / 28944, ETA: 17:37:49.9613 @ 0.419190 items / sec XY3P: 2339 / 28944 @ c=73, r=132, X138.732 Y74.978 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r132.jpg 2339 / 28944, ETA: 17:37:47.7308 @ 0.419189 items / sec XY3P: 2340 / 28944 @ c=72, r=132, X138.559 Y74.982 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r132.jpg 2340 / 28944, ETA: 17:37:45.4604 @ 0.419189 items / sec XY3P: 2341 / 28944 @ c=71, r=132, X138.386 Y74.985 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r132.jpg 2341 / 28944, ETA: 17:37:43.2096 @ 0.419188 items / sec XY3P: 2342 / 28944 @ c=70, r=132, X138.213 Y74.989 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r132.jpg 2342 / 28944, ETA: 17:37:40.9487 @ 0.419187 items / sec XY3P: 2343 / 28944 @ c=69, r=132, X138.041 Y74.993 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r132.jpg 2343 / 28944, ETA: 17:37:38.7017 @ 0.419186 items / sec XY3P: 2344 / 28944 @ c=68, r=132, X137.868 Y74.997 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r132.jpg 2344 / 28944, ETA: 17:37:36.4655 @ 0.419185 items / sec XY3P: 2345 / 28944 @ c=67, r=132, X137.695 Y75.001 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r132.jpg 2345 / 28944, ETA: 17:37:34.1880 @ 0.419184 items / sec XY3P: 2346 / 28944 @ c=66, r=132, X137.522 Y75.005 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r132.jpg 2346 / 28944, ETA: 17:37:31.9373 @ 0.419183 items / sec XY3P: 2347 / 28944 @ c=65, r=132, X137.350 Y75.009 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r132.jpg 2347 / 28944, ETA: 17:37:29.6878 @ 0.419183 items / sec XY3P: 2348 / 28944 @ c=64, r=132, X137.177 Y75.013 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r132.jpg 2348 / 28944, ETA: 17:37:27.4369 @ 0.419182 items / sec XY3P: 2349 / 28944 @ c=63, r=132, X137.004 Y75.017 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r132.jpg 2349 / 28944, ETA: 17:37:25.1995 @ 0.419181 items / sec XY3P: 2350 / 28944 @ c=62, r=132, X136.831 Y75.021 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r132.jpg 2350 / 28944, ETA: 17:37:20.6539 @ 0.419195 items / sec XY3P: 2351 / 28944 @ c=61, r=132, X136.659 Y75.025 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r132.jpg 2351 / 28944, ETA: 17:37:18.4111 @ 0.419194 items / sec XY3P: 2352 / 28944 @ c=60, r=132, X136.486 Y75.029 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r132.jpg 2352 / 28944, ETA: 17:37:16.1645 @ 0.419193 items / sec XY3P: 2353 / 28944 @ c=59, r=132, X136.313 Y75.033 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r132.jpg 2353 / 28944, ETA: 17:37:13.8934 @ 0.419192 items / sec XY3P: 2354 / 28944 @ c=58, r=132, X136.140 Y75.037 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r132.jpg 2354 / 28944, ETA: 17:37:11.6723 @ 0.419191 items / sec XY3P: 2355 / 28944 @ c=57, r=132, X135.968 Y75.041 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r132.jpg 2355 / 28944, ETA: 17:37:09.3955 @ 0.419190 items / sec XY3P: 2356 / 28944 @ c=56, r=132, X135.795 Y75.045 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r132.jpg 2356 / 28944, ETA: 17:37:07.1438 @ 0.419190 items / sec XY3P: 2357 / 28944 @ c=55, r=132, X135.622 Y75.049 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r132.jpg 2357 / 28944, ETA: 17:37:04.8902 @ 0.419189 items / sec XY3P: 2358 / 28944 @ c=54, r=132, X135.449 Y75.053 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r132.jpg 2358 / 28944, ETA: 17:37:02.6572 @ 0.419188 items / sec XY3P: 2359 / 28944 @ c=53, r=132, X135.277 Y75.057 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r132.jpg 2359 / 28944, ETA: 17:37:00.4095 @ 0.419187 items / sec XY3P: 2360 / 28944 @ c=52, r=132, X135.104 Y75.061 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r132.jpg 2360 / 28944, ETA: 17:36:58.2038 @ 0.419186 items / sec XY3P: 2361 / 28944 @ c=51, r=132, X134.931 Y75.065 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r132.jpg 2361 / 28944, ETA: 17:36:55.8793 @ 0.419185 items / sec XY3P: 2362 / 28944 @ c=50, r=132, X134.758 Y75.069 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r132.jpg 2362 / 28944, ETA: 17:36:53.6234 @ 0.419184 items / sec XY3P: 2363 / 28944 @ c=49, r=132, X134.586 Y75.073 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r132.jpg 2363 / 28944, ETA: 17:36:51.3724 @ 0.419183 items / sec XY3P: 2364 / 28944 @ c=48, r=132, X134.413 Y75.077 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r132.jpg 2364 / 28944, ETA: 17:36:49.1444 @ 0.419182 items / sec XY3P: 2365 / 28944 @ c=47, r=132, X134.240 Y75.081 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r132.jpg 2365 / 28944, ETA: 17:36:46.8630 @ 0.419182 items / sec XY3P: 2366 / 28944 @ c=46, r=132, X134.067 Y75.085 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r132.jpg 2366 / 28944, ETA: 17:36:44.6092 @ 0.419181 items / sec XY3P: 2367 / 28944 @ c=45, r=132, X133.895 Y75.089 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r132.jpg 2367 / 28944, ETA: 17:36:42.3585 @ 0.419180 items / sec XY3P: 2368 / 28944 @ c=44, r=132, X133.722 Y75.093 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r132.jpg 2368 / 28944, ETA: 17:36:40.1674 @ 0.419179 items / sec XY3P: 2369 / 28944 @ c=43, r=132, X133.549 Y75.097 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r132.jpg 2369 / 28944, ETA: 17:36:37.8674 @ 0.419178 items / sec XY3P: 2370 / 28944 @ c=42, r=132, X133.376 Y75.100 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r132.jpg 2370 / 28944, ETA: 17:36:35.5891 @ 0.419177 items / sec XY3P: 2371 / 28944 @ c=41, r=132, X133.204 Y75.104 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r132.jpg 2371 / 28944, ETA: 17:36:33.3296 @ 0.419177 items / sec XY3P: 2372 / 28944 @ c=40, r=132, X133.031 Y75.108 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r132.jpg 2372 / 28944, ETA: 17:36:31.0799 @ 0.419176 items / sec XY3P: 2373 / 28944 @ c=39, r=132, X132.858 Y75.112 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r132.jpg 2373 / 28944, ETA: 17:36:28.8865 @ 0.419174 items / sec XY3P: 2374 / 28944 @ c=38, r=132, X132.685 Y75.116 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r132.jpg 2374 / 28944, ETA: 17:36:26.5934 @ 0.419174 items / sec XY3P: 2375 / 28944 @ c=37, r=132, X132.513 Y75.120 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r132.jpg 2375 / 28944, ETA: 17:36:24.3133 @ 0.419173 items / sec XY3P: 2376 / 28944 @ c=36, r=132, X132.340 Y75.124 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r132.jpg 2376 / 28944, ETA: 17:36:22.0579 @ 0.419172 items / sec XY3P: 2377 / 28944 @ c=35, r=132, X132.167 Y75.128 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r132.jpg 2377 / 28944, ETA: 17:36:19.8028 @ 0.419171 items / sec XY3P: 2378 / 28944 @ c=34, r=132, X131.994 Y75.132 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r132.jpg 2378 / 28944, ETA: 17:36:17.5423 @ 0.419171 items / sec XY3P: 2379 / 28944 @ c=33, r=132, X131.822 Y75.136 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r132.jpg 2379 / 28944, ETA: 17:36:15.3114 @ 0.419170 items / sec XY3P: 2380 / 28944 @ c=32, r=132, X131.649 Y75.140 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r132.jpg 2380 / 28944, ETA: 17:36:10.8772 @ 0.419183 items / sec XY3P: 2381 / 28944 @ c=31, r=132, X131.476 Y75.144 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r132.jpg 2381 / 28944, ETA: 17:36:08.5465 @ 0.419183 items / sec XY3P: 2382 / 28944 @ c=30, r=132, X131.303 Y75.148 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r132.jpg 2382 / 28944, ETA: 17:36:06.3580 @ 0.419181 items / sec XY3P: 2383 / 28944 @ c=29, r=132, X131.131 Y75.152 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r132.jpg 2383 / 28944, ETA: 17:36:04.0512 @ 0.419181 items / sec XY3P: 2384 / 28944 @ c=28, r=132, X130.958 Y75.156 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r132.jpg 2384 / 28944, ETA: 17:36:01.7744 @ 0.419180 items / sec XY3P: 2385 / 28944 @ c=27, r=132, X130.785 Y75.160 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r132.jpg 2385 / 28944, ETA: 17:35:59.5239 @ 0.419179 items / sec XY3P: 2386 / 28944 @ c=26, r=132, X130.612 Y75.164 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r132.jpg 2386 / 28944, ETA: 17:35:57.2717 @ 0.419178 items / sec XY3P: 2387 / 28944 @ c=25, r=132, X130.440 Y75.168 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r132.jpg 2387 / 28944, ETA: 17:35:55.0081 @ 0.419178 items / sec XY3P: 2388 / 28944 @ c=24, r=132, X130.267 Y75.172 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r132.jpg 2388 / 28944, ETA: 17:35:52.7713 @ 0.419177 items / sec XY3P: 2389 / 28944 @ c=23, r=132, X130.094 Y75.176 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r132.jpg 2389 / 28944, ETA: 17:35:50.4942 @ 0.419176 items / sec XY3P: 2390 / 28944 @ c=22, r=132, X129.921 Y75.180 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r132.jpg 2390 / 28944, ETA: 17:35:48.2410 @ 0.419175 items / sec XY3P: 2391 / 28944 @ c=21, r=132, X129.749 Y75.184 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r132.jpg 2391 / 28944, ETA: 17:35:45.9844 @ 0.419174 items / sec XY3P: 2392 / 28944 @ c=20, r=132, X129.576 Y75.188 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r132.jpg 2392 / 28944, ETA: 17:35:43.7250 @ 0.419173 items / sec XY3P: 2393 / 28944 @ c=19, r=132, X129.403 Y75.192 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r132.jpg 2393 / 28944, ETA: 17:35:41.4864 @ 0.419172 items / sec XY3P: 2394 / 28944 @ c=18, r=132, X129.230 Y75.196 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r132.jpg 2394 / 28944, ETA: 17:35:39.2078 @ 0.419172 items / sec XY3P: 2395 / 28944 @ c=17, r=132, X129.058 Y75.200 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r132.jpg 2395 / 28944, ETA: 17:35:36.9554 @ 0.419171 items / sec XY3P: 2396 / 28944 @ c=16, r=132, X128.885 Y75.204 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r132.jpg 2396 / 28944, ETA: 17:35:34.6907 @ 0.419170 items / sec XY3P: 2397 / 28944 @ c=15, r=132, X128.712 Y75.208 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r132.jpg 2397 / 28944, ETA: 17:35:32.4435 @ 0.419169 items / sec XY3P: 2398 / 28944 @ c=14, r=132, X128.539 Y75.211 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r132.jpg 2398 / 28944, ETA: 17:35:30.2015 @ 0.419168 items / sec XY3P: 2399 / 28944 @ c=13, r=132, X128.367 Y75.215 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r132.jpg 2399 / 28944, ETA: 17:35:27.9260 @ 0.419167 items / sec XY3P: 2400 / 28944 @ c=12, r=132, X128.194 Y75.219 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r132.jpg 2400 / 28944, ETA: 17:35:25.6705 @ 0.419167 items / sec XY3P: 2401 / 28944 @ c=11, r=132, X128.021 Y75.223 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r132.jpg 2401 / 28944, ETA: 17:35:23.4126 @ 0.419166 items / sec XY3P: 2402 / 28944 @ c=10, r=132, X127.848 Y75.227 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r132.jpg 2402 / 28944, ETA: 17:35:21.1527 @ 0.419165 items / sec XY3P: 2403 / 28944 @ c=9, r=132, X127.676 Y75.231 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r132.jpg 2403 / 28944, ETA: 17:35:18.9948 @ 0.419163 items / sec XY3P: 2404 / 28944 @ c=8, r=132, X127.503 Y75.235 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r132.jpg 2404 / 28944, ETA: 17:35:16.6420 @ 0.419163 items / sec XY3P: 2405 / 28944 @ c=7, r=132, X127.330 Y75.239 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r132.jpg 2405 / 28944, ETA: 17:35:14.3912 @ 0.419162 items / sec XY3P: 2406 / 28944 @ c=6, r=132, X127.157 Y75.243 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r132.jpg 2406 / 28944, ETA: 17:35:12.1651 @ 0.419161 items / sec XY3P: 2407 / 28944 @ c=5, r=132, X126.985 Y75.247 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r132.jpg 2407 / 28944, ETA: 17:35:09.9388 @ 0.419160 items / sec XY3P: 2408 / 28944 @ c=4, r=132, X126.812 Y75.251 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r132.jpg 2408 / 28944, ETA: 17:35:07.6284 @ 0.419160 items / sec XY3P: 2409 / 28944 @ c=3, r=132, X126.639 Y75.255 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r132.jpg 2409 / 28944, ETA: 17:35:05.3547 @ 0.419159 items / sec XY3P: 2410 / 28944 @ c=2, r=132, X126.466 Y75.259 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r132.jpg 2410 / 28944, ETA: 17:35:03.1616 @ 0.419158 items / sec XY3P: 2411 / 28944 @ c=1, r=132, X126.294 Y75.263 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r132.jpg 2411 / 28944, ETA: 17:35:00.8431 @ 0.419157 items / sec XY3P: 2412 / 28944 @ c=0, r=132, X126.121 Y75.267 Z-15.183 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r132.jpg 2412 / 28944, ETA: 17:34:58.5682 @ 0.419156 items / sec XY3P: 2413 / 28944 @ c=0, r=131, X126.126 Y75.440 Z-15.182 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r131.jpg 2413 / 28944, ETA: 17:34:56.3327 @ 0.419155 items / sec XY3P: 2414 / 28944 @ c=1, r=131, X126.298 Y75.436 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r131.jpg 2414 / 28944, ETA: 17:34:54.0509 @ 0.419155 items / sec XY3P: 2415 / 28944 @ c=2, r=131, X126.471 Y75.432 Z-15.181 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r131.jpg 2415 / 28944, ETA: 17:34:51.7963 @ 0.419154 items / sec XY3P: 2416 / 28944 @ c=3, r=131, X126.644 Y75.428 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r131.jpg 2416 / 28944, ETA: 17:34:49.5323 @ 0.419153 items / sec XY3P: 2417 / 28944 @ c=4, r=131, X126.817 Y75.424 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r131.jpg 2417 / 28944, ETA: 17:34:47.2741 @ 0.419152 items / sec XY3P: 2418 / 28944 @ c=5, r=131, X126.989 Y75.420 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r131.jpg 2418 / 28944, ETA: 17:34:45.0366 @ 0.419151 items / sec XY3P: 2419 / 28944 @ c=6, r=131, X127.162 Y75.416 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r131.jpg 2419 / 28944, ETA: 17:34:42.7536 @ 0.419151 items / sec XY3P: 2420 / 28944 @ c=7, r=131, X127.335 Y75.412 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r131.jpg 2420 / 28944, ETA: 17:34:40.4957 @ 0.419150 items / sec XY3P: 2421 / 28944 @ c=8, r=131, X127.508 Y75.408 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r131.jpg 2421 / 28944, ETA: 17:34:38.2349 @ 0.419149 items / sec XY3P: 2422 / 28944 @ c=9, r=131, X127.680 Y75.404 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r131.jpg 2422 / 28944, ETA: 17:34:35.9644 @ 0.419148 items / sec XY3P: 2423 / 28944 @ c=10, r=131, X127.853 Y75.400 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r131.jpg 2423 / 28944, ETA: 17:34:31.5272 @ 0.419162 items / sec XY3P: 2424 / 28944 @ c=11, r=131, X128.026 Y75.396 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r131.jpg 2424 / 28944, ETA: 17:34:29.2659 @ 0.419161 items / sec XY3P: 2425 / 28944 @ c=12, r=131, X128.199 Y75.392 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r131.jpg 2425 / 28944, ETA: 17:34:24.8250 @ 0.419174 items / sec XY3P: 2426 / 28944 @ c=13, r=131, X128.371 Y75.388 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r131.jpg 2426 / 28944, ETA: 17:34:22.5589 @ 0.419174 items / sec XY3P: 2427 / 28944 @ c=14, r=131, X128.544 Y75.384 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r131.jpg 2427 / 28944, ETA: 17:34:20.3283 @ 0.419173 items / sec XY3P: 2428 / 28944 @ c=15, r=131, X128.717 Y75.380 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r131.jpg 2428 / 28944, ETA: 17:34:18.0514 @ 0.419172 items / sec XY3P: 2429 / 28944 @ c=16, r=131, X128.890 Y75.376 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r131.jpg 2429 / 28944, ETA: 17:34:15.7916 @ 0.419171 items / sec XY3P: 2430 / 28944 @ c=17, r=131, X129.062 Y75.372 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r131.jpg 2430 / 28944, ETA: 17:34:13.5309 @ 0.419170 items / sec XY3P: 2431 / 28944 @ c=18, r=131, X129.235 Y75.368 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r131.jpg 2431 / 28944, ETA: 17:34:11.2630 @ 0.419169 items / sec XY3P: 2432 / 28944 @ c=19, r=131, X129.408 Y75.364 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r131.jpg 2432 / 28944, ETA: 17:34:09.1067 @ 0.419168 items / sec XY3P: 2433 / 28944 @ c=20, r=131, X129.581 Y75.360 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r131.jpg 2433 / 28944, ETA: 17:34:06.7446 @ 0.419168 items / sec XY3P: 2434 / 28944 @ c=21, r=131, X129.753 Y75.356 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r131.jpg 2434 / 28944, ETA: 17:34:04.4974 @ 0.419167 items / sec XY3P: 2435 / 28944 @ c=22, r=131, X129.926 Y75.352 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r131.jpg 2435 / 28944, ETA: 17:34:02.2325 @ 0.419166 items / sec XY3P: 2436 / 28944 @ c=23, r=131, X130.099 Y75.349 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r131.jpg 2436 / 28944, ETA: 17:33:59.9874 @ 0.419165 items / sec XY3P: 2437 / 28944 @ c=24, r=131, X130.272 Y75.345 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r131.jpg 2437 / 28944, ETA: 17:33:57.7359 @ 0.419164 items / sec XY3P: 2438 / 28944 @ c=25, r=131, X130.444 Y75.341 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r131.jpg 2438 / 28944, ETA: 17:33:55.4561 @ 0.419164 items / sec XY3P: 2439 / 28944 @ c=26, r=131, X130.617 Y75.337 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r131.jpg 2439 / 28944, ETA: 17:33:53.1929 @ 0.419163 items / sec XY3P: 2440 / 28944 @ c=27, r=131, X130.790 Y75.333 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r131.jpg 2440 / 28944, ETA: 17:33:50.9254 @ 0.419162 items / sec XY3P: 2441 / 28944 @ c=28, r=131, X130.963 Y75.329 