Initializing planner! Corners (tracking_z=1) ll x=125.945, y=73.243, z=-15.189 ul x=125.945, y=75.100, z=-15.154 lr x=160.743, y=72.450, z=-15.071 Bounding box z: -15.189 to -15.071 y: 72.450 to 75.100 x: 125.945 to 160.743 per_col xs (0, 200), ys (-15.189, -15.071) per_row xs (0, 10), ys (-15.189, -15.154) per_col xs (0, 200), ys (73.24325, 72.45025) per_row xs (0, 10), ys (73.24325, 74.85225) per_col xs (0, 200), ys (125.94525, 160.49525) per_row xs (0, 10), ys (125.94525, 125.94525) Planner pipeline: odict_keys(['points-xy3p', 'kinematics', 'image-capture', 'image-save']) Running planner Generated by pyuscope on 2026-06-17 01:51:00 General notes: Pixel counts are for final scaled image as written to disk XY3P Ideally taking 2062.32 pictures (200.475 X 10.2872) but actually taking 2211 (201 X 11), 93.3% efficient Axis x 0.000000 to 34.806535 Ideal overlap: 0.300000, actual 0.301838 full delta: 34.806535 view: 960 pix border: 0.000000 Axis y 0.000000 to 1.856500 Ideal overlap: 0.300000, actual 0.349899 full delta: 1.856500 view: 960 pix border: 0.000000 Pano size (requested/actual): mm: 34.807 x, 1.856 y => 64.6 mm2 pix: 135008 x, 7201 y => 972.2 MP Image size: mm: 0.247 x, 0.247 y => 0.1 mm2 pix: 960 x, 960 y => 0.9 MP Step 1: raw sensor pixels: 1280w x 960h Step 2: crop {'top': 0, 'bottom': 0, 'left': 160, 'right': 160} Step 3: apply scalar 1.00 Step 4: final sensor pixels: 960w x 960h Derived: Ideal pictures: 200.5 x, 10.3 y => 2062.3 Actual pictures: 201 x, 11 y => 2211 Generated positions: 2211 step: 0.173 x, 0.161 y tsettle_motion: 1.300 tsettle_hdr: 0.600 Output dir: data/scan/2026-06-17_05-51-00_waferspace1a Output extension: .jpg XY3P: 1 / 2211 @ c=0, r=10, X126.069 Y73.367 Z-15.189 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c000_r010.jpg 1 / 2211, ETA: 03:53:00.2607 @ 0.158080 items / sec XY3P: 2 / 2211 @ c=1, r=10, X126.242 Y73.363 Z-15.188 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c001_r010.jpg 2 / 2211, ETA: 02:40:26.7659 @ 0.229464 items / sec XY3P: 3 / 2211 @ c=2, r=10, X126.415 Y73.359 Z-15.188 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c002_r010.jpg 3 / 2211, ETA: 02:16:19.0926 @ 0.269957 items / sec XY3P: 4 / 2211 @ c=3, r=10, X126.587 Y73.355 Z-15.187 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c003_r010.jpg 4 / 2211, ETA: 02:04:13.9149 @ 0.296086 items / sec XY3P: 5 / 2211 @ c=4, r=10, X126.760 Y73.351 Z-15.187 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c004_r010.jpg 5 / 2211, ETA: 01:56:57.9973 @ 0.314335 items / sec XY3P: 6 / 2211 @ c=5, r=10, X126.933 Y73.347 Z-15.186 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c005_r010.jpg 6 / 2211, ETA: 01:52:06.2721 @ 0.327819 items / sec XY3P: 7 / 2211 @ c=6, r=10, X127.106 Y73.343 Z-15.185 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c006_r010.jpg 7 / 2211, ETA: 01:47:35.0542 @ 0.341438 items / sec XY3P: 8 / 2211 @ c=7, r=10, X127.278 Y73.339 Z-15.185 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c007_r010.jpg 8 / 2211, ETA: 01:45:05.8288 @ 0.349359 items / sec XY3P: 9 / 2211 @ c=8, r=10, X127.451 Y73.335 Z-15.184 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c008_r010.jpg 9 / 2211, ETA: 01:42:20.2530 @ 0.358617 items / sec XY3P: 10 / 2211 @ c=9, r=10, X127.624 Y73.331 Z-15.184 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c009_r010.jpg 10 / 2211, ETA: 01:40:51.3357 @ 0.363721 items / sec XY3P: 11 / 2211 @ c=10, r=10, X127.797 Y73.327 Z-15.183 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c010_r010.jpg 11 / 2211, ETA: 01:39:38.4866 @ 0.367986 items / sec XY3P: 12 / 2211 @ c=11, r=10, X127.969 Y73.323 Z-15.183 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c011_r010.jpg 12 / 2211, ETA: 01:38:36.8069 @ 0.371653 items / sec XY3P: 13 / 2211 @ c=12, r=10, X128.142 Y73.319 Z-15.182 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c012_r010.jpg 13 / 2211, ETA: 01:37:44.5718 @ 0.374793 items / sec XY3P: 14 / 2211 @ c=13, r=10, X128.315 Y73.315 Z-15.181 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c013_r010.jpg 14 / 2211, ETA: 01:36:59.2783 @ 0.377538 items / sec XY3P: 15 / 2211 @ c=14, r=10, X128.488 Y73.311 Z-15.181 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c014_r010.jpg 15 / 2211, ETA: 01:36:19.9037 @ 0.379937 items / sec XY3P: 16 / 2211 @ c=15, r=10, X128.660 Y73.308 Z-15.180 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c015_r010.jpg 16 / 2211, ETA: 01:35:45.2709 @ 0.382053 items / sec XY3P: 17 / 2211 @ c=16, r=10, X128.833 Y73.304 Z-15.180 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c016_r010.jpg 17 / 2211, ETA: 01:35:14.0381 @ 0.383967 items / sec XY3P: 18 / 2211 @ c=17, r=10, X129.006 Y73.300 Z-15.179 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c017_r010.jpg 18 / 2211, ETA: 01:34:46.2378 @ 0.385668 items / sec XY3P: 19 / 2211 @ c=18, r=10, X129.179 Y73.296 Z-15.178 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c018_r010.jpg 19 / 2211, ETA: 01:34:21.0051 @ 0.387210 items / sec XY3P: 20 / 2211 @ c=19, r=10, X129.351 Y73.292 Z-15.178 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c019_r010.jpg 20 / 2211, ETA: 01:33:58.0776 @ 0.388608 items / sec XY3P: 21 / 2211 @ c=20, r=10, X129.524 Y73.288 Z-15.177 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c020_r010.jpg 21 / 2211, ETA: 01:33:37.4074 @ 0.389860 items / sec XY3P: 22 / 2211 @ c=21, r=10, X129.697 Y73.284 Z-15.177 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c021_r010.jpg 22 / 2211, ETA: 01:33:17.8973 @ 0.391040 items / sec XY3P: 23 / 2211 @ c=22, r=10, X129.870 Y73.280 Z-15.176 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c022_r010.jpg 23 / 2211, ETA: 01:33:00.1741 @ 0.392102 items / sec XY3P: 24 / 2211 @ c=23, r=10, X130.042 Y73.276 Z-15.175 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c023_r010.jpg 24 / 2211, ETA: 01:32:43.6348 @ 0.393088 items / sec XY3P: 25 / 2211 @ c=24, r=10, X130.215 Y73.272 Z-15.175 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c024_r010.jpg 25 / 2211, ETA: 01:32:28.2768 @ 0.393996 items / sec XY3P: 26 / 2211 @ c=25, r=10, X130.388 Y73.268 Z-15.174 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c025_r010.jpg 26 / 2211, ETA: 01:32:14.0772 @ 0.394826 items / sec XY3P: 27 / 2211 @ c=26, r=10, X130.560 Y73.264 Z-15.174 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c026_r010.jpg 27 / 2211, ETA: 01:31:44.9285 @ 0.396735 items / sec XY3P: 28 / 2211 @ c=27, r=10, X130.733 Y73.260 Z-15.173 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c027_r010.jpg 28 / 2211, ETA: 01:31:32.1391 @ 0.397477 items / sec XY3P: 29 / 2211 @ c=28, r=10, X130.906 Y73.256 Z-15.172 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c028_r010.jpg 29 / 2211, ETA: 01:31:20.8657 @ 0.398112 items / sec XY3P: 30 / 2211 @ c=29, r=10, X131.079 Y73.252 Z-15.172 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c029_r010.jpg 30 / 2211, ETA: 01:31:09.8959 @ 0.398728 items / sec XY3P: 31 / 2211 @ c=30, r=10, X131.251 Y73.248 Z-15.171 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c030_r010.jpg 31 / 2211, ETA: 01:30:59.5962 @ 0.399297 items / sec XY3P: 32 / 2211 @ c=31, r=10, X131.424 Y73.244 Z-15.171 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c031_r010.jpg 32 / 2211, ETA: 01:30:49.7903 @ 0.399832 items / sec XY3P: 33 / 2211 @ c=32, r=10, X131.597 Y73.240 Z-15.170 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c032_r010.jpg 33 / 2211, ETA: 01:30:40.8373 @ 0.400306 items / sec XY3P: 34 / 2211 @ c=33, r=10, X131.770 Y73.236 Z-15.170 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c033_r010.jpg 34 / 2211, ETA: 01:30:31.6363 @ 0.400800 items / sec XY3P: 35 / 2211 @ c=34, r=10, X131.942 Y73.232 Z-15.169 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c034_r010.jpg 35 / 2211, ETA: 01:30:22.9572 @ 0.401257 items / sec XY3P: 36 / 2211 @ c=35, r=10, X132.115 Y73.228 Z-15.168 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c035_r010.jpg 36 / 2211, ETA: 01:30:14.6877 @ 0.401685 items / sec XY3P: 37 / 2211 @ c=36, r=10, X132.288 Y73.224 Z-15.168 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c036_r010.jpg 37 / 2211, ETA: 01:30:06.7788 @ 0.402088 items / sec XY3P: 38 / 2211 @ c=37, r=10, X132.461 Y73.220 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c037_r010.jpg 38 / 2211, ETA: 01:29:59.1789 @ 0.402469 items / sec XY3P: 39 / 2211 @ c=38, r=10, X132.633 Y73.216 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c038_r010.jpg 39 / 2211, ETA: 01:29:51.9253 @ 0.402825 items / sec XY3P: 40 / 2211 @ c=39, r=10, X132.806 Y73.212 Z-15.166 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c039_r010.jpg 40 / 2211, ETA: 01:29:44.7091 @ 0.403179 items / sec XY3P: 41 / 2211 @ c=40, r=10, X132.979 Y73.208 Z-15.165 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c040_r010.jpg 41 / 2211, ETA: 01:29:37.8910 @ 0.403504 items / sec XY3P: 42 / 2211 @ c=41, r=10, X133.152 Y73.204 Z-15.165 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c041_r010.jpg 42 / 2211, ETA: 01:29:31.1734 @ 0.403822 items / sec XY3P: 43 / 2211 @ c=42, r=10, X133.325 Y73.200 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c042_r010.jpg 43 / 2211, ETA: 01:29:25.0069 @ 0.404100 items / sec XY3P: 44 / 2211 @ c=43, r=10, X133.497 Y73.197 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c043_r010.jpg 44 / 2211, ETA: 01:29:18.5223 @ 0.404403 items / sec XY3P: 45 / 2211 @ c=44, r=10, X133.670 Y73.193 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c044_r010.jpg 45 / 2211, ETA: 01:29:02.7922 @ 0.405406 items / sec XY3P: 46 / 2211 @ c=45, r=10, X133.843 Y73.189 Z-15.162 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c045_r010.jpg 46 / 2211, ETA: 01:28:56.9890 @ 0.405659 items / sec XY3P: 47 / 2211 @ c=46, r=10, X134.016 Y73.185 Z-15.162 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c046_r010.jpg 47 / 2211, ETA: 01:28:51.4090 @ 0.405896 items / sec XY3P: 48 / 2211 @ c=47, r=10, X134.188 Y73.181 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c047_r010.jpg 48 / 2211, ETA: 01:28:45.9425 @ 0.406125 items / sec XY3P: 49 / 2211 @ c=48, r=10, X134.361 Y73.177 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c048_r010.jpg 49 / 2211, ETA: 01:28:40.6080 @ 0.406345 items / sec XY3P: 50 / 2211 @ c=49, r=10, X134.534 Y73.173 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c049_r010.jpg 50 / 2211, ETA: 01:28:35.4623 @ 0.406550 items / sec XY3P: 51 / 2211 @ c=50, r=10, X134.707 Y73.169 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c050_r010.jpg 51 / 2211, ETA: 01:28:30.3059 @ 0.406756 items / sec XY3P: 52 / 2211 @ c=51, r=10, X134.879 Y73.165 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c051_r010.jpg 52 / 2211, ETA: 01:28:25.2909 @ 0.406952 items / sec XY3P: 53 / 2211 @ c=52, r=10, X135.052 Y73.161 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c052_r010.jpg 53 / 2211, ETA: 01:28:20.4007 @ 0.407139 items / sec XY3P: 54 / 2211 @ c=53, r=10, X135.225 Y73.157 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c053_r010.jpg 54 / 2211, ETA: 01:28:15.5803 @ 0.407321 items / sec XY3P: 55 / 2211 @ c=54, r=10, X135.398 Y73.153 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c054_r010.jpg 55 / 2211, ETA: 01:28:10.9206 @ 0.407491 items / sec XY3P: 56 / 2211 @ c=55, r=10, X135.570 Y73.149 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c055_r010.jpg 56 / 2211, ETA: 01:28:06.2359 @ 0.407662 items / sec XY3P: 57 / 2211 @ c=56, r=10, X135.743 Y73.145 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c056_r010.jpg 57 / 2211, ETA: 01:28:01.6826 @ 0.407825 items / sec XY3P: 58 / 2211 @ c=57, r=10, X135.916 Y73.141 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c057_r010.jpg 58 / 2211, ETA: 01:27:57.1809 @ 0.407983 items / sec XY3P: 59 / 2211 @ c=58, r=10, X136.089 Y73.137 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c058_r010.jpg 59 / 2211, ETA: 01:27:52.7548 @ 0.408136 items / sec XY3P: 60 / 2211 @ c=59, r=10, X136.261 Y73.133 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c059_r010.jpg 60 / 2211, ETA: 01:27:48.4806 @ 0.408277 items / sec XY3P: 61 / 2211 @ c=60, r=10, X136.434 Y73.129 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c060_r010.jpg 61 / 2211, ETA: 01:27:44.1428 @ 0.408424 items / sec XY3P: 62 / 2211 @ c=61, r=10, X136.607 Y73.125 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c061_r010.jpg 62 / 2211, ETA: 01:27:39.8929 @ 0.408563 items / sec XY3P: 63 / 2211 @ c=62, r=10, X136.780 Y73.121 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c062_r010.jpg 63 / 2211, ETA: 01:27:35.7631 @ 0.408694 items / sec XY3P: 64 / 2211 @ c=63, r=10, X136.952 Y73.117 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c063_r010.jpg 64 / 2211, ETA: 01:27:24.9840 @ 0.409343 items / sec XY3P: 65 / 2211 @ c=64, r=10, X137.125 Y73.113 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c064_r010.jpg 65 / 2211, ETA: 01:27:14.5889 @ 0.409965 items / sec XY3P: 66 / 2211 @ c=65, r=10, X137.298 Y73.109 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c065_r010.jpg 66 / 2211, ETA: 01:27:10.6681 @ 0.410081 items / sec XY3P: 67 / 2211 @ c=66, r=10, X137.471 Y73.105 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c066_r010.jpg 67 / 2211, ETA: 01:27:07.0621 @ 0.410173 items / sec XY3P: 68 / 2211 @ c=67, r=10, X137.643 Y73.101 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c067_r010.jpg 68 / 2211, ETA: 01:27:03.0902 @ 0.410294 items / sec XY3P: 69 / 2211 @ c=68, r=10, X137.816 Y73.097 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c068_r010.jpg 69 / 2211, ETA: 01:26:59.4509 @ 0.410388 items / sec XY3P: 70 / 2211 @ c=69, r=10, X137.989 Y73.093 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c069_r010.jpg 70 / 2211, ETA: 01:26:55.8569 @ 0.410479 items / sec XY3P: 71 / 2211 @ c=70, r=10, X138.161 Y73.089 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c070_r010.jpg 71 / 2211, ETA: 01:26:52.1956 @ 0.410576 items / sec XY3P: 72 / 2211 @ c=71, r=10, X138.334 Y73.085 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c071_r010.jpg 72 / 2211, ETA: 01:26:48.6681 @ 0.410662 items / sec XY3P: 73 / 2211 @ c=72, r=10, X138.507 Y73.082 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c072_r010.jpg 73 / 2211, ETA: 01:26:45.0612 @ 0.410754 items / sec XY3P: 74 / 2211 @ c=73, r=10, X138.680 Y73.078 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c073_r010.jpg 74 / 2211, ETA: 01:26:41.5583 @ 0.410838 items / sec XY3P: 75 / 2211 @ c=74, r=10, X138.852 Y73.074 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c074_r010.jpg 75 / 2211, ETA: 01:26:38.0563 @ 0.410923 items / sec XY3P: 76 / 2211 @ c=75, r=10, X139.025 Y73.070 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c075_r010.jpg 76 / 2211, ETA: 01:26:34.6268 @ 0.411002 items / sec XY3P: 77 / 2211 @ c=76, r=10, X139.198 Y73.066 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c076_r010.jpg 77 / 2211, ETA: 01:26:31.2438 @ 0.411077 items / sec XY3P: 78 / 2211 @ c=77, r=10, X139.371 Y73.062 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c077_r010.jpg 78 / 2211, ETA: 01:26:27.7925 @ 0.411158 items / sec XY3P: 79 / 2211 @ c=78, r=10, X139.543 Y73.058 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c078_r010.jpg 79 / 2211, ETA: 01:26:24.4262 @ 0.411232 items / sec XY3P: 80 / 2211 @ c=79, r=10, X139.716 Y73.054 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c079_r010.jpg 80 / 2211, ETA: 01:26:21.0587 @ 0.411306 items / sec XY3P: 81 / 2211 @ c=80, r=10, X139.889 Y73.050 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c080_r010.jpg 81 / 2211, ETA: 01:26:17.7393 @ 0.411376 items / sec XY3P: 82 / 2211 @ c=81, r=10, X140.062 Y73.046 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c081_r010.jpg 82 / 2211, ETA: 01:26:09.2599 @ 0.411858 items / sec XY3P: 83 / 2211 @ c=82, r=10, X140.234 Y73.042 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c082_r010.jpg 83 / 2211, ETA: 01:26:00.9221 @ 0.412329 items / sec XY3P: 84 / 2211 @ c=83, r=10, X140.407 Y73.038 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c083_r010.jpg 84 / 2211, ETA: 01:25:57.7887 @ 0.412386 items / sec XY3P: 85 / 2211 @ c=84, r=10, X140.580 Y73.034 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c084_r010.jpg 85 / 2211, ETA: 01:25:54.6668 @ 0.412442 items / sec XY3P: 86 / 2211 @ c=85, r=10, X140.753 Y73.030 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c085_r010.jpg 86 / 2211, ETA: 01:25:51.5934 @ 0.412494 items / sec XY3P: 87 / 2211 @ c=86, r=10, X140.925 Y73.026 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c086_r010.jpg 87 / 2211, ETA: 01:25:48.4890 @ 0.412548 items / sec XY3P: 88 / 2211 @ c=87, r=10, X141.098 Y73.022 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c087_r010.jpg 88 / 2211, ETA: 01:25:45.4205 @ 0.412600 items / sec XY3P: 89 / 2211 @ c=88, r=10, X141.271 Y73.018 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c088_r010.jpg 89 / 2211, ETA: 01:25:42.3628 @ 0.412651 items / sec XY3P: 90 / 2211 @ c=89, r=10, X141.444 Y73.014 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c089_r010.jpg 90 / 2211, ETA: 01:25:39.3191 @ 0.412701 items / sec XY3P: 91 / 2211 @ c=90, r=10, X141.617 Y73.010 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c090_r010.jpg 91 / 2211, ETA: 01:25:36.3579 @ 0.412744 items / sec XY3P: 92 / 2211 @ c=91, r=10, X141.789 Y73.006 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c091_r010.jpg 92 / 2211, ETA: 01:25:33.2971 @ 0.412795 items / sec XY3P: 93 / 2211 @ c=92, r=10, X141.962 Y73.002 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c092_r010.jpg 93 / 2211, ETA: 01:25:30.2864 @ 0.412842 items / sec XY3P: 94 / 2211 @ c=93, r=10, X142.135 Y72.998 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c093_r010.jpg 94 / 2211, ETA: 01:25:27.3130 @ 0.412887 items / sec XY3P: 95 / 2211 @ c=94, r=10, X142.308 Y72.994 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c094_r010.jpg 95 / 2211, ETA: 01:25:24.3514 @ 0.412930 items / sec XY3P: 96 / 2211 @ c=95, r=10, X142.480 Y72.990 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c095_r010.jpg 96 / 2211, ETA: 01:25:21.4217 @ 0.412971 items / sec XY3P: 97 / 2211 @ c=96, r=10, X142.653 Y72.986 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c096_r010.jpg 97 / 2211, ETA: 01:25:18.4280 @ 0.413017 items / sec XY3P: 98 / 2211 @ c=97, r=10, X142.826 Y72.982 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c097_r010.jpg 98 / 2211, ETA: 01:25:15.5035 @ 0.413058 items / sec XY3P: 99 / 2211 @ c=98, r=10, X142.999 Y72.978 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c098_r010.jpg 99 / 2211, ETA: 01:25:12.5809 @ 0.413099 items / sec XY3P: 100 / 2211 @ c=99, r=10, X143.171 Y72.974 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c099_r010.jpg 100 / 2211, ETA: 01:25:09.6333 @ 0.413141 items / sec XY3P: 101 / 2211 @ c=100, r=10, X143.344 Y72.971 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c100_r010.jpg 101 / 2211, ETA: 01:25:02.5795 @ 0.413516 items / sec XY3P: 102 / 2211 @ c=101, r=10, X143.517 Y72.967 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c101_r010.jpg 102 / 2211, ETA: 01:24:55.6623 @ 0.413881 items / sec XY3P: 103 / 2211 @ c=102, r=10, X143.690 Y72.963 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c102_r010.jpg 103 / 2211, ETA: 01:24:52.7943 @ 0.413918 items / sec XY3P: 104 / 2211 @ c=103, r=10, X143.862 Y72.959 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c103_r010.jpg 104 / 2211, ETA: 01:24:50.1242 @ 0.413939 items / sec XY3P: 105 / 2211 @ c=104, r=10, X144.035 Y72.955 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c104_r010.jpg 105 / 2211, ETA: 01:24:47.2507 @ 0.413976 items / sec XY3P: 106 / 2211 @ c=105, r=10, X144.208 Y72.951 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c105_r010.jpg 106 / 2211, ETA: 01:24:44.4226 @ 0.414010 items / sec XY3P: 107 / 2211 @ c=106, r=10, X144.381 Y72.947 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c106_r010.jpg 107 / 2211, ETA: 01:24:41.6663 @ 0.414037 items / sec XY3P: 108 / 2211 @ c=107, r=10, X144.553 Y72.943 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c107_r010.jpg 108 / 2211, ETA: 01:24:38.8843 @ 0.414067 items / sec XY3P: 109 / 2211 @ c=108, r=10, X144.726 Y72.939 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c108_r010.jpg 109 / 2211, ETA: 01:24:36.1546 @ 0.414093 items / sec XY3P: 110 / 2211 @ c=109, r=10, X144.899 Y72.935 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c109_r010.jpg 110 / 2211, ETA: 01:24:33.4150 @ 0.414119 items / sec XY3P: 111 / 2211 @ c=110, r=10, X145.072 Y72.931 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c110_r010.jpg 111 / 2211, ETA: 01:24:30.7447 @ 0.414140 items / sec XY3P: 112 / 2211 @ c=111, r=10, X145.244 Y72.927 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c111_r010.jpg 112 / 2211, ETA: 01:24:27.8930 @ 0.414176 items / sec XY3P: 113 / 2211 @ c=112, r=10, X145.417 Y72.923 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c112_r010.jpg 113 / 2211, ETA: 01:24:25.1575 @ 0.414202 items / sec XY3P: 114 / 2211 @ c=113, r=10, X145.590 Y72.919 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c113_r010.jpg 114 / 2211, ETA: 01:24:22.4341 @ 0.414228 items / sec XY3P: 115 / 2211 @ c=114, r=10, X145.762 Y72.915 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c114_r010.jpg 115 / 2211, ETA: 01:24:19.7462 @ 0.414250 items / sec XY3P: 116 / 2211 @ c=115, r=10, X145.935 Y72.911 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c115_r010.jpg 116 / 2211, ETA: 01:24:16.9993 @ 0.414277 items / sec XY3P: 117 / 2211 @ c=116, r=10, X146.108 Y72.907 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c116_r010.jpg 117 / 2211, ETA: 01:24:14.2835 @ 0.414302 items / sec XY3P: 118 / 2211 @ c=117, r=10, X146.281 Y72.903 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c117_r010.jpg 118 / 2211, ETA: 01:24:11.5720 @ 0.414326 items / sec XY3P: 119 / 2211 @ c=118, r=10, X146.453 Y72.899 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c118_r010.jpg 119 / 2211, ETA: 01:24:08.8816 @ 0.414349 items / sec XY3P: 120 / 2211 @ c=119, r=10, X146.626 Y72.895 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c119_r010.jpg 120 / 2211, ETA: 01:24:02.7115 @ 0.414658 items / sec XY3P: 121 / 2211 @ c=120, r=10, X146.799 Y72.891 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c120_r010.jpg 121 / 2211, ETA: 01:23:56.6001 @ 0.414962 items / sec XY3P: 122 / 2211 @ c=121, r=10, X146.972 Y72.887 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c121_r010.jpg 122 / 2211, ETA: 01:23:53.9755 @ 0.414980 items / sec XY3P: 123 / 2211 @ c=122, r=10, X147.144 Y72.883 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c122_r010.jpg 123 / 2211, ETA: 01:23:51.3448 @ 0.414998 items / sec XY3P: 124 / 2211 @ c=123, r=10, X147.317 Y72.879 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c123_r010.jpg 124 / 2211, ETA: 01:23:48.7577 @ 0.415013 items / sec XY3P: 125 / 2211 @ c=124, r=10, X147.490 Y72.875 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c124_r010.jpg 125 / 2211, ETA: 01:23:46.1207 @ 0.415032 items / sec XY3P: 126 / 2211 @ c=125, r=10, X147.663 Y72.871 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c125_r010.jpg 126 / 2211, ETA: 01:23:43.5007 @ 0.415049 items / sec XY3P: 127 / 2211 @ c=126, r=10, X147.835 Y72.867 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c126_r010.jpg 127 / 2211, ETA: 01:23:40.8983 @ 0.415065 items / sec XY3P: 128 / 2211 @ c=127, r=10, X148.008 Y72.863 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c127_r010.jpg 128 / 2211, ETA: 01:23:38.2858 @ 0.415082 items / sec XY3P: 129 / 2211 @ c=128, r=10, X148.181 Y72.859 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c128_r010.jpg 129 / 2211, ETA: 01:23:35.7121 @ 0.415096 items / sec XY3P: 130 / 2211 @ c=129, r=10, X148.354 Y72.856 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c129_r010.jpg 130 / 2211, ETA: 01:23:33.1014 @ 0.415112 items / sec XY3P: 131 / 2211 @ c=130, r=10, X148.526 Y72.852 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c130_r010.jpg 131 / 2211, ETA: 01:23:30.4973 @ 0.415128 items / sec XY3P: 132 / 2211 @ c=131, r=10, X148.699 Y72.848 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c131_r010.jpg 132 / 2211, ETA: 01:23:27.9019 @ 0.415144 items / sec XY3P: 133 / 2211 @ c=132, r=10, X148.872 Y72.844 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c132_r010.jpg 133 / 2211, ETA: 01:23:25.3133 @ 0.415159 items / sec XY3P: 134 / 2211 @ c=133, r=10, X149.045 Y72.840 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c133_r010.jpg 134 / 2211, ETA: 01:23:22.7522 @ 0.415171 items / sec XY3P: 135 / 2211 @ c=134, r=10, X149.218 Y72.836 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c134_r010.jpg 135 / 2211, ETA: 01:23:20.1534 @ 0.415187 items / sec XY3P: 136 / 2211 @ c=135, r=10, X149.390 Y72.832 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c135_r010.jpg 136 / 2211, ETA: 01:23:17.5675 @ 0.415202 items / sec XY3P: 137 / 2211 @ c=136, r=10, X149.563 Y72.828 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c136_r010.jpg 137 / 2211, ETA: 01:23:14.9946 @ 0.415216 items / sec XY3P: 138 / 2211 @ c=137, r=10, X149.736 Y72.824 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c137_r010.jpg 138 / 2211, ETA: 01:23:09.4287 @ 0.415478 items / sec XY3P: 139 / 2211 @ c=138, r=10, X149.909 Y72.820 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c138_r010.jpg 139 / 2211, ETA: 01:23:03.9255 @ 0.415737 items / sec XY3P: 140 / 2211 @ c=139, r=10, X150.081 Y72.816 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c139_r010.jpg 140 / 2211, ETA: 01:22:58.4471 @ 0.415993 items / sec XY3P: 141 / 2211 @ c=140, r=10, X150.254 Y72.812 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c140_r010.jpg 141 / 2211, ETA: 01:22:55.9816 @ 0.415998 items / sec XY3P: 142 / 2211 @ c=141, r=10, X150.427 Y72.808 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c141_r010.jpg 142 / 2211, ETA: 01:22:53.4298 @ 0.416011 items / sec XY3P: 143 / 2211 @ c=142, r=10, X150.600 Y72.804 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c142_r010.jpg 143 / 2211, ETA: 01:22:51.0709 @ 0.416007 items / sec XY3P: 144 / 2211 @ c=143, r=10, X150.772 Y72.800 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c143_r010.jpg 