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r131.jpg 2441 / 28944, ETA: 17:33:48.6721 @ 0.419161 items / sec XY3P: 2442 / 28944 @ c=29, r=131, X131.135 Y75.325 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r131.jpg 2442 / 28944, ETA: 17:33:46.4341 @ 0.419160 items / sec XY3P: 2443 / 28944 @ c=30, r=131, X131.308 Y75.321 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r131.jpg 2443 / 28944, ETA: 17:33:44.1497 @ 0.419159 items / sec XY3P: 2444 / 28944 @ c=31, r=131, X131.481 Y75.317 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r131.jpg 2444 / 28944, ETA: 17:33:39.7241 @ 0.419173 items / sec XY3P: 2445 / 28944 @ c=32, r=131, X131.654 Y75.313 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r131.jpg 2445 / 28944, ETA: 17:33:37.4626 @ 0.419172 items / sec XY3P: 2446 / 28944 @ c=33, r=131, X131.826 Y75.309 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r131.jpg 2446 / 28944, ETA: 17:33:35.2247 @ 0.419171 items / sec XY3P: 2447 / 28944 @ c=34, r=131, X131.999 Y75.305 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r131.jpg 2447 / 28944, ETA: 17:33:32.9506 @ 0.419170 items / sec XY3P: 2448 / 28944 @ c=35, r=131, X132.172 Y75.301 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r131.jpg 2448 / 28944, ETA: 17:33:30.6880 @ 0.419170 items / sec XY3P: 2449 / 28944 @ c=36, r=131, X132.345 Y75.297 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r131.jpg 2449 / 28944, ETA: 17:33:28.4167 @ 0.419169 items / sec XY3P: 2450 / 28944 @ c=37, r=131, X132.517 Y75.293 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r131.jpg 2450 / 28944, ETA: 17:33:26.1667 @ 0.419168 items / sec XY3P: 2451 / 28944 @ c=38, r=131, X132.690 Y75.289 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r131.jpg 2451 / 28944, ETA: 17:33:23.9254 @ 0.419167 items / sec XY3P: 2452 / 28944 @ c=39, r=131, X132.863 Y75.285 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r131.jpg 2452 / 28944, ETA: 17:33:21.6379 @ 0.419166 items / sec XY3P: 2453 / 28944 @ c=40, r=131, X133.036 Y75.281 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r131.jpg 2453 / 28944, ETA: 17:33:19.3832 @ 0.419165 items / sec XY3P: 2454 / 28944 @ c=41, r=131, X133.208 Y75.277 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r131.jpg 2454 / 28944, ETA: 17:33:17.1238 @ 0.419165 items / sec XY3P: 2455 / 28944 @ c=42, r=131, X133.381 Y75.273 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r131.jpg 2455 / 28944, ETA: 17:33:14.8632 @ 0.419164 items / sec XY3P: 2456 / 28944 @ c=43, r=131, X133.554 Y75.269 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r131.jpg 2456 / 28944, ETA: 17:33:12.6145 @ 0.419163 items / sec XY3P: 2457 / 28944 @ c=44, r=131, X133.727 Y75.265 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r131.jpg 2457 / 28944, ETA: 17:33:10.4100 @ 0.419162 items / sec XY3P: 2458 / 28944 @ c=45, r=131, X133.899 Y75.261 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r131.jpg 2458 / 28944, ETA: 17:33:08.0798 @ 0.419161 items / sec XY3P: 2459 / 28944 @ c=46, r=131, X134.072 Y75.257 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r131.jpg 2459 / 28944, ETA: 17:33:05.8191 @ 0.419161 items / sec XY3P: 2460 / 28944 @ c=47, r=131, X134.245 Y75.253 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r131.jpg 2460 / 28944, ETA: 17:33:03.5543 @ 0.419160 items / sec XY3P: 2461 / 28944 @ c=48, r=131, X134.418 Y75.249 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r131.jpg 2461 / 28944, ETA: 17:32:59.1665 @ 0.419173 items / sec XY3P: 2462 / 28944 @ c=49, r=131, X134.590 Y75.245 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r131.jpg 2462 / 28944, ETA: 17:32:56.8857 @ 0.419172 items / sec XY3P: 2463 / 28944 @ c=50, r=131, X134.763 Y75.241 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r131.jpg 2463 / 28944, ETA: 17:32:54.6241 @ 0.419171 items / sec XY3P: 2464 / 28944 @ c=51, r=131, X134.936 Y75.238 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r131.jpg 2464 / 28944, ETA: 17:32:52.3612 @ 0.419171 items / sec XY3P: 2465 / 28944 @ c=52, r=131, X135.109 Y75.234 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r131.jpg 2465 / 28944, ETA: 17:32:50.0938 @ 0.419170 items / sec XY3P: 2466 / 28944 @ c=53, r=131, X135.281 Y75.230 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r131.jpg 2466 / 28944, ETA: 17:32:47.8605 @ 0.419169 items / sec XY3P: 2467 / 28944 @ c=54, r=131, X135.454 Y75.226 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r131.jpg 2467 / 28944, ETA: 17:32:45.5743 @ 0.419168 items / sec XY3P: 2468 / 28944 @ c=55, r=131, X135.627 Y75.222 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r131.jpg 2468 / 28944, ETA: 17:32:43.3167 @ 0.419167 items / sec XY3P: 2469 / 28944 @ c=56, r=131, X135.800 Y75.218 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r131.jpg 2469 / 28944, ETA: 17:32:41.0548 @ 0.419167 items / sec XY3P: 2470 / 28944 @ c=57, r=131, X135.972 Y75.214 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r131.jpg 2470 / 28944, ETA: 17:32:38.7901 @ 0.419166 items / sec XY3P: 2471 / 28944 @ c=58, r=131, X136.145 Y75.210 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r131.jpg 2471 / 28944, ETA: 17:32:36.5553 @ 0.419165 items / sec XY3P: 2472 / 28944 @ c=59, r=131, X136.318 Y75.206 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r131.jpg 2472 / 28944, ETA: 17:32:34.2638 @ 0.419164 items / sec XY3P: 2473 / 28944 @ c=60, r=131, X136.491 Y75.202 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r131.jpg 2473 / 28944, ETA: 17:32:32.0053 @ 0.419163 items / sec XY3P: 2474 / 28944 @ c=61, r=131, X136.663 Y75.198 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r131.jpg 2474 / 28944, ETA: 17:32:27.5992 @ 0.419177 items / sec XY3P: 2475 / 28944 @ c=62, r=131, X136.836 Y75.194 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r131.jpg 2475 / 28944, ETA: 17:32:25.3679 @ 0.419176 items / sec XY3P: 2476 / 28944 @ c=63, r=131, X137.009 Y75.190 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r131.jpg 2476 / 28944, ETA: 17:32:23.0914 @ 0.419175 items / sec XY3P: 2477 / 28944 @ c=64, r=131, X137.182 Y75.186 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r131.jpg 2477 / 28944, ETA: 17:32:20.9081 @ 0.419174 items / sec XY3P: 2478 / 28944 @ c=65, r=131, X137.354 Y75.182 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r131.jpg 2478 / 28944, ETA: 17:32:18.5663 @ 0.419173 items / sec XY3P: 2479 / 28944 @ c=66, r=131, X137.527 Y75.178 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r131.jpg 2479 / 28944, ETA: 17:32:16.3248 @ 0.419172 items / sec XY3P: 2480 / 28944 @ c=67, r=131, X137.700 Y75.174 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r131.jpg 2480 / 28944, ETA: 17:32:14.1240 @ 0.419171 items / sec XY3P: 2481 / 28944 @ c=68, r=131, X137.873 Y75.170 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r131.jpg 2481 / 28944, ETA: 17:32:11.7704 @ 0.419171 items / sec XY3P: 2482 / 28944 @ c=69, r=131, X138.045 Y75.166 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r131.jpg 2482 / 28944, ETA: 17:32:09.5151 @ 0.419170 items / sec XY3P: 2483 / 28944 @ c=70, r=131, X138.218 Y75.162 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r131.jpg 2483 / 28944, ETA: 17:32:07.2401 @ 0.419169 items / sec XY3P: 2484 / 28944 @ c=71, r=131, X138.391 Y75.158 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r131.jpg 2484 / 28944, ETA: 17:32:04.9934 @ 0.419168 items / sec XY3P: 2485 / 28944 @ c=72, r=131, X138.564 Y75.154 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r131.jpg 2485 / 28944, ETA: 17:32:02.7522 @ 0.419167 items / sec XY3P: 2486 / 28944 @ c=73, r=131, X138.736 Y75.150 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r131.jpg 2486 / 28944, ETA: 17:32:00.5416 @ 0.419166 items / sec XY3P: 2487 / 28944 @ c=74, r=131, X138.909 Y75.146 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r131.jpg 2487 / 28944, ETA: 17:31:58.2071 @ 0.419166 items / sec XY3P: 2488 / 28944 @ c=75, r=131, X139.082 Y75.142 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r131.jpg 2488 / 28944, ETA: 17:31:55.9314 @ 0.419165 items / sec XY3P: 2489 / 28944 @ c=76, r=131, X139.255 Y75.138 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r131.jpg 2489 / 28944, ETA: 17:31:53.6813 @ 0.419164 items / sec XY3P: 2490 / 28944 @ c=77, r=131, X139.427 Y75.134 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r131.jpg 2490 / 28944, ETA: 17:31:51.4401 @ 0.419163 items / sec XY3P: 2491 / 28944 @ c=78, r=131, X139.600 Y75.130 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r131.jpg 2491 / 28944, ETA: 17:31:49.1485 @ 0.419163 items / sec XY3P: 2492 / 28944 @ c=79, r=131, X139.773 Y75.126 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r131.jpg 2492 / 28944, ETA: 17:31:44.7675 @ 0.419176 items / sec XY3P: 2493 / 28944 @ c=80, r=131, X139.946 Y75.123 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r131.jpg 2493 / 28944, ETA: 17:31:42.5068 @ 0.419175 items / sec XY3P: 2494 / 28944 @ c=81, r=131, X140.118 Y75.119 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r131.jpg 2494 / 28944, ETA: 17:31:40.2541 @ 0.419174 items / sec XY3P: 2495 / 28944 @ c=82, r=131, X140.291 Y75.115 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r131.jpg 2495 / 28944, ETA: 17:31:37.9826 @ 0.419173 items / sec XY3P: 2496 / 28944 @ c=83, r=131, X140.464 Y75.111 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r131.jpg 2496 / 28944, ETA: 17:31:35.7212 @ 0.419173 items / sec XY3P: 2497 / 28944 @ c=84, r=131, X140.637 Y75.107 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r131.jpg 2497 / 28944, ETA: 17:31:33.4516 @ 0.419172 items / sec XY3P: 2498 / 28944 @ c=85, r=131, X140.809 Y75.103 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r131.jpg 2498 / 28944, ETA: 17:31:29.0797 @ 0.419185 items / sec XY3P: 2499 / 28944 @ c=86, r=131, X140.982 Y75.099 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r131.jpg 2499 / 28944, ETA: 17:31:24.7039 @ 0.419198 items / sec XY3P: 2500 / 28944 @ c=87, r=131, X141.155 Y75.095 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r131.jpg 2500 / 28944, ETA: 17:31:20.3304 @ 0.419212 items / sec XY3P: 2501 / 28944 @ c=88, r=131, X141.328 Y75.091 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r131.jpg 2501 / 28944, ETA: 17:31:18.0721 @ 0.419211 items / sec XY3P: 2502 / 28944 @ c=89, r=131, X141.500 Y75.087 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r131.jpg 2502 / 28944, ETA: 17:31:15.8154 @ 0.419210 items / sec XY3P: 2503 / 28944 @ c=90, r=131, X141.673 Y75.083 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r131.jpg 2503 / 28944, ETA: 17:31:13.6325 @ 0.419208 items / sec XY3P: 2504 / 28944 @ c=91, r=131, X141.846 Y75.079 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r131.jpg 2504 / 28944, ETA: 17:31:11.2925 @ 0.419208 items / sec XY3P: 2505 / 28944 @ c=92, r=131, X142.019 Y75.075 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r131.jpg 2505 / 28944, ETA: 17:31:09.0326 @ 0.419207 items / sec XY3P: 2506 / 28944 @ c=93, r=131, X142.191 Y75.071 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r131.jpg 2506 / 28944, ETA: 17:31:06.7714 @ 0.419206 items / sec XY3P: 2507 / 28944 @ c=94, r=131, X142.364 Y75.067 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r131.jpg 2507 / 28944, ETA: 17:31:04.5066 @ 0.419206 items / sec XY3P: 2508 / 28944 @ c=95, r=131, X142.537 Y75.063 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r131.jpg 2508 / 28944, ETA: 17:31:02.2765 @ 0.419205 items / sec XY3P: 2509 / 28944 @ c=96, r=131, X142.710 Y75.059 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r131.jpg 2509 / 28944, ETA: 17:30:59.9833 @ 0.419204 items / sec XY3P: 2510 / 28944 @ c=97, r=131, X142.882 Y75.055 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r131.jpg 2510 / 28944, ETA: 17:30:57.7994 @ 0.419203 items / sec XY3P: 2511 / 28944 @ c=98, r=131, X143.055 Y75.051 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r131.jpg 2511 / 28944, ETA: 17:30:55.4613 @ 0.419202 items / sec XY3P: 2512 / 28944 @ c=99, r=131, X143.228 Y75.047 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r131.jpg 2512 / 28944, ETA: 17:30:53.1987 @ 0.419202 items / sec XY3P: 2513 / 28944 @ c=100, r=131, X143.401 Y75.043 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r131.jpg 2513 / 28944, ETA: 17:30:50.9591 @ 0.419201 items / sec XY3P: 2514 / 28944 @ c=101, r=131, X143.573 Y75.039 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r131.jpg 2514 / 28944, ETA: 17:30:48.6760 @ 0.419200 items / sec XY3P: 2515 / 28944 @ c=102, r=131, X143.746 Y75.035 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r131.jpg 2515 / 28944, ETA: 17:30:46.4098 @ 0.419199 items / sec XY3P: 2516 / 28944 @ c=103, r=131, X143.919 Y75.031 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r131.jpg 2516 / 28944, ETA: 17:30:44.1531 @ 0.419198 items / sec XY3P: 2517 / 28944 @ c=104, r=131, X144.092 Y75.027 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r131.jpg 2517 / 28944, ETA: 17:30:39.8133 @ 0.419211 items / sec XY3P: 2518 / 28944 @ c=105, r=131, X144.264 Y75.023 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r131.jpg 2518 / 28944, ETA: 17:30:35.4405 @ 0.419224 items / sec XY3P: 2519 / 28944 @ c=106, r=131, X144.437 Y75.019 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r131.jpg 2519 / 28944, ETA: 17:30:33.1689 @ 0.419224 items / sec XY3P: 2520 / 28944 @ c=107, r=131, X144.610 Y75.015 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r131.jpg 2520 / 28944, ETA: 17:30:28.8227 @ 0.419237 items / sec XY3P: 2521 / 28944 @ c=108, r=131, X144.783 Y75.012 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r131.jpg 2521 / 28944, ETA: 17:30:26.5784 @ 0.419236 items / sec XY3P: 2522 / 28944 @ c=109, r=131, X144.955 Y75.008 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r131.jpg 2522 / 28944, ETA: 17:30:24.3015 @ 0.419235 items / sec XY3P: 2523 / 28944 @ c=110, r=131, X145.128 Y75.004 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r131.jpg 2523 / 28944, ETA: 17:30:22.0400 @ 0.419234 items / sec XY3P: 2524 / 28944 @ c=111, r=131, X145.301 Y75.000 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r131.jpg 2524 / 28944, ETA: 17:30:19.7785 @ 0.419233 items / sec XY3P: 2525 / 28944 @ c=112, r=131, X145.474 Y74.996 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r131.jpg 2525 / 28944, ETA: 17:30:17.5175 @ 0.419233 items / sec XY3P: 2526 / 28944 @ c=113, r=131, X145.646 Y74.992 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r131.jpg 2526 / 28944, ETA: 17:30:15.2698 @ 0.419232 items / sec XY3P: 2527 / 28944 @ c=114, r=131, X145.819 Y74.988 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r131.jpg 2527 / 28944, ETA: 17:30:13.0076 @ 0.419231 items / sec XY3P: 2528 / 28944 @ c=115, r=131, X145.992 Y74.984 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r131.jpg 2528 / 28944, ETA: 17:30:10.7529 @ 0.419230 items / sec XY3P: 2529 / 28944 @ c=116, r=131, X146.165 Y74.980 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r131.jpg 2529 / 28944, ETA: 17:30:08.4765 @ 0.419229 items / sec XY3P: 2530 / 28944 @ c=117, r=131, X146.337 Y74.976 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r131.jpg 2530 / 28944, ETA: 17:30:06.2805 @ 0.419228 items / sec XY3P: 2531 / 28944 @ c=118, r=131, X146.510 Y74.972 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r131.jpg 2531 / 28944, ETA: 17:30:03.9728 @ 0.419228 items / sec XY3P: 2532 / 28944 @ c=119, r=131, X146.683 Y74.968 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r131.jpg 2532 / 28944, ETA: 17:30:01.6945 @ 0.419227 items / sec XY3P: 2533 / 28944 @ c=120, r=131, X146.856 Y74.964 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r131.jpg 2533 / 28944, ETA: 17:29:59.4299 @ 0.419226 items / sec XY3P: 2534 / 28944 @ c=121, r=131, X147.028 Y74.960 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r131.jpg 2534 / 28944, ETA: 17:29:57.1681 @ 0.419225 items / sec XY3P: 2535 / 28944 @ c=122, r=131, X147.201 Y74.956 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r131.jpg 2535 / 28944, ETA: 17:29:54.9097 @ 0.419224 items / sec XY3P: 2536 / 28944 @ c=123, r=131, X147.374 Y74.952 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r131.jpg 2536 / 28944, ETA: 17:29:50.5935 @ 0.419237 items / sec XY3P: 2537 / 28944 @ c=124, r=131, X147.547 Y74.948 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r131.jpg 2537 / 28944, ETA: 17:29:46.2302 @ 0.419250 items / sec XY3P: 2538 / 28944 @ c=125, r=131, X147.719 Y74.944 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r131.jpg 2538 / 28944, ETA: 17:29:43.9718 @ 0.419250 items / sec XY3P: 2539 / 28944 @ c=126, r=131, X147.892 Y74.940 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r131.jpg 2539 / 28944, ETA: 17:29:41.7269 @ 0.419249 items / sec XY3P: 2540 / 28944 @ c=127, r=131, X148.065 Y74.936 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r131.jpg 2540 / 28944, ETA: 17:29:39.4687 @ 0.419248 items / sec XY3P: 2541 / 28944 @ c=128, r=131, X148.238 Y74.932 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r131.jpg 2541 / 28944, ETA: 17:29:37.1903 @ 0.419247 items / sec XY3P: 2542 / 28944 @ c=129, r=131, X148.410 Y74.928 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r131.jpg 2542 / 28944, ETA: 17:29:34.9302 @ 0.419246 items / sec XY3P: 2543 / 28944 @ c=130, r=131, X148.583 Y74.924 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r131.jpg 2543 / 28944, ETA: 17:29:32.6699 @ 0.419245 items / sec XY3P: 2544 / 28944 @ c=131, r=131, X148.756 Y74.920 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r131.jpg 2544 / 28944, ETA: 17:29:30.4072 @ 0.419245 items / sec XY3P: 2545 / 28944 @ c=132, r=131, X148.929 Y74.916 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r131.jpg 2545 / 28944, ETA: 17:29:28.1643 @ 0.419244 items / sec XY3P: 2546 / 28944 @ c=133, r=131, X149.101 Y74.912 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r131.jpg 2546 / 28944, ETA: 17:29:25.8879 @ 0.419243 items / sec XY3P: 2547 / 28944 @ c=134, r=131, X149.274 Y74.908 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r131.jpg 2547 / 28944, ETA: 17:29:23.6295 @ 0.419242 items / sec XY3P: 2548 / 28944 @ c=135, r=131, X149.447 Y74.904 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r131.jpg 2548 / 28944, ETA: 17:29:21.4263 @ 0.419241 items / sec XY3P: 2549 / 28944 @ c=136, r=131, X149.620 Y74.900 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r131.jpg 2549 / 28944, ETA: 17:29:19.1054 @ 0.419240 items / sec XY3P: 2550 / 28944 @ c=137, r=131, X149.792 Y74.897 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r131.jpg 2550 / 28944, ETA: 17:29:16.8618 @ 0.419239 items / sec XY3P: 2551 / 28944 @ c=138, r=131, X149.965 Y74.893 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r131.jpg 2551 / 28944, ETA: 17:29:14.5926 @ 0.419239 items / sec XY3P: 2552 / 28944 @ c=139, r=131, X150.138 Y74.889 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r131.jpg 2552 / 28944, ETA: 17:29:12.3262 @ 0.419238 items / sec XY3P: 2553 / 28944 @ c=140, r=131, X150.311 Y74.885 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r131.jpg 2553 / 28944, ETA: 17:29:10.0863 @ 0.419237 items / sec XY3P: 2554 / 28944 @ c=141, r=131, X150.483 Y74.881 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r131.jpg 2554 / 28944, ETA: 17:29:07.8696 @ 0.419236 items / sec XY3P: 2555 / 28944 @ c=142, r=131, X150.656 Y74.877 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r131.jpg 2555 / 28944, ETA: 17:29:07.7031 @ 0.419221 items / sec XY3P: 2556 / 28944 @ c=143, r=131, X150.829 Y74.873 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r131.jpg 2556 / 28944, ETA: 17:29:05.4760 @ 0.419220 items / sec XY3P: 2557 / 28944 @ c=144, r=131, X151.002 Y74.869 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r131.jpg 2557 / 28944, ETA: 17:29:03.0940 @ 0.419220 items / sec XY3P: 2558 / 28944 @ c=145, r=131, X151.174 Y74.865 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r131.jpg 2558 / 28944, ETA: 17:29:00.8156 @ 0.419219 items / sec XY3P: 2559 / 28944 @ c=146, r=131, X151.347 Y74.861 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r131.jpg 2559 / 28944, ETA: 17:28:58.5453 @ 0.419218 items / sec XY3P: 2560 / 28944 @ c=147, r=131, X151.520 Y74.857 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r131.jpg 2560 / 28944, ETA: 17:28:56.3653 @ 0.419217 items / sec XY3P: 2561 / 28944 @ c=148, r=131, X151.693 Y74.853 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r131.jpg 2561 / 28944, ETA: 17:28:54.0214 @ 0.419217 items / sec XY3P: 2562 / 28944 @ c=149, r=131, X151.865 Y74.849 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r131.jpg 2562 / 28944, ETA: 17:28:51.7614 @ 0.419216 items / sec XY3P: 2563 / 28944 @ c=150, r=131, X152.038 Y74.845 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r131.jpg 2563 / 28944, ETA: 17:28:49.4995 @ 0.419215 items / sec XY3P: 2564 / 28944 @ c=151, r=131, X152.211 Y74.841 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r131.jpg 2564 / 28944, ETA: 17:28:47.2316 @ 0.419214 items / sec XY3P: 2565 / 28944 @ c=152, r=131, X152.384 Y74.837 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r131.jpg 2565 / 28944, ETA: 17:28:44.9932 @ 0.419213 items / sec XY3P: 2566 / 28944 @ c=153, r=131, X152.556 Y74.833 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r131.jpg 2566 / 28944, ETA: 17:28:42.7087 @ 0.419213 items / sec XY3P: 2567 / 28944 @ c=154, r=131, X152.729 Y74.829 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r131.jpg 2567 / 28944, ETA: 17:28:40.4491 @ 0.419212 items / sec XY3P: 2568 / 28944 @ c=155, r=131, X152.902 Y74.825 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r131.jpg 2568 / 28944, ETA: 17:28:38.1797 @ 0.419211 items / sec XY3P: 2569 / 28944 @ c=156, r=131, X153.075 Y74.821 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r131.jpg 2569 / 28944, ETA: 17:28:35.9134 @ 0.419210 items / sec XY3P: 2570 / 28944 @ c=157, r=131, X153.247 Y74.817 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r131.jpg 2570 / 28944, ETA: 17:28:33.6667 @ 0.419209 items / sec XY3P: 2571 / 28944 @ c=158, r=131, X153.420 Y74.813 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r131.jpg 2571 / 28944, ETA: 17:28:31.3843 @ 0.419209 items / sec XY3P: 2572 / 28944 @ c=159, r=131, X153.593 Y74.809 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r131.jpg 2572 / 28944, ETA: 17:28:29.1269 @ 0.419208 items / sec XY3P: 2573 / 28944 @ c=160, r=131, X153.766 Y74.805 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r131.jpg 2573 / 28944, ETA: 17:28:24.8123 @ 0.419221 items / sec XY3P: 2574 / 28944 @ c=161, r=131, X153.938 Y74.801 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r131.jpg 2574 / 28944, ETA: 17:28:20.5150 @ 0.419233 items / sec XY3P: 2575 / 28944 @ c=162, r=131, X154.111 Y74.797 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r131.jpg 2575 / 28944, ETA: 17:28:18.2361 @ 0.419233 items / sec XY3P: 2576 / 28944 @ c=163, r=131, X154.284 Y74.793 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r131.jpg 2576 / 28944, ETA: 17:28:15.9641 @ 0.419232 items / sec XY3P: 2577 / 28944 @ c=164, r=131, X154.457 Y74.789 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r131.jpg 2577 / 28944, ETA: 17:28:13.7168 @ 0.419231 items / sec XY3P: 2578 / 28944 @ c=165, r=131, X154.629 Y74.786 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r131.jpg 2578 / 28944, ETA: 17:28:11.4464 @ 0.419230 items / sec XY3P: 2579 / 28944 @ c=166, r=131, X154.802 Y74.782 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r131.jpg 2579 / 28944, ETA: 17:28:09.1999 @ 0.419229 items / sec XY3P: 2580 / 28944 @ c=167, r=131, X154.975 Y74.778 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r131.jpg 2580 / 28944, ETA: 17:28:06.9253 @ 0.419229 items / sec XY3P: 2581 / 28944 @ c=168, r=131, X155.148 Y74.774 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r131.jpg 2581 / 28944, ETA: 17:28:04.6581 @ 0.419228 items / sec XY3P: 2582 / 28944 @ c=169, r=131, X155.320 Y74.770 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r131.jpg 2582 / 28944, ETA: 17:28:02.4622 @ 0.419227 items / sec XY3P: 2583 / 28944 @ c=170, r=131, X155.493 Y74.766 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r131.jpg 2583 / 28944, ETA: 17:28:00.1202 @ 0.419226 items / sec XY3P: 2584 / 28944 @ c=171, r=131, X155.666 Y74.762 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r131.jpg 2584 / 28944, ETA: 17:27:57.8824 @ 0.419225 items / sec XY3P: 2585 / 28944 @ c=172, r=131, X155.839 Y74.758 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r131.jpg 2585 / 28944, ETA: 17:27:55.6780 @ 0.419224 items / sec XY3P: 2586 / 28944 @ c=173, r=131, X156.011 Y74.754 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r131.jpg 2586 / 28944, ETA: 17:27:53.3418 @ 0.419224 items / sec XY3P: 2587 / 28944 @ c=174, r=131, X156.184 Y74.750 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r131.jpg 2587 / 28944, ETA: 17:27:51.0713 @ 0.419223 items / sec XY3P: 2588 / 28944 @ c=175, r=131, X156.357 Y74.746 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r131.jpg 2588 / 28944, ETA: 17:27:48.8131 @ 0.419222 items / sec XY3P: 2589 / 28944 @ c=176, r=131, X156.530 Y74.742 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r131.jpg 2589 / 28944, ETA: 17:27:46.5630 @ 0.419221 items / sec XY3P: 2590 / 28944 @ c=177, r=131, X156.702 Y74.738 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r131.jpg 2590 / 28944, ETA: 17:27:44.2755 @ 0.419221 items / sec XY3P: 2591 / 28944 @ c=178, r=131, X156.875 Y74.734 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r131.jpg 2591 / 28944, ETA: 17:27:42.0188 @ 0.419220 items / sec XY3P: 2592 / 28944 @ c=179, r=131, X157.048 Y74.730 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r131.jpg 2592 / 28944, ETA: 17:27:37.7153 @ 0.419233 items / sec XY3P: 2593 / 28944 @ c=180, r=131, X157.221 Y74.726 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r131.jpg 2593 / 28944, ETA: 17:27:33.4438 @ 0.419245 items / sec XY3P: 2594 / 28944 @ c=181, r=131, X157.393 Y74.722 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r131.jpg 2594 / 28944, ETA: 17:27:31.1571 @ 0.419244 items / sec XY3P: 2595 / 28944 @ c=182, r=131, X157.566 Y74.718 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r131.jpg 2595 / 28944, ETA: 17:27:28.9028 @ 0.419244 items / sec XY3P: 2596 / 28944 @ c=183, r=131, X157.739 Y74.714 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r131.jpg 2596 / 28944, ETA: 17:27:26.6306 @ 0.419243 items / sec XY3P: 2597 / 28944 @ c=184, r=131, X157.912 Y74.710 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r131.jpg 2597 / 28944, ETA: 17:27:24.3755 @ 0.419242 items / sec XY3P: 2598 / 28944 @ c=185, r=131, X158.084 Y74.706 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r131.jpg 2598 / 28944, ETA: 17:27:22.1259 @ 0.419241 items / sec XY3P: 2599 / 28944 @ c=186, r=131, X158.257 Y74.702 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r131.jpg 2599 / 28944, ETA: 17:27:19.8473 @ 0.419240 items / sec XY3P: 2600 / 28944 @ c=187, r=131, X158.430 Y74.698 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r131.jpg 2600 / 28944, ETA: 17:27:17.5846 @ 0.419240 items / sec XY3P: 2601 / 28944 @ c=188, r=131, X158.603 Y74.694 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r131.jpg 2601 / 28944, ETA: 17:27:15.3116 @ 0.419239 items / sec XY3P: 2602 / 28944 @ c=189, r=131, X158.775 Y74.690 Z-15.085 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r131.jpg 2602 / 28944, ETA: 17:27:13.0510 @ 0.419238 items / sec XY3P: 2603 / 28944 @ c=190, r=131, X158.948 Y74.686 Z-15.085 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r131.jpg 2603 / 28944, ETA: 17:27:10.8076 @ 0.419237 items / sec XY3P: 2604 / 28944 @ c=191, r=131, X159.121 Y74.682 Z-15.084 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r131.jpg 2604 / 28944, ETA: 17:27:08.5238 @ 0.419236 items / sec XY3P: 2605 / 28944 @ c=192, r=131, X159.294 Y74.678 Z-15.084 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r131.jpg 2605 / 28944, ETA: 17:27:06.2658 @ 0.419235 items / sec XY3P: 2606 / 28944 @ c=193, r=131, X159.466 Y74.674 Z-15.083 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r131.jpg 2606 / 28944, ETA: 17:27:03.9900 @ 0.419235 items / sec XY3P: 2607 / 28944 @ c=194, r=131, X159.639 Y74.671 Z-15.083 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r131.jpg 2607 / 28944, ETA: 17:27:01.7372 @ 0.419234 items / sec XY3P: 2608 / 28944 @ c=195, r=131, X159.812 Y74.667 Z-15.082 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r131.jpg 2608 / 28944, ETA: 17:26:59.4780 @ 0.419233 items / sec XY3P: 2609 / 28944 @ c=196, r=131, X159.985 Y74.663 Z-15.082 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r131.jpg 2609 / 28944, ETA: 17:26:57.2074 @ 0.419232 items / sec XY3P: 2610 / 28944 @ c=197, r=131, X160.157 Y74.659 Z-15.081 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r131.jpg 2610 / 28944, ETA: 17:26:54.9435 @ 0.419231 items / sec XY3P: 2611 / 28944 @ c=198, r=131, X160.330 Y74.655 Z-15.081 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r131.jpg 2611 / 28944, ETA: 17:26:50.6614 @ 0.419244 items / sec XY3P: 2612 / 28944 @ c=199, r=131, X160.503 Y74.651 Z-15.080 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r131.jpg 2612 / 28944, ETA: 17:26:46.3937 @ 0.419257 items / sec XY3P: 2613 / 28944 @ c=200, r=131, X160.676 Y74.647 Z-15.080 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r131.jpg 2613 / 28944, ETA: 17:26:44.1195 @ 0.419256 items / sec XY3P: 2614 / 28944 @ c=200, r=130, X160.680 Y74.819 Z-15.078 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r130.jpg 2614 / 28944, ETA: 17:26:41.8551 @ 0.419255 items / sec XY3P: 2615 / 28944 @ c=199, r=130, X160.508 Y74.823 Z-15.078 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r130.jpg 2615 / 28944, ETA: 17:26:39.5937 @ 0.419254 items / sec XY3P: 2616 / 28944 @ c=198, r=130, X160.335 Y74.827 Z-15.079 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r130.jpg 2616 / 28944, ETA: 17:26:37.3309 @ 0.419253 items / sec XY3P: 2617 / 28944 @ c=197, r=130, X160.162 Y74.831 Z-15.079 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r130.jpg 2617 / 28944, ETA: 17:26:35.0884 @ 0.419253 items / sec XY3P: 2618 / 28944 @ c=196, r=130, X159.989 Y74.835 Z-15.080 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r130.jpg 2618 / 28944, ETA: 17:26:32.8005 @ 0.419252 items / sec XY3P: 2619 / 28944 @ c=195, r=130, X159.817 Y74.839 Z-15.080 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r130.jpg 2619 / 28944, ETA: 17:26:30.5320 @ 0.419251 items / sec XY3P: 2620 / 28944 @ c=194, r=130, X159.644 Y74.843 Z-15.081 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r130.jpg 2620 / 28944, ETA: 17:26:28.2744 @ 0.419250 items / sec XY3P: 2621 / 28944 @ c=193, r=130, X159.471 Y74.847 Z-15.081 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r130.jpg 2621 / 28944, ETA: 17:26:26.0169 @ 0.419249 items / sec XY3P: 2622 / 28944 @ c=192, r=130, X159.298 Y74.851 Z-15.082 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r130.jpg 2622 / 28944, ETA: 17:26:23.7638 @ 0.419249 items / sec XY3P: 2623 / 28944 @ c=191, r=130, X159.126 Y74.855 Z-15.082 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r130.jpg 2623 / 28944, ETA: 17:26:21.4859 @ 0.419248 items / sec XY3P: 2624 / 28944 @ c=190, r=130, X158.953 Y74.859 Z-15.083 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r130.jpg 2624 / 28944, ETA: 17:26:19.2232 @ 0.419247 items / sec XY3P: 2625 / 28944 @ c=189, r=130, X158.780 Y74.863 Z-15.084 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r130.jpg 2625 / 28944, ETA: 17:26:16.9604 @ 0.419246 items / sec XY3P: 2626 / 28944 @ c=188, r=130, X158.607 Y74.867 Z-15.084 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r130.jpg 2626 / 28944, ETA: 17:26:14.7008 @ 0.419245 items / sec XY3P: 2627 / 28944 @ c=187, r=130, X158.435 Y74.871 Z-15.085 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r130.jpg 2627 / 28944, ETA: 17:26:12.5041 @ 0.419244 items / sec XY3P: 2628 / 28944 @ c=186, r=130, X158.262 Y74.875 Z-15.085 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r130.jpg 2628 / 28944, ETA: 17:26:10.1544 @ 0.419244 items / sec XY3P: 2629 / 28944 @ c=185, r=130, X158.089 Y74.879 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r130.jpg 2629 / 28944, ETA: 17:26:07.8957 @ 0.419243 items / sec XY3P: 2630 / 28944 @ c=184, r=130, X157.916 Y74.883 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r130.jpg 2630 / 28944, ETA: 17:26:05.7804 @ 0.419241 items / sec XY3P: 2631 / 28944 @ c=183, r=130, X157.744 Y74.887 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r130.jpg 2631 / 28944, ETA: 17:26:03.3660 @ 0.419241 items / sec XY3P: 2632 / 28944 @ c=182, r=130, X157.571 Y74.891 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r130.jpg 2632 / 28944, ETA: 17:25:59.1029 @ 0.419254 items / sec XY3P: 2633 / 28944 @ c=181, r=130, X157.398 Y74.895 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r130.jpg 2633 / 28944, ETA: 17:25:56.8304 @ 0.419253 items / sec XY3P: 2634 / 28944 @ c=180, r=130, X157.225 Y74.899 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r130.jpg 2634 / 28944, ETA: 17:25:54.5717 @ 0.419252 items / sec XY3P: 2635 / 28944 @ c=179, r=130, X157.053 Y74.903 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r130.jpg 2635 / 28944, ETA: 17:25:52.3035 @ 0.419252 items / sec XY3P: 2636 / 28944 @ c=178, r=130, X156.880 Y74.907 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r130.jpg 2636 / 28944, ETA: 17:25:50.0575 @ 0.419251 items / sec XY3P: 2637 / 28944 @ c=177, r=130, X156.707 Y74.911 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r130.jpg 2637 / 28944, ETA: 17:25:47.7765 @ 0.419250 items / sec XY3P: 2638 / 28944 @ c=176, r=130, X156.534 Y74.915 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r130.jpg 2638 / 28944, ETA: 17:25:45.5036 @ 0.419249 items / sec XY3P: 2639 / 28944 @ c=175, r=130, X156.362 Y74.919 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r130.jpg 2639 / 28944, ETA: 17:25:43.2503 @ 0.419248 items / sec XY3P: 2640 / 28944 @ c=174, r=130, X156.189 Y74.923 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r130.jpg 2640 / 28944, ETA: 17:25:40.9843 @ 0.419247 items / sec XY3P: 2641 / 28944 @ c=173, r=130, X156.016 Y74.927 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r130.jpg 2641 / 28944, ETA: 17:25:38.7307 @ 0.419247 items / sec XY3P: 2642 / 28944 @ c=172, r=130, X155.843 Y74.930 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r130.jpg 2642 / 28944, ETA: 17:25:36.4477 @ 0.419246 items / sec XY3P: 2643 / 28944 @ c=171, r=130, X155.671 Y74.934 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r130.jpg 2643 / 28944, ETA: 17:25:34.1776 @ 0.419245 items / sec XY3P: 2644 / 28944 @ c=170, r=130, X155.498 Y74.938 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r130.jpg 