144 / 2211, ETA: 01:22:48.4027 @ 0.416029 items / sec XY3P: 145 / 2211 @ c=144, r=10, X150.945 Y72.796 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c144_r010.jpg 145 / 2211, ETA: 01:22:45.9115 @ 0.416036 items / sec XY3P: 146 / 2211 @ c=145, r=10, X151.118 Y72.792 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c145_r010.jpg 146 / 2211, ETA: 01:22:43.4196 @ 0.416044 items / sec XY3P: 147 / 2211 @ c=146, r=10, X151.291 Y72.788 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c146_r010.jpg 147 / 2211, ETA: 01:22:40.9400 @ 0.416050 items / sec XY3P: 148 / 2211 @ c=147, r=10, X151.463 Y72.784 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c147_r010.jpg 148 / 2211, ETA: 01:22:38.4426 @ 0.416058 items / sec XY3P: 149 / 2211 @ c=148, r=10, X151.636 Y72.780 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c148_r010.jpg 149 / 2211, ETA: 01:22:35.9498 @ 0.416066 items / sec XY3P: 150 / 2211 @ c=149, r=10, X151.809 Y72.776 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c149_r010.jpg 150 / 2211, ETA: 01:22:33.4518 @ 0.416073 items / sec XY3P: 151 / 2211 @ c=150, r=10, X151.982 Y72.772 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c150_r010.jpg 151 / 2211, ETA: 01:22:30.9702 @ 0.416080 items / sec XY3P: 152 / 2211 @ c=151, r=10, X152.154 Y72.768 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c151_r010.jpg 152 / 2211, ETA: 01:22:28.5092 @ 0.416085 items / sec XY3P: 153 / 2211 @ c=152, r=10, X152.327 Y72.764 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c152_r010.jpg 153 / 2211, ETA: 01:22:25.9914 @ 0.416095 items / sec XY3P: 154 / 2211 @ c=153, r=10, X152.500 Y72.760 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c153_r010.jpg 154 / 2211, ETA: 01:22:23.5067 @ 0.416101 items / sec XY3P: 155 / 2211 @ c=154, r=10, X152.673 Y72.756 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c154_r010.jpg 155 / 2211, ETA: 01:22:21.0320 @ 0.416107 items / sec XY3P: 156 / 2211 @ c=155, r=10, X152.845 Y72.752 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c155_r010.jpg 156 / 2211, ETA: 01:22:18.6282 @ 0.416107 items / sec XY3P: 157 / 2211 @ c=156, r=10, X153.018 Y72.748 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c156_r010.jpg 157 / 2211, ETA: 01:22:16.0948 @ 0.416118 items / sec XY3P: 158 / 2211 @ c=157, r=10, X153.191 Y72.744 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c157_r010.jpg 158 / 2211, ETA: 01:22:11.0155 @ 0.416344 items / sec XY3P: 159 / 2211 @ c=158, r=10, X153.363 Y72.741 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c158_r010.jpg 159 / 2211, ETA: 01:22:08.5325 @ 0.416351 items / sec XY3P: 160 / 2211 @ c=159, r=10, X153.536 Y72.737 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c159_r010.jpg 160 / 2211, ETA: 01:22:06.0750 @ 0.416356 items / sec XY3P: 161 / 2211 @ c=160, r=10, X153.709 Y72.733 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c160_r010.jpg 161 / 2211, ETA: 01:22:03.6126 @ 0.416361 items / sec XY3P: 162 / 2211 @ c=161, r=10, X153.882 Y72.729 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c161_r010.jpg 162 / 2211, ETA: 01:22:01.1528 @ 0.416366 items / sec XY3P: 163 / 2211 @ c=162, r=10, X154.054 Y72.725 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c162_r010.jpg 163 / 2211, ETA: 01:21:58.7948 @ 0.416362 items / sec XY3P: 164 / 2211 @ c=163, r=10, X154.227 Y72.721 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c163_r010.jpg 164 / 2211, ETA: 01:21:56.2322 @ 0.416376 items / sec XY3P: 165 / 2211 @ c=164, r=10, X154.400 Y72.717 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c164_r010.jpg 165 / 2211, ETA: 01:21:53.7810 @ 0.416380 items / sec XY3P: 166 / 2211 @ c=165, r=10, X154.573 Y72.713 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c165_r010.jpg 166 / 2211, ETA: 01:21:51.3289 @ 0.416384 items / sec XY3P: 167 / 2211 @ c=166, r=10, X154.745 Y72.709 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c166_r010.jpg 167 / 2211, ETA: 01:21:48.8713 @ 0.416389 items / sec XY3P: 168 / 2211 @ c=167, r=10, X154.918 Y72.705 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c167_r010.jpg 168 / 2211, ETA: 01:21:46.4469 @ 0.416391 items / sec XY3P: 169 / 2211 @ c=168, r=10, X155.091 Y72.701 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c168_r010.jpg 169 / 2211, ETA: 01:21:43.9682 @ 0.416397 items / sec XY3P: 170 / 2211 @ c=169, r=10, X155.264 Y72.697 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c169_r010.jpg 170 / 2211, ETA: 01:21:41.5857 @ 0.416396 items / sec XY3P: 171 / 2211 @ c=170, r=10, X155.436 Y72.693 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c170_r010.jpg 171 / 2211, ETA: 01:21:39.0629 @ 0.416406 items / sec XY3P: 172 / 2211 @ c=171, r=10, X155.609 Y72.689 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c171_r010.jpg 172 / 2211, ETA: 01:21:36.6063 @ 0.416411 items / sec XY3P: 173 / 2211 @ c=172, r=10, X155.782 Y72.685 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c172_r010.jpg 173 / 2211, ETA: 01:21:34.1728 @ 0.416414 items / sec XY3P: 174 / 2211 @ c=173, r=10, X155.955 Y72.681 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c173_r010.jpg 174 / 2211, ETA: 01:21:31.7050 @ 0.416419 items / sec XY3P: 175 / 2211 @ c=174, r=10, X156.127 Y72.677 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c174_r010.jpg 175 / 2211, ETA: 01:21:29.2597 @ 0.416423 items / sec XY3P: 176 / 2211 @ c=175, r=10, X156.300 Y72.673 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c175_r010.jpg 176 / 2211, ETA: 01:21:24.5214 @ 0.416622 items / sec XY3P: 177 / 2211 @ c=176, r=10, X156.473 Y72.669 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c176_r010.jpg 177 / 2211, ETA: 01:21:19.7874 @ 0.416821 items / sec XY3P: 178 / 2211 @ c=177, r=10, X156.646 Y72.665 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c177_r010.jpg 178 / 2211, ETA: 01:21:17.3434 @ 0.416825 items / sec XY3P: 179 / 2211 @ c=178, r=10, X156.819 Y72.661 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c178_r010.jpg 179 / 2211, ETA: 01:21:14.9231 @ 0.416827 items / sec XY3P: 180 / 2211 @ c=179, r=10, X156.991 Y72.657 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c179_r010.jpg 180 / 2211, ETA: 01:21:12.5025 @ 0.416829 items / sec XY3P: 181 / 2211 @ c=180, r=10, X157.164 Y72.653 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c180_r010.jpg 181 / 2211, ETA: 01:21:10.0881 @ 0.416830 items / sec XY3P: 182 / 2211 @ c=181, r=10, X157.337 Y72.649 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c181_r010.jpg 182 / 2211, ETA: 01:21:07.6855 @ 0.416831 items / sec XY3P: 183 / 2211 @ c=182, r=10, X157.510 Y72.645 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c182_r010.jpg 183 / 2211, ETA: 01:21:05.2452 @ 0.416834 items / sec XY3P: 184 / 2211 @ c=183, r=10, X157.682 Y72.641 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c183_r010.jpg 184 / 2211, ETA: 01:21:02.8334 @ 0.416835 items / sec XY3P: 185 / 2211 @ c=184, r=10, X157.855 Y72.637 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c184_r010.jpg 185 / 2211, ETA: 01:21:00.4137 @ 0.416837 items / sec XY3P: 186 / 2211 @ c=185, r=10, X158.028 Y72.633 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c185_r010.jpg 186 / 2211, ETA: 01:20:57.9956 @ 0.416839 items / sec XY3P: 187 / 2211 @ c=186, r=10, X158.201 Y72.630 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c186_r010.jpg 187 / 2211, ETA: 01:20:55.5935 @ 0.416839 items / sec XY3P: 188 / 2211 @ c=187, r=10, X158.373 Y72.626 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c187_r010.jpg 188 / 2211, ETA: 01:20:51.0138 @ 0.417026 items / sec XY3P: 189 / 2211 @ c=188, r=10, X158.546 Y72.622 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c188_r010.jpg 189 / 2211, ETA: 01:20:48.6027 @ 0.417027 items / sec XY3P: 190 / 2211 @ c=189, r=10, X158.719 Y72.618 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c189_r010.jpg 190 / 2211, ETA: 01:20:46.2252 @ 0.417026 items / sec XY3P: 191 / 2211 @ c=190, r=10, X158.892 Y72.614 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c190_r010.jpg 191 / 2211, ETA: 01:20:43.7918 @ 0.417029 items / sec XY3P: 192 / 2211 @ c=191, r=10, X159.064 Y72.610 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c191_r010.jpg 192 / 2211, ETA: 01:20:41.3848 @ 0.417029 items / sec XY3P: 193 / 2211 @ c=192, r=10, X159.237 Y72.606 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c192_r010.jpg 193 / 2211, ETA: 01:20:38.9825 @ 0.417030 items / sec XY3P: 194 / 2211 @ c=193, r=10, X159.410 Y72.602 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c193_r010.jpg 194 / 2211, ETA: 01:20:34.5039 @ 0.417209 items / sec XY3P: 195 / 2211 @ c=194, r=10, X159.583 Y72.598 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c194_r010.jpg 195 / 2211, ETA: 01:20:30.0381 @ 0.417388 items / sec XY3P: 196 / 2211 @ c=195, r=10, X159.755 Y72.594 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c195_r010.jpg 196 / 2211, ETA: 01:20:25.6108 @ 0.417564 items / sec XY3P: 197 / 2211 @ c=196, r=10, X159.928 Y72.590 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c196_r010.jpg 197 / 2211, ETA: 01:20:23.2393 @ 0.417562 items / sec XY3P: 198 / 2211 @ c=197, r=10, X160.101 Y72.586 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c197_r010.jpg 198 / 2211, ETA: 01:20:20.8691 @ 0.417560 items / sec XY3P: 199 / 2211 @ c=198, r=10, X160.274 Y72.582 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c198_r010.jpg 199 / 2211, ETA: 01:20:18.5018 @ 0.417557 items / sec XY3P: 200 / 2211 @ c=199, r=10, X160.446 Y72.578 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c199_r010.jpg 200 / 2211, ETA: 01:20:16.1391 @ 0.417554 items / sec XY3P: 201 / 2211 @ c=200, r=10, X160.619 Y72.574 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c200_r010.jpg 201 / 2211, ETA: 01:20:13.7470 @ 0.417554 items / sec XY3P: 202 / 2211 @ c=200, r=9, X160.619 Y72.735 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c200_r009.jpg 202 / 2211, ETA: 01:20:11.3794 @ 0.417552 items / sec XY3P: 203 / 2211 @ c=199, r=9, X160.446 Y72.739 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c199_r009.jpg 203 / 2211, ETA: 01:20:09.0135 @ 0.417549 items / sec XY3P: 204 / 2211 @ c=198, r=9, X160.274 Y72.743 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c198_r009.jpg 204 / 2211, ETA: 01:20:06.6371 @ 0.417548 items / sec XY3P: 205 / 2211 @ c=197, r=9, X160.101 Y72.747 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c197_r009.jpg 205 / 2211, ETA: 01:20:04.2908 @ 0.417543 items / sec XY3P: 206 / 2211 @ c=196, r=9, X159.928 Y72.751 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c196_r009.jpg 206 / 2211, ETA: 01:20:01.8949 @ 0.417543 items / sec XY3P: 207 / 2211 @ c=195, r=9, X159.755 Y72.755 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c195_r009.jpg 207 / 2211, ETA: 01:19:59.5810 @ 0.417536 items / sec XY3P: 208 / 2211 @ c=194, r=9, X159.583 Y72.759 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c194_r009.jpg 208 / 2211, ETA: 01:19:57.1450 @ 0.417540 items / sec XY3P: 209 / 2211 @ c=193, r=9, X159.410 Y72.763 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c193_r009.jpg 209 / 2211, ETA: 01:19:54.7806 @ 0.417537 items / sec XY3P: 210 / 2211 @ c=192, r=9, X159.237 Y72.767 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c192_r009.jpg 210 / 2211, ETA: 01:19:52.4093 @ 0.417535 items / sec XY3P: 211 / 2211 @ c=191, r=9, X159.064 Y72.771 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c191_r009.jpg 211 / 2211, ETA: 01:19:50.0369 @ 0.417533 items / sec XY3P: 212 / 2211 @ c=190, r=9, X158.892 Y72.775 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c190_r009.jpg 212 / 2211, ETA: 01:19:47.6576 @ 0.417532 items / sec XY3P: 213 / 2211 @ c=189, r=9, X158.719 Y72.779 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c189_r009.jpg 213 / 2211, ETA: 01:19:45.3181 @ 0.417527 items / sec XY3P: 214 / 2211 @ c=188, r=9, X158.546 Y72.782 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c188_r009.jpg 214 / 2211, ETA: 01:19:42.9444 @ 0.417525 items / sec XY3P: 215 / 2211 @ c=187, r=9, X158.373 Y72.786 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c187_r009.jpg 215 / 2211, ETA: 01:19:40.5272 @ 0.417527 items / sec XY3P: 216 / 2211 @ c=186, r=9, X158.201 Y72.790 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c186_r009.jpg 216 / 2211, ETA: 01:19:38.1549 @ 0.417525 items / sec XY3P: 217 / 2211 @ c=185, r=9, X158.028 Y72.794 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c185_r009.jpg 217 / 2211, ETA: 01:19:35.7880 @ 0.417523 items / sec XY3P: 218 / 2211 @ c=184, r=9, X157.855 Y72.798 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c184_r009.jpg 218 / 2211, ETA: 01:19:33.4312 @ 0.417519 items / sec XY3P: 219 / 2211 @ c=183, r=9, X157.682 Y72.802 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c183_r009.jpg 219 / 2211, ETA: 01:19:31.0367 @ 0.417519 items / sec XY3P: 220 / 2211 @ c=182, r=9, X157.510 Y72.806 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c182_r009.jpg 220 / 2211, ETA: 01:19:28.6589 @ 0.417518 items / sec XY3P: 221 / 2211 @ c=181, r=9, X157.337 Y72.810 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c181_r009.jpg 221 / 2211, ETA: 01:19:26.2835 @ 0.417516 items / sec XY3P: 222 / 2211 @ c=180, r=9, X157.164 Y72.814 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c180_r009.jpg 222 / 2211, ETA: 01:19:23.9006 @ 0.417515 items / sec XY3P: 223 / 2211 @ c=179, r=9, X156.991 Y72.818 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c179_r009.jpg 223 / 2211, ETA: 01:19:21.5534 @ 0.417511 items / sec XY3P: 224 / 2211 @ c=178, r=9, X156.819 Y72.822 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c178_r009.jpg 224 / 2211, ETA: 01:19:19.1573 @ 0.417511 items / sec XY3P: 225 / 2211 @ c=177, r=9, X156.646 Y72.826 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c177_r009.jpg 225 / 2211, ETA: 01:19:15.0687 @ 0.417660 items / sec XY3P: 226 / 2211 @ c=176, r=9, X156.473 Y72.830 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c176_r009.jpg 226 / 2211, ETA: 01:19:12.6414 @ 0.417662 items / sec XY3P: 227 / 2211 @ c=175, r=9, X156.300 Y72.834 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c175_r009.jpg 227 / 2211, ETA: 01:19:10.2755 @ 0.417660 items / sec XY3P: 228 / 2211 @ c=174, r=9, X156.127 Y72.838 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c174_r009.jpg 228 / 2211, ETA: 01:19:07.9650 @ 0.417653 items / sec XY3P: 229 / 2211 @ c=173, r=9, X155.955 Y72.842 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c173_r009.jpg 229 / 2211, ETA: 01:19:05.5556 @ 0.417654 items / sec XY3P: 230 / 2211 @ c=172, r=9, X155.782 Y72.846 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c172_r009.jpg 230 / 2211, ETA: 01:19:03.1729 @ 0.417653 items / sec XY3P: 231 / 2211 @ c=171, r=9, X155.609 Y72.850 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c171_r009.jpg 231 / 2211, ETA: 01:19:00.7984 @ 0.417651 items / sec XY3P: 232 / 2211 @ c=170, r=9, X155.436 Y72.854 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c170_r009.jpg 232 / 2211, ETA: 01:18:58.4352 @ 0.417648 items / sec XY3P: 233 / 2211 @ c=169, r=9, X155.264 Y72.858 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c169_r009.jpg 233 / 2211, ETA: 01:18:56.0633 @ 0.417646 items / sec XY3P: 234 / 2211 @ c=168, r=9, X155.091 Y72.862 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c168_r009.jpg 234 / 2211, ETA: 01:18:53.7070 @ 0.417643 items / sec XY3P: 235 / 2211 @ c=167, r=9, X154.918 Y72.866 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c167_r009.jpg 235 / 2211, ETA: 01:18:51.3257 @ 0.417642 items / sec XY3P: 236 / 2211 @ c=166, r=9, X154.745 Y72.870 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c166_r009.jpg 236 / 2211, ETA: 01:18:48.9566 @ 0.417640 items / sec XY3P: 237 / 2211 @ c=165, r=9, X154.573 Y72.874 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c165_r009.jpg 237 / 2211, ETA: 01:18:46.5818 @ 0.417638 items / sec XY3P: 238 / 2211 @ c=164, r=9, X154.400 Y72.878 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c164_r009.jpg 238 / 2211, ETA: 01:18:44.2103 @ 0.417636 items / sec XY3P: 239 / 2211 @ c=163, r=9, X154.227 Y72.882 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c163_r009.jpg 239 / 2211, ETA: 01:18:41.8511 @ 0.417633 items / sec XY3P: 240 / 2211 @ c=162, r=9, X154.054 Y72.886 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c162_r009.jpg 240 / 2211, ETA: 01:18:39.5203 @ 0.417627 items / sec XY3P: 241 / 2211 @ c=161, r=9, X153.882 Y72.890 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c161_r009.jpg 241 / 2211, ETA: 01:18:37.1069 @ 0.417629 items / sec XY3P: 242 / 2211 @ c=160, r=9, X153.709 Y72.893 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c160_r009.jpg 242 / 2211, ETA: 01:18:34.7305 @ 0.417627 items / sec XY3P: 243 / 2211 @ c=159, r=9, X153.536 Y72.897 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c159_r009.jpg 243 / 2211, ETA: 01:18:32.3556 @ 0.417626 items / sec XY3P: 244 / 2211 @ c=158, r=9, X153.363 Y72.901 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c158_r009.jpg 244 / 2211, ETA: 01:18:29.9941 @ 0.417623 items / sec XY3P: 245 / 2211 @ c=157, r=9, X153.191 Y72.905 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c157_r009.jpg 245 / 2211, ETA: 01:18:27.6064 @ 0.417622 items / sec XY3P: 246 / 2211 @ c=156, r=9, X153.018 Y72.909 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c156_r009.jpg 246 / 2211, ETA: 01:18:25.2359 @ 0.417620 items / sec XY3P: 247 / 2211 @ c=155, r=9, X152.845 Y72.913 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c155_r009.jpg 247 / 2211, ETA: 01:18:22.8652 @ 0.417618 items / sec XY3P: 248 / 2211 @ c=154, r=9, X152.673 Y72.917 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c154_r009.jpg 248 / 2211, ETA: 01:18:20.4920 @ 0.417616 items / sec XY3P: 249 / 2211 @ c=153, r=9, X152.500 Y72.921 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c153_r009.jpg 249 / 2211, ETA: 01:18:18.1331 @ 0.417613 items / sec XY3P: 250 / 2211 @ c=152, r=9, X152.327 Y72.925 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c152_r009.jpg 250 / 2211, ETA: 01:18:15.7914 @ 0.417608 items / sec XY3P: 251 / 2211 @ c=151, r=9, X152.154 Y72.929 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c151_r009.jpg 251 / 2211, ETA: 01:18:13.3701 @ 0.417610 items / sec XY3P: 252 / 2211 @ c=150, r=9, X151.982 Y72.933 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c150_r009.jpg 252 / 2211, ETA: 01:18:10.9947 @ 0.417609 items / sec XY3P: 253 / 2211 @ c=149, r=9, X151.809 Y72.937 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c149_r009.jpg 253 / 2211, ETA: 01:18:08.6247 @ 0.417606 items / sec XY3P: 254 / 2211 @ c=148, r=9, X151.636 Y72.941 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c148_r009.jpg 254 / 2211, ETA: 01:18:06.2697 @ 0.417603 items / sec XY3P: 255 / 2211 @ c=147, r=9, X151.463 Y72.945 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c147_r009.jpg 255 / 2211, ETA: 01:18:03.8779 @ 0.417603 items / sec XY3P: 256 / 2211 @ c=146, r=9, X151.291 Y72.949 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c146_r009.jpg 256 / 2211, ETA: 01:18:01.5017 @ 0.417601 items / sec XY3P: 257 / 2211 @ c=145, r=9, X151.118 Y72.953 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c145_r009.jpg 257 / 2211, ETA: 01:17:59.1298 @ 0.417599 items / sec XY3P: 258 / 2211 @ c=144, r=9, X150.945 Y72.957 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c144_r009.jpg 258 / 2211, ETA: 01:17:56.7546 @ 0.417597 items / sec XY3P: 259 / 2211 @ c=143, r=9, X150.772 Y72.961 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c143_r009.jpg 259 / 2211, ETA: 01:17:54.3850 @ 0.417595 items / sec XY3P: 260 / 2211 @ c=142, r=9, X150.600 Y72.965 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c142_r009.jpg 260 / 2211, ETA: 01:17:52.0046 @ 0.417594 items / sec XY3P: 261 / 2211 @ c=141, r=9, X150.427 Y72.969 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c141_r009.jpg 261 / 2211, ETA: 01:17:49.6277 @ 0.417592 items / sec XY3P: 262 / 2211 @ c=140, r=9, X150.254 Y72.973 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c140_r009.jpg 262 / 2211, ETA: 01:17:47.2515 @ 0.417591 items / sec XY3P: 263 / 2211 @ c=139, r=9, X150.081 Y72.977 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c139_r009.jpg 263 / 2211, ETA: 01:17:44.8810 @ 0.417588 items / sec XY3P: 264 / 2211 @ c=138, r=9, X149.909 Y72.981 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c138_r009.jpg 264 / 2211, ETA: 01:17:42.5125 @ 0.417586 items / sec XY3P: 265 / 2211 @ c=137, r=9, X149.736 Y72.985 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c137_r009.jpg 265 / 2211, ETA: 01:17:40.1310 @ 0.417585 items / sec XY3P: 266 / 2211 @ c=136, r=9, X149.563 Y72.989 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c136_r009.jpg 266 / 2211, ETA: 01:17:37.7463 @ 0.417584 items / sec XY3P: 267 / 2211 @ c=135, r=9, X149.390 Y72.993 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c135_r009.jpg 267 / 2211, ETA: 01:17:35.3751 @ 0.417582 items / sec XY3P: 268 / 2211 @ c=134, r=9, X149.218 Y72.997 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c134_r009.jpg 268 / 2211, ETA: 01:17:32.9947 @ 0.417581 items / sec XY3P: 269 / 2211 @ c=133, r=9, X149.045 Y73.001 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c133_r009.jpg 269 / 2211, ETA: 01:17:30.6322 @ 0.417578 items / sec XY3P: 270 / 2211 @ c=132, r=9, X148.872 Y73.005 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c132_r009.jpg 270 / 2211, ETA: 01:17:28.2447 @ 0.417577 items / sec XY3P: 271 / 2211 @ c=131, r=9, X148.699 Y73.008 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c131_r009.jpg 271 / 2211, ETA: 01:17:25.8678 @ 0.417575 items / sec XY3P: 272 / 2211 @ c=130, r=9, X148.526 Y73.012 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c130_r009.jpg 272 / 2211, ETA: 01:17:23.4937 @ 0.417574 items / sec XY3P: 273 / 2211 @ c=129, r=9, X148.354 Y73.016 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c129_r009.jpg 273 / 2211, ETA: 01:17:21.1086 @ 0.417573 items / sec XY3P: 274 / 2211 @ c=128, r=9, X148.181 Y73.020 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c128_r009.jpg 274 / 2211, ETA: 01:17:18.7482 @ 0.417570 items / sec XY3P: 275 / 2211 @ c=127, r=9, X148.008 Y73.024 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c127_r009.jpg 275 / 2211, ETA: 01:17:16.3575 @ 0.417569 items / sec XY3P: 276 / 2211 @ c=126, r=9, X147.835 Y73.028 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c126_r009.jpg 276 / 2211, ETA: 01:17:13.9785 @ 0.417568 items / sec XY3P: 277 / 2211 @ c=125, r=9, X147.663 Y73.032 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c125_r009.jpg 277 / 2211, ETA: 01:17:11.5984 @ 0.417566 items / sec XY3P: 278 / 2211 @ c=124, r=9, X147.490 Y73.036 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c124_r009.jpg 278 / 2211, ETA: 01:17:09.2214 @ 0.417565 items / sec XY3P: 279 / 2211 @ c=123, r=9, X147.317 Y73.040 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c123_r009.jpg 279 / 2211, ETA: 01:17:06.8588 @ 0.417562 items / sec XY3P: 280 / 2211 @ c=122, r=9, X147.144 Y73.044 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c122_r009.jpg 280 / 2211, ETA: 01:17:04.4632 @ 0.417562 items / sec XY3P: 281 / 2211 @ c=121, r=9, X146.972 Y73.048 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c121_r009.jpg 281 / 2211, ETA: 01:17:02.0874 @ 0.417560 items / sec XY3P: 282 / 2211 @ c=120, r=9, X146.799 Y73.052 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c120_r009.jpg 282 / 2211, ETA: 01:16:59.7623 @ 0.417554 items / sec XY3P: 283 / 2211 @ c=119, r=9, X146.626 Y73.056 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c119_r009.jpg 283 / 2211, ETA: 01:16:57.3377 @ 0.417557 items / sec XY3P: 284 / 2211 @ c=118, r=9, X146.453 Y73.060 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c118_r009.jpg 284 / 2211, ETA: 01:16:54.9738 @ 0.417554 items / sec XY3P: 285 / 2211 @ c=117, r=9, X146.281 Y73.064 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c117_r009.jpg 285 / 2211, ETA: 01:16:52.5823 @ 0.417554 items / sec XY3P: 286 / 2211 @ c=116, r=9, X146.108 Y73.068 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c116_r009.jpg 286 / 2211, ETA: 01:16:50.2040 @ 0.417552 items / sec XY3P: 287 / 2211 @ c=115, r=9, X145.935 Y73.072 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c115_r009.jpg 287 / 2211, ETA: 01:16:47.8563 @ 0.417548 items / sec XY3P: 288 / 2211 @ c=114, r=9, X145.762 Y73.076 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c114_r009.jpg 288 / 2211, ETA: 01:16:45.4781 @ 0.417546 items / sec XY3P: 289 / 2211 @ c=113, r=9, X145.590 Y73.080 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c113_r009.jpg 289 / 2211, ETA: 01:16:43.0564 @ 0.417549 items / sec XY3P: 290 / 2211 @ c=112, r=9, X145.417 Y73.084 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c112_r009.jpg 290 / 2211, ETA: 01:16:40.6784 @ 0.417547 items / sec XY3P: 291 / 2211 @ c=111, r=9, X145.244 Y73.088 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c111_r009.jpg 291 / 2211, ETA: 01:16:38.2986 @ 0.417546 items / sec XY3P: 292 / 2211 @ c=110, r=9, X145.072 Y73.092 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c110_r009.jpg 292 / 2211, ETA: 01:16:35.9296 @ 0.417543 items / sec XY3P: 293 / 2211 @ c=109, r=9, X144.899 Y73.096 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c109_r009.jpg 293 / 2211, ETA: 01:16:33.5421 @ 0.417543 items / sec XY3P: 294 / 2211 @ c=108, r=9, X144.726 Y73.100 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c108_r009.jpg 294 / 2211, ETA: 01:16:31.1556 @ 0.417542 items / sec XY3P: 295 / 2211 @ c=107, r=9, X144.553 Y73.104 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c107_r009.jpg 295 / 2211, ETA: 01:16:28.7806 @ 0.417540 items / sec XY3P: 296 / 2211 @ c=106, r=9, X144.381 Y73.108 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c106_r009.jpg 296 / 2211, ETA: 01:16:26.3989 @ 0.417539 items / sec XY3P: 297 / 2211 @ c=105, r=9, X144.208 Y73.112 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c105_r009.jpg 297 / 2211, ETA: 01:16:24.0294 @ 0.417537 items / sec XY3P: 298 / 2211 @ c=104, r=9, X144.035 Y73.116 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c104_r009.jpg 298 / 2211, ETA: 01:16:21.6377 @ 0.417536 items / sec XY3P: 299 / 2211 @ c=103, r=9, X143.862 Y73.120 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c103_r009.jpg 299 / 2211, ETA: 01:16:19.2575 @ 0.417535 items / sec XY3P: 300 / 2211 @ c=102, r=9, X143.690 Y73.123 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c102_r009.jpg 300 / 2211, ETA: 01:16:16.8760 @ 0.417534 items / sec XY3P: 301 / 2211 @ c=101, r=9, X143.517 Y73.127 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c101_r009.jpg 301 / 2211, ETA: 01:16:14.4925 @ 0.417533 items / sec XY3P: 302 / 2211 @ c=100, r=9, X143.344 Y73.131 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c100_r009.jpg 302 / 2211, ETA: 01:16:12.1296 @ 0.417530 items / sec XY3P: 303 / 2211 @ c=99, r=9, X143.171 Y73.135 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c099_r009.jpg 303 / 2211, ETA: 01:16:09.7368 @ 0.417530 items / sec XY3P: 304 / 2211 @ c=98, r=9, X142.999 Y73.139 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c098_r009.jpg 304 / 2211, ETA: 01:16:07.3538 @ 0.417528 items / sec XY3P: 305 / 2211 @ c=97, r=9, X142.826 Y73.143 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c097_r009.jpg 305 / 2211, ETA: 01:16:04.9713 @ 0.417527 items / sec XY3P: 306 / 2211 @ c=96, r=9, X142.653 Y73.147 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c096_r009.jpg 306 / 2211, ETA: 01:16:02.5916 @ 0.417526 items / sec XY3P: 307 / 2211 @ c=95, r=9, X142.480 Y73.151 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c095_r009.jpg 307 / 2211, ETA: 01:15:58.9764 @ 0.417638 items / sec XY3P: 308 / 2211 @ c=94, r=9, X142.308 Y73.155 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c094_r009.jpg 308 / 2211, ETA: 01:15:56.6017 @ 0.417636 items / sec XY3P: 309 / 2211 @ c=93, r=9, X142.135 Y73.159 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c093_r009.jpg 309 / 2211, ETA: 01:15:54.2178 @ 0.417635 items / sec XY3P: 310 / 2211 @ c=92, r=9, X141.962 Y73.163 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c092_r009.jpg 310 / 2211, ETA: 01:15:51.8408 @ 0.417633 items / sec XY3P: 311 / 2211 @ c=91, r=9, X141.789 Y73.167 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c091_r009.jpg 311 / 2211, ETA: 01:15:49.4632 @ 0.417632 items / sec XY3P: 312 / 2211 @ c=90, r=9, X141.617 Y73.171 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c090_r009.jpg 312 / 2211, ETA: 01:15:47.0878 @ 0.417630 items / sec XY3P: 313 / 2211 @ c=89, r=9, X141.444 Y73.175 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c089_r009.jpg 313 / 2211, ETA: 01:15:44.7210 @ 0.417627 items / sec XY3P: 314 / 2211 @ c=88, r=9, X141.271 Y73.179 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c088_r009.jpg 314 / 2211, ETA: 01:15:42.3334 @ 0.417627 items / sec XY3P: 315 / 2211 @ c=87, r=9, X141.098 Y73.183 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c087_r009.jpg 315 / 2211, ETA: 01:15:39.9563 @ 0.417625 items / sec XY3P: 316 / 2211 @ c=86, r=9, X140.925 Y73.187 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c086_r009.jpg 316 / 2211, ETA: 01:15:37.6133 @ 0.417620 items / sec XY3P: 317 / 2211 @ c=85, r=9, X140.753 Y73.191 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c085_r009.jpg 317 / 2211, ETA: 01:15:35.1976 @ 0.417622 items / sec XY3P: 318 / 2211 @ c=84, r=9, X140.580 Y73.195 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c084_r009.jpg 318 / 2211, ETA: 01:15:32.8608 @ 0.417617 items / sec XY3P: 319 / 2211 @ c=83, r=9, X140.407 Y73.199 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c083_r009.jpg 319 / 2211, ETA: 01:15:30.4413 @ 0.417619 items / sec XY3P: 320 / 2211 @ c=82, r=9, X140.234 Y73.203 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c082_r009.jpg 320 / 2211, ETA: 01:15:28.0653 @ 0.417618 items / sec XY3P: 321 / 2211 @ c=81, r=9, X140.062 Y73.207 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c081_r009.jpg 321 / 2211, ETA: 01:15:25.6842 @ 0.417616 items / sec XY3P: 322 / 2211 @ c=80, r=9, X139.889 Y73.211 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c080_r009.jpg 322 / 2211, ETA: 01:15:23.3132 @ 0.417614 items / sec XY3P: 323 / 2211 @ c=79, r=9, X139.716 Y73.215 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c079_r009.jpg 323 / 2211, ETA: 01:15:20.9395 @ 0.417612 items / sec XY3P: 324 / 2211 @ c=78, r=9, X139.543 Y73.219 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c078_r009.jpg 324 / 2211, ETA: 01:15:18.5481 @ 0.417612 items / sec XY3P: 325 / 2211 @ c=77, r=9, X139.371 Y73.223 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c077_r009.jpg 325 / 2211, ETA: 01:15:16.1702 @ 0.417610 items / sec XY3P: 326 / 2211 @ c=76, r=9, X139.198 Y73.227 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c076_r009.jpg 326 / 2211, ETA: 01:15:13.7894 @ 0.417609 items / sec XY3P: 327 / 2211 @ c=75, r=9, X139.025 Y73.231 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c075_r009.jpg 327 / 2211, ETA: 01:15:11.4137 @ 0.417607 items / sec XY3P: 328 / 2211 @ c=74, r=9, X138.852 Y73.234 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c074_r009.jpg 328 / 2211, ETA: 01:15:09.0383 @ 0.417606 items / sec XY3P: 329 / 2211 @ c=73, r=9, X138.680 Y73.238 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c073_r009.jpg 329 / 2211, ETA: 01:15:06.6539 @ 0.417605 items / sec XY3P: 330 / 2211 @ c=72, r=9, X138.507 Y73.242 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c072_r009.jpg 330 / 2211, ETA: 01:15:04.2740 @ 0.417603 items / sec XY3P: 331 / 2211 @ c=71, r=9, X138.334 Y73.246 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c071_r009.jpg 331 / 2211, ETA: 01:15:01.8917 @ 0.417602 items / sec XY3P: 332 / 2211 @ c=70, r=9, X138.161 Y73.250 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c070_r009.jpg 332 / 2211, ETA: 01:14:59.5162 @ 0.417600 items / sec XY3P: 333 / 2211 @ c=69, r=9, X137.989 Y73.254 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c069_r009.jpg 333 / 2211, ETA: 01:14:57.1386 @ 0.417599 items / sec XY3P: 334 / 2211 @ c=68, r=9, X137.816 Y73.258 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c068_r009.jpg 334 / 2211, ETA: 01:14:54.7529 @ 0.417598 items / sec XY3P: 335 / 2211 @ c=67, r=9, X137.643 Y73.262 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c067_r009.jpg 335 / 2211, ETA: 01:14:52.3766 @ 0.417596 items / sec XY3P: 336 / 2211 @ c=66, r=9, X137.471 Y73.266 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c066_r009.jpg 336 / 2211, ETA: 01:14:49.9969 @ 0.417595 items / sec XY3P: 337 / 2211 @ c=65, r=9, X137.298 Y73.270 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c065_r009.jpg 337 / 2211, ETA: 01:14:46.5027 @ 0.417697 items / sec XY3P: 338 / 2211 @ c=64, r=9, X137.125 Y73.274 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c064_r009.jpg 338 / 2211, ETA: 01:14:44.1293 @ 0.417695 items / sec XY3P: 339 / 2211 @ c=63, r=9, X136.952 Y73.278 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c063_r009.jpg 339 / 2211, ETA: 01:14:41.7498 @ 0.417694 items / sec XY3P: 340 / 2211 @ c=62, r=9, X136.780 Y73.282 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c062_r009.jpg 340 / 2211, ETA: 01:14:39.3714 @ 0.417693 items / sec XY3P: 341 / 2211 @ c=61, r=9, X136.607 Y73.286 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c061_r009.jpg 341 / 2211, ETA: 01:14:37.0057 @ 0.417690 items / sec XY3P: 342 / 2211 @ c=60, r=9, X136.434 Y73.290 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c060_r009.jpg 342 / 2211, ETA: 01:14:34.6211 @ 0.417689 items / sec XY3P: 343 / 2211 @ c=59, r=9, X136.261 Y73.294 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c059_r009.jpg 343 / 2211, ETA: 01:14:32.2430 @ 0.417687 items / sec XY3P: 344 / 2211 @ c=58, r=9, X136.089 Y73.298 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c058_r009.jpg 344 / 2211, ETA: 01:14:29.8654 @ 0.417686 items / sec XY3P: 345 / 2211 @ c=57, r=9, X135.916 Y73.302 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c057_r009.jpg 345 / 2211, ETA: 01:14:27.4900 @ 0.417684 items / sec XY3P: 346 / 2211 @ c=56, r=9, X135.743 Y73.306 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c056_r009.jpg 346 / 2211, ETA: 01:14:25.1223 @ 0.417682 items / sec XY3P: 347 / 2211 @ c=55, r=9, X135.570 Y73.310 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c055_r009.jpg 347 / 2211, ETA: 01:14:21.6706 @ 0.417781 items / sec XY3P: 348 / 2211 @ c=54, r=9, X135.398 Y73.314 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c054_r009.jpg 348 / 2211, ETA: 01:14:19.2853 @ 0.417780 items / sec XY3P: 349 / 2211 @ c=53, r=9, X135.225 Y73.318 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c053_r009.jpg 349 / 2211, ETA: 01:14:16.9142 @ 0.417778 items / sec XY3P: 350 / 2211 @ c=52, r=9, X135.052 Y73.322 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c052_r009.jpg 350 / 2211, ETA: 01:14:14.5368 @ 0.417776 items / sec XY3P: 351 / 2211 @ c=51, r=9, X134.879 Y73.326 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c051_r009.jpg 351 / 2211, ETA: 01:14:12.1638 @ 0.417774 items / sec XY3P: 352 / 2211 @ c=50, r=9, X134.707 Y73.330 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c050_r009.jpg 352 / 2211, ETA: 01:14:09.7969 @ 0.417772 items / sec XY3P: 353 / 2211 @ c=49, r=9, X134.534 Y73.334 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c049_r009.jpg 353 / 2211, ETA: 01:14:07.4158 @ 0.417771 items / sec XY3P: 354 / 2211 @ c=48, r=9, X134.361 Y73.338 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c048_r009.jpg 354 / 2211, ETA: 01:14:05.0405 @ 0.417769 items / sec XY3P: 355 / 2211 @ c=47, r=9, X134.188 Y73.342 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c047_r009.jpg 355 / 2211, ETA: 01:14:02.6674 @ 0.417767 items / sec XY3P: 356 / 2211 @ c=46, r=9, X134.016 Y73.346 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c046_r009.jpg 356 / 2211, ETA: 01:14:00.3180 @ 0.417763 items / sec XY3P: 357 / 2211 @ c=45, r=9, X133.843 Y73.349 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c045_r009.jpg 357 / 2211, ETA: 01:13:57.9269 @ 0.417763 items / sec XY3P: 358 / 2211 @ c=44, r=9, X133.670 Y73.353 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c044_r009.jpg 358 / 2211, ETA: 01:13:55.5436 @ 0.417762 items / sec XY3P: 359 / 2211 @ c=43, r=9, X133.497 Y73.357 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c043_r009.jpg 359 / 2211, ETA: 01:13:53.1686 @ 0.417760 items / sec XY3P: 360 / 2211 @ c=42, r=9, X133.325 Y73.361 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c042_r009.jpg 360 / 2211, ETA: 01:13:50.8138 @ 0.417756 items / sec XY3P: 361 / 2211 @ c=41, r=9, X133.152 Y73.365 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c041_r009.jpg 361 / 2211, ETA: 01:13:48.4363 @ 0.417755 items / sec XY3P: 362 / 2211 @ c=40, r=9, X132.979 Y73.369 Z-15.162 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c040_r009.jpg 362 / 2211, ETA: 01:13:46.0374 @ 0.417755 items / sec XY3P: 363 / 2211 @ c=39, r=9, X132.806 Y73.373 Z-15.162 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c039_r009.jpg 363 / 2211, ETA: 01:13:44.6778 @ 0.417658 items / sec XY3P: 364 / 2211 @ c=38, r=9, X132.633 Y73.377 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c038_r009.jpg 364 / 2211, ETA: 01:13:42.3070 @ 0.417655 items / sec XY3P: 365 / 2211 @ c=37, r=9, X132.461 Y73.381 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c037_r009.jpg 365 / 2211, ETA: 01:13:39.9180 @ 0.417655 items / sec XY3P: 366 / 2211 @ c=36, r=9, X132.288 Y73.385 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c036_r009.jpg 366 / 2211, ETA: 01:13:37.5413 @ 0.417653 items / sec XY3P: 367 / 2211 @ c=35, r=9, X132.115 Y73.389 Z-15.165 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c035_r009.jpg 367 / 2211, ETA: 01:13:34.1560 @ 0.417747 items / sec XY3P: 368 / 2211 @ c=34, r=9, X131.942 Y73.393 Z-15.165 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c034_r009.jpg 368 / 2211, ETA: 01:13:31.7796 @ 0.417745 items / sec XY3P: 369 / 2211 @ c=33, r=9, X131.770 Y73.397 Z-15.166 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c033_r009.jpg 369 / 2211, ETA: 01:13:29.4044 @ 0.417743 items / sec XY3P: 370 / 2211 @ c=32, r=9, X131.597 Y73.401 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c032_r009.jpg 370 / 2211, ETA: 01:13:27.0350 @ 0.417741 items / sec XY3P: 371 / 2211 @ c=31, r=9, X131.424 Y73.405 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c031_r009.jpg 371 / 2211, ETA: 01:13:24.6517 @ 0.417740 items / sec XY3P: 372 / 2211 @ c=30, r=9, X131.251 Y73.409 Z-15.168 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c030_r009.jpg 372 / 2211, ETA: 01:13:21.2863 @ 0.417832 items / sec XY3P: 373 / 2211 @ c=29, r=9, X131.079 Y73.413 Z-15.168 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c029_r009.jpg 373 / 2211, ETA: 01:13:18.9142 @ 0.417830 items / sec XY3P: 374 / 2211 @ c=28, r=9, X130.906 Y73.417 Z-15.169 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c028_r009.jpg 374 / 2211, ETA: 01:13:16.5421 @ 0.417828 items / sec XY3P: 375 / 2211 @ c=27, r=9, X130.733 Y73.421 Z-15.170 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c027_r009.jpg 375 / 2211, ETA: 01:13:14.1661 @ 0.417827 items / sec XY3P: 376 / 2211 @ c=26, r=9, X130.560 Y73.425 Z-15.170 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c026_r009.jpg 376 / 2211, ETA: 01:13:11.7996 @ 0.417824 items / sec XY3P: 377 / 2211 @ c=25, r=9, X130.388 Y73.429 Z-15.171 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c025_r009.jpg 377 / 2211, ETA: 01:13:09.4131 @ 0.417824 items / sec XY3P: 378 / 2211 @ c=24, r=9, X130.215 Y73.433 Z-15.171 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c024_r009.jpg 378 / 2211, ETA: 01:13:07.0450 @ 0.417821 items / sec XY3P: 379 / 2211 @ c=23, r=9, X130.042 Y73.437 Z-15.172 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c023_r009.jpg 379 / 2211, ETA: 01:13:04.6678 @ 0.417820 items / sec XY3P: 380 / 2211 @ c=22, r=9, X129.870 Y73.441 Z-15.173 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c022_r009.jpg 380 / 2211, ETA: 01:13:02.2917 @ 0.417818 items / sec XY3P: 381 / 2211 @ c=21, r=9, X129.697 Y73.445 Z-15.173 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c021_r009.jpg 381 / 2211, ETA: 01:12:59.9277 @ 0.417815 items / sec XY3P: 382 / 2211 @ c=20, r=9, X129.524 Y73.449 Z-15.174 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c020_r009.jpg 382 / 2211, ETA: 01:12:57.5426 @ 0.417814 items / sec XY3P: 383 / 2211 @ c=19, r=9, X129.351 Y73.453 Z-15.174 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c019_r009.jpg 383 / 2211, ETA: 01:12:55.1646 @ 0.417813 items / sec XY3P: 384 / 2211 @ c=18, r=9, X129.179 Y73.457 Z-15.175 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c018_r009.jpg 384 / 2211, ETA: 01:12:52.7889 @ 0.417811 items / sec XY3P: 385 / 2211 @ c=17, r=9, X129.006 Y73.460 Z-15.175 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c017_r009.jpg 385 / 2211, ETA: 01:12:49.4686 @ 0.417900 items / sec XY3P: 386 / 2211 @ c=16, r=9, X128.833 Y73.464 Z-15.176 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c016_r009.jpg 386 / 2211, ETA: 01:12:47.0944 @ 0.417898 items / sec XY3P: 387 / 2211 @ c=15, r=9, X128.660 Y73.468 Z-15.177 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c015_r009.jpg 387 / 2211, ETA: 01:12:44.7238 @ 0.417896 items / sec XY3P: 388 / 2211 @ c=14, r=9, X128.488 Y73.472 Z-15.177 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c014_r009.jpg 388 / 2211, ETA: 01:12:42.3520 @ 0.417894 items / sec XY3P: 389 / 2211 @ c=13, r=9, X128.315 Y73.476 Z-15.178 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c013_r009.jpg 389 / 2211, ETA: 01:12:39.9886 @ 0.417891 items / sec XY3P: 390 / 2211 @ c=12, r=9, X128.142 Y73.480 Z-15.178 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c012_r009.jpg 390 / 2211, ETA: 01:12:37.6063 @ 0.417890 items / sec XY3P: 391 / 2211 @ c=11, r=9, X127.969 Y73.484 Z-15.179 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c011_r009.jpg 391 / 2211, ETA: 01:12:35.2330 @ 0.417888 items / sec XY3P: 392 / 2211 @ c=10, r=9, X127.797 Y73.488 Z-15.180 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c010_r009.jpg 392 / 2211, ETA: 01:12:32.8624 @ 0.417886 items / sec XY3P: 393 / 2211 @ c=9, r=9, X127.624 Y73.492 Z-15.180 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c009_r009.jpg 393 / 2211, ETA: 01:12:30.4824 @ 0.417885 items / sec XY3P: 394 / 2211 @ c=8, r=9, X127.451 Y73.496 Z-15.181 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c008_r009.jpg 394 / 2211, ETA: 01:12:28.1219 @ 0.417882 items / sec XY3P: 395 / 2211 @ c=7, r=9, X127.278 Y73.500 Z-15.181 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c007_r009.jpg 395 / 2211, ETA: 01:12:25.7405 @ 0.417880 items / sec XY3P: 396 / 2211 @ c=6, r=9, X127.106 Y73.504 Z-15.182 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c006_r009.jpg 396 / 2211, ETA: 01:12:23.3647 @ 0.417879 items / sec XY3P: 397 / 2211 @ c=5, r=9, X126.933 Y73.508 Z-15.183 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c005_r009.jpg 397 / 2211, ETA: 01:12:20.9938 @ 0.417877 items / sec XY3P: 398 / 2211 @ c=4, r=9, X126.760 Y73.512 Z-15.183 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c004_r009.jpg 398 / 2211, ETA: 01:12:18.6194 @ 0.417875 items / sec XY3P: 399 / 2211 @ c=3, r=9, X126.587 Y73.516 Z-15.184 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c003_r009.jpg 399 / 2211, ETA: 01:12:16.2528 @ 0.417872 items / sec XY3P: 400 / 2211 @ c=2, r=9, X126.415 Y73.520 Z-15.184 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c002_r009.jpg 400 / 2211, ETA: 01:12:13.8677 @ 0.417872 items / sec XY3P: 401 / 2211 @ c=1, r=9, X126.242 Y73.524 Z-15.185 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c001_r009.jpg 401 / 2211, ETA: 01:12:11.4952 @ 0.417870 items / sec XY3P: 402 / 2211 @ c=0, r=9, X126.069 Y73.528 Z-15.185 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c000_r009.jpg 402 / 2211, ETA: 01:12:09.1228 @ 0.417868 items / sec XY3P: 403 / 2211 @ c=0, r=8, X126.069 Y73.689 Z-15.182 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c000_r008.jpg 403 / 2211, ETA: 01:12:06.7468 @ 0.417866 items / sec XY3P: 404 / 2211 @ c=1, r=8, X126.242 Y73.685 Z-15.181 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c001_r008.jpg 404 / 2211, ETA: 01:12:04.3811 @ 0.417863 items / sec XY3P: 405 / 2211 @ c=2, r=8, X126.415 Y73.681 Z-15.181 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c002_r008.jpg 405 / 2211, ETA: 01:12:01.9975 @ 0.417862 items / sec XY3P: 406 / 2211 @ c=3, r=8, X126.587 Y73.677 Z-15.180 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c003_r008.jpg 406 / 2211, ETA: 01:11:59.6197 @ 0.417861 items / sec XY3P: 407 / 2211 @ c=4, r=8, X126.760 Y73.673 Z-15.180 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c004_r008.jpg 407 / 2211, ETA: 01:11:57.2460 @ 0.417859 items / sec XY3P: 408 / 2211 @ c=5, r=8, X126.933 Y73.669 Z-15.179 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c005_r008.jpg 408 / 2211, ETA: 01:11:54.8742 @ 0.417857 items / sec XY3P: 409 / 2211 @ c=6, r=8, X127.106 Y73.665 Z-15.178 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c006_r008.jpg 409 / 2211, ETA: 01:11:52.5093 @ 0.417854 items / sec XY3P: 410 / 2211 @ c=7, r=8, X127.278 Y73.661 Z-15.178 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c007_r008.jpg 410 / 2211, ETA: 01:11:50.1247 @ 0.417853 items / sec XY3P: 411 / 2211 @ c=8, r=8, X127.451 Y73.657 Z-15.177 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c008_r008.jpg 411 / 2211, ETA: 01:11:47.7728 @ 0.417849 items / sec XY3P: 412 / 2211 @ c=9, r=8, X127.624 Y73.653 Z-15.177 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c009_r008.jpg 412 / 2211, ETA: 01:11:45.3726 @ 0.417850 items / sec XY3P: 413 / 2211 @ c=10, r=8, X127.797 Y73.649 Z-15.176 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c010_r008.jpg 413 / 2211, ETA: 01:11:42.9958 @ 0.417848 items / sec XY3P: 414 / 2211 @ c=11, r=8, X127.969 Y73.645 Z-15.176 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c011_r008.jpg 414 / 2211, ETA: 01:11:40.6286 @ 0.417846 items / sec XY3P: 415 / 2211 @ c=12, r=8, X128.142 Y73.641 Z-15.175 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c012_r008.jpg 415 / 2211, ETA: 01:11:38.2464 @ 0.417845 items / sec XY3P: 416 / 2211 @ c=13, r=8, X128.315 Y73.637 Z-15.174 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c013_r008.jpg 416 / 2211, ETA: 01:11:35.8705 @ 0.417843 items / sec XY3P: 417 / 2211 @ c=14, r=8, X128.488 Y73.633 Z-15.174 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c014_r008.jpg 417 / 2211, ETA: 01:11:33.4948 @ 0.417841 items / sec XY3P: 418 / 2211 @ c=15, r=8, X128.660 Y73.629 Z-15.173 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c015_r008.jpg 418 / 2211, ETA: 01:11:30.2636 @ 0.417923 items / sec XY3P: 419 / 2211 @ c=16, r=8, X128.833 Y73.625 Z-15.173 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c016_r008.jpg 419 / 2211, ETA: 01:11:27.0335 @ 0.418005 items / sec XY3P: 420 / 2211 @ c=17, r=8, X129.006 Y73.621 Z-15.172 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c017_r008.jpg 420 / 2211, ETA: 01:11:24.6614 @ 0.418003 items / sec XY3P: 421 / 2211 @ c=18, r=8, X129.179 Y73.617 Z-15.171 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c018_r008.jpg 421 / 2211, ETA: 01:11:22.2900 @ 0.418001 items / sec XY3P: 422 / 2211 @ c=19, r=8, X129.351 Y73.613 Z-15.171 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c019_r008.jpg 422 / 2211, ETA: 01:11:19.9440 @ 0.417996 items / sec XY3P: 423 / 2211 @ c=20, r=8, X129.524 Y73.609 Z-15.170 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c020_r008.jpg 423 / 2211, ETA: 01:11:17.5567 @ 0.417996 items / sec XY3P: 424 / 2211 @ c=21, r=8, X129.697 Y73.606 Z-15.170 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c021_r008.jpg 424 / 2211, ETA: 01:11:15.1769 @ 0.417994 items / sec XY3P: 425 / 2211 @ c=22, r=8, X129.870 Y73.602 Z-15.169 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c022_r008.jpg 425 / 2211, ETA: 01:11:12.8009 @ 0.417993 items / sec XY3P: 426 / 2211 @ c=23, r=8, X130.042 Y73.598 Z-15.168 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c023_r008.jpg 426 / 2211, ETA: 01:11:10.4320 @ 0.417990 items / sec XY3P: 427 / 2211 @ c=24, r=8, X130.215 Y73.594 Z-15.168 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c024_r008.jpg 427 / 2211, ETA: 01:11:08.0596 @ 0.417989 items / sec XY3P: 428 / 2211 @ c=25, r=8, X130.388 Y73.590 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c025_r008.jpg 428 / 2211, ETA: 01:11:05.6985 @ 0.417985 items / sec XY3P: 429 / 2211 @ c=26, r=8, X130.560 Y73.586 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c026_r008.jpg 429 / 2211, ETA: 01:11:03.3177 @ 0.417984 items / sec XY3P: 430 / 2211 @ c=27, r=8, X130.733 Y73.582 Z-15.166 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c027_r008.jpg 430 / 2211, ETA: 01:11:00.9444 @ 0.417982 items / sec XY3P: 431 / 2211 @ c=28, r=8, X130.906 Y73.578 Z-15.165 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c028_r008.jpg 431 / 2211, ETA: 01:10:58.5743 @ 0.417980 items / sec XY3P: 432 / 2211 @ c=29, r=8, X131.079 Y73.574 Z-15.165 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c029_r008.jpg 432 / 2211, ETA: 01:10:56.1969 @ 0.417979 items / sec XY3P: 433 / 2211 @ c=30, r=8, X131.251 Y73.570 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c030_r008.jpg 433 / 2211, ETA: 01:10:53.8428 @ 0.417975 items / sec XY3P: 434 / 2211 @ c=31, r=8, X131.424 Y73.566 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c031_r008.jpg 434 / 2211, ETA: 01:10:51.4768 @ 0.417972 items / sec XY3P: 435 / 2211 @ c=32, r=8, X131.597 Y73.562 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c032_r008.jpg 435 / 2211, ETA: 01:10:49.0797 @ 0.417973 items / sec XY3P: 436 / 2211 @ c=33, r=8, X131.770 Y73.558 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c033_r008.jpg 436 / 2211, ETA: 01:10:46.7058 @ 0.417971 items / sec XY3P: 437 / 2211 @ c=34, r=8, X131.942 Y73.554 Z-15.162 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c034_r008.jpg 437 / 2211, ETA: 01:10:44.3333 @ 0.417969 items / sec XY3P: 438 / 2211 @ c=35, r=8, X132.115 Y73.550 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c035_r008.jpg 438 / 2211, ETA: 01:10:41.9603 @ 0.417967 items / sec XY3P: 439 / 2211 @ c=36, r=8, X132.288 Y73.546 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c036_r008.jpg 439 / 2211, ETA: 01:10:39.5897 @ 0.417965 items / sec XY3P: 440 / 2211 @ c=37, r=8, X132.461 Y73.542 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c037_r008.jpg 440 / 2211, ETA: 01:10:37.2135 @ 0.417963 items / sec XY3P: 441 / 2211 @ c=38, r=8, X132.633 Y73.538 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c038_r008.jpg 441 / 2211, ETA: 01:10:34.8393 @ 0.417962 items / sec XY3P: 442 / 2211 @ c=39, r=8, X132.806 Y73.534 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c039_r008.jpg 442 / 2211, ETA: 01:10:32.4655 @ 0.417960 items / sec XY3P: 443 / 2211 @ c=40, r=8, X132.979 Y73.530 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c040_r008.jpg 443 / 2211, ETA: 01:10:30.0913 @ 0.417958 items / sec XY3P: 444 / 2211 @ c=41, r=8, X133.152 Y73.526 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c041_r008.jpg 444 / 2211, ETA: 01:10:27.7237 @ 0.417955 items / sec XY3P: 445 / 2211 @ c=42, r=8, X133.325 Y73.522 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c042_r008.jpg 445 / 2211, ETA: 01:10:25.3435 @ 0.417954 items / sec XY3P: 446 / 2211 @ c=43, r=8, X133.497 Y73.518 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c043_r008.jpg 446 / 2211, ETA: 01:10:22.9654 @ 0.417953 items / sec XY3P: 447 / 2211 @ c=44, r=8, X133.670 Y73.514 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c044_r008.jpg 447 / 2211, ETA: 01:10:20.5956 @ 0.417950 items / sec XY3P: 448 / 2211 @ c=45, r=8, X133.843 Y73.510 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c045_r008.jpg 448 / 2211, ETA: 01:10:18.2189 @ 0.417949 items / sec XY3P: 449 / 2211 @ c=46, r=8, X134.016 Y73.506 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c046_r008.jpg 449 / 2211, ETA: 01:10:15.8527 @ 0.417946 items / sec XY3P: 450 / 2211 @ c=47, r=8, X134.188 Y73.502 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c047_r008.jpg 450 / 2211, ETA: 01:10:13.4725 @ 0.417945 items / sec XY3P: 451 / 2211 @ c=48, r=8, X134.361 Y73.498 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c048_r008.jpg 451 / 2211, ETA: 01:10:11.0964 @ 0.417943 items / sec XY3P: 452 / 2211 @ c=49, r=8, X134.534 Y73.495 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c049_r008.jpg 452 / 2211, ETA: 01:10:08.7251 @ 0.417941 items / sec XY3P: 453 / 2211 @ c=50, r=8, X134.707 Y73.491 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c050_r008.jpg 453 / 2211, ETA: 01:10:06.3453 @ 0.417940 items / sec XY3P: 454 / 2211 @ c=51, r=8, X134.879 Y73.487 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c051_r008.jpg 454 / 2211, ETA: 01:10:03.9797 @ 0.417937 items / sec XY3P: 455 / 2211 @ c=52, r=8, X135.052 Y73.483 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c052_r008.jpg 455 / 2211, ETA: 01:10:00.8496 @ 0.418011 items / sec XY3P: 456 / 2211 @ c=53, r=8, X135.225 Y73.479 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c053_r008.jpg 456 / 2211, ETA: 01:09:58.4534 @ 0.418011 items / sec XY3P: 457 / 2211 @ c=54, r=8, X135.398 Y73.475 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c054_r008.jpg 457 / 2211, ETA: 01:09:56.0878 @ 0.418008 items / sec XY3P: 458 / 2211 @ c=55, r=8, X135.570 Y73.471 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c055_r008.jpg 458 / 2211, ETA: 01:09:53.7061 @ 0.418007 items / sec XY3P: 459 / 2211 @ c=56, r=8, X135.743 Y73.467 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c056_r008.jpg 459 / 2211, ETA: 01:09:51.3339 @ 0.418005 items / sec XY3P: 460 / 2211 @ c=57, r=8, X135.916 Y73.463 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c057_r008.jpg 460 / 2211, ETA: 01:09:48.9603 @ 0.418003 items / sec XY3P: 461 / 2211 @ c=58, r=8, X136.089 Y73.459 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c058_r008.jpg 461 / 2211, ETA: 01:09:46.5872 @ 0.418002 items / sec XY3P: 462 / 2211 @ c=59, r=8, X136.261 Y73.455 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c059_r008.jpg 462 / 2211, ETA: 01:09:44.2198 @ 0.417999 items / sec XY3P: 463 / 2211 @ c=60, r=8, X136.434 Y73.451 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c060_r008.jpg 463 / 2211, ETA: 01:09:41.8385 @ 0.417998 items / sec XY3P: 464 / 2211 @ c=61, r=8, X136.607 Y73.447 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c061_r008.jpg 464 / 2211, ETA: 01:09:39.4643 @ 0.417996 items / sec XY3P: 465 / 2211 @ c=62, r=8, X136.780 Y73.443 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c062_r008.jpg 465 / 2211, ETA: 01:09:37.0936 @ 0.417994 items / sec XY3P: 466 / 2211 @ c=63, r=8, X136.952 Y73.439 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c063_r008.jpg 466 / 2211, ETA: 01:09:34.7175 @ 0.417992 items / sec XY3P: 467 / 2211 @ c=64, r=8, X137.125 Y73.435 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c064_r008.jpg 467 / 2211, ETA: 01:09:32.3507 @ 0.417990 items / sec XY3P: 468 / 2211 @ c=65, r=8, X137.298 Y73.431 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c065_r008.jpg 468 / 2211, ETA: 01:09:29.9677 @ 0.417989 items / sec XY3P: 469 / 2211 @ c=66, r=8, X137.471 Y73.427 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c066_r008.jpg 469 / 2211, ETA: 01:09:27.6156 @ 0.417985 items / sec XY3P: 470 / 2211 @ c=67, r=8, X137.643 Y73.423 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c067_r008.jpg 470 / 2211, ETA: 01:09:25.2191 @ 0.417985 items / sec XY3P: 471 / 2211 @ c=68, r=8, X137.816 Y73.419 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c068_r008.jpg 471 / 2211, ETA: 01:09:22.8456 @ 0.417983 items / sec XY3P: 472 / 2211 @ c=69, r=8, X137.989 Y73.415 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c069_r008.jpg 472 / 2211, ETA: 01:09:20.4779 @ 0.417981 items / sec XY3P: 473 / 2211 @ c=70, r=8, X138.161 Y73.411 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c070_r008.jpg 473 / 2211, ETA: 01:09:18.0946 @ 0.417980 items / sec XY3P: 474 / 2211 @ c=71, r=8, X138.334 Y73.407 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c071_r008.jpg 474 / 2211, ETA: 01:09:14.9881 @ 0.418052 items / sec XY3P: 475 / 2211 @ c=72, r=8, X138.507 Y73.403 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c072_r008.jpg 475 / 2211, ETA: 01:09:11.9082 @ 0.418121 items / sec XY3P: 476 / 2211 @ c=73, r=8, X138.680 Y73.399 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c073_r008.jpg 476 / 2211, ETA: 01:09:09.5224 @ 0.418120 items / sec XY3P: 477 / 2211 @ c=74, r=8, X138.852 Y73.395 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c074_r008.jpg 477 / 2211, ETA: 01:09:07.1434 @ 0.418119 items / sec XY3P: 478 / 2211 @ c=75, r=8, X139.025 Y73.391 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c075_r008.jpg 478 / 2211, ETA: 01:09:04.7724 @ 0.418117 items / sec XY3P: 479 / 2211 @ c=76, r=8, X139.198 Y73.387 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c076_r008.jpg 479 / 2211, ETA: 01:09:02.4015 @ 0.418115 items / sec XY3P: 480 / 2211 @ c=77, r=8, X139.371 Y73.383 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c077_r008.jpg 480 / 2211, ETA: 01:09:00.0505 @ 0.418111 items / sec XY3P: 481 / 2211 @ c=78, r=8, X139.543 Y73.380 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c078_r008.jpg 481 / 2211, ETA: 01:08:57.6658 @ 0.418110 items / sec XY3P: 482 / 2211 @ c=79, r=8, X139.716 Y73.376 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c079_r008.jpg 482 / 2211, ETA: 01:08:55.2851 @ 0.418109 items / sec XY3P: 483 / 2211 @ c=80, r=8, X139.889 Y73.372 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c080_r008.jpg 483 / 2211, ETA: 01:08:52.9130 @ 0.418107 items / sec XY3P: 484 / 2211 @ c=81, r=8, X140.062 Y73.368 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c081_r008.jpg 484 / 2211, ETA: 01:08:50.5426 @ 0.418105 items / sec XY3P: 485 / 2211 @ c=82, r=8, X140.234 Y73.364 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c082_r008.jpg 485 / 2211, ETA: 01:08:48.1692 @ 0.418103 items / sec XY3P: 486 / 2211 @ c=83, r=8, X140.407 Y73.360 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c083_r008.jpg 486 / 2211, ETA: 01:08:45.8034 @ 0.418100 items / sec XY3P: 487 / 2211 @ c=84, r=8, X140.580 Y73.356 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c084_r008.jpg 487 / 2211, ETA: 01:08:43.4464 @ 0.418097 items / sec XY3P: 488 / 2211 @ c=85, r=8, X140.753 Y73.352 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c085_r008.jpg 488 / 2211, ETA: 01:08:41.0521 @ 0.418097 items / sec XY3P: 489 / 2211 @ c=86, r=8, X140.925 Y73.348 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c086_r008.jpg 489 / 2211, ETA: 01:08:38.7052 @ 0.418093 items / sec XY3P: 490 / 2211 @ c=87, r=8, X141.098 Y73.344 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c087_r008.jpg 490 / 2211, ETA: 01:08:36.3088 @ 0.418093 items / sec XY3P: 491 / 2211 @ c=88, r=8, X141.271 Y73.340 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c088_r008.jpg 491 / 2211, ETA: 01:08:33.9408 @ 0.418091 items / sec XY3P: 492 / 2211 @ c=89, r=8, X141.444 Y73.336 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c089_r008.jpg 492 / 2211, ETA: 01:08:31.5642 @ 0.418089 items / sec XY3P: 493 / 2211 @ c=90, r=8, X141.617 Y73.332 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c090_r008.jpg 493 / 2211, ETA: 01:08:28.4918 @ 0.418158 items / sec XY3P: 494 / 2211 @ c=91, r=8, X141.789 Y73.328 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c091_r008.jpg 494 / 2211, ETA: 01:08:26.1238 @ 0.418156 items / sec XY3P: 495 / 2211 @ c=92, r=8, X141.962 Y73.324 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c092_r008.jpg 495 / 2211, ETA: 01:08:23.7515 @ 0.418154 items / sec XY3P: 496 / 2211 @ c=93, r=8, X142.135 Y73.320 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c093_r008.jpg 496 / 2211, ETA: 01:08:21.4010 @ 0.418150 items / sec XY3P: 497 / 2211 @ c=94, r=8, X142.308 Y73.316 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c094_r008.jpg 497 / 2211, ETA: 01:08:19.0147 @ 0.418149 items / sec XY3P: 498 / 2211 @ c=95, r=8, X142.480 Y73.312 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c095_r008.jpg 498 / 2211, ETA: 01:08:16.6372 @ 0.418148 items / sec XY3P: 499 / 2211 @ c=96, r=8, X142.653 Y73.308 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c096_r008.jpg 499 / 2211, ETA: 01:08:14.2653 @ 0.418146 items / sec XY3P: 500 / 2211 @ c=97, r=8, X142.826 Y73.304 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c097_r008.jpg 500 / 2211, ETA: 01:08:11.8925 @ 0.418144 items / sec XY3P: 501 / 2211 @ c=98, r=8, X142.999 Y73.300 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c098_r008.jpg 501 / 2211, ETA: 01:08:09.5214 @ 0.418142 items / sec XY3P: 502 / 2211 @ c=99, r=8, X143.171 Y73.296 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c099_r008.jpg 502 / 2211, ETA: 01:08:07.1549 @ 0.418139 items / sec XY3P: 503 / 2211 @ c=100, r=8, X143.344 Y73.292 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c100_r008.jpg 503 / 2211, ETA: 01:08:05.4750 @ 0.418066 items / sec XY3P: 504 / 2211 @ c=101, r=8, X143.517 Y73.288 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c101_r008.jpg 504 / 2211, ETA: 01:08:03.0822 @ 0.418067 items / sec XY3P: 505 / 2211 @ c=102, r=8, X143.690 Y73.284 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c102_r008.jpg 505 / 2211, ETA: 01:08:00.7088 @ 0.418065 items / sec XY3P: 506 / 2211 @ c=103, r=8, X143.862 Y73.280 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c103_r008.jpg 506 / 2211, ETA: 01:07:58.3393 @ 0.418062 items / sec XY3P: 507 / 2211 @ c=104, r=8, X144.035 Y73.276 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c104_r008.jpg 507 / 2211, ETA: 01:07:55.9742 @ 0.418060 items / sec XY3P: 508 / 2211 @ c=105, r=8, X144.208 Y73.272 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c105_r008.jpg 508 / 2211, ETA: 01:07:53.6142 @ 0.418056 items / sec XY3P: 509 / 2211 @ c=106, r=8, X144.381 Y73.269 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c106_r008.jpg 509 / 2211, ETA: 01:07:51.2085 @ 0.418058 items / sec XY3P: 510 / 2211 @ c=107, r=8, X144.553 Y73.265 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c107_r008.jpg 510 / 2211, ETA: 01:07:48.8354 @ 0.418056 items / sec XY3P: 511 / 2211 @ c=108, r=8, X144.726 Y73.261 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c108_r008.jpg 511 / 2211, ETA: 01:07:46.4658 @ 0.418053 items / sec XY3P: 512 / 2211 @ c=109, r=8, X144.899 Y73.257 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c109_r008.jpg 512 / 2211, ETA: 01:07:44.0909 @ 0.418052 items / sec XY3P: 513 / 2211 @ c=110, r=8, X145.072 Y73.253 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c110_r008.jpg 513 / 2211, ETA: 01:07:41.7106 @ 0.418050 items / sec XY3P: 514 / 2211 @ c=111, r=8, X145.244 Y73.249 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c111_r008.jpg 514 / 2211, ETA: 01:07:39.3373 @ 0.418049 items / sec XY3P: 515 / 2211 @ c=112, r=8, X145.417 Y73.245 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c112_r008.jpg 515 / 2211, ETA: 01:07:36.9808 @ 0.418045 items / sec XY3P: 516 / 2211 @ c=113, r=8, X145.590 Y73.241 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c113_r008.jpg 516 / 2211, ETA: 01:07:34.5855 @ 0.418045 items / sec XY3P: 517 / 2211 @ c=114, r=8, X145.762 Y73.237 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c114_r008.jpg 517 / 2211, ETA: 01:07:32.2164 @ 0.418043 items / sec XY3P: 518 / 2211 @ c=115, r=8, X145.935 Y73.233 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c115_r008.jpg 518 / 2211, ETA: 01:07:29.8367 @ 0.418042 items / sec XY3P: 519 / 2211 @ c=116, r=8, X146.108 Y73.229 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c116_r008.jpg 519 / 2211, ETA: 01:07:27.4614 @ 0.418040 items / sec XY3P: 520 / 2211 @ c=117, r=8, X146.281 Y73.225 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c117_r008.jpg 520 / 2211, ETA: 01:07:25.0874 @ 0.418038 items / sec XY3P: 521 / 2211 @ c=118, r=8, X146.453 Y73.221 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c118_r008.jpg 521 / 2211, ETA: 01:07:22.7108 @ 0.418036 items / sec XY3P: 522 / 2211 @ c=119, r=8, X146.626 Y73.217 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c119_r008.jpg 522 / 2211, ETA: 01:07:20.3601 @ 0.418032 items / sec XY3P: 523 / 2211 @ c=120, r=8, X146.799 Y73.213 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c120_r008.jpg 523 / 2211, ETA: 01:07:17.9585 @ 0.418033 items / sec XY3P: 524 / 2211 @ c=121, r=8, X146.972 Y73.209 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c121_r008.jpg 524 / 2211, ETA: 01:07:15.5835 @ 0.418031 items / sec XY3P: 525 / 2211 @ c=122, r=8, X147.144 Y73.205 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c122_r008.jpg 525 / 2211, ETA: 01:07:13.2071 @ 0.418030 items / sec XY3P: 526 / 2211 @ c=123, r=8, X147.317 Y73.201 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c123_r008.jpg 526 / 2211, ETA: 01:07:10.8309 @ 0.418028 items / sec XY3P: 527 / 2211 @ c=124, r=8, X147.490 Y73.197 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c124_r008.jpg 527 / 2211, ETA: 01:07:08.4601 @ 0.418026 items / sec XY3P: 528 / 2211 @ c=125, r=8, X147.663 Y73.193 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c125_r008.jpg 528 / 2211, ETA: 01:07:06.0790 @ 0.418025 items / sec XY3P: 529 / 2211 @ c=126, r=8, X147.835 Y73.189 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c126_r008.jpg 529 / 2211, ETA: 01:07:03.7028 @ 0.418023 items / sec XY3P: 530 / 2211 @ c=127, r=8, X148.008 Y73.185 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c127_r008.jpg 530 / 2211, ETA: 01:07:00.6995 @ 0.418086 items / sec XY3P: 531 / 2211 @ c=128, r=8, X148.181 Y73.181 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c128_r008.jpg 531 / 2211, ETA: 01:06:57.6894 @ 0.418151 items / sec XY3P: 532 / 2211 @ c=129, r=8, X148.354 Y73.177 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c129_r008.jpg 532 / 2211, ETA: 01:06:55.3132 @ 0.418149 items / sec XY3P: 533 / 2211 @ c=130, r=8, X148.526 Y73.173 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c130_r008.jpg 533 / 2211, ETA: 01:06:52.9392 @ 0.418147 items / sec XY3P: 534 / 2211 @ c=131, r=8, X148.699 Y73.169 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c131_r008.jpg 534 / 2211, ETA: 01:06:50.5660 @ 0.418145 items / sec XY3P: 535 / 2211 @ c=132, r=8, X148.872 Y73.165 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c132_r008.jpg 535 / 2211, ETA: 01:06:48.1929 @ 0.418144 items / sec XY3P: 536 / 2211 @ c=133, r=8, X149.045 Y73.161 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c133_r008.jpg 536 / 2211, ETA: 01:06:45.8435 @ 0.418139 items / sec XY3P: 537 / 2211 @ c=134, r=8, X149.218 Y73.157 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c134_r008.jpg 537 / 2211, ETA: 01:06:43.4636 @ 0.418138 items / sec XY3P: 538 / 2211 @ c=135, r=8, X149.390 Y73.154 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c135_r008.jpg 538 / 2211, ETA: 01:06:41.0734 @ 0.418138 items / sec XY3P: 539 / 2211 @ c=136, r=8, X149.563 Y73.150 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c136_r008.jpg 539 / 2211, ETA: 01:06:38.6975 @ 0.418136 items / sec XY3P: 540 / 2211 @ c=137, r=8, X149.736 Y73.146 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c137_r008.jpg 540 / 2211, ETA: 01:06:36.3248 @ 0.418134 items / sec XY3P: 541 / 2211 @ c=138, r=8, X149.909 Y73.142 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c138_r008.jpg 541 / 2211, ETA: 01:06:33.9559 @ 0.418132 items / sec XY3P: 542 / 2211 @ c=139, r=8, X150.081 Y73.138 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c139_r008.jpg 542 / 2211, ETA: 01:06:31.5745 @ 0.418131 items / sec XY3P: 543 / 2211 @ c=140, r=8, X150.254 Y73.134 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c140_r008.jpg 543 / 2211, ETA: 01:06:29.2013 @ 0.418129 items / sec XY3P: 544 / 2211 @ c=141, r=8, X150.427 Y73.130 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c141_r008.jpg 544 / 2211, ETA: 01:06:26.8294 @ 0.418127 items / sec XY3P: 545 / 2211 @ c=142, r=8, X150.600 Y73.126 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c142_r008.jpg 545 / 2211, ETA: 01:06:24.4564 @ 0.418125 items / sec XY3P: 546 / 2211 @ c=143, r=8, X150.772 Y73.122 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c143_r008.jpg 546 / 2211, ETA: 01:06:22.0817 @ 0.418123 items / sec XY3P: 547 / 2211 @ c=144, r=8, X150.945 Y73.118 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c144_r008.jpg 547 / 2211, ETA: 01:06:19.7021 @ 0.418122 items / sec XY3P: 548 / 2211 @ c=145, r=8, X151.118 Y73.114 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c145_r008.jpg 548 / 2211, ETA: 01:06:16.7235 @ 0.418183 items / sec XY3P: 549 / 2211 @ c=146, r=8, X151.291 Y73.110 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c146_r008.jpg 549 / 2211, ETA: 01:06:13.7477 @ 0.418245 items / sec XY3P: 550 / 2211 @ c=147, r=8, X151.463 Y73.106 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c147_r008.jpg 550 / 2211, ETA: 01:06:11.3797 @ 0.418243 items / sec XY3P: 551 / 2211 @ c=148, r=8, X151.636 Y73.102 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c148_r008.jpg 551 / 2211, ETA: 01:06:09.0009 @ 0.418241 items / sec XY3P: 552 / 2211 @ c=149, r=8, X151.809 Y73.098 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c149_r008.jpg 552 / 2211, ETA: 01:06:06.6289 @ 0.418239 items / sec XY3P: 553 / 2211 @ c=150, r=8, X151.982 Y73.094 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c150_r008.jpg 553 / 2211, ETA: 01:06:04.2567 @ 0.418237 items / sec XY3P: 554 / 2211 @ c=151, r=8, X152.154 Y73.090 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c151_r008.jpg 554 / 2211, ETA: 01:06:01.8853 @ 0.418235 items / sec XY3P: 555 / 2211 @ c=152, r=8, X152.327 Y73.086 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c152_r008.jpg 555 / 2211, ETA: 01:05:59.5173 @ 0.418233 items / sec XY3P: 556 / 2211 @ c=153, r=8, X152.500 Y73.082 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c153_r008.jpg 556 / 2211, ETA: 01:05:57.1422 @ 0.418231 items / sec XY3P: 557 / 2211 @ c=154, r=8, X152.673 Y73.078 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c154_r008.jpg 557 / 2211, ETA: 01:05:54.7674 @ 0.418229 items / sec XY3P: 558 / 2211 @ c=155, r=8, X152.845 Y73.074 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c155_r008.jpg 558 / 2211, ETA: 01:05:52.3924 @ 0.418228 items / sec XY3P: 559 / 2211 @ c=156, r=8, X153.018 Y73.070 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c156_r008.jpg 559 / 2211, ETA: 01:05:50.0211 @ 0.418226 items / sec XY3P: 560 / 2211 @ c=157, r=8, X153.191 Y73.066 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c157_r008.jpg 560 / 2211, ETA: 01:05:47.6559 @ 0.418223 items / sec XY3P: 561 / 2211 @ c=158, r=8, X153.363 Y73.062 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c158_r008.jpg 561 / 2211, ETA: 01:05:45.2781 @ 0.418221 items / sec XY3P: 562 / 2211 @ c=159, r=8, X153.536 Y73.058 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c159_r008.jpg 562 / 2211, ETA: 01:05:42.9032 @ 0.418220 items / sec XY3P: 563 / 2211 @ c=160, r=8, X153.709 Y73.054 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c160_r008.jpg 563 / 2211, ETA: 01:05:40.5289 @ 0.418218 items / sec XY3P: 564 / 2211 @ c=161, r=8, X153.882 Y73.050 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c161_r008.jpg 564 / 2211, ETA: 01:05:38.1585 @ 0.418216 items / sec XY3P: 565 / 2211 @ c=162, r=8, X154.054 Y73.046 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c162_r008.jpg 565 / 2211, ETA: 01:05:35.7905 @ 0.418213 items / sec XY3P: 566 / 2211 @ c=163, r=8, X154.227 Y73.043 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c163_r008.jpg 566 / 2211, ETA: 01:05:33.4111 @ 0.418212 items / sec XY3P: 567 / 2211 @ c=164, r=8, X154.400 Y73.039 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c164_r008.jpg 567 / 2211, ETA: 01:05:30.4593 @ 0.418272 items / sec XY3P: 568 / 2211 @ c=165, r=8, X154.573 Y73.035 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c165_r008.jpg 568 / 2211, ETA: 01:05:27.5088 @ 0.418331 items / sec XY3P: 569 / 2211 @ c=166, r=8, X154.745 Y73.031 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c166_r008.jpg 569 / 2211, ETA: 01:05:25.1417 @ 0.418329 items / sec XY3P: 570 / 2211 @ c=167, r=8, X154.918 Y73.027 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c167_r008.jpg 570 / 2211, ETA: 01:05:22.7680 @ 0.418327 items / sec XY3P: 571 / 2211 @ c=168, r=8, X155.091 Y73.023 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c168_r008.jpg 571 / 2211, ETA: 01:05:20.3952 @ 0.418325 items / sec XY3P: 572 / 2211 @ c=169, r=8, X155.264 Y73.019 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c169_r008.jpg 572 / 2211, ETA: 01:05:18.0281 @ 0.418323 items / sec XY3P: 573 / 2211 @ c=170, r=8, X155.436 Y73.015 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c170_r008.jpg 573 / 2211, ETA: 01:05:15.6543 @ 0.418321 items / sec XY3P: 574 / 2211 @ c=171, r=8, X155.609 Y73.011 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c171_r008.jpg 574 / 2211, ETA: 01:05:13.2863 @ 0.418318 items / sec XY3P: 575 / 2211 @ c=172, r=8, X155.782 Y73.007 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c172_r008.jpg 575 / 2211, ETA: 01:05:10.9114 @ 0.418317 items / sec XY3P: 576 / 2211 @ c=173, r=8, X155.955 Y73.003 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c173_r008.jpg 576 / 2211, ETA: 01:05:08.5421 @ 0.418315 items / sec XY3P: 577 / 2211 @ c=174, r=8, X156.127 Y72.999 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c174_r008.jpg 577 / 2211, ETA: 01:05:06.1698 @ 0.418313 items / sec XY3P: 578 / 2211 @ c=175, r=8, X156.300 Y72.995 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c175_r008.jpg 578 / 2211, ETA: 01:05:03.7991 @ 0.418310 items / sec XY3P: 579 / 2211 @ c=176, r=8, X156.473 Y72.991 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c176_r008.jpg 579 / 2211, ETA: 01:05:01.4314 @ 0.418308 items / sec XY3P: 580 / 2211 @ c=177, r=8, X156.646 Y72.987 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c177_r008.jpg 580 / 2211, ETA: 01:04:59.0576 @ 0.418306 items / sec XY3P: 581 / 2211 @ c=178, r=8, X156.819 Y72.983 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c178_r008.jpg 581 / 2211, ETA: 01:04:56.6919 @ 0.418304 items / sec XY3P: 582 / 2211 @ c=179, r=8, X156.991 Y72.979 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c179_r008.jpg 582 / 2211, ETA: 01:04:54.3363 @ 0.418300 items / sec XY3P: 583 / 2211 @ c=180, r=8, X157.164 Y72.975 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c180_r008.jpg 583 / 2211, ETA: 01:04:51.9392 @ 0.418300 items / sec XY3P: 584 / 2211 @ c=181, r=8, X157.337 Y72.971 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c181_r008.jpg 584 / 2211, ETA: 01:04:49.5659 @ 0.418299 items / sec XY3P: 585 / 2211 @ c=182, r=8, X157.510 Y72.967 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c182_r008.jpg 585 / 2211, ETA: 01:04:47.1950 @ 0.418296 items / sec XY3P: 586 / 2211 @ c=183, r=8, X157.682 Y72.963 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c183_r008.jpg 586 / 2211, ETA: 01:04:44.2679 @ 0.418354 items / sec XY3P: 587 / 2211 @ c=184, r=8, X157.855 Y72.959 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c184_r008.jpg 587 / 2211, ETA: 01:04:41.8951 @ 0.418352 items / sec XY3P: 588 / 2211 @ c=185, r=8, X158.028 Y72.955 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c185_r008.jpg 588 / 2211, ETA: 01:04:39.5308 @ 0.418350 items / sec XY3P: 589 / 2211 @ c=186, r=8, X158.201 Y72.951 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c186_r008.jpg 589 / 2211, ETA: 01:04:37.1543 @ 0.418348 items / sec XY3P: 590 / 2211 @ c=187, r=8, X158.373 Y72.947 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c187_r008.jpg 590 / 2211, ETA: 01:04:34.7798 @ 0.418346 items / sec XY3P: 591 / 2211 @ c=188, r=8, X158.546 Y72.943 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c188_r008.jpg 591 / 2211, ETA: 01:04:32.4102 @ 0.418344 items / sec XY3P: 592 / 2211 @ c=189, r=8, X158.719 Y72.939 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c189_r008.jpg 592 / 2211, ETA: 01:04:30.0391 @ 0.418342 items / sec XY3P: 593 / 2211 @ c=190, r=8, X158.892 Y72.935 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c190_r008.jpg 593 / 2211, ETA: 01:04:27.6728 @ 0.418339 items / sec XY3P: 594 / 2211 @ c=191, r=8, X159.064 Y72.931 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c191_r008.jpg 594 / 2211, ETA: 01:04:25.2944 @ 0.418338 items / sec XY3P: 595 / 2211 @ c=192, r=8, X159.237 Y72.928 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c192_r008.jpg 595 / 2211, ETA: 01:04:22.9224 @ 0.418336 items / sec XY3P: 596 / 2211 @ c=193, r=8, X159.410 Y72.924 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c193_r008.jpg 596 / 2211, ETA: 01:04:20.5525 @ 0.418334 items / sec XY3P: 597 / 2211 @ c=194, r=8, X159.583 Y72.920 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c194_r008.jpg 597 / 2211, ETA: 01:04:18.1786 @ 0.418332 items / sec XY3P: 598 / 2211 @ c=195, r=8, X159.755 Y72.916 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c195_r008.jpg 598 / 2211, ETA: 01:04:15.8119 @ 0.418330 items / sec XY3P: 599 / 2211 @ c=196, r=8, X159.928 Y72.912 Z-15.066 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c196_r008.jpg 599 / 2211, ETA: 01:04:13.4362 @ 0.418328 items / sec XY3P: 600 / 2211 @ c=197, r=8, X160.101 Y72.908 Z-15.066 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c197_r008.jpg 600 / 2211, ETA: 01:04:11.0650 @ 0.418326 items / sec XY3P: 601 / 2211 @ c=198, r=8, X160.274 Y72.904 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c198_r008.jpg 601 / 2211, ETA: 01:04:08.6927 @ 0.418324 items / sec XY3P: 602 / 2211 @ c=199, r=8, X160.446 Y72.900 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c199_r008.jpg 602 / 2211, ETA: 01:04:06.3199 @ 0.418322 items / sec XY3P: 603 / 2211 @ c=200, r=8, X160.619 Y72.896 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c200_r008.jpg 603 / 2211, ETA: 01:04:03.9509 @ 0.418320 items / sec XY3P: 604 / 2211 @ c=200, r=7, X160.619 Y73.057 Z-15.060 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c200_r007.jpg 604 / 2211, ETA: 01:04:01.0435 @ 0.418376 items / sec XY3P: 605 / 2211 @ c=199, r=7, X160.446 Y73.061 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c199_r007.jpg 605 / 2211, ETA: 01:03:59.2017 @ 0.418316 items / sec XY3P: 606 / 2211 @ c=198, r=7, X160.274 Y73.065 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c198_r007.jpg 606 / 2211, ETA: 01:03:56.8293 @ 0.418314 items / sec XY3P: 607 / 2211 @ c=197, r=7, X160.101 Y73.069 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c197_r007.jpg 607 / 2211, ETA: 01:03:53.9456 @ 0.418368 items / sec XY3P: 608 / 2211 @ c=196, r=7, X159.928 Y73.073 Z-15.063 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c196_r007.jpg 608 / 2211, ETA: 01:03:51.5563 @ 0.418368 items / sec XY3P: 609 / 2211 @ c=195, r=7, X159.755 Y73.077 Z-15.063 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c195_r007.jpg 609 / 2211, ETA: 01:03:49.1852 @ 0.418366 items / sec XY3P: 610 / 2211 @ c=194, r=7, X159.583 Y73.080 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c194_r007.jpg 610 / 2211, ETA: 01:03:46.8121 @ 0.418364 items / sec XY3P: 611 / 2211 @ c=193, r=7, X159.410 Y73.084 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c193_r007.jpg 611 / 2211, ETA: 01:03:44.4463 @ 0.418361 items / sec XY3P: 612 / 2211 @ c=192, r=7, X159.237 Y73.088 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c192_r007.jpg 612 / 2211, ETA: 01:03:42.0709 @ 0.418360 items / sec XY3P: 613 / 2211 @ c=191, r=7, X159.064 Y73.092 Z-15.066 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c191_r007.jpg 613 / 2211, ETA: 01:03:39.6951 @ 0.418358 items / sec XY3P: 614 / 2211 @ c=190, r=7, X158.892 Y73.096 Z-15.066 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c190_r007.jpg 614 / 2211, ETA: 01:03:37.3232 @ 0.418356 items / sec XY3P: 615 / 2211 @ c=189, r=7, X158.719 Y73.100 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c189_r007.jpg 615 / 2211, ETA: 01:03:34.9522 @ 0.418354 items / sec XY3P: 616 / 2211 @ c=188, r=7, X158.546 Y73.104 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c188_r007.jpg 616 / 2211, ETA: 01:03:32.5831 @ 0.418352 items / sec XY3P: 617 / 2211 @ c=187, r=7, X158.373 Y73.108 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c187_r007.jpg 617 / 2211, ETA: 01:03:30.2082 @ 0.418350 items / sec XY3P: 618 / 2211 @ c=186, r=7, X158.201 Y73.112 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c186_r007.jpg 618 / 2211, ETA: 01:03:27.8358 @ 0.418348 items / sec XY3P: 619 / 2211 @ c=185, r=7, X158.028 Y73.116 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c185_r007.jpg 619 / 2211, ETA: 01:03:25.4617 @ 0.418346 items / sec XY3P: 620 / 2211 @ c=184, r=7, X157.855 Y73.120 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c184_r007.jpg 620 / 2211, ETA: 01:03:23.0882 @ 0.418344 items / sec XY3P: 621 / 2211 @ c=183, r=7, X157.682 Y73.124 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c183_r007.jpg 621 / 2211, ETA: 01:03:20.7207 @ 0.418342 items / sec XY3P: 622 / 2211 @ c=182, r=7, X157.510 Y73.128 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c182_r007.jpg 622 / 2211, ETA: 01:03:18.3446 @ 0.418340 items / sec XY3P: 623 / 2211 @ c=181, r=7, X157.337 Y73.132 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c181_r007.jpg 623 / 2211, ETA: 01:03:15.9712 @ 0.418338 items / sec XY3P: 624 / 2211 @ c=180, r=7, X157.164 Y73.136 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c180_r007.jpg 624 / 2211, ETA: 01:03:13.5988 @ 0.418336 items / sec XY3P: 625 / 2211 @ c=179, r=7, X156.991 Y73.140 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c179_r007.jpg 625 / 2211, ETA: 01:03:11.2254 @ 0.418334 items / sec XY3P: 626 / 2211 @ c=178, r=7, X156.819 Y73.144 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c178_r007.jpg 626 / 2211, ETA: 01:03:08.8557 @ 0.418332 items / sec XY3P: 627 / 2211 @ c=177, r=7, X156.646 Y73.148 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c177_r007.jpg 627 / 2211, ETA: 01:03:05.9784 @ 0.418386 items / sec XY3P: 628 / 2211 @ c=176, r=7, X156.473 Y73.152 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c176_r007.jpg 628 / 2211, ETA: 01:03:03.6023 @ 0.418384 items / sec XY3P: 629 / 2211 @ c=175, r=7, X156.300 Y73.156 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c175_r007.jpg 629 / 2211, ETA: 01:03:01.2276 @ 0.418383 items / sec XY3P: 630 / 2211 @ c=174, r=7, X156.127 Y73.160 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c174_r007.jpg 630 / 2211, ETA: 01:02:58.8575 @ 0.418380 items / sec XY3P: 631 / 2211 @ c=173, r=7, X155.955 Y73.164 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c173_r007.jpg 631 / 2211, ETA: 01:02:56.4839 @ 0.418379 items / sec XY3P: 632 / 2211 @ c=172, r=7, X155.782 Y73.168 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c172_r007.jpg 632 / 2211, ETA: 01:02:54.1309 @ 0.418374 items / sec XY3P: 633 / 2211 @ c=171, r=7, X155.609 Y73.172 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c171_r007.jpg 633 / 2211, ETA: 01:02:51.7402 @ 0.418375 items / sec XY3P: 634 / 2211 @ c=170, r=7, X155.436 Y73.176 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c170_r007.jpg 634 / 2211, ETA: 01:02:49.3683 @ 0.418372 items / sec XY3P: 635 / 2211 @ c=169, r=7, X155.264 Y73.180 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c169_r007.jpg 635 / 2211, ETA: 01:02:46.9967 @ 0.418370 items / sec XY3P: 636 / 2211 @ c=168, r=7, X155.091 Y73.184 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c168_r007.jpg 636 / 2211, ETA: 01:02:44.6213 @ 0.418369 items / sec XY3P: 637 / 2211 @ c=167, r=7, X154.918 Y73.188 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c167_r007.jpg 637 / 2211, ETA: 01:02:42.2513 @ 0.418367 items / sec XY3P: 638 / 2211 @ c=166, r=7, X154.745 Y73.192 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c166_r007.jpg 638 / 2211, ETA: 01:02:39.8763 @ 0.418365 items / sec XY3P: 639 / 2211 @ c=165, r=7, X154.573 Y73.195 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c165_r007.jpg 639 / 2211, ETA: 01:02:37.5030 @ 0.418363 items / sec XY3P: 640 / 2211 @ c=164, r=7, X154.400 Y73.199 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c164_r007.jpg 640 / 2211, ETA: 01:02:35.1305 @ 0.418361 items / sec XY3P: 641 / 2211 @ c=163, r=7, X154.227 Y73.203 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c163_r007.jpg 641 / 2211, ETA: 01:02:32.7551 @ 0.418359 items / sec XY3P: 642 / 2211 @ c=162, r=7, X154.054 Y73.207 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c162_r007.jpg 642 / 2211, ETA: 01:02:29.8970 @ 0.418411 items / sec XY3P: 643 / 2211 @ c=161, r=7, X153.882 Y73.211 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c161_r007.jpg 643 / 2211, ETA: 01:02:27.5228 @ 0.418410 items / sec XY3P: 644 / 2211 @ c=160, r=7, X153.709 Y73.215 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c160_r007.jpg 644 / 2211, ETA: 01:02:25.1502 @ 0.418408 items / sec XY3P: 645 / 2211 @ c=159, r=7, X153.536 Y73.219 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c159_r007.jpg 645 / 2211, ETA: 01:02:22.7813 @ 0.418405 items / sec XY3P: 646 / 2211 @ c=158, r=7, X153.363 Y73.223 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c158_r007.jpg 646 / 2211, ETA: 01:02:20.4060 @ 0.418404 items / sec XY3P: 647 / 2211 @ c=157, r=7, X153.191 Y73.227 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c157_r007.jpg 647 / 2211, ETA: 01:02:18.0330 @ 0.418402 items / sec XY3P: 648 / 2211 @ c=156, r=7, X153.018 Y73.231 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c156_r007.jpg 648 / 2211, ETA: 01:02:15.6606 @ 0.418400 items / sec XY3P: 649 / 2211 @ c=155, r=7, X152.845 Y73.235 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c155_r007.jpg 649 / 2211, ETA: 01:02:13.2916 @ 0.418398 items / sec XY3P: 650 / 2211 @ c=154, r=7, X152.673 Y73.239 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c154_r007.jpg 650 / 2211, ETA: 01:02:10.9348 @ 0.418394 items / sec XY3P: 651 / 2211 @ c=153, r=7, X152.500 Y73.243 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c153_r007.jpg 651 / 2211, ETA: 01:02:08.5430 @ 0.418394 items / sec XY3P: 652 / 2211 @ c=152, r=7, X152.327 Y73.247 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c152_r007.jpg 652 / 2211, ETA: 01:02:06.1705 @ 0.418392 items / sec XY3P: 653 / 2211 @ c=151, r=7, X152.154 Y73.251 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c151_r007.jpg 653 / 2211, ETA: 01:02:03.7975 @ 0.418390 items / sec XY3P: 654 / 2211 @ c=150, r=7, X151.982 Y73.255 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c150_r007.jpg 654 / 2211, ETA: 01:02:01.4316 @ 0.418387 items / sec XY3P: 655 / 2211 @ c=149, r=7, X151.809 Y73.259 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c149_r007.jpg 655 / 2211, ETA: 01:01:59.0678 @ 0.418384 items / sec XY3P: 656 / 2211 @ c=148, r=7, X151.636 Y73.263 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c148_r007.jpg 656 / 2211, ETA: 01:01:56.6824 @ 0.418384 items / sec XY3P: 657 / 2211 @ c=147, r=7, X151.463 Y73.267 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c147_r007.jpg 657 / 2211, ETA: 01:01:54.3028 @ 0.418383 items / sec XY3P: 658 / 2211 @ c=146, r=7, X151.291 Y73.271 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c146_r007.jpg 658 / 2211, ETA: 01:01:51.9297 @ 0.418381 items / sec XY3P: 659 / 2211 @ c=145, r=7, X151.118 Y73.275 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c145_r007.jpg 659 / 2211, ETA: 01:01:49.5551 @ 0.418379 items / sec XY3P: 660 / 2211 @ c=144, r=7, X150.945 Y73.279 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c144_r007.jpg 660 / 2211, ETA: 01:01:47.1841 @ 0.418377 items / sec XY3P: 661 / 2211 @ c=143, r=7, X150.772 Y73.283 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c143_r007.jpg 661 / 2211, ETA: 01:01:44.8134 @ 0.418375 items / sec XY3P: 662 / 2211 @ c=142, r=7, X150.600 Y73.287 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c142_r007.jpg 662 / 2211, ETA: 01:01:41.9689 @ 0.418426 items / sec XY3P: 663 / 2211 @ c=141, r=7, X150.427 Y73.291 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c141_r007.jpg 663 / 2211, ETA: 01:01:39.5979 @ 0.418424 items / sec XY3P: 664 / 2211 @ c=140, r=7, X150.254 Y73.295 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c140_r007.jpg 664 / 2211, ETA: 01:01:37.2275 @ 0.418422 items / sec XY3P: 665 / 2211 @ c=139, r=7, X150.081 Y73.299 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c139_r007.jpg 665 / 2211, ETA: 01:01:34.8507 @ 0.418420 items / sec XY3P: 666 / 2211 @ c=138, r=7, X149.909 Y73.303 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c138_r007.jpg 666 / 2211, ETA: 01:01:32.4774 @ 0.418418 items / sec XY3P: 667 / 2211 @ c=137, r=7, X149.736 Y73.306 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c137_r007.jpg 667 / 2211, ETA: 01:01:30.1039 @ 0.418416 items / sec XY3P: 668 / 2211 @ c=136, r=7, X149.563 Y73.310 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c136_r007.jpg 668 / 2211, ETA: 01:01:27.7312 @ 0.418414 items / sec XY3P: 669 / 2211 @ c=135, r=7, X149.390 Y73.314 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c135_r007.jpg 669 / 2211, ETA: 01:01:25.3626 @ 0.418412 items / sec XY3P: 670 / 2211 @ c=134, r=7, X149.218 Y73.318 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c134_r007.jpg 670 / 2211, ETA: 01:01:22.9855 @ 0.418411 items / sec XY3P: 671 / 2211 @ c=133, r=7, X149.045 Y73.322 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c133_r007.jpg 671 / 2211, ETA: 01:01:20.6118 @ 0.418409 items / sec XY3P: 672 / 2211 @ c=132, r=7, X148.872 Y73.326 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c132_r007.jpg 672 / 2211, ETA: 01:01:18.2386 @ 0.418407 items / sec XY3P: 673 / 2211 @ c=131, r=7, X148.699 Y73.330 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c131_r007.jpg 673 / 2211, ETA: 01:01:15.8655 @ 0.418405 items / sec XY3P: 674 / 2211 @ c=130, r=7, X148.526 Y73.334 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c130_r007.jpg 674 / 2211, ETA: 01:01:13.4954 @ 0.418403 items / sec XY3P: 675 / 2211 @ c=129, r=7, X148.354 Y73.338 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c129_r007.jpg 675 / 2211, ETA: 01:01:11.1174 @ 0.418401 items / sec XY3P: 676 / 2211 @ c=128, r=7, X148.181 Y73.342 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c128_r007.jpg 676 / 2211, ETA: 01:01:08.7436 @ 0.418399 items / sec XY3P: 677 / 2211 @ c=127, r=7, X148.008 Y73.346 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c127_r007.jpg 677 / 2211, ETA: 01:01:06.3704 @ 0.418397 items / sec XY3P: 678 / 2211 @ c=126, r=7, X147.835 Y73.350 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c126_r007.jpg 678 / 2211, ETA: 01:01:03.9960 @ 0.418396 items / sec XY3P: 679 / 2211 @ c=125, r=7, X147.663 Y73.354 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c125_r007.jpg 679 / 2211, ETA: 01:01:01.6272 @ 0.418393 items / sec XY3P: 680 / 2211 @ c=124, r=7, X147.490 Y73.358 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c124_r007.jpg 680 / 2211, ETA: 01:00:59.2499 @ 0.418392 items / sec XY3P: 681 / 2211 @ c=123, r=7, X147.317 Y73.362 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c123_r007.jpg 681 / 2211, ETA: 01:00:56.8760 @ 0.418390 items / sec XY3P: 682 / 2211 @ c=122, r=7, X147.144 Y73.366 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c122_r007.jpg 682 / 2211, ETA: 01:00:54.5006 @ 0.418388 items / sec XY3P: 683 / 2211 @ c=121, r=7, X146.972 Y73.370 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c121_r007.jpg 683 / 2211, ETA: 01:00:52.1267 @ 0.418386 items / sec XY3P: 684 / 2211 @ c=120, r=7, X146.799 Y73.374 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c120_r007.jpg 684 / 2211, ETA: 01:00:49.3039 @ 0.418436 items / sec XY3P: 685 / 2211 @ c=119, r=7, X146.626 Y73.378 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c119_r007.jpg 685 / 2211, ETA: 01:00:46.9363 @ 0.418433 items / sec XY3P: 686 / 2211 @ c=118, r=7, X146.453 Y73.382 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c118_r007.jpg 686 / 2211, ETA: 01:00:44.5607 @ 0.418432 items / sec XY3P: 687 / 2211 @ c=117, r=7, X146.281 Y73.386 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c117_r007.jpg 687 / 2211, ETA: 01:00:42.1858 @ 0.418430 items / sec XY3P: 688 / 2211 @ c=116, r=7, X146.108 Y73.390 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c116_r007.jpg 688 / 2211, ETA: 01:00:39.8133 @ 0.418428 items / sec XY3P: 689 / 2211 @ c=115, r=7, X145.935 Y73.394 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c115_r007.jpg 689 / 2211, ETA: 01:00:36.9976 @ 0.418477 items / sec XY3P: 690 / 2211 @ c=114, r=7, X145.762 Y73.398 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c114_r007.jpg 690 / 2211, ETA: 01:00:34.6245 @ 0.418475 items / sec XY3P: 691 / 2211 @ c=113, r=7, X145.590 Y73.402 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c113_r007.jpg 691 / 2211, ETA: 01:00:32.2541 @ 0.418473 items / sec XY3P: 692 / 2211 @ c=112, r=7, X145.417 Y73.406 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c112_r007.jpg 692 / 2211, ETA: 01:00:29.8785 @ 0.418471 items / sec XY3P: 693 / 2211 @ c=111, r=7, X145.244 Y73.410 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c111_r007.jpg 693 / 2211, ETA: 01:00:27.5235 @ 0.418467 items / sec XY3P: 694 / 2211 @ c=110, r=7, X145.072 Y73.414 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c110_r007.jpg 694 / 2211, ETA: 01:00:25.1336 @ 0.418467 items / sec XY3P: 695 / 2211 @ c=109, r=7, X144.899 Y73.418 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c109_r007.jpg 695 / 2211, ETA: 01:00:22.7734 @ 0.418464 items / sec XY3P: 696 / 2211 @ c=108, r=7, X144.726 Y73.421 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c108_r007.jpg 696 / 2211, ETA: 01:00:20.3863 @ 0.418464 items / sec XY3P: 697 / 2211 @ c=107, r=7, X144.553 Y73.425 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c107_r007.jpg 697 / 2211, ETA: 01:00:18.0141 @ 0.418462 items / sec XY3P: 698 / 2211 @ c=106, r=7, X144.381 Y73.429 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c106_r007.jpg 698 / 2211, ETA: 01:00:15.6445 @ 0.418459 items / sec XY3P: 699 / 2211 @ c=105, r=7, X144.208 Y73.433 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c105_r007.jpg 699 / 2211, ETA: 01:00:13.2670 @ 0.418458 items / sec XY3P: 700 / 2211 @ c=104, r=7, X144.035 Y73.437 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c104_r007.jpg 700 / 2211, ETA: 01:00:10.9069 @ 0.418454 items / sec XY3P: 701 / 2211 @ c=103, r=7, X143.862 Y73.441 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c103_r007.jpg 701 / 2211, ETA: 01:00:08.5198 @ 0.418454 items / sec XY3P: 702 / 2211 @ c=102, r=7, X143.690 Y73.445 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c102_r007.jpg 702 / 2211, ETA: 01:00:06.1466 @ 0.418452 items / sec XY3P: 703 / 2211 @ c=101, r=7, X143.517 Y73.449 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c101_r007.jpg 703 / 2211, ETA: 01:00:03.7771 @ 0.418450 items / sec XY3P: 704 / 2211 @ c=100, r=7, X143.344 Y73.453 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c100_r007.jpg 704 / 2211, ETA: 01:00:01.3995 @ 0.418448 items / sec XY3P: 705 / 2211 @ c=99, r=7, X143.171 Y73.457 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c099_r007.jpg 705 / 2211, ETA: 00:59:59.0235 @ 0.418447 items / sec XY3P: 706 / 2211 @ c=98, r=7, X142.999 Y73.461 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c098_r007.jpg 706 / 2211, ETA: 00:59:56.6516 @ 0.418445 items / sec XY3P: 707 / 2211 @ c=97, r=7, X142.826 Y73.465 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c097_r007.jpg 707 / 2211, ETA: 00:59:54.2914 @ 0.418441 items / sec XY3P: 708 / 2211 @ c=96, r=7, X142.653 Y73.469 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c096_r007.jpg 708 / 2211, ETA: 00:59:51.9085 @ 0.418441 items / sec XY3P: 709 / 2211 @ c=95, r=7, X142.480 Y73.473 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c095_r007.jpg 709 / 2211, ETA: 00:59:49.1092 @ 0.418488 items / sec XY3P: 710 / 2211 @ c=94, r=7, X142.308 Y73.477 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c094_r007.jpg 710 / 2211, ETA: 00:59:46.7328 @ 0.418487 items / sec XY3P: 711 / 2211 @ c=93, r=7, X142.135 Y73.481 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c093_r007.jpg 711 / 2211, ETA: 00:59:44.3600 @ 0.418485 items / sec XY3P: 712 / 2211 @ c=92, r=7, X141.962 Y73.485 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c092_r007.jpg 712 / 2211, ETA: 00:59:41.9863 @ 0.418483 items / sec XY3P: 713 / 2211 @ c=91, r=7, X141.789 Y73.489 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c091_r007.jpg 713 / 2211, ETA: 00:59:39.6124 @ 0.418481 items / sec XY3P: 714 / 2211 @ c=90, r=7, X141.617 Y73.493 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c090_r007.jpg 714 / 2211, ETA: 00:59:37.2427 @ 0.418479 items / sec XY3P: 715 / 2211 @ c=89, r=7, X141.444 Y73.497 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c089_r007.jpg 715 / 2211, ETA: 00:59:34.8649 @ 0.418477 items / sec XY3P: 716 / 2211 @ c=88, r=7, X141.271 Y73.501 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c088_r007.jpg 716 / 2211, ETA: 00:59:32.4916 @ 0.418475 items / sec XY3P: 717 / 2211 @ c=87, r=7, X141.098 Y73.505 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c087_r007.jpg 717 / 2211, ETA: 00:59:30.1184 @ 0.418474 items / sec XY3P: 718 / 2211 @ c=86, r=7, X140.925 Y73.509 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c086_r007.jpg 718 / 2211, ETA: 00:59:27.7452 @ 0.418472 items / sec XY3P: 719 / 2211 @ c=85, r=7, X140.753 Y73.513 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c085_r007.jpg 719 / 2211, ETA: 00:59:25.3737 @ 0.418469 items / sec XY3P: 720 / 2211 @ c=84, r=7, X140.580 Y73.517 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c084_r007.jpg 720 / 2211, ETA: 00:59:22.9971 @ 0.418468 items / sec XY3P: 721 / 2211 @ c=83, r=7, X140.407 Y73.521 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c083_r007.jpg 721 / 2211, ETA: 00:59:20.6247 @ 0.418466 items / sec XY3P: 722 / 2211 @ c=82, r=7, X140.234 Y73.525 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c082_r007.jpg 722 / 2211, ETA: 00:59:18.2493 @ 0.418464 items / sec XY3P: 723 / 2211 @ c=81, r=7, X140.062 Y73.529 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c081_r007.jpg 723 / 2211, ETA: 00:59:15.8752 @ 0.418462 items / sec XY3P: 724 / 2211 @ c=80, r=7, X139.889 Y73.532 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c080_r007.jpg 724 / 2211, ETA: 00:59:13.5184 @ 0.418459 items / sec XY3P: 725 / 2211 @ c=79, r=7, X139.716 Y73.536 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c079_r007.jpg 725 / 2211, ETA: 00:59:11.1275 @ 0.418459 items / sec XY3P: 726 / 2211 @ c=78, r=7, X139.543 Y73.540 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c078_r007.jpg 726 / 2211, ETA: 00:59:08.7679 @ 0.418455 items / sec XY3P: 727 / 2211 @ c=77, r=7, X139.371 Y73.544 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c077_r007.jpg 727 / 2211, ETA: 00:59:06.3860 @ 0.418454 items / sec XY3P: 728 / 2211 @ c=76, r=7, X139.198 Y73.548 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c076_r007.jpg 728 / 2211, ETA: 00:59:04.0120 @ 0.418452 items / sec XY3P: 729 / 2211 @ c=75, r=7, X139.025 Y73.552 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c075_r007.jpg 729 / 2211, ETA: 00:59:01.2365 @ 0.418498 items / sec XY3P: 730 / 2211 @ c=74, r=7, X138.852 Y73.556 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c074_r007.jpg 730 / 2211, ETA: 00:58:58.8471 @ 0.418498 items / sec XY3P: 731 / 2211 @ c=73, r=7, X138.680 Y73.560 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c073_r007.jpg 731 / 2211, ETA: 00:58:56.4744 @ 0.418496 items / sec XY3P: 732 / 2211 @ c=72, r=7, X138.507 Y73.564 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c072_r007.jpg 732 / 2211, ETA: 00:58:54.1008 @ 0.418494 items / sec XY3P: 733 / 2211 @ c=71, r=7, X138.334 Y73.568 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c071_r007.jpg 733 / 2211, ETA: 00:58:51.7291 @ 0.418492 items / sec XY3P: 734 / 2211 @ c=70, r=7, X138.161 Y73.572 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c070_r007.jpg 734 / 2211, ETA: 00:58:49.3529 @ 0.418490 items / sec XY3P: 735 / 2211 @ c=69, r=7, X137.989 Y73.576 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c069_r007.jpg 735 / 2211, ETA: 00:58:46.9789 @ 0.418488 items / sec XY3P: 736 / 2211 @ c=68, r=7, X137.816 Y73.580 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c068_r007.jpg 736 / 2211, ETA: 00:58:44.6060 @ 0.418486 items / sec XY3P: 737 / 2211 @ c=67, r=7, X137.643 Y73.584 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c067_r007.jpg 737 / 2211, ETA: 00:58:42.2351 @ 0.418484 items / sec XY3P: 738 / 2211 @ c=66, r=7, X137.471 Y73.588 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c066_r007.jpg 738 / 2211, ETA: 00:58:39.8602 @ 0.418483 items / sec XY3P: 739 / 2211 @ c=65, r=7, X137.298 Y73.592 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c065_r007.jpg 739 / 2211, ETA: 00:58:37.4830 @ 0.418481 items / sec XY3P: 740 / 2211 @ c=64, r=7, X137.125 Y73.596 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c064_r007.jpg 740 / 2211, ETA: 00:58:35.1082 @ 0.418479 items / sec XY3P: 741 / 2211 @ c=63, r=7, X136.952 Y73.600 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c063_r007.jpg 741 / 2211, ETA: 00:58:32.7341 @ 0.418477 items / sec XY3P: 742 / 2211 @ c=62, r=7, X136.780 Y73.604 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c062_r007.jpg 742 / 2211, ETA: 00:58:30.3590 @ 0.418476 items / sec XY3P: 743 / 2211 @ c=61, r=7, X136.607 Y73.608 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c061_r007.jpg 743 / 2211, ETA: 00:58:27.9877 @ 0.418474 items / sec XY3P: 744 / 2211 @ c=60, r=7, X136.434 Y73.612 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c060_r007.jpg 744 / 2211, ETA: 00:58:25.6138 @ 0.418472 items / sec XY3P: 745 / 2211 @ c=59, r=7, X136.261 Y73.616 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c059_r007.jpg 745 / 2211, ETA: 00:58:23.2363 @ 0.418470 items / sec XY3P: 746 / 2211 @ c=58, r=7, X136.089 Y73.620 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c058_r007.jpg 746 / 2211, ETA: 00:58:20.8602 @ 0.418469 items / sec XY3P: 747 / 2211 @ c=57, r=7, X135.916 Y73.624 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c057_r007.jpg 747 / 2211, ETA: 00:58:18.4857 @ 0.418467 items / sec XY3P: 748 / 2211 @ c=56, r=7, X135.743 Y73.628 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c056_r007.jpg 748 / 2211, ETA: 00:58:16.1145 @ 0.418465 items / sec XY3P: 749 / 2211 @ c=55, r=7, X135.570 Y73.632 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c055_r007.jpg 749 / 2211, ETA: 00:58:13.7361 @ 0.418463 items / sec XY3P: 750 / 2211 @ c=54, r=7, X135.398 Y73.636 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c054_r007.jpg 750 / 2211, ETA: 00:58:11.3613 @ 0.418461 items / sec XY3P: 751 / 2211 @ c=53, r=7, X135.225 Y73.640 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c053_r007.jpg 751 / 2211, ETA: 00:58:08.9887 @ 0.418459 items / sec XY3P: 752 / 2211 @ c=52, r=7, X135.052 Y73.644 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c052_r007.jpg 752 / 2211, ETA: 00:58:06.6113 @ 0.418458 items / sec XY3P: 753 / 2211 @ c=51, r=7, X134.879 Y73.647 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c051_r007.jpg 753 / 2211, ETA: 00:58:04.2400 @ 0.418456 items / sec XY3P: 754 / 2211 @ c=50, r=7, X134.707 Y73.651 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c050_r007.jpg 754 / 2211, ETA: 00:58:01.8607 @ 0.418454 items / sec XY3P: 755 / 2211 @ c=49, r=7, X134.534 Y73.655 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c049_r007.jpg 755 / 2211, ETA: 00:57:59.4846 @ 0.418453 items / sec XY3P: 756 / 2211 @ c=48, r=7, X134.361 Y73.659 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c048_r007.jpg 756 / 2211, ETA: 00:57:57.1098 @ 0.418451 items / sec XY3P: 757 / 2211 @ c=47, r=7, X134.188 Y73.663 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c047_r007.jpg 757 / 2211, ETA: 00:57:54.7489 @ 0.418448 items / sec XY3P: 758 / 2211 @ c=46, r=7, X134.016 Y73.667 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c046_r007.jpg 758 / 2211, ETA: 00:57:52.3654 @ 0.418447 items / sec XY3P: 759 / 2211 @ c=45, r=7, X133.843 Y73.671 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c045_r007.jpg 759 / 2211, ETA: 00:57:49.6019 @ 0.418492 items / sec XY3P: 760 / 2211 @ c=44, r=7, X133.670 Y73.675 