2644 / 28944, ETA: 17:25:31.9202 @ 0.419244 items / sec XY3P: 2645 / 28944 @ c=169, r=130, X155.325 Y74.942 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r130.jpg 2645 / 28944, ETA: 17:25:29.6562 @ 0.419243 items / sec XY3P: 2646 / 28944 @ c=168, r=130, X155.152 Y74.946 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r130.jpg 2646 / 28944, ETA: 17:25:27.4024 @ 0.419243 items / sec XY3P: 2647 / 28944 @ c=167, r=130, X154.980 Y74.950 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r130.jpg 2647 / 28944, ETA: 17:25:25.1268 @ 0.419242 items / sec XY3P: 2648 / 28944 @ c=166, r=130, X154.807 Y74.954 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r130.jpg 2648 / 28944, ETA: 17:25:22.8579 @ 0.419241 items / sec XY3P: 2649 / 28944 @ c=165, r=130, X154.634 Y74.958 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r130.jpg 2649 / 28944, ETA: 17:25:20.5933 @ 0.419240 items / sec XY3P: 2650 / 28944 @ c=164, r=130, X154.461 Y74.962 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r130.jpg 2650 / 28944, ETA: 17:25:18.3828 @ 0.419239 items / sec XY3P: 2651 / 28944 @ c=163, r=130, X154.289 Y74.966 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r130.jpg 2651 / 28944, ETA: 17:25:16.0742 @ 0.419239 items / sec XY3P: 2652 / 28944 @ c=162, r=130, X154.116 Y74.970 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r130.jpg 2652 / 28944, ETA: 17:25:13.7900 @ 0.419238 items / sec XY3P: 2653 / 28944 @ c=161, r=130, X153.943 Y74.974 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r130.jpg 2653 / 28944, ETA: 17:25:11.5267 @ 0.419237 items / sec XY3P: 2654 / 28944 @ c=160, r=130, X153.770 Y74.978 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r130.jpg 2654 / 28944, ETA: 17:25:09.2605 @ 0.419236 items / sec XY3P: 2655 / 28944 @ c=159, r=130, X153.598 Y74.982 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r130.jpg 2655 / 28944, ETA: 17:25:06.9901 @ 0.419236 items / sec XY3P: 2656 / 28944 @ c=158, r=130, X153.425 Y74.986 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r130.jpg 2656 / 28944, ETA: 17:25:04.7891 @ 0.419234 items / sec XY3P: 2657 / 28944 @ c=157, r=130, X153.252 Y74.990 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r130.jpg 2657 / 28944, ETA: 17:25:02.4669 @ 0.419234 items / sec XY3P: 2658 / 28944 @ c=156, r=130, X153.079 Y74.994 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r130.jpg 2658 / 28944, ETA: 17:25:00.1883 @ 0.419233 items / sec XY3P: 2659 / 28944 @ c=155, r=130, X152.907 Y74.998 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r130.jpg 2659 / 28944, ETA: 17:24:57.9238 @ 0.419232 items / sec XY3P: 2660 / 28944 @ c=154, r=130, X152.734 Y75.002 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r130.jpg 2660 / 28944, ETA: 17:24:55.6618 @ 0.419232 items / sec XY3P: 2661 / 28944 @ c=153, r=130, X152.561 Y75.006 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r130.jpg 2661 / 28944, ETA: 17:24:53.4710 @ 0.419230 items / sec XY3P: 2662 / 28944 @ c=152, r=130, X152.388 Y75.010 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r130.jpg 2662 / 28944, ETA: 17:24:51.1202 @ 0.419230 items / sec XY3P: 2663 / 28944 @ c=151, r=130, X152.216 Y75.014 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r130.jpg 2663 / 28944, ETA: 17:24:48.9197 @ 0.419229 items / sec XY3P: 2664 / 28944 @ c=150, r=130, X152.043 Y75.018 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r130.jpg 2664 / 28944, ETA: 17:24:46.6445 @ 0.419228 items / sec XY3P: 2665 / 28944 @ c=149, r=130, X151.870 Y75.022 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r130.jpg 2665 / 28944, ETA: 17:24:44.3216 @ 0.419228 items / sec XY3P: 2666 / 28944 @ c=148, r=130, X151.697 Y75.026 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r130.jpg 2666 / 28944, ETA: 17:24:42.0729 @ 0.419227 items / sec XY3P: 2667 / 28944 @ c=147, r=130, X151.525 Y75.030 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r130.jpg 2667 / 28944, ETA: 17:24:39.7846 @ 0.419226 items / sec XY3P: 2668 / 28944 @ c=146, r=130, X151.352 Y75.034 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r130.jpg 2668 / 28944, ETA: 17:24:37.5168 @ 0.419225 items / sec XY3P: 2669 / 28944 @ c=145, r=130, X151.179 Y75.038 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r130.jpg 2669 / 28944, ETA: 17:24:35.2475 @ 0.419225 items / sec XY3P: 2670 / 28944 @ c=144, r=130, X151.006 Y75.041 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r130.jpg 2670 / 28944, ETA: 17:24:33.0418 @ 0.419223 items / sec XY3P: 2671 / 28944 @ c=143, r=130, X150.834 Y75.045 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r130.jpg 2671 / 28944, ETA: 17:24:30.7329 @ 0.419223 items / sec XY3P: 2672 / 28944 @ c=142, r=130, X150.661 Y75.049 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r130.jpg 2672 / 28944, ETA: 17:24:26.4771 @ 0.419235 items / sec XY3P: 2673 / 28944 @ c=141, r=130, X150.488 Y75.053 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r130.jpg 2673 / 28944, ETA: 17:24:24.2104 @ 0.419235 items / sec XY3P: 2674 / 28944 @ c=140, r=130, X150.315 Y75.057 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r130.jpg 2674 / 28944, ETA: 17:24:21.9367 @ 0.419234 items / sec XY3P: 2675 / 28944 @ c=139, r=130, X150.143 Y75.061 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r130.jpg 2675 / 28944, ETA: 17:24:19.6699 @ 0.419233 items / sec XY3P: 2676 / 28944 @ c=138, r=130, X149.970 Y75.065 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r130.jpg 2676 / 28944, ETA: 17:24:17.4214 @ 0.419232 items / sec XY3P: 2677 / 28944 @ c=137, r=130, X149.797 Y75.069 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r130.jpg 2677 / 28944, ETA: 17:24:15.1391 @ 0.419231 items / sec XY3P: 2678 / 28944 @ c=136, r=130, X149.624 Y75.073 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r130.jpg 2678 / 28944, ETA: 17:24:12.8698 @ 0.419231 items / sec XY3P: 2679 / 28944 @ c=135, r=130, X149.452 Y75.077 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r130.jpg 2679 / 28944, ETA: 17:24:10.6659 @ 0.419229 items / sec XY3P: 2680 / 28944 @ c=134, r=130, X149.279 Y75.081 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r130.jpg 2680 / 28944, ETA: 17:24:08.3420 @ 0.419229 items / sec XY3P: 2681 / 28944 @ c=133, r=130, X149.106 Y75.085 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r130.jpg 2681 / 28944, ETA: 17:24:06.0879 @ 0.419228 items / sec XY3P: 2682 / 28944 @ c=132, r=130, X148.933 Y75.089 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r130.jpg 2682 / 28944, ETA: 17:24:03.7967 @ 0.419227 items / sec XY3P: 2683 / 28944 @ c=131, r=130, X148.761 Y75.093 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r130.jpg 2683 / 28944, ETA: 17:24:01.5337 @ 0.419227 items / sec XY3P: 2684 / 28944 @ c=130, r=130, X148.588 Y75.097 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r130.jpg 2684 / 28944, ETA: 17:23:59.2625 @ 0.419226 items / sec XY3P: 2685 / 28944 @ c=129, r=130, X148.415 Y75.101 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r130.jpg 2685 / 28944, ETA: 17:23:56.9929 @ 0.419225 items / sec XY3P: 2686 / 28944 @ c=128, r=130, X148.242 Y75.105 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r130.jpg 2686 / 28944, ETA: 17:23:54.8025 @ 0.419224 items / sec XY3P: 2687 / 28944 @ c=127, r=130, X148.070 Y75.109 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r130.jpg 2687 / 28944, ETA: 17:23:52.4553 @ 0.419224 items / sec XY3P: 2688 / 28944 @ c=126, r=130, X147.897 Y75.113 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r130.jpg 2688 / 28944, ETA: 17:23:50.1836 @ 0.419223 items / sec XY3P: 2689 / 28944 @ c=125, r=130, X147.724 Y75.117 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r130.jpg 2689 / 28944, ETA: 17:23:47.9167 @ 0.419222 items / sec XY3P: 2690 / 28944 @ c=124, r=130, X147.551 Y75.121 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r130.jpg 2690 / 28944, ETA: 17:23:45.6439 @ 0.419221 items / sec XY3P: 2691 / 28944 @ c=123, r=130, X147.379 Y75.125 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r130.jpg 2691 / 28944, ETA: 17:23:43.3911 @ 0.419220 items / sec XY3P: 2692 / 28944 @ c=122, r=130, X147.206 Y75.129 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r130.jpg 2692 / 28944, ETA: 17:23:41.1029 @ 0.419220 items / sec XY3P: 2693 / 28944 @ c=121, r=130, X147.033 Y75.133 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r130.jpg 2693 / 28944, ETA: 17:23:38.8954 @ 0.419219 items / sec XY3P: 2694 / 28944 @ c=120, r=130, X146.860 Y75.137 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r130.jpg 2694 / 28944, ETA: 17:23:36.5686 @ 0.419218 items / sec XY3P: 2695 / 28944 @ c=119, r=130, X146.688 Y75.141 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r130.jpg 2695 / 28944, ETA: 17:23:34.3003 @ 0.419217 items / sec XY3P: 2696 / 28944 @ c=118, r=130, X146.515 Y75.145 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r130.jpg 2696 / 28944, ETA: 17:23:32.0545 @ 0.419216 items / sec XY3P: 2697 / 28944 @ c=117, r=130, X146.342 Y75.149 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r130.jpg 2697 / 28944, ETA: 17:23:29.7602 @ 0.419216 items / sec XY3P: 2698 / 28944 @ c=116, r=130, X146.169 Y75.153 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r130.jpg 2698 / 28944, ETA: 17:23:27.5006 @ 0.419215 items / sec XY3P: 2699 / 28944 @ c=115, r=130, X145.997 Y75.156 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r130.jpg 2699 / 28944, ETA: 17:23:25.2219 @ 0.419214 items / sec XY3P: 2700 / 28944 @ c=114, r=130, X145.824 Y75.160 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r130.jpg 2700 / 28944, ETA: 17:23:23.0102 @ 0.419213 items / sec XY3P: 2701 / 28944 @ c=113, r=130, X145.651 Y75.164 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r130.jpg 2701 / 28944, ETA: 17:23:20.7552 @ 0.419212 items / sec XY3P: 2702 / 28944 @ c=112, r=130, X145.478 Y75.168 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r130.jpg 2702 / 28944, ETA: 17:23:18.4085 @ 0.419212 items / sec XY3P: 2703 / 28944 @ c=111, r=130, X145.306 Y75.172 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r130.jpg 2703 / 28944, ETA: 17:23:16.1395 @ 0.419211 items / sec XY3P: 2704 / 28944 @ c=110, r=130, X145.133 Y75.176 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r130.jpg 2704 / 28944, ETA: 17:23:13.8840 @ 0.419210 items / sec XY3P: 2705 / 28944 @ c=109, r=130, X144.960 Y75.180 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r130.jpg 2705 / 28944, ETA: 17:23:11.6415 @ 0.419209 items / sec XY3P: 2706 / 28944 @ c=108, r=130, X144.787 Y75.184 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r130.jpg 2706 / 28944, ETA: 17:23:09.3233 @ 0.419209 items / sec XY3P: 2707 / 28944 @ c=107, r=130, X144.615 Y75.188 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r130.jpg 2707 / 28944, ETA: 17:23:07.0534 @ 0.419208 items / sec XY3P: 2708 / 28944 @ c=106, r=130, X144.442 Y75.192 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r130.jpg 2708 / 28944, ETA: 17:23:04.7862 @ 0.419207 items / sec XY3P: 2709 / 28944 @ c=105, r=130, X144.269 Y75.196 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r130.jpg 2709 / 28944, ETA: 17:23:02.5127 @ 0.419207 items / sec XY3P: 2710 / 28944 @ c=104, r=130, X144.096 Y75.200 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r130.jpg 2710 / 28944, ETA: 17:23:00.2509 @ 0.419206 items / sec XY3P: 2711 / 28944 @ c=103, r=130, X143.924 Y75.204 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r130.jpg 2711 / 28944, ETA: 17:22:57.9689 @ 0.419205 items / sec XY3P: 2712 / 28944 @ c=102, r=130, X143.751 Y75.208 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r130.jpg 2712 / 28944, ETA: 17:22:55.7079 @ 0.419204 items / sec XY3P: 2713 / 28944 @ c=101, r=130, X143.578 Y75.212 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r130.jpg 2713 / 28944, ETA: 17:22:53.4311 @ 0.419203 items / sec XY3P: 2714 / 28944 @ c=100, r=130, X143.405 Y75.216 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r130.jpg 2714 / 28944, ETA: 17:22:51.1546 @ 0.419203 items / sec XY3P: 2715 / 28944 @ c=99, r=130, X143.233 Y75.220 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r130.jpg 2715 / 28944, ETA: 17:22:48.9028 @ 0.419202 items / sec XY3P: 2716 / 28944 @ c=98, r=130, X143.060 Y75.224 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r130.jpg 2716 / 28944, ETA: 17:22:46.6114 @ 0.419201 items / sec XY3P: 2717 / 28944 @ c=97, r=130, X142.887 Y75.228 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r130.jpg 2717 / 28944, ETA: 17:22:44.3399 @ 0.419200 items / sec XY3P: 2718 / 28944 @ c=96, r=130, X142.714 Y75.232 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r130.jpg 2718 / 28944, ETA: 17:22:42.0658 @ 0.419200 items / sec XY3P: 2719 / 28944 @ c=95, r=130, X142.542 Y75.236 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r130.jpg 2719 / 28944, ETA: 17:22:39.7988 @ 0.419199 items / sec XY3P: 2720 / 28944 @ c=94, r=130, X142.369 Y75.240 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r130.jpg 2720 / 28944, ETA: 17:22:37.5401 @ 0.419198 items / sec XY3P: 2721 / 28944 @ c=93, r=130, X142.196 Y75.244 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r130.jpg 2721 / 28944, ETA: 17:22:35.2533 @ 0.419197 items / sec XY3P: 2722 / 28944 @ c=92, r=130, X142.023 Y75.248 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r130.jpg 2722 / 28944, ETA: 17:22:32.9826 @ 0.419197 items / sec XY3P: 2723 / 28944 @ c=91, r=130, X141.851 Y75.252 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r130.jpg 2723 / 28944, ETA: 17:22:30.7079 @ 0.419196 items / sec XY3P: 2724 / 28944 @ c=90, r=130, X141.678 Y75.256 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r130.jpg 2724 / 28944, ETA: 17:22:28.4355 @ 0.419195 items / sec XY3P: 2725 / 28944 @ c=89, r=130, X141.505 Y75.260 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r130.jpg 2725 / 28944, ETA: 17:22:26.1735 @ 0.419194 items / sec XY3P: 2726 / 28944 @ c=88, r=130, X141.332 Y75.264 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r130.jpg 2726 / 28944, ETA: 17:22:23.8920 @ 0.419194 items / sec XY3P: 2727 / 28944 @ c=87, r=130, X141.160 Y75.267 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r130.jpg 2727 / 28944, ETA: 17:22:21.6157 @ 0.419193 items / sec XY3P: 2728 / 28944 @ c=86, r=130, X140.987 Y75.271 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r130.jpg 2728 / 28944, ETA: 17:22:19.3386 @ 0.419192 items / sec XY3P: 2729 / 28944 @ c=85, r=130, X140.814 Y75.275 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r130.jpg 2729 / 28944, ETA: 17:22:17.0698 @ 0.419191 items / sec XY3P: 2730 / 28944 @ c=84, r=130, X140.641 Y75.279 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r130.jpg 2730 / 28944, ETA: 17:22:14.8046 @ 0.419191 items / sec XY3P: 2731 / 28944 @ c=83, r=130, X140.469 Y75.283 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r130.jpg 2731 / 28944, ETA: 17:22:12.5227 @ 0.419190 items / sec XY3P: 2732 / 28944 @ c=82, r=130, X140.296 Y75.287 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r130.jpg 2732 / 28944, ETA: 17:22:10.2491 @ 0.419189 items / sec XY3P: 2733 / 28944 @ c=81, r=130, X140.123 Y75.291 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r130.jpg 2733 / 28944, ETA: 17:22:07.9870 @ 0.419188 items / sec XY3P: 2734 / 28944 @ c=80, r=130, X139.950 Y75.295 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r130.jpg 2734 / 28944, ETA: 17:22:03.7895 @ 0.419200 items / sec XY3P: 2735 / 28944 @ c=79, r=130, X139.778 Y75.299 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r130.jpg 2735 / 28944, ETA: 17:22:01.5593 @ 0.419199 items / sec XY3P: 2736 / 28944 @ c=78, r=130, X139.605 Y75.303 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r130.jpg 2736 / 28944, ETA: 17:21:59.2413 @ 0.419199 items / sec XY3P: 2737 / 28944 @ c=77, r=130, X139.432 Y75.307 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r130.jpg 2737 / 28944, ETA: 17:21:56.9745 @ 0.419198 items / sec XY3P: 2738 / 28944 @ c=76, r=130, X139.259 Y75.311 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r130.jpg 2738 / 28944, ETA: 17:21:54.7026 @ 0.419197 items / sec XY3P: 2739 / 28944 @ c=75, r=130, X139.087 Y75.315 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r130.jpg 2739 / 28944, ETA: 17:21:52.4240 @ 0.419197 items / sec XY3P: 2740 / 28944 @ c=74, r=130, X138.914 Y75.319 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r130.jpg 2740 / 28944, ETA: 17:21:50.1714 @ 0.419196 items / sec XY3P: 2741 / 28944 @ c=73, r=130, X138.741 Y75.323 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r130.jpg 2741 / 28944, ETA: 17:21:47.9398 @ 0.419195 items / sec XY3P: 2742 / 28944 @ c=72, r=130, X138.568 Y75.327 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r130.jpg 2742 / 28944, ETA: 17:21:45.6000 @ 0.419194 items / sec XY3P: 2743 / 28944 @ c=71, r=130, X138.396 Y75.331 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r130.jpg 2743 / 28944, ETA: 17:21:43.3355 @ 0.419194 items / sec XY3P: 2744 / 28944 @ c=70, r=130, X138.223 Y75.335 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r130.jpg 2744 / 28944, ETA: 17:21:41.0589 @ 0.419193 items / sec XY3P: 2745 / 28944 @ c=69, r=130, X138.050 Y75.339 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r130.jpg 2745 / 28944, ETA: 17:21:38.8072 @ 0.419192 items / sec XY3P: 2746 / 28944 @ c=68, r=130, X137.877 Y75.343 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r130.jpg 2746 / 28944, ETA: 17:21:36.5137 @ 0.419191 items / sec XY3P: 2747 / 28944 @ c=67, r=130, X137.705 Y75.347 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r130.jpg 2747 / 28944, ETA: 17:21:34.2353 @ 0.419191 items / sec XY3P: 2748 / 28944 @ c=66, r=130, X137.532 Y75.351 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r130.jpg 2748 / 28944, ETA: 17:21:31.9667 @ 0.419190 items / sec XY3P: 2749 / 28944 @ c=65, r=130, X137.359 Y75.355 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r130.jpg 2749 / 28944, ETA: 17:21:29.6807 @ 0.419189 items / sec XY3P: 2750 / 28944 @ c=64, r=130, X137.186 Y75.359 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r130.jpg 2750 / 28944, ETA: 17:21:27.4357 @ 0.419188 items / sec XY3P: 2751 / 28944 @ c=63, r=130, X137.014 Y75.363 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r130.jpg 2751 / 28944, ETA: 17:21:25.1437 @ 0.419188 items / sec XY3P: 2752 / 28944 @ c=62, r=130, X136.841 Y75.367 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r130.jpg 2752 / 28944, ETA: 17:21:22.8680 @ 0.419187 items / sec XY3P: 2753 / 28944 @ c=61, r=130, X136.668 Y75.371 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r130.jpg 2753 / 28944, ETA: 17:21:20.5923 @ 0.419186 items / sec XY3P: 2754 / 28944 @ c=60, r=130, X136.495 Y75.375 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r130.jpg 2754 / 28944, ETA: 17:21:18.3180 @ 0.419185 items / sec XY3P: 2755 / 28944 @ c=59, r=130, X136.323 Y75.379 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r130.jpg 2755 / 28944, ETA: 17:21:16.0594 @ 0.419185 items / sec XY3P: 2756 / 28944 @ c=58, r=130, X136.150 Y75.382 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r130.jpg 2756 / 28944, ETA: 17:21:13.7646 @ 0.419184 items / sec XY3P: 2757 / 28944 @ c=57, r=130, X135.977 Y75.386 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r130.jpg 2757 / 28944, ETA: 17:21:11.5495 @ 0.419183 items / sec XY3P: 2758 / 28944 @ c=56, r=130, X135.804 Y75.390 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r130.jpg 2758 / 28944, ETA: 17:21:09.2096 @ 0.419183 items / sec XY3P: 2759 / 28944 @ c=55, r=130, X135.632 Y75.394 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r130.jpg 2759 / 28944, ETA: 17:21:06.9440 @ 0.419182 items / sec XY3P: 2760 / 28944 @ c=54, r=130, X135.459 Y75.398 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r130.jpg 2760 / 28944, ETA: 17:21:04.6899 @ 0.419181 items / sec XY3P: 2761 / 28944 @ c=53, r=130, X135.286 Y75.402 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r130.jpg 2761 / 28944, ETA: 17:21:02.3990 @ 0.419180 items / sec XY3P: 2762 / 28944 @ c=52, r=130, X135.113 Y75.406 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r130.jpg 2762 / 28944, ETA: 17:21:00.1146 @ 0.419180 items / sec XY3P: 2763 / 28944 @ c=51, r=130, X134.941 Y75.410 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r130.jpg 2763 / 28944, ETA: 17:20:57.8501 @ 0.419179 items / sec XY3P: 2764 / 28944 @ c=50, r=130, X134.768 Y75.414 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r130.jpg 2764 / 28944, ETA: 17:20:55.5698 @ 0.419178 items / sec XY3P: 2765 / 28944 @ c=49, r=130, X134.595 Y75.418 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r130.jpg 2765 / 28944, ETA: 17:20:53.3135 @ 0.419177 items / sec XY3P: 2766 / 28944 @ c=48, r=130, X134.422 Y75.422 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r130.jpg 2766 / 28944, ETA: 17:20:51.0104 @ 0.419177 items / sec XY3P: 2767 / 28944 @ c=47, r=130, X134.250 Y75.426 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r130.jpg 2767 / 28944, ETA: 17:20:48.7424 @ 0.419176 items / sec XY3P: 2768 / 28944 @ c=46, r=130, X134.077 Y75.430 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r130.jpg 2768 / 28944, ETA: 17:20:46.4659 @ 0.419175 items / sec XY3P: 2769 / 28944 @ c=45, r=130, X133.904 Y75.434 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r130.jpg 2769 / 28944, ETA: 17:20:42.3165 @ 0.419187 items / sec XY3P: 2770 / 28944 @ c=44, r=130, X133.731 Y75.438 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r130.jpg 2770 / 28944, ETA: 17:20:40.0346 @ 0.419186 items / sec XY3P: 2771 / 28944 @ c=43, r=130, X133.559 Y75.442 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r130.jpg 2771 / 28944, ETA: 17:20:37.7619 @ 0.419185 items / sec XY3P: 2772 / 28944 @ c=42, r=130, X133.386 Y75.446 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r130.jpg 2772 / 28944, ETA: 17:20:35.4829 @ 0.419185 items / sec XY3P: 2773 / 28944 @ c=41, r=130, X133.213 Y75.450 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r130.jpg 2773 / 28944, ETA: 17:20:33.2210 @ 0.419184 items / sec XY3P: 2774 / 28944 @ c=40, r=130, X133.040 Y75.454 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r130.jpg 2774 / 28944, ETA: 17:20:31.0069 @ 0.419183 items / sec XY3P: 2775 / 28944 @ c=39, r=130, X132.868 Y75.458 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r130.jpg 2775 / 28944, ETA: 17:20:28.6511 @ 0.419183 items / sec XY3P: 2776 / 28944 @ c=38, r=130, X132.695 Y75.462 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r130.jpg 2776 / 28944, ETA: 17:20:26.3827 @ 0.419182 items / sec XY3P: 2777 / 28944 @ c=37, r=130, X132.522 Y75.466 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r130.jpg 2777 / 28944, ETA: 17:20:24.1474 @ 0.419181 items / sec XY3P: 2778 / 28944 @ c=36, r=130, X132.349 Y75.470 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r130.jpg 2778 / 28944, ETA: 17:20:21.8217 @ 0.419180 items / sec XY3P: 2779 / 28944 @ c=35, r=130, X132.177 Y75.474 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r130.jpg 2779 / 28944, ETA: 17:20:19.5653 @ 0.419179 items / sec XY3P: 2780 / 28944 @ c=34, r=130, X132.004 Y75.478 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r130.jpg 2780 / 28944, ETA: 17:20:17.2725 @ 0.419179 items / sec XY3P: 2781 / 28944 @ c=33, r=130, X131.831 Y75.482 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r130.jpg 2781 / 28944, ETA: 17:20:14.9951 @ 0.419178 items / sec XY3P: 2782 / 28944 @ c=32, r=130, X131.658 Y75.486 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r130.jpg 2782 / 28944, ETA: 17:20:12.7148 @ 0.419177 items / sec XY3P: 2783 / 28944 @ c=31, r=130, X131.486 Y75.490 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r130.jpg 2783 / 28944, ETA: 17:20:10.4469 @ 0.419177 items / sec XY3P: 2784 / 28944 @ c=30, r=130, X131.313 Y75.494 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r130.jpg 2784 / 28944, ETA: 17:20:08.1906 @ 0.419176 items / sec XY3P: 2785 / 28944 @ c=29, r=130, X131.140 Y75.497 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r130.jpg 2785 / 28944, ETA: 17:20:05.8932 @ 0.419175 items / sec XY3P: 2786 / 28944 @ c=28, r=130, X130.967 Y75.501 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r130.jpg 2786 / 28944, ETA: 17:20:03.6213 @ 0.419174 items / sec XY3P: 2787 / 28944 @ c=27, r=130, X130.795 Y75.505 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r130.jpg 2787 / 28944, ETA: 17:20:01.3386 @ 0.419174 items / sec XY3P: 2788 / 28944 @ c=26, r=130, X130.622 Y75.509 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r130.jpg 2788 / 28944, ETA: 17:19:59.0615 @ 0.419173 items / sec XY3P: 2789 / 28944 @ c=25, r=130, X130.449 Y75.513 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r130.jpg 2789 / 28944, ETA: 17:19:56.8029 @ 0.419172 items / sec XY3P: 2790 / 28944 @ c=24, r=130, X130.276 Y75.517 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r130.jpg 2790 / 28944, ETA: 17:19:54.5134 @ 0.419171 items / sec XY3P: 2791 / 28944 @ c=23, r=130, X130.104 Y75.521 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r130.jpg 2791 / 28944, ETA: 17:19:52.2302 @ 0.419171 items / sec XY3P: 2792 / 28944 @ c=22, r=130, X129.931 Y75.525 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r130.jpg 2792 / 28944, ETA: 17:19:49.9539 @ 0.419170 items / sec XY3P: 2793 / 28944 @ c=21, r=130, X129.758 Y75.529 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r130.jpg 2793 / 28944, ETA: 17:19:47.6817 @ 0.419169 items / sec XY3P: 2794 / 28944 @ c=20, r=130, X129.585 Y75.533 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r130.jpg 2794 / 28944, ETA: 17:19:45.4138 @ 0.419168 items / sec XY3P: 2795 / 28944 @ c=19, r=130, X129.413 Y75.537 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r130.jpg 2795 / 28944, ETA: 17:19:43.1816 @ 0.419167 items / sec XY3P: 2796 / 28944 @ c=18, r=130, X129.240 Y75.541 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r130.jpg 2796 / 28944, ETA: 17:19:40.8496 @ 0.419167 items / sec XY3P: 2797 / 28944 @ c=17, r=130, X129.067 Y75.545 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r130.jpg 2797 / 28944, ETA: 17:19:38.5642 @ 0.419166 items / sec XY3P: 2798 / 28944 @ c=16, r=130, X128.894 Y75.549 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r130.jpg 2798 / 28944, ETA: 17:19:36.2893 @ 0.419166 items / sec XY3P: 2799 / 28944 @ c=15, r=130, X128.722 Y75.553 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r130.jpg 2799 / 28944, ETA: 17:19:34.0325 @ 0.419165 items / sec XY3P: 2800 / 28944 @ c=14, r=130, X128.549 Y75.557 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r130.jpg 2800 / 28944, ETA: 17:19:31.7414 @ 0.419164 items / sec XY3P: 2801 / 28944 @ c=13, r=130, X128.376 Y75.561 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r130.jpg 2801 / 28944, ETA: 17:19:29.4580 @ 0.419163 items / sec XY3P: 2802 / 28944 @ c=12, r=130, X128.203 Y75.565 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r130.jpg 2802 / 28944, ETA: 17:19:27.2008 @ 0.419163 items / sec XY3P: 2803 / 28944 @ c=11, r=130, X128.031 Y75.569 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r130.jpg 2803 / 28944, ETA: 17:19:24.8993 @ 0.419162 items / sec XY3P: 2804 / 28944 @ c=10, r=130, X127.858 Y75.573 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r130.jpg 2804 / 28944, ETA: 17:19:22.7008 @ 0.419161 items / sec XY3P: 2805 / 28944 @ c=9, r=130, X127.685 Y75.577 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r130.jpg 2805 / 28944, ETA: 17:19:20.3488 @ 0.419161 items / sec XY3P: 2806 / 28944 @ c=8, r=130, X127.512 Y75.581 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r130.jpg 2806 / 28944, ETA: 17:19:18.0704 @ 0.419160 items / sec XY3P: 2807 / 28944 @ c=7, r=130, X127.340 Y75.585 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r130.jpg 2807 / 28944, ETA: 17:19:15.7897 @ 0.419159 items / sec XY3P: 2808 / 28944 @ c=6, r=130, X127.167 Y75.589 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r130.jpg 2808 / 28944, ETA: 17:19:13.5102 @ 0.419158 items / sec XY3P: 2809 / 28944 @ c=5, r=130, X126.994 Y75.593 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r130.jpg 2809 / 28944, ETA: 17:19:11.3069 @ 0.419157 items / sec XY3P: 2810 / 28944 @ c=4, r=130, X126.821 Y75.597 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r130.jpg 2810 / 28944, ETA: 17:19:08.9543 @ 0.419157 items / sec XY3P: 2811 / 28944 @ c=3, r=130, X126.649 Y75.601 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r130.jpg 2811 / 28944, ETA: 17:19:06.6769 @ 0.419156 items / sec XY3P: 2812 / 28944 @ c=2, r=130, X126.476 Y75.605 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r130.jpg 2812 / 28944, ETA: 17:19:04.3997 @ 0.419156 items / sec XY3P: 2813 / 28944 @ c=1, r=130, X126.303 Y75.608 Z-15.179 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r130.jpg 2813 / 28944, ETA: 17:19:02.1192 @ 0.419155 items / sec XY3P: 2814 / 28944 @ c=0, r=130, X126.130 Y75.612 Z-15.180 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r130.jpg 2814 / 28944, ETA: 17:18:59.8584 @ 0.419154 items / sec XY3P: 2815 / 28944 @ c=0, r=129, X126.135 Y75.785 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c000_r129.jpg 2815 / 28944, ETA: 17:18:57.5577 @ 0.419153 items / sec XY3P: 2816 / 28944 @ c=1, r=129, X126.308 Y75.781 Z-15.178 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c001_r129.jpg 2816 / 28944, ETA: 17:18:53.4430 @ 0.419165 items / sec XY3P: 2817 / 28944 @ c=2, r=129, X126.480 Y75.777 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c002_r129.jpg 2817 / 28944, ETA: 17:18:51.1545 @ 0.419164 items / sec XY3P: 2818 / 28944 @ c=3, r=129, X126.653 Y75.773 Z-15.177 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c003_r129.jpg 2818 / 28944, ETA: 17:18:48.8808 @ 0.419164 items / sec XY3P: 2819 / 28944 @ c=4, r=129, X126.826 Y75.769 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c004_r129.jpg 2819 / 28944, ETA: 17:18:46.5898 @ 0.419163 items / sec XY3P: 2820 / 28944 @ c=5, r=129, X126.999 Y75.765 Z-15.176 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c005_r129.jpg 2820 / 28944, ETA: 17:18:44.3119 @ 0.419162 items / sec XY3P: 2821 / 28944 @ c=6, r=129, X127.171 Y75.761 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c006_r129.jpg 2821 / 28944, ETA: 17:18:42.0332 @ 0.419162 items / sec XY3P: 2822 / 28944 @ c=7, r=129, X127.344 Y75.757 Z-15.175 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c007_r129.jpg 2822 / 28944, ETA: 17:18:39.7543 @ 0.419161 items / sec XY3P: 2823 / 28944 @ c=8, r=129, X127.517 Y75.753 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c008_r129.jpg 2823 / 28944, ETA: 17:18:37.5492 @ 0.419160 items / sec XY3P: 2824 / 28944 @ c=9, r=129, X127.690 Y75.749 Z-15.174 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c009_r129.jpg 2824 / 28944, ETA: 17:18:35.2003 @ 0.419159 items / sec XY3P: 2825 / 28944 @ c=10, r=129, X127.862 Y75.746 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c010_r129.jpg 2825 / 28944, ETA: 17:18:32.9760 @ 0.419158 items / sec XY3P: 2826 / 28944 @ c=11, r=129, X128.035 Y75.742 Z-15.173 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c011_r129.jpg 2826 / 28944, ETA: 17:18:30.6427 @ 0.419158 items / sec XY3P: 2827 / 28944 @ c=12, r=129, X128.208 Y75.738 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c012_r129.jpg 2827 / 28944, ETA: 17:18:28.3629 @ 0.419157 items / sec XY3P: 2828 / 28944 @ c=13, r=129, X128.381 Y75.734 Z-15.172 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c013_r129.jpg 2828 / 28944, ETA: 17:18:26.0899 @ 0.419156 items / sec XY3P: 2829 / 28944 @ c=14, r=129, X128.553 Y75.730 Z-15.171 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c014_r129.jpg 2829 / 28944, ETA: 17:18:23.8017 @ 0.419156 items / sec XY3P: 2830 / 28944 @ c=15, r=129, X128.726 Y75.726 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c015_r129.jpg 2830 / 28944, ETA: 17:18:21.5230 @ 0.419155 items / sec XY3P: 2831 / 28944 @ c=16, r=129, X128.899 Y75.722 Z-15.170 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c016_r129.jpg 2831 / 28944, ETA: 17:18:19.2506 @ 0.419154 items / sec XY3P: 2832 / 28944 @ c=17, r=129, X129.072 Y75.718 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c017_r129.jpg 2832 / 28944, ETA: 17:18:17.0188 @ 0.419153 items / sec XY3P: 2833 / 28944 @ c=18, r=129, X129.244 Y75.714 Z-15.169 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c018_r129.jpg 2833 / 28944, ETA: 17:18:14.6942 @ 0.419153 items / sec XY3P: 2834 / 28944 @ c=19, r=129, X129.417 Y75.710 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c019_r129.jpg 2834 / 28944, ETA: 17:18:10.6180 @ 0.419164 items / sec XY3P: 2835 / 28944 @ c=20, r=129, X129.590 Y75.706 Z-15.168 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c020_r129.jpg 2835 / 28944, ETA: 17:18:08.2791 @ 0.419164 items / sec XY3P: 2836 / 28944 @ c=21, r=129, X129.763 Y75.702 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c021_r129.jpg 2836 / 28944, ETA: 17:18:04.1652 @ 0.419176 items / sec XY3P: 2837 / 28944 @ c=22, r=129, X129.935 Y75.698 Z-15.167 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c022_r129.jpg 2837 / 28944, ETA: 17:18:01.9046 @ 0.419175 items / sec XY3P: 2838 / 28944 @ c=23, r=129, X130.108 Y75.694 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c023_r129.jpg 2838 / 28944, ETA: 17:17:59.6068 @ 0.419174 items / sec XY3P: 2839 / 28944 @ c=24, r=129, X130.281 Y75.690 Z-15.166 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c024_r129.jpg 2839 / 28944, ETA: 17:17:57.3287 @ 0.419173 items / sec XY3P: 2840 / 28944 @ c=25, r=129, X130.454 Y75.686 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c025_r129.jpg 2840 / 28944, ETA: 17:17:55.0522 @ 0.419173 items / sec XY3P: 2841 / 28944 @ c=26, r=129, X130.626 Y75.682 Z-15.165 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c026_r129.jpg 2841 / 28944, ETA: 17:17:52.7604 @ 0.419172 items / sec XY3P: 2842 / 28944 @ c=27, r=129, X130.799 Y75.678 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c027_r129.jpg 2842 / 28944, ETA: 17:17:50.5096 @ 0.419171 items / sec XY3P: 2843 / 28944 @ c=28, r=129, X130.972 Y75.674 Z-15.164 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c028_r129.jpg 2843 / 28944, ETA: 17:17:48.2160 @ 0.419171 items / sec XY3P: 2844 / 28944 @ c=29, r=129, X131.145 Y75.670 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c029_r129.jpg 2844 / 28944, ETA: 17:17:45.9365 @ 0.419170 items / sec XY3P: 2845 / 28944 @ c=30, r=129, X131.317 Y75.666 Z-15.163 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c030_r129.jpg 2845 / 28944, ETA: 17:17:43.6610 @ 0.419169 items / sec XY3P: 2846 / 28944 @ c=31, r=129, X131.490 Y75.662 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c031_r129.jpg 2846 / 28944, ETA: 17:17:41.3848 @ 0.419168 items / sec XY3P: 2847 / 28944 @ c=32, r=129, X131.663 Y75.658 Z-15.162 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c032_r129.jpg 2847 / 28944, ETA: 17:17:39.1715 @ 0.419167 items / sec XY3P: 2848 / 28944 @ c=33, r=129, X131.836 Y75.654 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c033_r129.jpg 2848 / 28944, ETA: 17:17:36.8720 @ 0.419167 items / sec XY3P: 2849 / 28944 @ c=34, r=129, X132.008 Y75.650 Z-15.161 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c034_r129.jpg 2849 / 28944, ETA: 17:17:34.5404 @ 0.419166 items / sec XY3P: 2850 / 28944 @ c=35, r=129, X132.181 Y75.646 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c035_r129.jpg 2850 / 28944, ETA: 17:17:32.2624 @ 0.419165 items / sec XY3P: 2851 / 28944 @ c=36, r=129, X132.354 Y75.642 Z-15.160 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c036_r129.jpg 2851 / 28944, ETA: 17:17:29.9772 @ 0.419165 items / sec XY3P: 2852 / 28944 @ c=37, r=129, X132.527 Y75.638 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c037_r129.jpg 2852 / 28944, ETA: 17:17:25.8679 @ 0.419176 items / sec XY3P: 2853 / 28944 @ c=38, r=129, X132.699 Y75.635 Z-15.159 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c038_r129.jpg 2853 / 28944, ETA: 17:17:23.5886 @ 0.419176 items / sec XY3P: 2854 / 28944 @ c=39, r=129, X132.872 Y75.631 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c039_r129.jpg 2854 / 28944, ETA: 17:17:19.4871 @ 0.419187 items / sec XY3P: 2855 / 28944 @ c=40, r=129, X133.045 Y75.627 Z-15.158 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c040_r129.jpg 2855 / 28944, ETA: 17:17:17.2095 @ 0.419187 items / sec XY3P: 2856 / 28944 @ c=41, r=129, X133.218 Y75.623 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c041_r129.jpg 2856 / 28944, ETA: 17:17:14.9460 @ 0.419186 items / sec XY3P: 2857 / 28944 @ c=42, r=129, X133.390 Y75.619 Z-15.157 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c042_r129.jpg 2857 / 28944, ETA: 17:17:12.6493 @ 0.419185 items / sec XY3P: 2858 / 28944 @ c=43, r=129, X133.563 Y75.615 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c043_r129.jpg 2858 / 28944, ETA: 17:17:10.3743 @ 0.419184 items / sec XY3P: 2859 / 28944 @ c=44, r=129, X133.736 Y75.611 Z-15.156 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c044_r129.jpg 2859 / 28944, ETA: 17:17:08.0829 @ 0.419184 items / sec XY3P: 2860 / 28944 @ c=45, r=129, X133.909 Y75.607 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c045_r129.jpg 2860 / 28944, ETA: 17:17:05.8125 @ 0.419183 items / sec XY3P: 2861 / 28944 @ c=46, r=129, X134.081 Y75.603 Z-15.155 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c046_r129.jpg 2861 / 28944, ETA: 17:17:03.5522 @ 0.419182 items / sec XY3P: 2862 / 28944 @ c=47, r=129, X134.254 Y75.599 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c047_r129.jpg 2862 / 28944, ETA: 17:17:01.2531 @ 0.419182 items / sec XY3P: 2863 / 28944 @ c=48, r=129, X134.427 Y75.595 Z-15.154 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c048_r129.jpg 2863 / 28944, ETA: 17:16:58.9741 @ 0.419181 items / sec XY3P: 2864 / 28944 @ c=49, r=129, X134.600 Y75.591 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c049_r129.jpg 2864 / 28944, ETA: 17:16:56.6949 @ 0.419180 items / sec XY3P: 2865 / 28944 @ c=50, r=129, X134.772 Y75.587 Z-15.153 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c050_r129.jpg 2865 / 28944, ETA: 17:16:54.4136 @ 0.419179 items / sec XY3P: 2866 / 28944 @ c=51, r=129, X134.945 Y75.583 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c051_r129.jpg 2866 / 28944, ETA: 17:16:52.2057 @ 0.419178 items / sec XY3P: 2867 / 28944 @ c=52, r=129, X135.118 Y75.579 Z-15.152 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c052_r129.jpg 2867 / 28944, ETA: 17:16:49.8565 @ 0.419178 items / sec XY3P: 2868 / 28944 @ c=53, r=129, X135.291 Y75.575 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c053_r129.jpg 2868 / 28944, ETA: 17:16:47.5768 @ 0.419177 items / sec XY3P: 2869 / 28944 @ c=54, r=129, X135.463 Y75.571 Z-15.151 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c054_r129.jpg 2869 / 28944, ETA: 17:16:45.3006 @ 0.419176 items / sec XY3P: 2870 / 28944 @ c=55, r=129, X135.636 Y75.567 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c055_r129.jpg 2870 / 28944, ETA: 17:16:43.0184 @ 0.419176 items / sec XY3P: 2871 / 28944 @ c=56, r=129, X135.809 Y75.563 Z-15.150 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c056_r129.jpg 2871 / 28944, ETA: 17:16:38.9218 @ 0.419187 items / sec XY3P: 2872 / 28944 @ c=57, r=129, X135.982 Y75.559 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c057_r129.jpg 2872 / 28944, ETA: 17:16:36.6390 @ 0.419187 items / sec XY3P: 2873 / 28944 @ c=58, r=129, X136.154 Y75.555 Z-15.149 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c058_r129.jpg 2873 / 28944, ETA: 17:16:32.5497 @ 0.419198 items / sec XY3P: 2874 / 28944 @ c=59, r=129, X136.327 Y75.551 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c059_r129.jpg 2874 / 28944, ETA: 17:16:30.2704 @ 0.419197 items / sec XY3P: 2875 / 28944 @ c=60, r=129, X136.500 Y75.547 Z-15.148 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c060_r129.jpg 2875 / 28944, ETA: 17:16:28.0128 @ 0.419197 items / sec XY3P: 2876 / 28944 @ c=61, r=129, X136.673 Y75.543 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c061_r129.jpg 2876 / 28944, ETA: 17:16:25.7130 @ 0.419196 items / sec XY3P: 2877 / 28944 @ c=62, r=129, X136.845 Y75.539 Z-15.147 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c062_r129.jpg 2877 / 28944, ETA: 17:16:23.4272 @ 0.419195 items / sec XY3P: 2878 / 28944 @ c=63, r=129, X137.018 Y75.535 Z-15.146 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c063_r129.jpg 2878 / 28944, ETA: 17:16:21.1562 @ 0.419195 items / sec XY3P: 2879 / 28944 @ c=64, r=129, X137.191 Y75.531 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c064_r129.jpg 2879 / 28944, ETA: 17:16:18.8769 @ 0.419194 items / sec XY3P: 2880 / 28944 @ c=65, r=129, X137.364 Y75.527 Z-15.145 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c065_r129.jpg 2880 / 28944, ETA: 17:16:16.6141 @ 0.419193 items / sec XY3P: 2881 / 28944 @ c=66, r=129, X137.536 Y75.523 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c066_r129.jpg 2881 / 28944, ETA: 17:16:14.3171 @ 0.419192 items / sec XY3P: 2882 / 28944 @ c=67, r=129, X137.709 Y75.520 Z-15.144 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c067_r129.jpg 2882 / 28944, ETA: 17:16:12.0405 @ 0.419192 items / sec XY3P: 2883 / 28944 @ c=68, r=129, X137.882 Y75.516 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c068_r129.jpg 2883 / 28944, ETA: 17:16:09.7542 @ 0.419191 items / sec XY3P: 2884 / 28944 @ c=69, r=129, X138.055 Y75.512 Z-15.143 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c069_r129.jpg 2884 / 28944, ETA: 17:16:07.4734 @ 0.419190 items / sec XY3P: 2885 / 28944 @ c=70, r=129, X138.227 Y75.508 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c070_r129.jpg 2885 / 28944, ETA: 17:16:05.2146 @ 0.419189 items / sec XY3P: 2886 / 28944 @ c=71, r=129, X138.400 Y75.504 Z-15.142 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c071_r129.jpg 2886 / 28944, ETA: 17:16:02.9181 @ 0.419189 items / sec XY3P: 2887 / 28944 @ c=72, r=129, X138.573 Y75.500 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c072_r129.jpg 2887 / 28944, ETA: 17:16:00.6378 @ 0.419188 items / sec XY3P: 2888 / 28944 @ c=73, r=129, X138.746 Y75.496 Z-15.141 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c073_r129.jpg 2888 / 28944, ETA: 17:15:58.3627 @ 0.419187 items / sec XY3P: 2889 / 28944 @ c=74, r=129, X138.918 Y75.492 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r129.jpg 2889 / 28944, ETA: 17:15:56.0803 @ 0.419187 items / sec XY3P: 2890 / 28944 @ c=75, r=129, X139.091 Y75.488 Z-15.140 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r129.jpg 2890 / 28944, ETA: 17:15:52.0028 @ 0.419198 items / sec XY3P: 2891 / 28944 @ c=76, r=129, X139.264 Y75.484 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r129.jpg 2891 / 28944, ETA: 17:15:47.9198 @ 0.419210 items / sec XY3P: 2892 / 28944 @ c=77, r=129, X139.437 Y75.480 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r129.jpg 2892 / 28944, ETA: 17:15:45.6422 @ 0.419209 items / sec XY3P: 2893 / 28944 @ c=78, r=129, X139.609 Y75.476 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r129.jpg 2893 / 28944, ETA: 17:15:43.3507 @ 0.419208 items / sec XY3P: 2894 / 28944 @ c=79, r=129, X139.782 Y75.472 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r129.jpg 2894 / 28944, ETA: 17:15:41.1492 @ 0.419207 items / sec XY3P: 2895 / 28944 @ c=80, r=129, X139.955 Y75.468 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r129.jpg 2895 / 28944, ETA: 17:15:38.8020 @ 0.419207 items / sec XY3P: 2896 / 28944 @ c=81, r=129, X140.128 Y75.464 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r129.jpg 2896 / 28944, ETA: 17:15:36.5283 @ 0.419206 items / sec XY3P: 2897 / 28944 @ c=82, r=129, X140.300 Y75.460 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r129.jpg 2897 / 28944, ETA: 17:15:34.2414 @ 0.419205 items / sec XY3P: 2898 / 28944 @ c=83, r=129, X140.473 Y75.456 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r129.jpg 2898 / 28944, ETA: 17:15:31.9640 @ 0.419205 items / sec XY3P: 2899 / 28944 @ c=84, r=129, X140.646 Y75.452 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r129.jpg 2899 / 28944, ETA: 17:15:29.7529 @ 0.419203 items / sec XY3P: 2900 / 28944 @ c=85, r=129, X140.819 Y75.448 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r129.jpg 2900 / 28944, ETA: 17:15:27.4023 @ 0.419203 items / sec XY3P: 2901 / 28944 @ c=86, r=129, X140.991 Y75.444 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r129.jpg 2901 / 28944, ETA: 17:15:25.1756 @ 0.419202 items / sec XY3P: 2902 / 28944 @ c=87, r=129, X141.164 Y75.440 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r129.jpg 2902 / 28944, ETA: 17:15:22.9013 @ 0.419201 items / sec XY3P: 2903 / 28944 @ c=88, r=129, X141.337 Y75.436 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r129.jpg 2903 / 28944, ETA: 17:15:20.5666 @ 0.419201 items / sec XY3P: 2904 / 28944 @ c=89, r=129, X141.510 Y75.432 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r129.jpg 2904 / 28944, ETA: 17:15:18.3049 @ 0.419200 items / sec XY3P: 2905 / 28944 @ c=90, r=129, X141.682 Y75.428 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r129.jpg 2905 / 28944, ETA: 17:15:16.0038 @ 0.419200 items / sec XY3P: 2906 / 28944 @ c=91, r=129, X141.855 Y75.424 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r129.jpg 2906 / 28944, ETA: 17:15:13.7262 @ 0.419199 items / sec XY3P: 2907 / 28944 @ c=92, r=129, X142.028 Y75.420 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r129.jpg 2907 / 28944, ETA: 17:15:11.4516 @ 0.419198 items / sec XY3P: 2908 / 28944 @ c=93, r=129, X142.201 Y75.416 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r129.jpg 2908 / 28944, ETA: 17:15:09.1634 @ 0.419197 items / sec XY3P: 2909 / 28944 @ c=94, r=129, X142.373 Y75.412 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r129.jpg 2909 / 28944, ETA: 17:15:05.0988 @ 0.419209 items / sec XY3P: 2910 / 28944 @ c=95, r=129, X142.546 Y75.409 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r129.jpg 2910 / 28944, ETA: 17:15:01.0302 @ 0.419220 items / sec XY3P: 2911 / 28944 @ c=96, r=129, X142.719 Y75.405 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r129.jpg 2911 / 28944, ETA: 17:14:58.7474 @ 0.419219 items / sec XY3P: 2912 / 28944 @ c=97, r=129, X142.892 Y75.401 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r129.jpg 2912 / 28944, ETA: 17:14:56.4708 @ 0.419219 items / sec XY3P: 2913 / 28944 @ c=98, r=129, X143.064 Y75.397 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r129.jpg 2913 / 28944, ETA: 17:14:54.2095 @ 0.419218 items / sec XY3P: 2914 / 28944 @ c=99, r=129, X143.237 Y75.393 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r129.jpg 2914 / 28944, ETA: 17:14:51.9178 @ 0.419217 items / sec XY3P: 2915 / 28944 @ c=100, r=129, X143.410 Y75.389 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r129.jpg 2915 / 28944, ETA: 17:14:49.6346 @ 0.419217 items / sec XY3P: 2916 / 28944 @ c=101, r=129, X143.583 Y75.385 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r129.jpg 2916 / 28944, ETA: 17:14:47.4141 @ 0.419215 items / sec XY3P: 2917 / 28944 @ c=102, r=129, X143.755 Y75.381 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r129.jpg 2917 / 28944, ETA: 17:14:45.0758 @ 0.419215 items / sec XY3P: 2918 / 28944 @ c=103, r=129, X143.928 Y75.377 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r129.jpg 2918 / 28944, ETA: 17:14:42.8186 @ 0.419214 items / sec XY3P: 2919 / 28944 @ c=104, r=129, X144.101 Y75.373 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r129.jpg 2919 / 28944, ETA: 17:14:40.5179 @ 0.419214 items / sec XY3P: 2920 / 28944 @ c=105, r=129, X144.274 Y75.369 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r129.jpg 2920 / 28944, ETA: 17:14:38.2530 @ 0.419213 items / sec XY3P: 2921 / 28944 @ c=106, r=129, X144.446 Y75.365 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r129.jpg 2921 / 28944, ETA: 17:14:35.9962 @ 0.419212 items / sec XY3P: 2922 / 28944 @ c=107, r=129, X144.619 Y75.361 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r129.jpg 2922 / 28944, ETA: 17:14:33.6906 @ 0.419211 items / sec XY3P: 2923 / 28944 @ c=108, r=129, X144.792 Y75.357 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r129.jpg 2923 / 28944, ETA: 17:14:31.3987 @ 0.419211 items / sec XY3P: 2924 / 28944 @ c=109, r=129, X144.965 Y75.353 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r129.jpg 2924 / 28944, ETA: 17:14:29.1712 @ 0.419210 items / sec XY3P: 2925 / 28944 @ c=110, r=129, X145.137 Y75.349 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r129.jpg 2925 / 28944, ETA: 17:14:26.8352 @ 0.419209 items / sec XY3P: 2926 / 28944 @ c=111, r=129, X145.310 Y75.345 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r129.jpg 2926 / 28944, ETA: 17:14:24.5549 @ 0.419209 items / sec XY3P: 2927 / 28944 @ c=112, r=129, X145.483 Y75.341 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r129.jpg 2927 / 28944, ETA: 17:14:20.5095 @ 0.419220 items / sec XY3P: 2928 / 28944 @ c=113, r=129, X145.656 Y75.337 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r129.jpg 2928 / 28944, ETA: 17:14:16.4480 @ 0.419231 items / sec XY3P: 2929 / 28944 @ c=114, r=129, X145.828 Y75.333 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r129.jpg 2929 / 28944, ETA: 17:14:12.3897 @ 0.419243 items / sec XY3P: 2930 / 28944 @ c=115, r=129, X146.001 Y75.329 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r129.jpg 2930 / 28944, ETA: 17:14:10.1115 @ 0.419242 items / sec XY3P: 2931 / 28944 @ c=116, r=129, X146.174 Y75.325 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r129.jpg 2931 / 28944, ETA: 17:14:07.8429 @ 0.419241 items / sec XY3P: 2932 / 28944 @ c=117, r=129, X146.347 Y75.321 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r129.jpg 2932 / 28944, ETA: 17:14:05.5526 @ 0.419240 items / sec XY3P: 2933 / 28944 @ c=118, r=129, X146.519 Y75.317 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r129.jpg 2933 / 28944, ETA: 17:14:03.2721 @ 0.419240 items / sec XY3P: 2934 / 28944 @ c=119, r=129, X146.692 Y75.313 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r129.jpg 2934 / 28944, ETA: 17:14:00.9973 @ 0.419239 items / sec XY3P: 2935 / 28944 @ c=120, r=129, X146.865 Y75.309 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r129.jpg 2935 / 28944, ETA: 17:13:58.7172 @ 0.419238 items / sec XY3P: 2936 / 28944 @ c=121, r=129, X147.038 Y75.305 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r129.jpg 2936 / 28944, ETA: 17:13:56.4554 @ 0.419237 items / sec XY3P: 2937 / 28944 @ c=122, r=129, X147.210 Y75.301 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r129.jpg 2937 / 28944, ETA: 17:13:54.1630 @ 0.419237 items / sec XY3P: 2938 / 28944 @ c=123, r=129, X147.383 Y75.297 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r129.jpg 2938 / 28944, ETA: 17:13:51.8750 @ 0.419236 items / sec XY3P: 2939 / 28944 @ c=124, r=129, X147.556 Y75.294 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r129.jpg 2939 / 28944, ETA: 17:13:49.5998 @ 0.419235 items / sec XY3P: 2940 / 28944 @ c=125, r=129, X147.729 Y75.290 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r129.jpg 2940 / 28944, ETA: 17:13:47.3219 @ 0.419235 items / sec XY3P: 2941 / 28944 @ c=126, r=129, X147.901 Y75.286 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r129.jpg 2941 / 28944, ETA: 17:13:45.0593 @ 0.419234 items / sec XY3P: 2942 / 28944 @ c=127, r=129, X148.074 Y75.282 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r129.jpg 2942 / 28944, ETA: 17:13:42.7624 @ 0.419233 items / sec XY3P: 2943 / 28944 @ c=128, r=129, X148.247 Y75.278 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r129.jpg 2943 / 28944, ETA: 17:13:40.4863 @ 0.419232 items / sec XY3P: 2944 / 28944 @ c=129, r=129, X148.420 Y75.274 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r129.jpg 2944 / 28944, ETA: 17:13:38.2012 @ 0.419232 items / sec XY3P: 2945 / 28944 @ c=130, r=129, X148.592 Y75.270 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r129.jpg 2945 / 28944, ETA: 17:13:35.9166 @ 0.419231 items / sec XY3P: 2946 / 28944 @ c=131, r=129, X148.765 Y75.266 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r129.jpg 2946 / 28944, ETA: 17:13:31.8845 @ 0.419242 items / sec XY3P: 2947 / 28944 @ c=132, r=129, X148.938 Y75.262 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r129.jpg 2947 / 28944, ETA: 17:13:29.6174 @ 0.419241 items / sec XY3P: 2948 / 28944 @ c=133, r=129, X149.111 Y75.258 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r129.jpg 2948 / 28944, ETA: 17:13:25.5587 @ 0.419253 items / sec XY3P: 2949 / 28944 @ c=134, r=129, X149.283 Y75.254 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r129.jpg 2949 / 28944, ETA: 17:13:23.3304 @ 0.419252 items / sec XY3P: 2950 / 28944 @ c=135, r=129, X149.456 Y75.250 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r129.jpg 2950 / 28944, ETA: 17:13:21.0188 @ 0.419251 items / sec XY3P: 2951 / 28944 @ c=136, r=129, X149.629 Y75.246 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r129.jpg 2951 / 28944, ETA: 17:13:18.7258 @ 0.419251 items / sec XY3P: 2952 / 28944 @ c=137, r=129, X149.802 Y75.242 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r129.jpg 2952 / 28944, ETA: 17:13:16.4437 @ 0.419250 items / sec XY3P: 2953 / 28944 @ c=138, r=129, X149.974 Y75.238 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r129.jpg 2953 / 28944, ETA: 17:13:14.1690 @ 0.419249 items / sec XY3P: 2954 / 28944 @ c=139, r=129, X150.147 Y75.234 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r129.jpg 2954 / 28944, ETA: 17:13:11.8873 @ 0.419248 items / sec XY3P: 2955 / 28944 @ c=140, r=129, X150.320 Y75.230 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r129.jpg 2955 / 28944, ETA: 17:13:09.6247 @ 0.419248 items / sec XY3P: 2956 / 28944 @ c=141, r=129, X150.493 Y75.226 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r129.jpg 2956 / 28944, ETA: 17:13:07.3798 @ 0.419247 items / sec XY3P: 2957 / 28944 @ c=142, r=129, X150.665 Y75.222 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r129.jpg 2957 / 28944, ETA: 17:13:05.0468 @ 0.419246 items / sec XY3P: 2958 / 28944 @ c=143, r=129, X150.838 Y75.218 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r129.jpg 2958 / 28944, ETA: 17:13:02.7649 @ 0.419246 items / sec XY3P: 2959 / 28944 @ c=144, r=129, X151.011 Y75.214 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r129.jpg 2959 / 28944, ETA: 17:13:00.4949 @ 0.419245 items / sec XY3P: 2960 / 28944 @ c=145, r=129, X151.184 Y75.210 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r129.jpg 2960 / 28944, ETA: 17:12:58.2266 @ 0.419244 items / sec XY3P: 2961 / 28944 @ c=146, r=129, X151.356 Y75.206 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r129.jpg 2961 / 28944, ETA: 17:12:55.9322 @ 0.419243 items / sec XY3P: 2962 / 28944 @ c=147, r=129, X151.529 Y75.202 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r129.jpg 2962 / 28944, ETA: 17:12:53.6506 @ 0.419243 items / sec XY3P: 2963 / 28944 @ c=148, r=129, X151.702 Y75.198 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r129.jpg 2963 / 28944, ETA: 17:12:51.4234 @ 0.419242 items / sec XY3P: 2964 / 28944 @ c=149, r=129, X151.875 Y75.194 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r129.jpg 2964 / 28944, ETA: 17:12:49.0909 @ 0.419241 items / sec XY3P: 2965 / 28944 @ c=150, r=129, X152.047 Y75.190 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r129.jpg 2965 / 28944, ETA: 17:12:45.1088 @ 0.419252 items / sec XY3P: 2966 / 28944 @ c=151, r=129, X152.220 Y75.186 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r129.jpg 2966 / 28944, ETA: 17:12:42.7764 @ 0.419252 items / sec XY3P: 2967 / 28944 @ c=152, r=129, X152.393 Y75.183 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r129.jpg 2967 / 28944, ETA: 17:12:40.5008 @ 0.419251 items / sec XY3P: 2968 / 28944 @ c=153, r=129, X152.566 Y75.179 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r129.jpg 2968 / 28944, ETA: 17:12:38.2216 @ 0.419250 items / sec XY3P: 2969 / 28944 @ c=154, r=129, X152.738 Y75.175 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r129.jpg 2969 / 28944, ETA: 17:12:35.9567 @ 0.419249 items / sec XY3P: 2970 / 28944 @ c=155, r=129, X152.911 Y75.171 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r129.jpg 2970 / 28944, ETA: 17:12:33.6615 @ 0.419249 items / sec XY3P: 2971 / 28944 @ c=156, r=129, X153.084 Y75.167 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r129.jpg 2971 / 28944, ETA: 17:12:31.3820 @ 0.419248 items / sec XY3P: 2972 / 28944 @ c=157, r=129, X153.257 Y75.163 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r129.jpg 2972 / 28944, ETA: 17:12:29.0991 @ 0.419247 items / sec XY3P: 2973 / 28944 @ c=158, r=129, X153.429 Y75.159 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r129.jpg 2973 / 28944, ETA: 17:12:26.8175 @ 0.419247 items / sec XY3P: 2974 / 28944 @ c=159, r=129, X153.602 Y75.155 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r129.jpg 2974 / 28944, ETA: 17:12:24.5620 @ 0.419246 items / sec XY3P: 2975 / 28944 @ c=160, r=129, X153.775 Y75.151 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r129.jpg 2975 / 28944, ETA: 17:12:22.2621 @ 0.419245 items / sec XY3P: 2976 / 28944 @ c=161, r=129, X153.948 Y75.147 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r129.jpg 2976 / 28944, ETA: 17:12:19.9799 @ 0.419245 items / sec XY3P: 2977 / 28944 @ c=162, r=129, X154.120 Y75.143 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r129.jpg 2977 / 28944, ETA: 17:12:17.7047 @ 0.419244 items / sec XY3P: 2978 / 28944 @ c=163, r=129, X154.293 Y75.139 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r129.jpg 2978 / 28944, ETA: 17:12:15.4164 @ 0.419243 items / sec XY3P: 2979 / 28944 @ c=164, r=129, X154.466 Y75.135 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r129.jpg 2979 / 28944, ETA: 17:12:13.1536 @ 0.419242 items / sec XY3P: 2980 / 28944 @ c=165, r=129, X154.639 Y75.131 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r129.jpg 2980 / 28944, ETA: 17:12:10.8623 @ 0.419242 items / sec XY3P: 2981 / 28944 @ c=166, r=129, X154.811 Y75.127 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r129.jpg 2981 / 28944, ETA: 17:12:08.5740 @ 0.419241 items / sec XY3P: 2982 / 28944 @ c=167, r=129, X154.984 Y75.123 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r129.jpg 2982 / 28944, ETA: 17:12:06.2967 @ 0.419240 items / sec XY3P: 2983 / 28944 @ c=168, r=129, X155.157 Y75.119 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r129.jpg 2983 / 28944, ETA: 17:12:04.0158 @ 0.419240 items / sec XY3P: 2984 / 28944 @ c=169, r=129, X155.330 Y75.115 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r129.jpg 2984 / 28944, ETA: 17:12:00.0032 @ 0.419251 items / sec XY3P: 2985 / 28944 @ c=170, r=129, X155.502 Y75.111 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r129.jpg 2985 / 28944, ETA: 17:11:57.7134 @ 0.419250 items / sec XY3P: 2986 / 28944 @ c=171, r=129, X155.675 Y75.107 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r129.jpg 2986 / 28944, ETA: 17:11:55.4345 @ 0.419249 items / sec XY3P: 2987 / 28944 @ c=172, r=129, X155.848 Y75.103 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r129.jpg 2987 / 28944, ETA: 17:11:53.1558 @ 0.419249 items / sec XY3P: 2988 / 28944 @ c=173, r=129, X156.021 Y75.099 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r129.jpg 2988 / 28944, ETA: 17:11:50.9250 @ 0.419247 items / sec XY3P: 2989 / 28944 @ c=174, r=129, X156.193 Y75.095 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r129.jpg 2989 / 28944, ETA: 17:11:48.5995 @ 0.419247 items / sec XY3P: 2990 / 28944 @ c=175, r=129, X156.366 Y75.091 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r129.jpg 2990 / 28944, ETA: 17:11:46.3152 @ 0.419246 items / sec XY3P: 2991 / 28944 @ c=176, r=129, X156.539 Y75.087 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r129.jpg 2991 / 28944, ETA: 17:11:44.0369 @ 0.419246 items / sec XY3P: 2992 / 28944 @ c=177, r=129, X156.712 Y75.083 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r129.jpg 2992 / 28944, ETA: 17:11:41.7589 @ 0.419245 items / sec XY3P: 2993 / 28944 @ c=178, r=129, X156.884 Y75.079 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r129.jpg 2993 / 28944, ETA: 17:11:39.4856 @ 0.419244 items / sec XY3P: 2994 / 28944 @ c=179, r=129, X157.057 Y75.075 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r129.jpg 2994 / 28944, ETA: 17:11:37.2355 @ 0.419243 items / sec XY3P: 2995 / 28944 @ c=180, r=129, X157.230 Y75.071 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r129.jpg 2995 / 28944, ETA: 17:11:34.9626 @ 0.419243 items / sec XY3P: 2996 / 28944 @ c=181, r=129, X157.403 Y75.068 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r129.jpg 2996 / 28944, ETA: 17:11:32.6260 @ 0.419242 items / sec XY3P: 2997 / 28944 @ c=182, r=129, X157.575 Y75.064 Z-15.085 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r129.jpg 2997 / 28944, ETA: 17:11:30.3479 @ 0.419241 items / sec XY3P: 2998 / 28944 @ c=183, r=129, X157.748 Y75.060 Z-15.085 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r129.jpg 2998 / 28944, ETA: 17:11:28.0863 @ 0.419241 items / sec XY3P: 2999 / 28944 @ c=184, r=129, X157.921 Y75.056 Z-15.084 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r129.jpg 2999 / 28944, ETA: 17:11:25.7833 @ 0.419240 items / sec XY3P: 3000 / 28944 @ c=185, r=129, X158.094 Y75.052 Z-15.084 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r129.jpg 3000 / 28944, ETA: 17:11:23.4980 @ 0.419239 items / sec XY3P: 3001 / 28944 @ c=186, r=129, X158.266 Y75.048 Z-15.083 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r129.jpg 3001 / 28944, ETA: 17:11:19.4912 @ 0.419250 items / sec XY3P: 3002 / 28944 @ c=187, r=129, X158.439 Y75.044 Z-15.083 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r129.jpg 3002 / 28944, ETA: 17:11:15.5020 @ 0.419261 items / sec XY3P: 3003 / 28944 @ c=188, r=129, X158.612 Y75.040 Z-15.082 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r129.jpg 3003 / 28944, ETA: 17:11:11.4773 @ 0.419272 items / sec XY3P: 3004 / 28944 @ c=189, r=129, X158.785 Y75.036 Z-15.082 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r129.jpg 3004 / 28944, ETA: 17:11:09.1989 @ 0.419272 items / sec XY3P: 3005 / 28944 @ c=190, r=129, X158.957 Y75.032 Z-15.081 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r129.jpg 3005 / 28944, ETA: 17:11:06.9186 @ 0.419271 items / sec XY3P: 3006 / 28944 @ c=191, r=129, X159.130 Y75.028 Z-15.081 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r129.jpg 3006 / 28944, ETA: 17:11:04.6307 @ 0.419270 items / sec XY3P: 3007 / 28944 @ c=192, r=129, X159.303 Y75.024 Z-15.080 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r129.jpg 3007 / 28944, ETA: 17:11:02.3782 @ 0.419269 items / sec XY3P: 3008 / 28944 @ c=193, r=129, X159.476 Y75.020 Z-15.080 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r129.jpg 3008 / 28944, ETA: 17:11:00.0777 @ 0.419269 items / sec XY3P: 3009 / 28944 @ c=194, r=129, X159.648 Y75.016 Z-15.079 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r129.jpg 3009 / 28944, ETA: 17:10:57.7984 @ 0.419268 items / sec XY3P: 3010 / 28944 @ c=195, r=129, X159.821 Y75.012 Z-15.079 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r129.jpg 3010 / 28944, ETA: 17:10:55.5207 @ 0.419267 items / sec XY3P: 3011 / 28944 @ c=196, r=129, X159.994 Y75.008 Z-15.078 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r129.jpg 3011 / 28944, ETA: 17:10:53.2303 @ 0.419267 items / sec XY3P: 3012 / 28944 @ c=197, r=129, X160.167 Y75.004 Z-15.078 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r129.jpg 3012 / 28944, ETA: 17:10:50.9771 @ 0.419266 items / sec XY3P: 3013 / 28944 @ c=198, r=129, X160.339 Y75.000 Z-15.077 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r129.jpg 3013 / 28944, ETA: 17:10:48.6720 @ 0.419265 items / sec XY3P: 3014 / 28944 @ c=199, r=129, X160.512 Y74.996 Z-15.077 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r129.jpg 3014 / 28944, ETA: 17:10:44.6748 @ 0.419276 items / sec XY3P: 3015 / 28944 @ c=200, r=129, X160.685 Y74.992 Z-15.076 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r129.jpg 3015 / 28944, ETA: 17:10:42.3920 @ 0.419276 items / sec XY3P: 3016 / 28944 @ c=200, r=128, X160.690 Y75.165 Z-15.074 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c200_r128.jpg 3016 / 28944, ETA: 17:10:40.1314 @ 0.419275 items / sec XY3P: 3017 / 28944 @ c=199, r=128, X160.517 Y75.169 Z-15.075 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c199_r128.jpg 3017 / 28944, ETA: 17:10:37.8361 @ 0.419274 items / sec XY3P: 3018 / 28944 @ c=198, r=128, X160.344 Y75.173 Z-15.075 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c198_r128.jpg 3018 / 28944, ETA: 17:10:35.5584 @ 0.419273 items / sec XY3P: 3019 / 28944 @ c=197, r=128, X160.171 Y75.177 Z-15.076 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c197_r128.jpg 3019 / 28944, ETA: 17:10:33.2765 @ 0.419273 items / sec XY3P: 3020 / 28944 @ c=196, r=128, X159.999 Y75.181 Z-15.076 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c196_r128.jpg 3020 / 28944, ETA: 17:10:31.0431 @ 0.419272 items / sec XY3P: 3021 / 28944 @ c=195, r=128, X159.826 Y75.185 Z-15.077 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c195_r128.jpg 3021 / 28944, ETA: 17:10:28.7329 @ 0.419271 items / sec XY3P: 3022 / 28944 @ c=194, r=128, X159.653 Y75.189 Z-15.077 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c194_r128.jpg 3022 / 28944, ETA: 17:10:26.4232 @ 0.419271 items / sec XY3P: 3023 / 28944 @ c=193, r=128, X159.480 Y75.193 Z-15.078 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c193_r128.jpg 3023 / 28944, ETA: 17:10:24.1562 @ 0.419270 items / sec XY3P: 3024 / 28944 @ c=192, r=128, X159.308 Y75.197 Z-15.078 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c192_r128.jpg 3024 / 28944, ETA: 17:10:21.8734 @ 0.419269 items / sec XY3P: 3025 / 28944 @ c=191, r=128, X159.135 Y75.201 Z-15.079 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c191_r128.jpg 3025 / 28944, ETA: 17:10:19.5916 @ 0.419268 items / sec XY3P: 3026 / 28944 @ c=190, r=128, X158.962 Y75.205 Z-15.079 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c190_r128.jpg 3026 / 28944, ETA: 17:10:17.3324 @ 0.419268 items / sec XY3P: 3027 / 28944 @ c=189, r=128, X158.789 Y75.209 Z-15.080 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c189_r128.jpg 3027 / 28944, ETA: 17:10:15.0818 @ 0.419267 items / sec XY3P: 3028 / 28944 @ c=188, r=128, X158.617 Y75.212 Z-15.080 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c188_r128.jpg 3028 / 28944, ETA: 17:10:12.7502 @ 0.419266 items / sec XY3P: 3029 / 28944 @ c=187, r=128, X158.444 Y75.216 Z-15.081 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c187_r128.jpg 3029 / 28944, ETA: 17:10:10.4614 @ 0.419266 items / sec XY3P: 3030 / 28944 @ c=186, r=128, X158.271 Y75.220 Z-15.081 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c186_r128.jpg 3030 / 28944, ETA: 17:10:08.1861 @ 0.419265 items / sec XY3P: 3031 / 28944 @ c=185, r=128, X158.098 Y75.224 Z-15.082 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c185_r128.jpg 3031 / 28944, ETA: 17:10:05.9171 @ 0.419264 items / sec XY3P: 3032 / 28944 @ c=184, r=128, X157.926 Y75.228 Z-15.083 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c184_r128.jpg 3032 / 28944, ETA: 17:10:03.6275 @ 0.419263 items / sec XY3P: 3033 / 28944 @ c=183, r=128, X157.753 Y75.232 Z-15.083 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c183_r128.jpg 3033 / 28944, ETA: 17:10:01.3431 @ 0.419263 items / sec XY3P: 3034 / 28944 @ c=182, r=128, X157.580 Y75.236 Z-15.084 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c182_r128.jpg 3034 / 28944, ETA: 17:09:59.0616 @ 0.419262 items / sec XY3P: 3035 / 28944 @ c=181, r=128, X157.407 Y75.240 Z-15.084 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c181_r128.jpg 3035 / 28944, ETA: 17:09:56.7816 @ 0.419261 items / sec XY3P: 3036 / 28944 @ c=180, r=128, X157.235 Y75.244 Z-15.085 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c180_r128.jpg 3036 / 28944, ETA: 17:09:54.5034 @ 0.419261 items / sec XY3P: 3037 / 28944 @ c=179, r=128, X157.062 Y75.248 Z-15.085 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c179_r128.jpg 3037 / 28944, ETA: 17:09:52.2083 @ 0.419260 items / sec XY3P: 3038 / 28944 @ c=178, r=128, X156.889 Y75.252 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c178_r128.jpg 3038 / 28944, ETA: 17:09:49.9360 @ 0.419259 items / sec XY3P: 3039 / 28944 @ c=177, r=128, X156.716 Y75.256 Z-15.086 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c177_r128.jpg 3039 / 28944, ETA: 17:09:47.6551 @ 0.419259 items / sec XY3P: 3040 / 28944 @ c=176, r=128, X156.544 Y75.260 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c176_r128.jpg 3040 / 28944, ETA: 17:09:45.3700 @ 0.419258 items / sec XY3P: 3041 / 28944 @ c=175, r=128, X156.371 Y75.264 Z-15.087 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c175_r128.jpg 3041 / 28944, ETA: 17:09:43.0987 @ 0.419257 items / sec XY3P: 3042 / 28944 @ c=174, r=128, X156.198 Y75.268 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c174_r128.jpg 3042 / 28944, ETA: 17:09:40.8098 @ 0.419256 items / sec XY3P: 3043 / 28944 @ c=173, r=128, X156.025 Y75.272 Z-15.088 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c173_r128.jpg 3043 / 28944, ETA: 17:09:38.5141 @ 0.419256 items / sec XY3P: 3044 / 28944 @ c=172, r=128, X155.853 Y75.276 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c172_r128.jpg 3044 / 28944, ETA: 17:09:36.2420 @ 0.419255 items / sec XY3P: 3045 / 28944 @ c=171, r=128, X155.680 Y75.280 Z-15.089 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c171_r128.jpg 3045 / 28944, ETA: 17:09:33.9557 @ 0.419254 items / sec XY3P: 3046 / 28944 @ c=170, r=128, X155.507 Y75.284 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c170_r128.jpg 3046 / 28944, ETA: 