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c044_r007.jpg 760 / 2211, ETA: 00:57:47.2298 @ 0.418490 items / sec XY3P: 761 / 2211 @ c=43, r=7, X133.497 Y73.679 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c043_r007.jpg 761 / 2211, ETA: 00:57:44.8568 @ 0.418488 items / sec XY3P: 762 / 2211 @ c=42, r=7, X133.325 Y73.683 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c042_r007.jpg 762 / 2211, ETA: 00:57:42.4775 @ 0.418486 items / sec XY3P: 763 / 2211 @ c=41, r=7, X133.152 Y73.687 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c041_r007.jpg 763 / 2211, ETA: 00:57:40.1023 @ 0.418485 items / sec XY3P: 764 / 2211 @ c=40, r=7, X132.979 Y73.691 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c040_r007.jpg 764 / 2211, ETA: 00:57:37.7273 @ 0.418483 items / sec XY3P: 765 / 2211 @ c=39, r=7, X132.806 Y73.695 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c039_r007.jpg 765 / 2211, ETA: 00:57:35.3521 @ 0.418481 items / sec XY3P: 766 / 2211 @ c=38, r=7, X132.633 Y73.699 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c038_r007.jpg 766 / 2211, ETA: 00:57:32.9806 @ 0.418479 items / sec XY3P: 767 / 2211 @ c=37, r=7, X132.461 Y73.703 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c037_r007.jpg 767 / 2211, ETA: 00:57:30.6029 @ 0.418478 items / sec XY3P: 768 / 2211 @ c=36, r=7, X132.288 Y73.707 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c036_r007.jpg 768 / 2211, ETA: 00:57:28.2267 @ 0.418476 items / sec XY3P: 769 / 2211 @ c=35, r=7, X132.115 Y73.711 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c035_r007.jpg 769 / 2211, ETA: 00:57:25.8515 @ 0.418474 items / sec XY3P: 770 / 2211 @ c=34, r=7, X131.942 Y73.715 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c034_r007.jpg 770 / 2211, ETA: 00:57:23.4764 @ 0.418472 items / sec XY3P: 771 / 2211 @ c=33, r=7, X131.770 Y73.719 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c033_r007.jpg 771 / 2211, ETA: 00:57:21.1043 @ 0.418470 items / sec XY3P: 772 / 2211 @ c=32, r=7, X131.597 Y73.723 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c032_r007.jpg 772 / 2211, ETA: 00:57:18.7247 @ 0.418469 items / sec XY3P: 773 / 2211 @ c=31, r=7, X131.424 Y73.727 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c031_r007.jpg 773 / 2211, ETA: 00:57:16.3495 @ 0.418467 items / sec XY3P: 774 / 2211 @ c=30, r=7, X131.251 Y73.731 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c030_r007.jpg 774 / 2211, ETA: 00:57:13.9760 @ 0.418465 items / sec XY3P: 775 / 2211 @ c=29, r=7, X131.079 Y73.735 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c029_r007.jpg 775 / 2211, ETA: 00:57:11.5981 @ 0.418464 items / sec XY3P: 776 / 2211 @ c=28, r=7, X130.906 Y73.739 Z-15.162 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c028_r007.jpg 776 / 2211, ETA: 00:57:09.2270 @ 0.418462 items / sec XY3P: 777 / 2211 @ c=27, r=7, X130.733 Y73.743 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c027_r007.jpg 777 / 2211, ETA: 00:57:06.8482 @ 0.418460 items / sec XY3P: 778 / 2211 @ c=26, r=7, X130.560 Y73.747 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c026_r007.jpg 778 / 2211, ETA: 00:57:04.4713 @ 0.418459 items / sec XY3P: 779 / 2211 @ c=25, r=7, X130.388 Y73.751 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c025_r007.jpg 779 / 2211, ETA: 00:57:02.0949 @ 0.418457 items / sec XY3P: 780 / 2211 @ c=24, r=7, X130.215 Y73.755 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c024_r007.jpg 780 / 2211, ETA: 00:56:59.7197 @ 0.418455 items / sec XY3P: 781 / 2211 @ c=23, r=7, X130.042 Y73.759 Z-15.165 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c023_r007.jpg 781 / 2211, ETA: 00:56:57.3471 @ 0.418453 items / sec XY3P: 782 / 2211 @ c=22, r=7, X129.870 Y73.762 Z-15.166 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c022_r007.jpg 782 / 2211, ETA: 00:56:54.9668 @ 0.418452 items / sec XY3P: 783 / 2211 @ c=21, r=7, X129.697 Y73.766 Z-15.166 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c021_r007.jpg 783 / 2211, ETA: 00:56:52.5913 @ 0.418450 items / sec XY3P: 784 / 2211 @ c=20, r=7, X129.524 Y73.770 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c020_r007.jpg 784 / 2211, ETA: 00:56:50.2144 @ 0.418449 items / sec XY3P: 785 / 2211 @ c=19, r=7, X129.351 Y73.774 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c019_r007.jpg 785 / 2211, ETA: 00:56:47.8390 @ 0.418447 items / sec XY3P: 786 / 2211 @ c=18, r=7, X129.179 Y73.778 Z-15.168 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c018_r007.jpg 786 / 2211, ETA: 00:56:45.4664 @ 0.418445 items / sec XY3P: 787 / 2211 @ c=17, r=7, X129.006 Y73.782 Z-15.168 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c017_r007.jpg 787 / 2211, ETA: 00:56:43.0866 @ 0.418444 items / sec XY3P: 788 / 2211 @ c=16, r=7, X128.833 Y73.786 Z-15.169 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c016_r007.jpg 788 / 2211, ETA: 00:56:40.7203 @ 0.418441 items / sec XY3P: 789 / 2211 @ c=15, r=7, X128.660 Y73.790 Z-15.170 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c015_r007.jpg 789 / 2211, ETA: 00:56:38.3339 @ 0.418440 items / sec XY3P: 790 / 2211 @ c=14, r=7, X128.488 Y73.794 Z-15.170 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c014_r007.jpg 790 / 2211, ETA: 00:56:35.9688 @ 0.418437 items / sec XY3P: 791 / 2211 @ c=13, r=7, X128.315 Y73.798 Z-15.171 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c013_r007.jpg 791 / 2211, ETA: 00:56:33.5852 @ 0.418437 items / sec XY3P: 792 / 2211 @ c=12, r=7, X128.142 Y73.802 Z-15.171 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c012_r007.jpg 792 / 2211, ETA: 00:56:31.2037 @ 0.418435 items / sec XY3P: 793 / 2211 @ c=11, r=7, X127.969 Y73.806 Z-15.172 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c011_r007.jpg 793 / 2211, ETA: 00:56:28.8268 @ 0.418434 items / sec XY3P: 794 / 2211 @ c=10, r=7, X127.797 Y73.810 Z-15.173 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c010_r007.jpg 794 / 2211, ETA: 00:56:26.4510 @ 0.418432 items / sec XY3P: 795 / 2211 @ c=9, r=7, X127.624 Y73.814 Z-15.173 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c009_r007.jpg 795 / 2211, ETA: 00:56:24.0738 @ 0.418431 items / sec XY3P: 796 / 2211 @ c=8, r=7, X127.451 Y73.818 Z-15.174 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c008_r007.jpg 796 / 2211, ETA: 00:56:21.7005 @ 0.418429 items / sec XY3P: 797 / 2211 @ c=7, r=7, X127.278 Y73.822 Z-15.174 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c007_r007.jpg 797 / 2211, ETA: 00:56:19.3317 @ 0.418426 items / sec XY3P: 798 / 2211 @ c=6, r=7, X127.106 Y73.826 Z-15.175 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c006_r007.jpg 798 / 2211, ETA: 00:56:16.9423 @ 0.418426 items / sec XY3P: 799 / 2211 @ c=5, r=7, X126.933 Y73.830 Z-15.176 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c005_r007.jpg 799 / 2211, ETA: 00:56:14.5688 @ 0.418424 items / sec XY3P: 800 / 2211 @ c=4, r=7, X126.760 Y73.834 Z-15.176 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c004_r007.jpg 800 / 2211, ETA: 00:56:12.1919 @ 0.418422 items / sec XY3P: 801 / 2211 @ c=3, r=7, X126.587 Y73.838 Z-15.177 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c003_r007.jpg 801 / 2211, ETA: 00:56:09.8217 @ 0.418420 items / sec XY3P: 802 / 2211 @ c=2, r=7, X126.415 Y73.842 Z-15.177 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c002_r007.jpg 802 / 2211, ETA: 00:56:07.4498 @ 0.418418 items / sec XY3P: 803 / 2211 @ c=1, r=7, X126.242 Y73.846 Z-15.178 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c001_r007.jpg 803 / 2211, ETA: 00:56:05.0577 @ 0.418418 items / sec XY3P: 804 / 2211 @ c=0, r=7, X126.069 Y73.850 Z-15.178 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c000_r007.jpg 804 / 2211, ETA: 00:56:02.6815 @ 0.418416 items / sec XY3P: 805 / 2211 @ c=0, r=6, X126.069 Y74.011 Z-15.175 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c000_r006.jpg 805 / 2211, ETA: 00:56:00.3051 @ 0.418414 items / sec XY3P: 806 / 2211 @ c=1, r=6, X126.242 Y74.007 Z-15.174 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c001_r006.jpg 806 / 2211, ETA: 00:55:57.9284 @ 0.418413 items / sec XY3P: 807 / 2211 @ c=2, r=6, X126.415 Y74.003 Z-15.174 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c002_r006.jpg 807 / 2211, ETA: 00:55:55.5533 @ 0.418411 items / sec XY3P: 808 / 2211 @ c=3, r=6, X126.587 Y73.999 Z-15.173 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c003_r006.jpg 808 / 2211, ETA: 00:55:53.1711 @ 0.418410 items / sec XY3P: 809 / 2211 @ c=4, r=6, X126.760 Y73.995 Z-15.173 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c004_r006.jpg 809 / 2211, ETA: 00:55:50.4490 @ 0.418451 items / sec XY3P: 810 / 2211 @ c=5, r=6, X126.933 Y73.991 Z-15.172 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c005_r006.jpg 810 / 2211, ETA: 00:55:47.7267 @ 0.418493 items / sec XY3P: 811 / 2211 @ c=6, r=6, X127.106 Y73.987 Z-15.171 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c006_r006.jpg 811 / 2211, ETA: 00:55:45.3531 @ 0.418491 items / sec XY3P: 812 / 2211 @ c=7, r=6, X127.278 Y73.983 Z-15.171 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c007_r006.jpg 812 / 2211, ETA: 00:55:42.9743 @ 0.418490 items / sec XY3P: 813 / 2211 @ c=8, r=6, X127.451 Y73.979 Z-15.170 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c008_r006.jpg 813 / 2211, ETA: 00:55:40.5980 @ 0.418488 items / sec XY3P: 814 / 2211 @ c=9, r=6, X127.624 Y73.975 Z-15.170 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c009_r006.jpg 814 / 2211, ETA: 00:55:38.2192 @ 0.418487 items / sec XY3P: 815 / 2211 @ c=10, r=6, X127.797 Y73.971 Z-15.169 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c010_r006.jpg 815 / 2211, ETA: 00:55:35.8445 @ 0.418485 items / sec XY3P: 816 / 2211 @ c=11, r=6, X127.969 Y73.967 Z-15.169 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c011_r006.jpg 816 / 2211, ETA: 00:55:33.4720 @ 0.418483 items / sec XY3P: 817 / 2211 @ c=12, r=6, X128.142 Y73.963 Z-15.168 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c012_r006.jpg 817 / 2211, ETA: 00:55:31.0930 @ 0.418481 items / sec XY3P: 818 / 2211 @ c=13, r=6, X128.315 Y73.959 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c013_r006.jpg 818 / 2211, ETA: 00:55:28.7152 @ 0.418480 items / sec XY3P: 819 / 2211 @ c=14, r=6, X128.488 Y73.955 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c014_r006.jpg 819 / 2211, ETA: 00:55:26.3392 @ 0.418478 items / sec XY3P: 820 / 2211 @ c=15, r=6, X128.660 Y73.951 Z-15.166 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c015_r006.jpg 820 / 2211, ETA: 00:55:23.9603 @ 0.418477 items / sec XY3P: 821 / 2211 @ c=16, r=6, X128.833 Y73.947 Z-15.166 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c016_r006.jpg 821 / 2211, ETA: 00:55:21.5889 @ 0.418474 items / sec XY3P: 822 / 2211 @ c=17, r=6, X129.006 Y73.943 Z-15.165 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c017_r006.jpg 822 / 2211, ETA: 00:55:19.2093 @ 0.418473 items / sec XY3P: 823 / 2211 @ c=18, r=6, X129.179 Y73.939 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c018_r006.jpg 823 / 2211, ETA: 00:55:16.8325 @ 0.418472 items / sec XY3P: 824 / 2211 @ c=19, r=6, X129.351 Y73.935 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c019_r006.jpg 824 / 2211, ETA: 00:55:14.4557 @ 0.418470 items / sec XY3P: 825 / 2211 @ c=20, r=6, X129.524 Y73.931 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c020_r006.jpg 825 / 2211, ETA: 00:55:12.0786 @ 0.418468 items / sec XY3P: 826 / 2211 @ c=21, r=6, X129.697 Y73.927 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c021_r006.jpg 826 / 2211, ETA: 00:55:09.7043 @ 0.418466 items / sec XY3P: 827 / 2211 @ c=22, r=6, X129.870 Y73.923 Z-15.162 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c022_r006.jpg 827 / 2211, ETA: 00:55:07.3255 @ 0.418465 items / sec XY3P: 828 / 2211 @ c=23, r=6, X130.042 Y73.919 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c023_r006.jpg 828 / 2211, ETA: 00:55:04.6145 @ 0.418506 items / sec XY3P: 829 / 2211 @ c=24, r=6, X130.215 Y73.915 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c024_r006.jpg 829 / 2211, ETA: 00:55:01.9043 @ 0.418546 items / sec XY3P: 830 / 2211 @ c=25, r=6, X130.388 Y73.911 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c025_r006.jpg 830 / 2211, ETA: 00:54:59.5313 @ 0.418544 items / sec XY3P: 831 / 2211 @ c=26, r=6, X130.560 Y73.908 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c026_r006.jpg 831 / 2211, ETA: 00:54:57.1516 @ 0.418543 items / sec XY3P: 832 / 2211 @ c=27, r=6, X130.733 Y73.904 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c027_r006.jpg 832 / 2211, ETA: 00:54:54.7768 @ 0.418541 items / sec XY3P: 833 / 2211 @ c=28, r=6, X130.906 Y73.900 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c028_r006.jpg 833 / 2211, ETA: 00:54:52.4010 @ 0.418540 items / sec XY3P: 834 / 2211 @ c=29, r=6, X131.079 Y73.896 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c029_r006.jpg 834 / 2211, ETA: 00:54:50.0244 @ 0.418538 items / sec XY3P: 835 / 2211 @ c=30, r=6, X131.251 Y73.892 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c030_r006.jpg 835 / 2211, ETA: 00:54:47.6506 @ 0.418536 items / sec XY3P: 836 / 2211 @ c=31, r=6, X131.424 Y73.888 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c031_r006.jpg 836 / 2211, ETA: 00:54:45.2722 @ 0.418535 items / sec XY3P: 837 / 2211 @ c=32, r=6, X131.597 Y73.884 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c032_r006.jpg 837 / 2211, ETA: 00:54:42.8968 @ 0.418533 items / sec XY3P: 838 / 2211 @ c=33, r=6, X131.770 Y73.880 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c033_r006.jpg 838 / 2211, ETA: 00:54:40.5224 @ 0.418531 items / sec XY3P: 839 / 2211 @ c=34, r=6, X131.942 Y73.876 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c034_r006.jpg 839 / 2211, ETA: 00:54:38.1436 @ 0.418530 items / sec XY3P: 840 / 2211 @ c=35, r=6, X132.115 Y73.872 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c035_r006.jpg 840 / 2211, ETA: 00:54:35.7702 @ 0.418528 items / sec XY3P: 841 / 2211 @ c=36, r=6, X132.288 Y73.868 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c036_r006.jpg 841 / 2211, ETA: 00:54:33.3910 @ 0.418526 items / sec XY3P: 842 / 2211 @ c=37, r=6, X132.461 Y73.864 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c037_r006.jpg 842 / 2211, ETA: 00:54:31.0147 @ 0.418525 items / sec XY3P: 843 / 2211 @ c=38, r=6, X132.633 Y73.860 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c038_r006.jpg 843 / 2211, ETA: 00:54:28.6381 @ 0.418523 items / sec XY3P: 844 / 2211 @ c=39, r=6, X132.806 Y73.856 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c039_r006.jpg 844 / 2211, ETA: 00:54:26.2628 @ 0.418521 items / sec XY3P: 845 / 2211 @ c=40, r=6, X132.979 Y73.852 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c040_r006.jpg 845 / 2211, ETA: 00:54:23.8883 @ 0.418519 items / sec XY3P: 846 / 2211 @ c=41, r=6, X133.152 Y73.848 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c041_r006.jpg 846 / 2211, ETA: 00:54:21.1881 @ 0.418559 items / sec XY3P: 847 / 2211 @ c=42, r=6, X133.325 Y73.844 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c042_r006.jpg 847 / 2211, ETA: 00:54:18.4879 @ 0.418599 items / sec XY3P: 848 / 2211 @ c=43, r=6, X133.497 Y73.840 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c043_r006.jpg 848 / 2211, ETA: 00:54:16.1127 @ 0.418597 items / sec XY3P: 849 / 2211 @ c=44, r=6, X133.670 Y73.836 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c044_r006.jpg 849 / 2211, ETA: 00:54:13.7386 @ 0.418595 items / sec XY3P: 850 / 2211 @ c=45, r=6, X133.843 Y73.832 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c045_r006.jpg 850 / 2211, ETA: 00:54:11.3613 @ 0.418594 items / sec XY3P: 851 / 2211 @ c=46, r=6, X134.016 Y73.828 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c046_r006.jpg 851 / 2211, ETA: 00:54:08.9863 @ 0.418592 items / sec XY3P: 852 / 2211 @ c=47, r=6, X134.188 Y73.824 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c047_r006.jpg 852 / 2211, ETA: 00:54:06.6106 @ 0.418590 items / sec XY3P: 853 / 2211 @ c=48, r=6, X134.361 Y73.820 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c048_r006.jpg 853 / 2211, ETA: 00:54:04.2335 @ 0.418589 items / sec XY3P: 854 / 2211 @ c=49, r=6, X134.534 Y73.816 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c049_r006.jpg 854 / 2211, ETA: 00:54:01.8616 @ 0.418587 items / sec XY3P: 855 / 2211 @ c=50, r=6, X134.707 Y73.812 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c050_r006.jpg 855 / 2211, ETA: 00:53:59.4826 @ 0.418585 items / sec XY3P: 856 / 2211 @ c=51, r=6, X134.879 Y73.808 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c051_r006.jpg 856 / 2211, ETA: 00:53:57.1080 @ 0.418583 items / sec XY3P: 857 / 2211 @ c=52, r=6, X135.052 Y73.804 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c052_r006.jpg 857 / 2211, ETA: 00:53:54.7307 @ 0.418582 items / sec XY3P: 858 / 2211 @ c=53, r=6, X135.225 Y73.800 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c053_r006.jpg 858 / 2211, ETA: 00:53:52.3545 @ 0.418580 items / sec XY3P: 859 / 2211 @ c=54, r=6, X135.398 Y73.796 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c054_r006.jpg 859 / 2211, ETA: 00:53:49.9813 @ 0.418578 items / sec XY3P: 860 / 2211 @ c=55, r=6, X135.570 Y73.793 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c055_r006.jpg 860 / 2211, ETA: 00:53:47.6026 @ 0.418577 items / sec XY3P: 861 / 2211 @ c=56, r=6, X135.743 Y73.789 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c056_r006.jpg 861 / 2211, ETA: 00:53:45.2269 @ 0.418575 items / sec XY3P: 862 / 2211 @ c=57, r=6, X135.916 Y73.785 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c057_r006.jpg 862 / 2211, ETA: 00:53:42.8502 @ 0.418574 items / sec XY3P: 863 / 2211 @ c=58, r=6, X136.089 Y73.781 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c058_r006.jpg 863 / 2211, ETA: 00:53:40.4740 @ 0.418572 items / sec XY3P: 864 / 2211 @ c=59, r=6, X136.261 Y73.777 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c059_r006.jpg 864 / 2211, ETA: 00:53:38.1003 @ 0.418570 items / sec XY3P: 865 / 2211 @ c=60, r=6, X136.434 Y73.773 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c060_r006.jpg 865 / 2211, ETA: 00:53:35.4111 @ 0.418609 items / sec XY3P: 866 / 2211 @ c=61, r=6, X136.607 Y73.769 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c061_r006.jpg 866 / 2211, ETA: 00:53:32.7245 @ 0.418648 items / sec XY3P: 867 / 2211 @ c=62, r=6, X136.780 Y73.765 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c062_r006.jpg 867 / 2211, ETA: 00:53:30.3467 @ 0.418646 items / sec XY3P: 868 / 2211 @ c=63, r=6, X136.952 Y73.761 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c063_r006.jpg 868 / 2211, ETA: 00:53:27.9770 @ 0.418644 items / sec XY3P: 869 / 2211 @ c=64, r=6, X137.125 Y73.757 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c064_r006.jpg 869 / 2211, ETA: 00:53:25.5982 @ 0.418643 items / sec XY3P: 870 / 2211 @ c=65, r=6, X137.298 Y73.753 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c065_r006.jpg 870 / 2211, ETA: 00:53:23.2248 @ 0.418641 items / sec XY3P: 871 / 2211 @ c=66, r=6, X137.471 Y73.749 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c066_r006.jpg 871 / 2211, ETA: 00:53:20.8478 @ 0.418639 items / sec XY3P: 872 / 2211 @ c=67, r=6, X137.643 Y73.745 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c067_r006.jpg 872 / 2211, ETA: 00:53:18.4728 @ 0.418637 items / sec XY3P: 873 / 2211 @ c=68, r=6, X137.816 Y73.741 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c068_r006.jpg 873 / 2211, ETA: 00:53:16.0988 @ 0.418635 items / sec XY3P: 874 / 2211 @ c=69, r=6, X137.989 Y73.737 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c069_r006.jpg 874 / 2211, ETA: 00:53:13.7235 @ 0.418634 items / sec XY3P: 875 / 2211 @ c=70, r=6, X138.161 Y73.733 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c070_r006.jpg 875 / 2211, ETA: 00:53:11.3509 @ 0.418631 items / sec XY3P: 876 / 2211 @ c=71, r=6, X138.334 Y73.729 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c071_r006.jpg 876 / 2211, ETA: 00:53:08.9726 @ 0.418630 items / sec XY3P: 877 / 2211 @ c=72, r=6, X138.507 Y73.725 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c072_r006.jpg 877 / 2211, ETA: 00:53:06.5942 @ 0.418629 items / sec XY3P: 878 / 2211 @ c=73, r=6, X138.680 Y73.721 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c073_r006.jpg 878 / 2211, ETA: 00:53:04.2164 @ 0.418627 items / sec XY3P: 879 / 2211 @ c=74, r=6, X138.852 Y73.717 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c074_r006.jpg 879 / 2211, ETA: 00:53:01.8510 @ 0.418624 items / sec XY3P: 880 / 2211 @ c=75, r=6, X139.025 Y73.713 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c075_r006.jpg 880 / 2211, ETA: 00:52:59.4661 @ 0.418624 items / sec XY3P: 881 / 2211 @ c=76, r=6, X139.198 Y73.709 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c076_r006.jpg 881 / 2211, ETA: 00:52:57.0957 @ 0.418621 items / sec XY3P: 882 / 2211 @ c=77, r=6, X139.371 Y73.705 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c077_r006.jpg 882 / 2211, ETA: 00:52:54.7140 @ 0.418620 items / sec XY3P: 883 / 2211 @ c=78, r=6, X139.543 Y73.701 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c078_r006.jpg 883 / 2211, ETA: 00:52:52.3377 @ 0.418619 items / sec XY3P: 884 / 2211 @ c=79, r=6, X139.716 Y73.697 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c079_r006.jpg 884 / 2211, ETA: 00:52:49.9708 @ 0.418616 items / sec XY3P: 885 / 2211 @ c=80, r=6, X139.889 Y73.693 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c080_r006.jpg 885 / 2211, ETA: 00:52:47.5854 @ 0.418615 items / sec XY3P: 886 / 2211 @ c=81, r=6, X140.062 Y73.689 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c081_r006.jpg 886 / 2211, ETA: 00:52:45.2129 @ 0.418613 items / sec XY3P: 887 / 2211 @ c=82, r=6, X140.234 Y73.685 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c082_r006.jpg 887 / 2211, ETA: 00:52:42.8330 @ 0.418612 items / sec XY3P: 888 / 2211 @ c=83, r=6, X140.407 Y73.682 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c083_r006.jpg 888 / 2211, ETA: 00:52:40.4570 @ 0.418610 items / sec XY3P: 889 / 2211 @ c=84, r=6, X140.580 Y73.678 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c084_r006.jpg 889 / 2211, ETA: 00:52:38.0801 @ 0.418609 items / sec XY3P: 890 / 2211 @ c=85, r=6, X140.753 Y73.674 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c085_r006.jpg 890 / 2211, ETA: 00:52:35.7039 @ 0.418607 items / sec XY3P: 891 / 2211 @ c=86, r=6, X140.925 Y73.670 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c086_r006.jpg 891 / 2211, ETA: 00:52:33.3308 @ 0.418605 items / sec XY3P: 892 / 2211 @ c=87, r=6, X141.098 Y73.666 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c087_r006.jpg 892 / 2211, ETA: 00:52:30.9513 @ 0.418604 items / sec XY3P: 893 / 2211 @ c=88, r=6, X141.271 Y73.662 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c088_r006.jpg 893 / 2211, ETA: 00:52:28.5747 @ 0.418602 items / sec XY3P: 894 / 2211 @ c=89, r=6, X141.444 Y73.658 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c089_r006.jpg 894 / 2211, ETA: 00:52:26.1982 @ 0.418600 items / sec XY3P: 895 / 2211 @ c=90, r=6, X141.617 Y73.654 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c090_r006.jpg 895 / 2211, ETA: 00:52:23.8200 @ 0.418599 items / sec XY3P: 896 / 2211 @ c=91, r=6, X141.789 Y73.650 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c091_r006.jpg 896 / 2211, ETA: 00:52:21.4481 @ 0.418597 items / sec XY3P: 897 / 2211 @ c=92, r=6, X141.962 Y73.646 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c092_r006.jpg 897 / 2211, ETA: 00:52:19.0687 @ 0.418595 items / sec XY3P: 898 / 2211 @ c=93, r=6, X142.135 Y73.642 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c093_r006.jpg 898 / 2211, ETA: 00:52:16.6913 @ 0.418594 items / sec XY3P: 899 / 2211 @ c=94, r=6, X142.308 Y73.638 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c094_r006.jpg 899 / 2211, ETA: 00:52:14.3152 @ 0.418592 items / sec XY3P: 900 / 2211 @ c=95, r=6, X142.480 Y73.634 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c095_r006.jpg 900 / 2211, ETA: 00:52:11.9369 @ 0.418591 items / sec XY3P: 901 / 2211 @ c=96, r=6, X142.653 Y73.630 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c096_r006.jpg 901 / 2211, ETA: 00:52:09.5634 @ 0.418589 items / sec XY3P: 902 / 2211 @ c=97, r=6, X142.826 Y73.626 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c097_r006.jpg 902 / 2211, ETA: 00:52:06.8958 @ 0.418626 items / sec XY3P: 903 / 2211 @ c=98, r=6, X142.999 Y73.622 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c098_r006.jpg 903 / 2211, ETA: 00:52:04.5176 @ 0.418625 items / sec XY3P: 904 / 2211 @ c=99, r=6, X143.171 Y73.618 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c099_r006.jpg 904 / 2211, ETA: 00:52:02.1408 @ 0.418623 items / sec XY3P: 905 / 2211 @ c=100, r=6, X143.344 Y73.614 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c100_r006.jpg 905 / 2211, ETA: 00:51:59.7643 @ 0.418621 items / sec XY3P: 906 / 2211 @ c=101, r=6, X143.517 Y73.610 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c101_r006.jpg 906 / 2211, ETA: 00:51:57.3875 @ 0.418620 items / sec XY3P: 907 / 2211 @ c=102, r=6, X143.690 Y73.606 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c102_r006.jpg 907 / 2211, ETA: 00:51:55.0134 @ 0.418618 items / sec XY3P: 908 / 2211 @ c=103, r=6, X143.862 Y73.602 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c103_r006.jpg 908 / 2211, ETA: 00:51:52.6343 @ 0.418616 items / sec XY3P: 909 / 2211 @ c=104, r=6, X144.035 Y73.598 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c104_r006.jpg 909 / 2211, ETA: 00:51:50.2572 @ 0.418615 items / sec XY3P: 910 / 2211 @ c=105, r=6, X144.208 Y73.594 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c105_r006.jpg 910 / 2211, ETA: 00:51:47.8809 @ 0.418613 items / sec XY3P: 911 / 2211 @ c=106, r=6, X144.381 Y73.590 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c106_r006.jpg 911 / 2211, ETA: 00:51:45.5037 @ 0.418612 items / sec XY3P: 912 / 2211 @ c=107, r=6, X144.553 Y73.586 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c107_r006.jpg 912 / 2211, ETA: 00:51:43.1299 @ 0.418610 items / sec XY3P: 913 / 2211 @ c=108, r=6, X144.726 Y73.582 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c108_r006.jpg 913 / 2211, ETA: 00:51:40.7503 @ 0.418608 items / sec XY3P: 914 / 2211 @ c=109, r=6, X144.899 Y73.578 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c109_r006.jpg 914 / 2211, ETA: 00:51:38.3729 @ 0.418607 items / sec XY3P: 915 / 2211 @ c=110, r=6, X145.072 Y73.574 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c110_r006.jpg 915 / 2211, ETA: 00:51:35.9960 @ 0.418605 items / sec XY3P: 916 / 2211 @ c=111, r=6, X145.244 Y73.570 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c111_r006.jpg 916 / 2211, ETA: 00:51:33.6192 @ 0.418604 items / sec XY3P: 917 / 2211 @ c=112, r=6, X145.417 Y73.567 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c112_r006.jpg 917 / 2211, ETA: 00:51:31.2445 @ 0.418602 items / sec XY3P: 918 / 2211 @ c=113, r=6, X145.590 Y73.563 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c113_r006.jpg 918 / 2211, ETA: 00:51:29.1544 @ 0.418561 items / sec XY3P: 919 / 2211 @ c=114, r=6, X145.762 Y73.559 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c114_r006.jpg 919 / 2211, ETA: 00:51:26.7713 @ 0.418560 items / sec XY3P: 920 / 2211 @ c=115, r=6, X145.935 Y73.555 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c115_r006.jpg 920 / 2211, ETA: 00:51:24.3907 @ 0.418559 items / sec XY3P: 921 / 2211 @ c=116, r=6, X146.108 Y73.551 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c116_r006.jpg 921 / 2211, ETA: 00:51:21.7333 @ 0.418596 items / sec XY3P: 922 / 2211 @ c=117, r=6, X146.281 Y73.547 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c117_r006.jpg 922 / 2211, ETA: 00:51:19.0770 @ 0.418632 items / sec XY3P: 923 / 2211 @ c=118, r=6, X146.453 Y73.543 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c118_r006.jpg 923 / 2211, ETA: 00:51:16.6995 @ 0.418630 items / sec XY3P: 924 / 2211 @ c=119, r=6, X146.626 Y73.539 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c119_r006.jpg 924 / 2211, ETA: 00:51:14.3233 @ 0.418629 items / sec XY3P: 925 / 2211 @ c=120, r=6, X146.799 Y73.535 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c120_r006.jpg 925 / 2211, ETA: 00:51:11.9480 @ 0.418627 items / sec XY3P: 926 / 2211 @ c=121, r=6, X146.972 Y73.531 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c121_r006.jpg 926 / 2211, ETA: 00:51:09.5689 @ 0.418626 items / sec XY3P: 927 / 2211 @ c=122, r=6, X147.144 Y73.527 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c122_r006.jpg 927 / 2211, ETA: 00:51:07.1916 @ 0.418624 items / sec XY3P: 928 / 2211 @ c=123, r=6, X147.317 Y73.523 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c123_r006.jpg 928 / 2211, ETA: 00:51:04.8155 @ 0.418622 items / sec XY3P: 929 / 2211 @ c=124, r=6, X147.490 Y73.519 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c124_r006.jpg 929 / 2211, ETA: 00:51:02.4381 @ 0.418621 items / sec XY3P: 930 / 2211 @ c=125, r=6, X147.663 Y73.515 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c125_r006.jpg 930 / 2211, ETA: 00:51:00.0628 @ 0.418619 items / sec XY3P: 931 / 2211 @ c=126, r=6, X147.835 Y73.511 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c126_r006.jpg 931 / 2211, ETA: 00:50:57.6835 @ 0.418618 items / sec XY3P: 932 / 2211 @ c=127, r=6, X148.008 Y73.507 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c127_r006.jpg 932 / 2211, ETA: 00:50:55.3069 @ 0.418616 items / sec XY3P: 933 / 2211 @ c=128, r=6, X148.181 Y73.503 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c128_r006.jpg 933 / 2211, ETA: 00:50:52.9296 @ 0.418614 items / sec XY3P: 934 / 2211 @ c=129, r=6, X148.354 Y73.499 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c129_r006.jpg 934 / 2211, ETA: 00:50:50.5515 @ 0.418613 items / sec XY3P: 935 / 2211 @ c=130, r=6, X148.526 Y73.495 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c130_r006.jpg 935 / 2211, ETA: 00:50:48.1771 @ 0.418611 items / sec XY3P: 936 / 2211 @ c=131, r=6, X148.699 Y73.491 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c131_r006.jpg 936 / 2211, ETA: 00:50:45.7971 @ 0.418610 items / sec XY3P: 937 / 2211 @ c=132, r=6, X148.872 Y73.487 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c132_r006.jpg 937 / 2211, ETA: 00:50:43.4203 @ 0.418608 items / sec XY3P: 938 / 2211 @ c=133, r=6, X149.045 Y73.483 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c133_r006.jpg 938 / 2211, ETA: 00:50:41.0419 @ 0.418607 items / sec XY3P: 939 / 2211 @ c=134, r=6, X149.218 Y73.479 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c134_r006.jpg 939 / 2211, ETA: 00:50:38.3942 @ 0.418642 items / sec XY3P: 940 / 2211 @ c=135, r=6, X149.390 Y73.475 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c135_r006.jpg 940 / 2211, ETA: 00:50:35.7469 @ 0.418678 items / sec XY3P: 941 / 2211 @ c=136, r=6, X149.563 Y73.471 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c136_r006.jpg 941 / 2211, ETA: 00:50:33.3685 @ 0.418676 items / sec XY3P: 942 / 2211 @ c=137, r=6, X149.736 Y73.467 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c137_r006.jpg 942 / 2211, ETA: 00:50:31.2704 @ 0.418636 items / sec XY3P: 943 / 2211 @ c=138, r=6, X149.909 Y73.463 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c138_r006.jpg 943 / 2211, ETA: 00:50:28.8851 @ 0.418636 items / sec XY3P: 944 / 2211 @ c=139, r=6, X150.081 Y73.459 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c139_r006.jpg 944 / 2211, ETA: 00:50:26.5092 @ 0.418634 items / sec XY3P: 945 / 2211 @ c=140, r=6, X150.254 Y73.455 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c140_r006.jpg 945 / 2211, ETA: 00:50:24.1315 @ 0.418633 items / sec XY3P: 946 / 2211 @ c=141, r=6, X150.427 Y73.452 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c141_r006.jpg 946 / 2211, ETA: 00:50:21.7653 @ 0.418629 items / sec XY3P: 947 / 2211 @ c=142, r=6, X150.600 Y73.448 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c142_r006.jpg 947 / 2211, ETA: 00:50:19.3780 @ 0.418629 items / sec XY3P: 948 / 2211 @ c=143, r=6, X150.772 Y73.444 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c143_r006.jpg 948 / 2211, ETA: 00:50:17.0040 @ 0.418627 items / sec XY3P: 949 / 2211 @ c=144, r=6, X150.945 Y73.440 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c144_r006.jpg 949 / 2211, ETA: 00:50:14.6323 @ 0.418625 items / sec XY3P: 950 / 2211 @ c=145, r=6, X151.118 Y73.436 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c145_r006.jpg 950 / 2211, ETA: 00:50:12.2437 @ 0.418625 items / sec XY3P: 951 / 2211 @ c=146, r=6, X151.291 Y73.432 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c146_r006.jpg 951 / 2211, ETA: 00:50:09.8668 @ 0.418623 items / sec XY3P: 952 / 2211 @ c=147, r=6, X151.463 Y73.428 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c147_r006.jpg 952 / 2211, ETA: 00:50:07.4892 @ 0.418622 items / sec XY3P: 953 / 2211 @ c=148, r=6, X151.636 Y73.424 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c148_r006.jpg 953 / 2211, ETA: 00:50:05.1111 @ 0.418620 items / sec XY3P: 954 / 2211 @ c=149, r=6, X151.809 Y73.420 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c149_r006.jpg 954 / 2211, ETA: 00:50:02.7363 @ 0.418618 items / sec XY3P: 955 / 2211 @ c=150, r=6, X151.982 Y73.416 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c150_r006.jpg 955 / 2211, ETA: 00:50:00.3565 @ 0.418617 items / sec XY3P: 956 / 2211 @ c=151, r=6, X152.154 Y73.412 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c151_r006.jpg 956 / 2211, ETA: 00:49:57.9777 @ 0.418616 items / sec XY3P: 957 / 2211 @ c=152, r=6, X152.327 Y73.408 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c152_r006.jpg 957 / 2211, ETA: 00:49:55.6085 @ 0.418613 items / sec XY3P: 958 / 2211 @ c=153, r=6, X152.500 Y73.404 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c153_r006.jpg 958 / 2211, ETA: 00:49:53.2225 @ 0.418612 items / sec XY3P: 959 / 2211 @ c=154, r=6, X152.673 Y73.400 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c154_r006.jpg 959 / 2211, ETA: 00:49:50.5843 @ 0.418647 items / sec XY3P: 960 / 2211 @ c=155, r=6, X152.845 Y73.396 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c155_r006.jpg 960 / 2211, ETA: 00:49:48.2089 @ 0.418645 items / sec XY3P: 961 / 2211 @ c=156, r=6, X153.018 Y73.392 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c156_r006.jpg 961 / 2211, ETA: 00:49:45.8292 @ 0.418644 items / sec XY3P: 962 / 2211 @ c=157, r=6, X153.191 Y73.388 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c157_r006.jpg 962 / 2211, ETA: 00:49:43.4517 @ 0.418643 items / sec XY3P: 963 / 2211 @ c=158, r=6, X153.363 Y73.384 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c158_r006.jpg 963 / 2211, ETA: 00:49:41.0743 @ 0.418641 items / sec XY3P: 964 / 2211 @ c=159, r=6, X153.536 Y73.380 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c159_r006.jpg 964 / 2211, ETA: 00:49:38.6948 @ 0.418640 items / sec XY3P: 965 / 2211 @ c=160, r=6, X153.709 Y73.376 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c160_r006.jpg 965 / 2211, ETA: 00:49:36.3213 @ 0.418638 items / sec XY3P: 966 / 2211 @ c=161, r=6, X153.882 Y73.372 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c161_r006.jpg 966 / 2211, ETA: 00:49:33.9411 @ 0.418636 items / sec XY3P: 967 / 2211 @ c=162, r=6, X154.054 Y73.368 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c162_r006.jpg 967 / 2211, ETA: 00:49:31.5641 @ 0.418635 items / sec XY3P: 968 / 2211 @ c=163, r=6, X154.227 Y73.364 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c163_r006.jpg 968 / 2211, ETA: 00:49:29.1858 @ 0.418633 items / sec XY3P: 969 / 2211 @ c=164, r=6, X154.400 Y73.360 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c164_r006.jpg 969 / 2211, ETA: 00:49:26.8088 @ 0.418632 items / sec XY3P: 970 / 2211 @ c=165, r=6, X154.573 Y73.356 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c165_r006.jpg 970 / 2211, ETA: 00:49:24.4334 @ 0.418630 items / sec XY3P: 971 / 2211 @ c=166, r=6, X154.745 Y73.352 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c166_r006.jpg 971 / 2211, ETA: 00:49:22.0525 @ 0.418629 items / sec XY3P: 972 / 2211 @ c=167, r=6, X154.918 Y73.348 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c167_r006.jpg 972 / 2211, ETA: 00:49:19.6742 @ 0.418627 items / sec XY3P: 973 / 2211 @ c=168, r=6, X155.091 Y73.344 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c168_r006.jpg 973 / 2211, ETA: 00:49:17.2968 @ 0.418626 items / sec XY3P: 974 / 2211 @ c=169, r=6, X155.264 Y73.341 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c169_r006.jpg 974 / 2211, ETA: 00:49:14.9190 @ 0.418624 items / sec XY3P: 975 / 2211 @ c=170, r=6, X155.436 Y73.337 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c170_r006.jpg 975 / 2211, ETA: 00:49:12.5427 @ 0.418622 items / sec XY3P: 976 / 2211 @ c=171, r=6, X155.609 Y73.333 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c171_r006.jpg 976 / 2211, ETA: 00:49:10.1629 @ 0.418621 items / sec XY3P: 977 / 2211 @ c=172, r=6, X155.782 Y73.329 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c172_r006.jpg 977 / 2211, ETA: 00:49:07.5328 @ 0.418655 items / sec XY3P: 978 / 2211 @ c=173, r=6, X155.955 Y73.325 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c173_r006.jpg 978 / 2211, ETA: 00:49:04.9100 @ 0.418689 items / sec XY3P: 979 / 2211 @ c=174, r=6, X156.127 Y73.321 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c174_r006.jpg 979 / 2211, ETA: 00:49:02.7843 @ 0.418651 items / sec XY3P: 980 / 2211 @ c=175, r=6, X156.300 Y73.317 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c175_r006.jpg 980 / 2211, ETA: 00:49:00.3984 @ 0.418651 items / sec XY3P: 981 / 2211 @ c=176, r=6, X156.473 Y73.313 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c176_r006.jpg 981 / 2211, ETA: 00:48:58.0211 @ 0.418649 items / sec XY3P: 982 / 2211 @ c=177, r=6, X156.646 Y73.309 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c177_r006.jpg 982 / 2211, ETA: 00:48:55.6436 @ 0.418648 items / sec XY3P: 983 / 2211 @ c=178, r=6, X156.819 Y73.305 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c178_r006.jpg 983 / 2211, ETA: 00:48:53.2681 @ 0.418646 items / sec XY3P: 984 / 2211 @ c=179, r=6, X156.991 Y73.301 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c179_r006.jpg 984 / 2211, ETA: 00:48:50.8876 @ 0.418645 items / sec XY3P: 985 / 2211 @ c=180, r=6, X157.164 Y73.297 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c180_r006.jpg 985 / 2211, ETA: 00:48:48.5094 @ 0.418643 items / sec XY3P: 986 / 2211 @ c=181, r=6, X157.337 Y73.293 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c181_r006.jpg 986 / 2211, ETA: 00:48:46.1315 @ 0.418641 items / sec XY3P: 987 / 2211 @ c=182, r=6, X157.510 Y73.289 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c182_r006.jpg 987 / 2211, ETA: 00:48:43.7546 @ 0.418640 items / sec XY3P: 988 / 2211 @ c=183, r=6, X157.682 Y73.285 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c183_r006.jpg 988 / 2211, ETA: 00:48:41.3784 @ 0.418638 items / sec XY3P: 989 / 2211 @ c=184, r=6, X157.855 Y73.281 Z-15.066 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c184_r006.jpg 989 / 2211, ETA: 00:48:38.9973 @ 0.418637 items / sec XY3P: 990 / 2211 @ c=185, r=6, X158.028 Y73.277 Z-15.066 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c185_r006.jpg 990 / 2211, ETA: 00:48:36.6201 @ 0.418635 items / sec XY3P: 991 / 2211 @ c=186, r=6, X158.201 Y73.273 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c186_r006.jpg 991 / 2211, ETA: 00:48:34.2411 @ 0.418634 items / sec XY3P: 992 / 2211 @ c=187, r=6, X158.373 Y73.269 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c187_r006.jpg 992 / 2211, ETA: 00:48:31.8627 @ 0.418632 items / sec XY3P: 993 / 2211 @ c=188, r=6, X158.546 Y73.265 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c188_r006.jpg 993 / 2211, ETA: 00:48:29.4870 @ 0.418630 items / sec XY3P: 994 / 2211 @ c=189, r=6, X158.719 Y73.261 Z-15.063 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c189_r006.jpg 994 / 2211, ETA: 00:48:27.1050 @ 0.418630 items / sec XY3P: 995 / 2211 @ c=190, r=6, X158.892 Y73.257 Z-15.063 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c190_r006.jpg 995 / 2211, ETA: 00:48:24.4835 @ 0.418663 items / sec XY3P: 996 / 2211 @ c=191, r=6, X159.064 Y73.253 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c191_r006.jpg 996 / 2211, ETA: 00:48:21.8624 @ 0.418697 items / sec XY3P: 997 / 2211 @ c=192, r=6, X159.237 Y73.249 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c192_r006.jpg 997 / 2211, ETA: 00:48:19.4868 @ 0.418695 items / sec XY3P: 998 / 2211 @ c=193, r=6, X159.410 Y73.245 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c193_r006.jpg 998 / 2211, ETA: 00:48:17.1063 @ 0.418694 items / sec XY3P: 999 / 2211 @ c=194, r=6, X159.583 Y73.241 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c194_r006.jpg 999 / 2211, ETA: 00:48:14.7297 @ 0.418692 items / sec XY3P: 1000 / 2211 @ c=195, r=6, X159.755 Y73.237 Z-15.060 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c195_r006.jpg 1000 / 2211, ETA: 00:48:12.3519 @ 0.418690 items / sec XY3P: 1001 / 2211 @ c=196, r=6, X159.928 Y73.233 Z-15.059 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c196_r006.jpg 1001 / 2211, ETA: 00:48:09.9744 @ 0.418689 items / sec XY3P: 1002 / 2211 @ c=197, r=6, X160.101 Y73.229 Z-15.059 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c197_r006.jpg 1002 / 2211, ETA: 00:48:07.5993 @ 0.418687 items / sec XY3P: 1003 / 2211 @ c=198, r=6, X160.274 Y73.226 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c198_r006.jpg 1003 / 2211, ETA: 00:48:05.2200 @ 0.418686 items / sec XY3P: 1004 / 2211 @ c=199, r=6, X160.446 Y73.222 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c199_r006.jpg 1004 / 2211, ETA: 00:48:02.8412 @ 0.418684 items / sec XY3P: 1005 / 2211 @ c=200, r=6, X160.619 Y73.218 Z-15.057 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c200_r006.jpg 1005 / 2211, ETA: 00:48:00.4624 @ 0.418683 items / sec XY3P: 1006 / 2211 @ c=200, r=5, X160.619 Y73.378 Z-15.053 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c200_r005.jpg 1006 / 2211, ETA: 00:47:58.0850 @ 0.418681 items / sec XY3P: 1007 / 2211 @ c=199, r=5, X160.446 Y73.382 Z-15.054 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c199_r005.jpg 1007 / 2211, ETA: 00:47:55.7100 @ 0.418679 items / sec XY3P: 1008 / 2211 @ c=198, r=5, X160.274 Y73.386 Z-15.055 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c198_r005.jpg 1008 / 2211, ETA: 00:47:53.3293 @ 0.418678 items / sec XY3P: 1009 / 2211 @ c=197, r=5, X160.101 Y73.390 Z-15.055 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c197_r005.jpg 1009 / 2211, ETA: 00:47:50.9520 @ 0.418676 items / sec XY3P: 1010 / 2211 @ c=196, r=5, X159.928 Y73.394 Z-15.056 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c196_r005.jpg 1010 / 2211, ETA: 00:47:48.5731 @ 0.418675 items / sec XY3P: 1011 / 2211 @ c=195, r=5, X159.755 Y73.398 Z-15.056 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c195_r005.jpg 1011 / 2211, ETA: 00:47:46.1953 @ 0.418673 items / sec XY3P: 1012 / 2211 @ c=194, r=5, X159.583 Y73.402 Z-15.057 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c194_r005.jpg 1012 / 2211, ETA: 00:47:43.8186 @ 0.418672 items / sec XY3P: 1013 / 2211 @ c=193, r=5, X159.410 Y73.406 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c193_r005.jpg 1013 / 2211, ETA: 00:47:41.4387 @ 0.418671 items / sec XY3P: 1014 / 2211 @ c=192, r=5, X159.237 Y73.410 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c192_r005.jpg 1014 / 2211, ETA: 00:47:39.0630 @ 0.418669 items / sec XY3P: 1015 / 2211 @ c=191, r=5, X159.064 Y73.414 Z-15.059 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c191_r005.jpg 1015 / 2211, ETA: 00:47:36.6834 @ 0.418667 items / sec XY3P: 1016 / 2211 @ c=190, r=5, X158.892 Y73.418 Z-15.059 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c190_r005.jpg 1016 / 2211, ETA: 00:47:34.3044 @ 0.418666 items / sec XY3P: 1017 / 2211 @ c=189, r=5, X158.719 Y73.422 Z-15.060 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c189_r005.jpg 1017 / 2211, ETA: 00:47:31.9288 @ 0.418664 items / sec XY3P: 1018 / 2211 @ c=188, r=5, X158.546 Y73.426 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c188_r005.jpg 1018 / 2211, ETA: 00:47:29.5478 @ 0.418663 items / sec XY3P: 1019 / 2211 @ c=187, r=5, X158.373 Y73.430 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c187_r005.jpg 1019 / 2211, ETA: 00:47:27.1686 @ 0.418662 items / sec XY3P: 1020 / 2211 @ c=186, r=5, X158.201 Y73.434 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c186_r005.jpg 1020 / 2211, ETA: 00:47:24.7920 @ 0.418660 items / sec XY3P: 1021 / 2211 @ c=185, r=5, X158.028 Y73.438 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c185_r005.jpg 1021 / 2211, ETA: 00:47:22.6533 @ 0.418623 items / sec XY3P: 1022 / 2211 @ c=184, r=5, X157.855 Y73.442 Z-15.063 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c184_r005.jpg 1022 / 2211, ETA: 00:47:20.2746 @ 0.418621 items / sec XY3P: 1023 / 2211 @ c=183, r=5, X157.682 Y73.446 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c183_r005.jpg 1023 / 2211, ETA: 00:47:17.8872 @ 0.418621 items / sec XY3P: 1024 / 2211 @ c=182, r=5, X157.510 Y73.450 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c182_r005.jpg 1024 / 2211, ETA: 00:47:15.5080 @ 0.418620 items / sec XY3P: 1025 / 2211 @ c=181, r=5, X157.337 Y73.454 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c181_r005.jpg 1025 / 2211, ETA: 00:47:13.1304 @ 0.418618 items / sec XY3P: 1026 / 2211 @ c=180, r=5, X157.164 Y73.458 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c180_r005.jpg 1026 / 2211, ETA: 00:47:10.7506 @ 0.418617 items / sec XY3P: 1027 / 2211 @ c=179, r=5, X156.991 Y73.462 Z-15.066 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c179_r005.jpg 1027 / 2211, ETA: 00:47:08.3742 @ 0.418615 items / sec XY3P: 1028 / 2211 @ c=178, r=5, X156.819 Y73.466 Z-15.066 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c178_r005.jpg 1028 / 2211, ETA: 00:47:05.9923 @ 0.418614 items / sec XY3P: 1029 / 2211 @ c=177, r=5, X156.646 Y73.470 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c177_r005.jpg 1029 / 2211, ETA: 00:47:03.6129 @ 0.418613 items / sec XY3P: 1030 / 2211 @ c=176, r=5, X156.473 Y73.474 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c176_r005.jpg 1030 / 2211, ETA: 00:47:01.2348 @ 0.418611 items / sec XY3P: 1031 / 2211 @ c=175, r=5, X156.300 Y73.478 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c175_r005.jpg 1031 / 2211, ETA: 00:46:58.8543 @ 0.418610 items / sec XY3P: 1032 / 2211 @ c=174, r=5, X156.127 Y73.482 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c174_r005.jpg 1032 / 2211, ETA: 00:46:56.4775 @ 0.418608 items / sec XY3P: 1033 / 2211 @ c=173, r=5, X155.955 Y73.486 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c173_r005.jpg 1033 / 2211, ETA: 00:46:54.0964 @ 0.418607 items / sec XY3P: 1034 / 2211 @ c=172, r=5, X155.782 Y73.490 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c172_r005.jpg 1034 / 2211, ETA: 00:46:51.7168 @ 0.418605 items / sec XY3P: 1035 / 2211 @ c=171, r=5, X155.609 Y73.493 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c171_r005.jpg 1035 / 2211, ETA: 00:46:49.3376 @ 0.418604 items / sec XY3P: 1036 / 2211 @ c=170, r=5, X155.436 Y73.497 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c170_r005.jpg 1036 / 2211, ETA: 00:46:46.9579 @ 0.418603 items / sec XY3P: 1037 / 2211 @ c=169, r=5, X155.264 Y73.501 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c169_r005.jpg 1037 / 2211, ETA: 00:46:44.5808 @ 0.418601 items / sec XY3P: 1038 / 2211 @ c=168, r=5, X155.091 Y73.505 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c168_r005.jpg 1038 / 2211, ETA: 00:46:42.1986 @ 0.418600 items / sec XY3P: 1039 / 2211 @ c=167, r=5, X154.918 Y73.509 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c167_r005.jpg 1039 / 2211, ETA: 00:46:39.8197 @ 0.418598 items / sec XY3P: 1040 / 2211 @ c=166, r=5, X154.745 Y73.513 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c166_r005.jpg 1040 / 2211, ETA: 00:46:37.4406 @ 0.418597 items / sec XY3P: 1041 / 2211 @ c=165, r=5, X154.573 Y73.517 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c165_r005.jpg 1041 / 2211, ETA: 00:46:35.0608 @ 0.418596 items / sec XY3P: 1042 / 2211 @ c=164, r=5, X154.400 Y73.521 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c164_r005.jpg 1042 / 2211, ETA: 00:46:32.6834 @ 0.418594 items / sec XY3P: 1043 / 2211 @ c=163, r=5, X154.227 Y73.525 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c163_r005.jpg 1043 / 2211, ETA: 00:46:30.3011 @ 0.418593 items / sec XY3P: 1044 / 2211 @ c=162, r=5, X154.054 Y73.529 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c162_r005.jpg 1044 / 2211, ETA: 00:46:27.6983 @ 0.418625 items / sec XY3P: 1045 / 2211 @ c=161, r=5, X153.882 Y73.533 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c161_r005.jpg 1045 / 2211, ETA: 00:46:25.3189 @ 0.418624 items / sec XY3P: 1046 / 2211 @ c=160, r=5, X153.709 Y73.537 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c160_r005.jpg 1046 / 2211, ETA: 00:46:22.9394 @ 0.418622 items / sec XY3P: 1047 / 2211 @ c=159, r=5, X153.536 Y73.541 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c159_r005.jpg 1047 / 2211, ETA: 00:46:20.5671 @ 0.418620 items / sec XY3P: 1048 / 2211 @ c=158, r=5, X153.363 Y73.545 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c158_r005.jpg 1048 / 2211, ETA: 00:46:18.1833 @ 0.418619 items / sec XY3P: 1049 / 2211 @ c=157, r=5, X153.191 Y73.549 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c157_r005.jpg 1049 / 2211, ETA: 00:46:15.8014 @ 0.418618 items / sec XY3P: 1050 / 2211 @ c=156, r=5, X153.018 Y73.553 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c156_r005.jpg 1050 / 2211, ETA: 00:46:13.4227 @ 0.418616 items / sec XY3P: 1051 / 2211 @ c=155, r=5, X152.845 Y73.557 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c155_r005.jpg 1051 / 2211, ETA: 00:46:11.0428 @ 0.418615 items / sec XY3P: 1052 / 2211 @ c=154, r=5, X152.673 Y73.561 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c154_r005.jpg 1052 / 2211, ETA: 00:46:08.6638 @ 0.418613 items / sec XY3P: 1053 / 2211 @ c=153, r=5, X152.500 Y73.565 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c153_r005.jpg 1053 / 2211, ETA: 00:46:06.2857 @ 0.418612 items / sec XY3P: 1054 / 2211 @ c=152, r=5, X152.327 Y73.569 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c152_r005.jpg 1054 / 2211, ETA: 00:46:03.9108 @ 0.418610 items / sec XY3P: 1055 / 2211 @ c=151, r=5, X152.154 Y73.573 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c151_r005.jpg 1055 / 2211, ETA: 00:46:01.5241 @ 0.418609 items / sec XY3P: 1056 / 2211 @ c=150, r=5, X151.982 Y73.577 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c150_r005.jpg 1056 / 2211, ETA: 00:45:59.1447 @ 0.418608 items / sec XY3P: 1057 / 2211 @ c=149, r=5, X151.809 Y73.581 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c149_r005.jpg 1057 / 2211, ETA: 00:45:56.7654 @ 0.418607 items / sec XY3P: 1058 / 2211 @ c=148, r=5, X151.636 Y73.585 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c148_r005.jpg 1058 / 2211, ETA: 00:45:54.3871 @ 0.418605 items / sec XY3P: 1059 / 2211 @ c=147, r=5, X151.463 Y73.589 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c147_r005.jpg 1059 / 2211, ETA: 00:45:52.0054 @ 0.418604 items / sec XY3P: 1060 / 2211 @ c=146, r=5, X151.291 Y73.593 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c146_r005.jpg 1060 / 2211, ETA: 00:45:49.6256 @ 0.418602 items / sec XY3P: 1061 / 2211 @ c=145, r=5, X151.118 Y73.597 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c145_r005.jpg 1061 / 2211, ETA: 00:45:47.2523 @ 0.418600 items / sec XY3P: 1062 / 2211 @ c=144, r=5, X150.945 Y73.601 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c144_r005.jpg 1062 / 2211, ETA: 00:45:44.8658 @ 0.418600 items / sec XY3P: 1063 / 2211 @ c=143, r=5, X150.772 Y73.605 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c143_r005.jpg 1063 / 2211, ETA: 00:45:42.4876 @ 0.418598 items / sec XY3P: 1064 / 2211 @ c=142, r=5, X150.600 Y73.608 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c142_r005.jpg 1064 / 2211, ETA: 00:45:40.1060 @ 0.418597 items / sec XY3P: 1065 / 2211 @ c=141, r=5, X150.427 Y73.612 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c141_r005.jpg 1065 / 2211, ETA: 00:45:37.7261 @ 0.418596 items / sec XY3P: 1066 / 2211 @ c=140, r=5, X150.254 Y73.616 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c140_r005.jpg 