17:09:31.6836 @ 0.419254 items / sec XY3P: 3047 / 28944 @ c=169, r=128, X155.334 Y75.288 Z-15.090 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c169_r128.jpg 3047 / 28944, ETA: 17:09:29.3872 @ 0.419253 items / sec XY3P: 3048 / 28944 @ c=168, r=128, X155.162 Y75.292 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c168_r128.jpg 3048 / 28944, ETA: 17:09:27.1086 @ 0.419252 items / sec XY3P: 3049 / 28944 @ c=167, r=128, X154.989 Y75.296 Z-15.091 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c167_r128.jpg 3049 / 28944, ETA: 17:09:24.8240 @ 0.419252 items / sec XY3P: 3050 / 28944 @ c=166, r=128, X154.816 Y75.300 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c166_r128.jpg 3050 / 28944, ETA: 17:09:22.5402 @ 0.419251 items / sec XY3P: 3051 / 28944 @ c=165, r=128, X154.643 Y75.304 Z-15.092 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c165_r128.jpg 3051 / 28944, ETA: 17:09:20.2777 @ 0.419250 items / sec XY3P: 3052 / 28944 @ c=164, r=128, X154.471 Y75.308 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c164_r128.jpg 3052 / 28944, ETA: 17:09:17.9694 @ 0.419250 items / sec XY3P: 3053 / 28944 @ c=163, r=128, X154.298 Y75.312 Z-15.093 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c163_r128.jpg 3053 / 28944, ETA: 17:09:15.6945 @ 0.419249 items / sec XY3P: 3054 / 28944 @ c=162, r=128, X154.125 Y75.316 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c162_r128.jpg 3054 / 28944, ETA: 17:09:13.4145 @ 0.419248 items / sec XY3P: 3055 / 28944 @ c=161, r=128, X153.952 Y75.320 Z-15.094 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c161_r128.jpg 3055 / 28944, ETA: 17:09:11.1277 @ 0.419247 items / sec XY3P: 3056 / 28944 @ c=160, r=128, X153.780 Y75.324 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c160_r128.jpg 3056 / 28944, ETA: 17:09:08.8592 @ 0.419247 items / sec XY3P: 3057 / 28944 @ c=159, r=128, X153.607 Y75.327 Z-15.095 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c159_r128.jpg 3057 / 28944, ETA: 17:09:06.5540 @ 0.419246 items / sec XY3P: 3058 / 28944 @ c=158, r=128, X153.434 Y75.331 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c158_r128.jpg 3058 / 28944, ETA: 17:09:04.2772 @ 0.419245 items / sec XY3P: 3059 / 28944 @ c=157, r=128, X153.261 Y75.335 Z-15.096 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c157_r128.jpg 3059 / 28944, ETA: 17:09:01.9959 @ 0.419245 items / sec XY3P: 3060 / 28944 @ c=156, r=128, X153.089 Y75.339 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c156_r128.jpg 3060 / 28944, ETA: 17:08:59.7123 @ 0.419244 items / sec XY3P: 3061 / 28944 @ c=155, r=128, X152.916 Y75.343 Z-15.097 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c155_r128.jpg 3061 / 28944, ETA: 17:08:57.4406 @ 0.419243 items / sec XY3P: 3062 / 28944 @ c=154, r=128, X152.743 Y75.347 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c154_r128.jpg 3062 / 28944, ETA: 17:08:55.1426 @ 0.419243 items / sec XY3P: 3063 / 28944 @ c=153, r=128, X152.570 Y75.351 Z-15.098 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c153_r128.jpg 3063 / 28944, ETA: 17:08:51.1827 @ 0.419253 items / sec XY3P: 3064 / 28944 @ c=152, r=128, X152.398 Y75.355 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c152_r128.jpg 3064 / 28944, ETA: 17:08:48.8914 @ 0.419253 items / sec XY3P: 3065 / 28944 @ c=151, r=128, X152.225 Y75.359 Z-15.099 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c151_r128.jpg 3065 / 28944, ETA: 17:08:46.6178 @ 0.419252 items / sec XY3P: 3066 / 28944 @ c=150, r=128, X152.052 Y75.363 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c150_r128.jpg 3066 / 28944, ETA: 17:08:44.3362 @ 0.419251 items / sec XY3P: 3067 / 28944 @ c=149, r=128, X151.879 Y75.367 Z-15.100 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c149_r128.jpg 3067 / 28944, ETA: 17:08:42.0530 @ 0.419250 items / sec XY3P: 3068 / 28944 @ c=148, r=128, X151.707 Y75.371 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c148_r128.jpg 3068 / 28944, ETA: 17:08:39.7938 @ 0.419250 items / sec XY3P: 3069 / 28944 @ c=147, r=128, X151.534 Y75.375 Z-15.101 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c147_r128.jpg 3069 / 28944, ETA: 17:08:37.5234 @ 0.419249 items / sec XY3P: 3070 / 28944 @ c=146, r=128, X151.361 Y75.379 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c146_r128.jpg 3070 / 28944, ETA: 17:08:35.2064 @ 0.419248 items / sec XY3P: 3071 / 28944 @ c=145, r=128, X151.188 Y75.383 Z-15.102 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c145_r128.jpg 3071 / 28944, ETA: 17:08:32.9059 @ 0.419248 items / sec XY3P: 3072 / 28944 @ c=144, r=128, X151.016 Y75.387 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c144_r128.jpg 3072 / 28944, ETA: 17:08:30.6237 @ 0.419247 items / sec XY3P: 3073 / 28944 @ c=143, r=128, X150.843 Y75.391 Z-15.103 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c143_r128.jpg 3073 / 28944, ETA: 17:08:28.3341 @ 0.419246 items / sec XY3P: 3074 / 28944 @ c=142, r=128, X150.670 Y75.395 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c142_r128.jpg 3074 / 28944, ETA: 17:08:26.0527 @ 0.419246 items / sec XY3P: 3075 / 28944 @ c=141, r=128, X150.497 Y75.399 Z-15.104 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c141_r128.jpg 3075 / 28944, ETA: 17:08:23.7843 @ 0.419245 items / sec XY3P: 3076 / 28944 @ c=140, r=128, X150.325 Y75.403 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c140_r128.jpg 3076 / 28944, ETA: 17:08:21.4949 @ 0.419244 items / sec XY3P: 3077 / 28944 @ c=139, r=128, X150.152 Y75.407 Z-15.105 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c139_r128.jpg 3077 / 28944, ETA: 17:08:19.2028 @ 0.419244 items / sec XY3P: 3078 / 28944 @ c=138, r=128, X149.979 Y75.411 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c138_r128.jpg 3078 / 28944, ETA: 17:08:16.9187 @ 0.419243 items / sec XY3P: 3079 / 28944 @ c=137, r=128, X149.806 Y75.415 Z-15.106 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c137_r128.jpg 3079 / 28944, ETA: 17:08:12.9523 @ 0.419254 items / sec XY3P: 3080 / 28944 @ c=136, r=128, X149.634 Y75.419 Z-15.107 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c136_r128.jpg 3080 / 28944, ETA: 17:08:10.7379 @ 0.419253 items / sec XY3P: 3081 / 28944 @ c=135, r=128, X149.461 Y75.423 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c135_r128.jpg 3081 / 28944, ETA: 17:08:08.3851 @ 0.419252 items / sec XY3P: 3082 / 28944 @ c=134, r=128, X149.288 Y75.427 Z-15.108 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c134_r128.jpg 3082 / 28944, ETA: 17:08:06.1541 @ 0.419251 items / sec XY3P: 3083 / 28944 @ c=133, r=128, X149.115 Y75.431 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c133_r128.jpg 3083 / 28944, ETA: 17:08:03.8172 @ 0.419251 items / sec XY3P: 3084 / 28944 @ c=132, r=128, X148.943 Y75.435 Z-15.109 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c132_r128.jpg 3084 / 28944, ETA: 17:08:01.5359 @ 0.419250 items / sec XY3P: 3085 / 28944 @ c=131, r=128, X148.770 Y75.438 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c131_r128.jpg 3085 / 28944, ETA: 17:07:59.2668 @ 0.419249 items / sec XY3P: 3086 / 28944 @ c=130, r=128, X148.597 Y75.442 Z-15.110 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c130_r128.jpg 3086 / 28944, ETA: 17:07:56.9666 @ 0.419249 items / sec XY3P: 3087 / 28944 @ c=129, r=128, X148.424 Y75.446 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c129_r128.jpg 3087 / 28944, ETA: 17:07:54.6822 @ 0.419248 items / sec XY3P: 3088 / 28944 @ c=128, r=128, X148.252 Y75.450 Z-15.111 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c128_r128.jpg 3088 / 28944, ETA: 17:07:52.3949 @ 0.419248 items / sec XY3P: 3089 / 28944 @ c=127, r=128, X148.079 Y75.454 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c127_r128.jpg 3089 / 28944, ETA: 17:07:50.1698 @ 0.419246 items / sec XY3P: 3090 / 28944 @ c=126, r=128, X147.906 Y75.458 Z-15.112 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c126_r128.jpg 3090 / 28944, ETA: 17:07:47.8427 @ 0.419246 items / sec XY3P: 3091 / 28944 @ c=125, r=128, X147.733 Y75.462 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c125_r128.jpg 3091 / 28944, ETA: 17:07:45.5447 @ 0.419245 items / sec XY3P: 3092 / 28944 @ c=124, r=128, X147.561 Y75.466 Z-15.113 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c124_r128.jpg 3092 / 28944, ETA: 17:07:43.2590 @ 0.419245 items / sec XY3P: 3093 / 28944 @ c=123, r=128, X147.388 Y75.470 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c123_r128.jpg 3093 / 28944, ETA: 17:07:40.9734 @ 0.419244 items / sec XY3P: 3094 / 28944 @ c=122, r=128, X147.215 Y75.474 Z-15.114 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c122_r128.jpg 3094 / 28944, ETA: 17:07:40.4110 @ 0.419232 items / sec XY3P: 3095 / 28944 @ c=121, r=128, X147.042 Y75.478 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c121_r128.jpg 3095 / 28944, ETA: 17:07:38.1346 @ 0.419231 items / sec XY3P: 3096 / 28944 @ c=120, r=128, X146.870 Y75.482 Z-15.115 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c120_r128.jpg 3096 / 28944, ETA: 17:07:35.7920 @ 0.419231 items / sec XY3P: 3097 / 28944 @ c=119, r=128, X146.697 Y75.486 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c119_r128.jpg 3097 / 28944, ETA: 17:07:33.5021 @ 0.419230 items / sec XY3P: 3098 / 28944 @ c=118, r=128, X146.524 Y75.490 Z-15.116 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c118_r128.jpg 3098 / 28944, ETA: 17:07:31.2156 @ 0.419229 items / sec XY3P: 3099 / 28944 @ c=117, r=128, X146.351 Y75.494 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c117_r128.jpg 3099 / 28944, ETA: 17:07:28.9302 @ 0.419229 items / sec XY3P: 3100 / 28944 @ c=116, r=128, X146.179 Y75.498 Z-15.117 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c116_r128.jpg 3100 / 28944, ETA: 17:07:26.6601 @ 0.419228 items / sec XY3P: 3101 / 28944 @ c=115, r=128, X146.006 Y75.502 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c115_r128.jpg 3101 / 28944, ETA: 17:07:24.3999 @ 0.419227 items / sec XY3P: 3102 / 28944 @ c=114, r=128, X145.833 Y75.506 Z-15.118 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c114_r128.jpg 3102 / 28944, ETA: 17:07:22.1123 @ 0.419226 items / sec XY3P: 3103 / 28944 @ c=113, r=128, X145.660 Y75.510 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c113_r128.jpg 3103 / 28944, ETA: 17:07:19.7851 @ 0.419226 items / sec XY3P: 3104 / 28944 @ c=112, r=128, X145.488 Y75.514 Z-15.119 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c112_r128.jpg 3104 / 28944, ETA: 17:07:17.4983 @ 0.419225 items / sec XY3P: 3105 / 28944 @ c=111, r=128, X145.315 Y75.518 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c111_r128.jpg 3105 / 28944, ETA: 17:07:15.2305 @ 0.419225 items / sec XY3P: 3106 / 28944 @ c=110, r=128, X145.142 Y75.522 Z-15.120 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c110_r128.jpg 3106 / 28944, ETA: 17:07:12.9283 @ 0.419224 items / sec XY3P: 3107 / 28944 @ c=109, r=128, X144.969 Y75.526 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c109_r128.jpg 3107 / 28944, ETA: 17:07:10.6467 @ 0.419223 items / sec XY3P: 3108 / 28944 @ c=108, r=128, X144.797 Y75.530 Z-15.121 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c108_r128.jpg 3108 / 28944, ETA: 17:07:08.4151 @ 0.419222 items / sec XY3P: 3109 / 28944 @ c=107, r=128, X144.624 Y75.534 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c107_r128.jpg 3109 / 28944, ETA: 17:07:06.0735 @ 0.419222 items / sec XY3P: 3110 / 28944 @ c=106, r=128, X144.451 Y75.538 Z-15.122 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c106_r128.jpg 3110 / 28944, ETA: 17:07:03.7962 @ 0.419221 items / sec XY3P: 3111 / 28944 @ c=105, r=128, X144.278 Y75.542 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c105_r128.jpg 3111 / 28944, ETA: 17:07:01.4976 @ 0.419221 items / sec XY3P: 3112 / 28944 @ c=104, r=128, X144.106 Y75.546 Z-15.123 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c104_r128.jpg 3112 / 28944, ETA: 17:06:59.2070 @ 0.419220 items / sec XY3P: 3113 / 28944 @ c=103, r=128, X143.933 Y75.550 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c103_r128.jpg 3113 / 28944, ETA: 17:06:56.9233 @ 0.419219 items / sec XY3P: 3114 / 28944 @ c=102, r=128, X143.760 Y75.553 Z-15.124 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c102_r128.jpg 3114 / 28944, ETA: 17:06:52.9752 @ 0.419230 items / sec XY3P: 3115 / 28944 @ c=101, r=128, X143.587 Y75.557 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c101_r128.jpg 3115 / 28944, ETA: 17:06:50.7088 @ 0.419229 items / sec XY3P: 3116 / 28944 @ c=100, r=128, X143.415 Y75.561 Z-15.125 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c100_r128.jpg 3116 / 28944, ETA: 17:06:48.4139 @ 0.419228 items / sec XY3P: 3117 / 28944 @ c=99, r=128, X143.242 Y75.565 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c099_r128.jpg 3117 / 28944, ETA: 17:06:46.1678 @ 0.419228 items / sec XY3P: 3118 / 28944 @ c=98, r=128, X143.069 Y75.569 Z-15.126 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c098_r128.jpg 3118 / 28944, ETA: 17:06:43.8309 @ 0.419227 items / sec XY3P: 3119 / 28944 @ c=97, r=128, X142.896 Y75.573 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c097_r128.jpg 3119 / 28944, ETA: 17:06:39.9049 @ 0.419238 items / sec XY3P: 3120 / 28944 @ c=96, r=128, X142.724 Y75.577 Z-15.127 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c096_r128.jpg 3120 / 28944, ETA: 17:06:37.6642 @ 0.419237 items / sec XY3P: 3121 / 28944 @ c=95, r=128, X142.551 Y75.581 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c095_r128.jpg 3121 / 28944, ETA: 17:06:35.3204 @ 0.419236 items / sec XY3P: 3122 / 28944 @ c=94, r=128, X142.378 Y75.585 Z-15.128 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c094_r128.jpg 3122 / 28944, ETA: 17:06:33.0311 @ 0.419236 items / sec XY3P: 3123 / 28944 @ c=93, r=128, X142.205 Y75.589 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c093_r128.jpg 3123 / 28944, ETA: 17:06:30.7484 @ 0.419235 items / sec XY3P: 3124 / 28944 @ c=92, r=128, X142.033 Y75.593 Z-15.129 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c092_r128.jpg 3124 / 28944, ETA: 17:06:28.4761 @ 0.419234 items / sec XY3P: 3125 / 28944 @ c=91, r=128, X141.860 Y75.597 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c091_r128.jpg 3125 / 28944, ETA: 17:06:26.1776 @ 0.419234 items / sec XY3P: 3126 / 28944 @ c=90, r=128, X141.687 Y75.601 Z-15.130 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c090_r128.jpg 3126 / 28944, ETA: 17:06:23.9370 @ 0.419233 items / sec XY3P: 3127 / 28944 @ c=89, r=128, X141.514 Y75.605 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c089_r128.jpg 3127 / 28944, ETA: 17:06:21.5970 @ 0.419232 items / sec XY3P: 3128 / 28944 @ c=88, r=128, X141.342 Y75.609 Z-15.131 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c088_r128.jpg 3128 / 28944, ETA: 17:06:19.3635 @ 0.419231 items / sec XY3P: 3129 / 28944 @ c=87, r=128, X141.169 Y75.613 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c087_r128.jpg 3129 / 28944, ETA: 17:06:17.0445 @ 0.419231 items / sec XY3P: 3130 / 28944 @ c=86, r=128, X140.996 Y75.617 Z-15.132 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c086_r128.jpg 3130 / 28944, ETA: 17:06:14.7415 @ 0.419230 items / sec XY3P: 3131 / 28944 @ c=85, r=128, X140.823 Y75.621 Z-15.133 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c085_r128.jpg 3131 / 28944, ETA: 17:06:12.4644 @ 0.419230 items / sec XY3P: 3132 / 28944 @ c=84, r=128, X140.651 Y75.625 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c084_r128.jpg 3132 / 28944, ETA: 17:06:10.1669 @ 0.419229 items / sec XY3P: 3133 / 28944 @ c=83, r=128, X140.478 Y75.629 Z-15.134 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c083_r128.jpg 3133 / 28944, ETA: 17:06:07.9269 @ 0.419228 items / sec XY3P: 3134 / 28944 @ c=82, r=128, X140.305 Y75.633 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c082_r128.jpg 3134 / 28944, ETA: 17:06:05.6022 @ 0.419228 items / sec XY3P: 3135 / 28944 @ c=81, r=128, X140.132 Y75.637 Z-15.135 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c081_r128.jpg 3135 / 28944, ETA: 17:06:03.3045 @ 0.419227 items / sec XY3P: 3136 / 28944 @ c=80, r=128, X139.960 Y75.641 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c080_r128.jpg 3136 / 28944, ETA: 17:06:01.0205 @ 0.419226 items / sec XY3P: 3137 / 28944 @ c=79, r=128, X139.787 Y75.645 Z-15.136 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c079_r128.jpg 3137 / 28944, ETA: 17:05:58.7308 @ 0.419226 items / sec XY3P: 3138 / 28944 @ c=78, r=128, X139.614 Y75.649 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c078_r128.jpg 3138 / 28944, ETA: 17:05:56.4478 @ 0.419225 items / sec XY3P: 3139 / 28944 @ c=77, r=128, X139.441 Y75.653 Z-15.137 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c077_r128.jpg 3139 / 28944, ETA: 17:05:54.1802 @ 0.419224 items / sec XY3P: 3140 / 28944 @ c=76, r=128, X139.269 Y75.657 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c076_r128.jpg 3140 / 28944, ETA: 17:05:51.8741 @ 0.419224 items / sec XY3P: 3141 / 28944 @ c=75, r=128, X139.096 Y75.661 Z-15.138 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c075_r128.jpg 3141 / 28944, ETA: 17:05:49.6013 @ 0.419223 items / sec XY3P: 3142 / 28944 @ c=74, r=128, X138.923 Y75.664 Z-15.139 Captured: data/scan/2026-06-17_03-30-01_waferspace1a/c074_r128.jpg 3142 / 28944, ETA: 17:05:47.3387 @ 0.419222 items / sec XY3P: 3143 / 28944 @ c=73, r=128, X138.750 Y75.668 Z-15.139 Planner paused RX planner done, result: stopped