1066 / 2211, ETA: 00:45:35.3462 @ 0.418594 items / sec XY3P: 1067 / 2211 @ c=139, r=5, X150.081 Y73.620 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c139_r005.jpg 1067 / 2211, ETA: 00:45:32.9663 @ 0.418593 items / sec XY3P: 1068 / 2211 @ c=138, r=5, X149.909 Y73.624 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c138_r005.jpg 1068 / 2211, ETA: 00:45:30.5941 @ 0.418590 items / sec XY3P: 1069 / 2211 @ c=137, r=5, X149.736 Y73.628 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c137_r005.jpg 1069 / 2211, ETA: 00:45:28.2059 @ 0.418590 items / sec XY3P: 1070 / 2211 @ c=136, r=5, X149.563 Y73.632 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c136_r005.jpg 1070 / 2211, ETA: 00:45:25.8250 @ 0.418589 items / sec XY3P: 1071 / 2211 @ c=135, r=5, X149.390 Y73.636 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c135_r005.jpg 1071 / 2211, ETA: 00:45:23.4455 @ 0.418587 items / sec XY3P: 1072 / 2211 @ c=134, r=5, X149.218 Y73.640 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c134_r005.jpg 1072 / 2211, ETA: 00:45:21.0654 @ 0.418586 items / sec XY3P: 1073 / 2211 @ c=133, r=5, X149.045 Y73.644 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c133_r005.jpg 1073 / 2211, ETA: 00:45:18.6870 @ 0.418584 items / sec XY3P: 1074 / 2211 @ c=132, r=5, X148.872 Y73.648 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c132_r005.jpg 1074 / 2211, ETA: 00:45:16.3051 @ 0.418583 items / sec XY3P: 1075 / 2211 @ c=131, r=5, X148.699 Y73.652 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c131_r005.jpg 1075 / 2211, ETA: 00:45:13.9310 @ 0.418581 items / sec XY3P: 1076 / 2211 @ c=130, r=5, X148.526 Y73.656 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c130_r005.jpg 1076 / 2211, ETA: 00:45:11.5440 @ 0.418581 items / sec XY3P: 1077 / 2211 @ c=129, r=5, X148.354 Y73.660 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c129_r005.jpg 1077 / 2211, ETA: 00:45:09.1646 @ 0.418579 items / sec XY3P: 1078 / 2211 @ c=128, r=5, X148.181 Y73.664 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c128_r005.jpg 1078 / 2211, ETA: 00:45:06.7853 @ 0.418578 items / sec XY3P: 1079 / 2211 @ c=127, r=5, X148.008 Y73.668 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c127_r005.jpg 1079 / 2211, ETA: 00:45:04.4030 @ 0.418577 items / sec XY3P: 1080 / 2211 @ c=126, r=5, X147.835 Y73.672 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c126_r005.jpg 1080 / 2211, ETA: 00:45:02.0227 @ 0.418575 items / sec XY3P: 1081 / 2211 @ c=125, r=5, X147.663 Y73.676 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c125_r005.jpg 1081 / 2211, ETA: 00:44:59.6419 @ 0.418574 items / sec XY3P: 1082 / 2211 @ c=124, r=5, X147.490 Y73.680 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c124_r005.jpg 1082 / 2211, ETA: 00:44:57.2677 @ 0.418572 items / sec XY3P: 1083 / 2211 @ c=123, r=5, X147.317 Y73.684 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c123_r005.jpg 1083 / 2211, ETA: 00:44:54.8824 @ 0.418571 items / sec XY3P: 1084 / 2211 @ c=122, r=5, X147.144 Y73.688 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c122_r005.jpg 1084 / 2211, ETA: 00:44:52.5012 @ 0.418570 items / sec XY3P: 1085 / 2211 @ c=121, r=5, X146.972 Y73.692 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c121_r005.jpg 1085 / 2211, ETA: 00:44:50.1198 @ 0.418569 items / sec XY3P: 1086 / 2211 @ c=120, r=5, X146.799 Y73.696 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c120_r005.jpg 1086 / 2211, ETA: 00:44:47.7402 @ 0.418567 items / sec XY3P: 1087 / 2211 @ c=119, r=5, X146.626 Y73.700 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c119_r005.jpg 1087 / 2211, ETA: 00:44:45.3589 @ 0.418566 items / sec XY3P: 1088 / 2211 @ c=118, r=5, X146.453 Y73.704 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c118_r005.jpg 1088 / 2211, ETA: 00:44:42.9803 @ 0.418564 items / sec XY3P: 1089 / 2211 @ c=117, r=5, X146.281 Y73.708 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c117_r005.jpg 1089 / 2211, ETA: 00:44:40.6038 @ 0.418562 items / sec XY3P: 1090 / 2211 @ c=116, r=5, X146.108 Y73.712 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c116_r005.jpg 1090 / 2211, ETA: 00:44:38.2171 @ 0.418562 items / sec XY3P: 1091 / 2211 @ c=115, r=5, X145.935 Y73.716 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c115_r005.jpg 1091 / 2211, ETA: 00:44:35.8359 @ 0.418561 items / sec XY3P: 1092 / 2211 @ c=114, r=5, X145.762 Y73.719 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c114_r005.jpg 1092 / 2211, ETA: 00:44:33.4559 @ 0.418559 items / sec XY3P: 1093 / 2211 @ c=113, r=5, X145.590 Y73.723 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c113_r005.jpg 1093 / 2211, ETA: 00:44:31.0759 @ 0.418558 items / sec XY3P: 1094 / 2211 @ c=112, r=5, X145.417 Y73.727 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c112_r005.jpg 1094 / 2211, ETA: 00:44:28.6945 @ 0.418557 items / sec XY3P: 1095 / 2211 @ c=111, r=5, X145.244 Y73.731 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c111_r005.jpg 1095 / 2211, ETA: 00:44:26.3172 @ 0.418555 items / sec XY3P: 1096 / 2211 @ c=110, r=5, X145.072 Y73.735 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c110_r005.jpg 1096 / 2211, ETA: 00:44:23.9335 @ 0.418554 items / sec XY3P: 1097 / 2211 @ c=109, r=5, X144.899 Y73.739 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c109_r005.jpg 1097 / 2211, ETA: 00:44:21.5506 @ 0.418553 items / sec XY3P: 1098 / 2211 @ c=108, r=5, X144.726 Y73.743 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c108_r005.jpg 1098 / 2211, ETA: 00:44:19.1694 @ 0.418552 items / sec XY3P: 1099 / 2211 @ c=107, r=5, X144.553 Y73.747 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c107_r005.jpg 1099 / 2211, ETA: 00:44:16.7887 @ 0.418550 items / sec XY3P: 1100 / 2211 @ c=106, r=5, X144.381 Y73.751 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c106_r005.jpg 1100 / 2211, ETA: 00:44:14.4061 @ 0.418549 items / sec XY3P: 1101 / 2211 @ c=105, r=5, X144.208 Y73.755 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c105_r005.jpg 1101 / 2211, ETA: 00:44:12.0282 @ 0.418548 items / sec XY3P: 1102 / 2211 @ c=104, r=5, X144.035 Y73.759 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c104_r005.jpg 1102 / 2211, ETA: 00:44:09.6457 @ 0.418547 items / sec XY3P: 1103 / 2211 @ c=103, r=5, X143.862 Y73.763 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c103_r005.jpg 1103 / 2211, ETA: 00:44:07.2642 @ 0.418545 items / sec XY3P: 1104 / 2211 @ c=102, r=5, X143.690 Y73.767 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c102_r005.jpg 1104 / 2211, ETA: 00:44:04.8833 @ 0.418544 items / sec XY3P: 1105 / 2211 @ c=101, r=5, X143.517 Y73.771 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c101_r005.jpg 1105 / 2211, ETA: 00:44:02.5020 @ 0.418543 items / sec XY3P: 1106 / 2211 @ c=100, r=5, X143.344 Y73.775 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c100_r005.jpg 1106 / 2211, ETA: 00:43:59.9270 @ 0.418572 items / sec XY3P: 1107 / 2211 @ c=99, r=5, X143.171 Y73.779 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c099_r005.jpg 1107 / 2211, ETA: 00:43:57.5418 @ 0.418572 items / sec XY3P: 1108 / 2211 @ c=98, r=5, X142.999 Y73.783 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c098_r005.jpg 1108 / 2211, ETA: 00:43:55.1593 @ 0.418571 items / sec XY3P: 1109 / 2211 @ c=97, r=5, X142.826 Y73.787 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c097_r005.jpg 1109 / 2211, ETA: 00:43:52.7779 @ 0.418569 items / sec XY3P: 1110 / 2211 @ c=96, r=5, X142.653 Y73.791 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c096_r005.jpg 1110 / 2211, ETA: 00:43:50.3969 @ 0.418568 items / sec XY3P: 1111 / 2211 @ c=95, r=5, X142.480 Y73.795 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c095_r005.jpg 1111 / 2211, ETA: 00:43:47.8182 @ 0.418598 items / sec XY3P: 1112 / 2211 @ c=94, r=5, X142.308 Y73.799 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c094_r005.jpg 1112 / 2211, ETA: 00:43:45.4368 @ 0.418597 items / sec XY3P: 1113 / 2211 @ c=93, r=5, X142.135 Y73.803 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c093_r005.jpg 1113 / 2211, ETA: 00:43:43.0568 @ 0.418596 items / sec XY3P: 1114 / 2211 @ c=92, r=5, X141.962 Y73.807 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c092_r005.jpg 1114 / 2211, ETA: 00:43:40.6757 @ 0.418594 items / sec XY3P: 1115 / 2211 @ c=91, r=5, X141.789 Y73.811 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c091_r005.jpg 1115 / 2211, ETA: 00:43:38.2973 @ 0.418593 items / sec XY3P: 1116 / 2211 @ c=90, r=5, X141.617 Y73.815 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c090_r005.jpg 1116 / 2211, ETA: 00:43:35.9142 @ 0.418592 items / sec XY3P: 1117 / 2211 @ c=89, r=5, X141.444 Y73.819 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c089_r005.jpg 1117 / 2211, ETA: 00:43:33.5337 @ 0.418590 items / sec XY3P: 1118 / 2211 @ c=88, r=5, X141.271 Y73.823 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c088_r005.jpg 1118 / 2211, ETA: 00:43:31.1526 @ 0.418589 items / sec XY3P: 1119 / 2211 @ c=87, r=5, X141.098 Y73.827 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c087_r005.jpg 1119 / 2211, ETA: 00:43:28.7712 @ 0.418588 items / sec XY3P: 1120 / 2211 @ c=86, r=5, X140.925 Y73.831 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c086_r005.jpg 1120 / 2211, ETA: 00:43:26.3930 @ 0.418586 items / sec XY3P: 1121 / 2211 @ c=85, r=5, X140.753 Y73.834 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c085_r005.jpg 1121 / 2211, ETA: 00:43:24.0104 @ 0.418585 items / sec XY3P: 1122 / 2211 @ c=84, r=5, X140.580 Y73.838 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c084_r005.jpg 1122 / 2211, ETA: 00:43:21.6292 @ 0.418584 items / sec XY3P: 1123 / 2211 @ c=83, r=5, X140.407 Y73.842 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c083_r005.jpg 1123 / 2211, ETA: 00:43:19.2483 @ 0.418583 items / sec XY3P: 1124 / 2211 @ c=82, r=5, X140.234 Y73.846 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c082_r005.jpg 1124 / 2211, ETA: 00:43:16.8672 @ 0.418581 items / sec XY3P: 1125 / 2211 @ c=81, r=5, X140.062 Y73.850 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c081_r005.jpg 1125 / 2211, ETA: 00:43:14.4878 @ 0.418580 items / sec XY3P: 1126 / 2211 @ c=80, r=5, X139.889 Y73.854 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c080_r005.jpg 1126 / 2211, ETA: 00:43:12.1044 @ 0.418579 items / sec XY3P: 1127 / 2211 @ c=79, r=5, X139.716 Y73.858 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c079_r005.jpg 1127 / 2211, ETA: 00:43:09.9175 @ 0.418546 items / sec XY3P: 1128 / 2211 @ c=78, r=5, X139.543 Y73.862 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c078_r005.jpg 1128 / 2211, ETA: 00:43:07.5347 @ 0.418545 items / sec XY3P: 1129 / 2211 @ c=77, r=5, X139.371 Y73.866 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c077_r005.jpg 1129 / 2211, ETA: 00:43:05.1529 @ 0.418544 items / sec XY3P: 1130 / 2211 @ c=76, r=5, X139.198 Y73.870 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c076_r005.jpg 1130 / 2211, ETA: 00:43:02.7709 @ 0.418543 items / sec XY3P: 1131 / 2211 @ c=75, r=5, X139.025 Y73.874 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c075_r005.jpg 1131 / 2211, ETA: 00:43:00.3889 @ 0.418542 items / sec XY3P: 1132 / 2211 @ c=74, r=5, X138.852 Y73.878 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c074_r005.jpg 1132 / 2211, ETA: 00:42:58.0096 @ 0.418540 items / sec XY3P: 1133 / 2211 @ c=73, r=5, X138.680 Y73.882 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c073_r005.jpg 1133 / 2211, ETA: 00:42:55.6328 @ 0.418538 items / sec XY3P: 1134 / 2211 @ c=72, r=5, X138.507 Y73.886 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c072_r005.jpg 1134 / 2211, ETA: 00:42:53.2449 @ 0.418538 items / sec XY3P: 1135 / 2211 @ c=71, r=5, X138.334 Y73.890 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c071_r005.jpg 1135 / 2211, ETA: 00:42:50.8643 @ 0.418536 items / sec XY3P: 1136 / 2211 @ c=70, r=5, X138.161 Y73.894 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c070_r005.jpg 1136 / 2211, ETA: 00:42:48.4814 @ 0.418535 items / sec XY3P: 1137 / 2211 @ c=69, r=5, X137.989 Y73.898 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c069_r005.jpg 1137 / 2211, ETA: 00:42:46.1012 @ 0.418534 items / sec XY3P: 1138 / 2211 @ c=68, r=5, X137.816 Y73.902 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c068_r005.jpg 1138 / 2211, ETA: 00:42:43.7181 @ 0.418533 items / sec XY3P: 1139 / 2211 @ c=67, r=5, X137.643 Y73.906 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c067_r005.jpg 1139 / 2211, ETA: 00:42:41.3368 @ 0.418531 items / sec XY3P: 1140 / 2211 @ c=66, r=5, X137.471 Y73.910 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c066_r005.jpg 1140 / 2211, ETA: 00:42:38.9597 @ 0.418529 items / sec XY3P: 1141 / 2211 @ c=65, r=5, X137.298 Y73.914 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c065_r005.jpg 1141 / 2211, ETA: 00:42:36.5737 @ 0.418529 items / sec XY3P: 1142 / 2211 @ c=64, r=5, X137.125 Y73.918 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c064_r005.jpg 1142 / 2211, ETA: 00:42:34.1926 @ 0.418528 items / sec XY3P: 1143 / 2211 @ c=63, r=5, X136.952 Y73.922 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c063_r005.jpg 1143 / 2211, ETA: 00:42:31.8086 @ 0.418527 items / sec XY3P: 1144 / 2211 @ c=62, r=5, X136.780 Y73.926 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c062_r005.jpg 1144 / 2211, ETA: 00:42:29.4268 @ 0.418525 items / sec XY3P: 1145 / 2211 @ c=61, r=5, X136.607 Y73.930 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c061_r005.jpg 1145 / 2211, ETA: 00:42:27.0462 @ 0.418524 items / sec XY3P: 1146 / 2211 @ c=60, r=5, X136.434 Y73.934 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c060_r005.jpg 1146 / 2211, ETA: 00:42:24.6627 @ 0.418523 items / sec XY3P: 1147 / 2211 @ c=59, r=5, X136.261 Y73.938 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c059_r005.jpg 1147 / 2211, ETA: 00:42:22.4659 @ 0.418491 items / sec XY3P: 1148 / 2211 @ c=58, r=5, X136.089 Y73.942 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c058_r005.jpg 1148 / 2211, ETA: 00:42:20.0835 @ 0.418490 items / sec XY3P: 1149 / 2211 @ c=57, r=5, X135.916 Y73.945 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c057_r005.jpg 1149 / 2211, ETA: 00:42:17.7011 @ 0.418489 items / sec XY3P: 1150 / 2211 @ c=56, r=5, X135.743 Y73.949 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c056_r005.jpg 1150 / 2211, ETA: 00:42:15.3255 @ 0.418487 items / sec XY3P: 1151 / 2211 @ c=55, r=5, X135.570 Y73.953 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c055_r005.jpg 1151 / 2211, ETA: 00:42:12.9378 @ 0.418486 items / sec XY3P: 1152 / 2211 @ c=54, r=5, X135.398 Y73.957 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c054_r005.jpg 1152 / 2211, ETA: 00:42:10.5560 @ 0.418485 items / sec XY3P: 1153 / 2211 @ c=53, r=5, X135.225 Y73.961 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c053_r005.jpg 1153 / 2211, ETA: 00:42:08.1711 @ 0.418484 items / sec XY3P: 1154 / 2211 @ c=52, r=5, X135.052 Y73.965 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c052_r005.jpg 1154 / 2211, ETA: 00:42:05.7888 @ 0.418483 items / sec XY3P: 1155 / 2211 @ c=51, r=5, X134.879 Y73.969 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c051_r005.jpg 1155 / 2211, ETA: 00:42:03.4066 @ 0.418482 items / sec XY3P: 1156 / 2211 @ c=50, r=5, X134.707 Y73.973 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c050_r005.jpg 1156 / 2211, ETA: 00:42:00.8414 @ 0.418511 items / sec XY3P: 1157 / 2211 @ c=49, r=5, X134.534 Y73.977 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c049_r005.jpg 1157 / 2211, ETA: 00:41:58.4604 @ 0.418510 items / sec XY3P: 1158 / 2211 @ c=48, r=5, X134.361 Y73.981 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c048_r005.jpg 1158 / 2211, ETA: 00:41:56.0768 @ 0.418509 items / sec XY3P: 1159 / 2211 @ c=47, r=5, X134.188 Y73.985 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c047_r005.jpg 1159 / 2211, ETA: 00:41:53.6949 @ 0.418507 items / sec XY3P: 1160 / 2211 @ c=46, r=5, X134.016 Y73.989 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c046_r005.jpg 1160 / 2211, ETA: 00:41:51.3119 @ 0.418506 items / sec XY3P: 1161 / 2211 @ c=45, r=5, X133.843 Y73.993 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c045_r005.jpg 1161 / 2211, ETA: 00:41:48.9358 @ 0.418504 items / sec XY3P: 1162 / 2211 @ c=44, r=5, X133.670 Y73.997 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c044_r005.jpg 1162 / 2211, ETA: 00:41:46.5489 @ 0.418504 items / sec XY3P: 1163 / 2211 @ c=43, r=5, X133.497 Y74.001 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c043_r005.jpg 1163 / 2211, ETA: 00:41:44.1649 @ 0.418503 items / sec XY3P: 1164 / 2211 @ c=42, r=5, X133.325 Y74.005 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c042_r005.jpg 1164 / 2211, ETA: 00:41:41.7821 @ 0.418502 items / sec XY3P: 1165 / 2211 @ c=41, r=5, X133.152 Y74.009 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c041_r005.jpg 1165 / 2211, ETA: 00:41:39.4012 @ 0.418500 items / sec XY3P: 1166 / 2211 @ c=40, r=5, X132.979 Y74.013 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c040_r005.jpg 1166 / 2211, ETA: 00:41:37.0182 @ 0.418499 items / sec XY3P: 1167 / 2211 @ c=39, r=5, X132.806 Y74.017 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c039_r005.jpg 1167 / 2211, ETA: 00:41:34.6424 @ 0.418497 items / sec XY3P: 1168 / 2211 @ c=38, r=5, X132.633 Y74.021 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c038_r005.jpg 1168 / 2211, ETA: 00:41:32.2576 @ 0.418496 items / sec XY3P: 1169 / 2211 @ c=37, r=5, X132.461 Y74.025 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c037_r005.jpg 1169 / 2211, ETA: 00:41:29.8763 @ 0.418495 items / sec XY3P: 1170 / 2211 @ c=36, r=5, X132.288 Y74.029 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c036_r005.jpg 1170 / 2211, ETA: 00:41:27.4894 @ 0.418494 items / sec XY3P: 1171 / 2211 @ c=35, r=5, X132.115 Y74.033 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c035_r005.jpg 1171 / 2211, ETA: 00:41:25.1050 @ 0.418493 items / sec XY3P: 1172 / 2211 @ c=34, r=5, X131.942 Y74.037 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c034_r005.jpg 1172 / 2211, ETA: 00:41:22.7214 @ 0.418492 items / sec XY3P: 1173 / 2211 @ c=33, r=5, X131.770 Y74.041 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c033_r005.jpg 1173 / 2211, ETA: 00:41:20.3396 @ 0.418491 items / sec XY3P: 1174 / 2211 @ c=32, r=5, X131.597 Y74.045 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c032_r005.jpg 1174 / 2211, ETA: 00:41:17.9567 @ 0.418490 items / sec XY3P: 1175 / 2211 @ c=31, r=5, X131.424 Y74.049 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c031_r005.jpg 1175 / 2211, ETA: 00:41:15.5757 @ 0.418489 items / sec XY3P: 1176 / 2211 @ c=30, r=5, X131.251 Y74.053 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c030_r005.jpg 1176 / 2211, ETA: 00:41:13.0164 @ 0.418517 items / sec XY3P: 1177 / 2211 @ c=29, r=5, X131.079 Y74.057 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c029_r005.jpg 1177 / 2211, ETA: 00:41:10.6327 @ 0.418516 items / sec XY3P: 1178 / 2211 @ c=28, r=5, X130.906 Y74.060 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c028_r005.jpg 1178 / 2211, ETA: 00:41:08.2502 @ 0.418515 items / sec XY3P: 1179 / 2211 @ c=27, r=5, X130.733 Y74.064 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c027_r005.jpg 1179 / 2211, ETA: 00:41:05.8678 @ 0.418514 items / sec XY3P: 1180 / 2211 @ c=26, r=5, X130.560 Y74.068 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c026_r005.jpg 1180 / 2211, ETA: 00:41:03.4847 @ 0.418513 items / sec XY3P: 1181 / 2211 @ c=25, r=5, X130.388 Y74.072 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c025_r005.jpg 1181 / 2211, ETA: 00:41:01.1044 @ 0.418511 items / sec XY3P: 1182 / 2211 @ c=24, r=5, X130.215 Y74.076 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c024_r005.jpg 1182 / 2211, ETA: 00:40:58.7193 @ 0.418511 items / sec XY3P: 1183 / 2211 @ c=23, r=5, X130.042 Y74.080 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c023_r005.jpg 1183 / 2211, ETA: 00:40:56.3375 @ 0.418509 items / sec XY3P: 1184 / 2211 @ c=22, r=5, X129.870 Y74.084 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c022_r005.jpg 1184 / 2211, ETA: 00:40:53.9547 @ 0.418508 items / sec XY3P: 1185 / 2211 @ c=21, r=5, X129.697 Y74.088 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c021_r005.jpg 1185 / 2211, ETA: 00:40:51.5723 @ 0.418507 items / sec XY3P: 1186 / 2211 @ c=20, r=5, X129.524 Y74.092 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c020_r005.jpg 1186 / 2211, ETA: 00:40:49.0171 @ 0.418535 items / sec XY3P: 1187 / 2211 @ c=19, r=5, X129.351 Y74.096 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c019_r005.jpg 1187 / 2211, ETA: 00:40:46.6344 @ 0.418534 items / sec XY3P: 1188 / 2211 @ c=18, r=5, X129.179 Y74.100 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c018_r005.jpg 1188 / 2211, ETA: 00:40:44.2514 @ 0.418533 items / sec XY3P: 1189 / 2211 @ c=17, r=5, X129.006 Y74.104 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c017_r005.jpg 1189 / 2211, ETA: 00:40:41.8711 @ 0.418531 items / sec XY3P: 1190 / 2211 @ c=16, r=5, X128.833 Y74.108 Z-15.162 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c016_r005.jpg 1190 / 2211, ETA: 00:40:39.4875 @ 0.418531 items / sec XY3P: 1191 / 2211 @ c=15, r=5, X128.660 Y74.112 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c015_r005.jpg 1191 / 2211, ETA: 00:40:37.1038 @ 0.418530 items / sec XY3P: 1192 / 2211 @ c=14, r=5, X128.488 Y74.116 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c014_r005.jpg 1192 / 2211, ETA: 00:40:34.7219 @ 0.418528 items / sec XY3P: 1193 / 2211 @ c=13, r=5, X128.315 Y74.120 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c013_r005.jpg 1193 / 2211, ETA: 00:40:32.3384 @ 0.418527 items / sec XY3P: 1194 / 2211 @ c=12, r=5, X128.142 Y74.124 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c012_r005.jpg 1194 / 2211, ETA: 00:40:29.9588 @ 0.418526 items / sec XY3P: 1195 / 2211 @ c=11, r=5, X127.969 Y74.128 Z-15.165 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c011_r005.jpg 1195 / 2211, ETA: 00:40:27.5744 @ 0.418525 items / sec XY3P: 1196 / 2211 @ c=10, r=5, X127.797 Y74.132 Z-15.166 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c010_r005.jpg 1196 / 2211, ETA: 00:40:25.1914 @ 0.418524 items / sec XY3P: 1197 / 2211 @ c=9, r=5, X127.624 Y74.136 Z-15.166 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c009_r005.jpg 1197 / 2211, ETA: 00:40:22.8091 @ 0.418522 items / sec XY3P: 1198 / 2211 @ c=8, r=5, X127.451 Y74.140 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c008_r005.jpg 1198 / 2211, ETA: 00:40:20.4263 @ 0.418521 items / sec XY3P: 1199 / 2211 @ c=7, r=5, X127.278 Y74.144 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c007_r005.jpg 1199 / 2211, ETA: 00:40:18.0452 @ 0.418520 items / sec XY3P: 1200 / 2211 @ c=6, r=5, X127.106 Y74.148 Z-15.168 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c006_r005.jpg 1200 / 2211, ETA: 00:40:15.6612 @ 0.418519 items / sec XY3P: 1201 / 2211 @ c=5, r=5, X126.933 Y74.152 Z-15.169 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c005_r005.jpg 1201 / 2211, ETA: 00:40:13.2781 @ 0.418518 items / sec XY3P: 1202 / 2211 @ c=4, r=5, X126.760 Y74.156 Z-15.169 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c004_r005.jpg 1202 / 2211, ETA: 00:40:10.8953 @ 0.418517 items / sec XY3P: 1203 / 2211 @ c=3, r=5, X126.587 Y74.160 Z-15.170 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c003_r005.jpg 1203 / 2211, ETA: 00:40:08.5127 @ 0.418516 items / sec XY3P: 1204 / 2211 @ c=2, r=5, X126.415 Y74.164 Z-15.170 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c002_r005.jpg 1204 / 2211, ETA: 00:40:06.1313 @ 0.418514 items / sec XY3P: 1205 / 2211 @ c=1, r=5, X126.242 Y74.168 Z-15.171 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c001_r005.jpg 1205 / 2211, ETA: 00:40:03.7467 @ 0.418513 items / sec XY3P: 1206 / 2211 @ c=0, r=5, X126.069 Y74.171 Z-15.171 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c000_r005.jpg 1206 / 2211, ETA: 00:40:01.3640 @ 0.418512 items / sec XY3P: 1207 / 2211 @ c=0, r=4, X126.069 Y74.332 Z-15.168 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c000_r004.jpg 1207 / 2211, ETA: 00:39:58.9813 @ 0.418511 items / sec XY3P: 1208 / 2211 @ c=1, r=4, X126.242 Y74.328 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c001_r004.jpg 1208 / 2211, ETA: 00:39:56.5981 @ 0.418510 items / sec XY3P: 1209 / 2211 @ c=2, r=4, X126.415 Y74.324 Z-15.167 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c002_r004.jpg 1209 / 2211, ETA: 00:39:54.2169 @ 0.418508 items / sec XY3P: 1210 / 2211 @ c=3, r=4, X126.587 Y74.321 Z-15.166 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c003_r004.jpg 1210 / 2211, ETA: 00:39:51.8325 @ 0.418508 items / sec XY3P: 1211 / 2211 @ c=4, r=4, X126.760 Y74.317 Z-15.166 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c004_r004.jpg 1211 / 2211, ETA: 00:39:49.4495 @ 0.418506 items / sec XY3P: 1212 / 2211 @ c=5, r=4, X126.933 Y74.313 Z-15.165 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c005_r004.jpg 1212 / 2211, ETA: 00:39:46.9020 @ 0.418534 items / sec XY3P: 1213 / 2211 @ c=6, r=4, X127.106 Y74.309 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c006_r004.jpg 1213 / 2211, ETA: 00:39:44.5190 @ 0.418533 items / sec XY3P: 1214 / 2211 @ c=7, r=4, X127.278 Y74.305 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c007_r004.jpg 1214 / 2211, ETA: 00:39:42.1357 @ 0.418532 items / sec XY3P: 1215 / 2211 @ c=8, r=4, X127.451 Y74.301 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c008_r004.jpg 1215 / 2211, ETA: 00:39:39.7548 @ 0.418531 items / sec XY3P: 1216 / 2211 @ c=9, r=4, X127.624 Y74.297 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c009_r004.jpg 1216 / 2211, ETA: 00:39:37.3708 @ 0.418530 items / sec XY3P: 1217 / 2211 @ c=10, r=4, X127.797 Y74.293 Z-15.162 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c010_r004.jpg 1217 / 2211, ETA: 00:39:34.9881 @ 0.418528 items / sec XY3P: 1218 / 2211 @ c=11, r=4, X127.969 Y74.289 Z-15.162 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c011_r004.jpg 1218 / 2211, ETA: 00:39:32.4438 @ 0.418556 items / sec XY3P: 1219 / 2211 @ c=12, r=4, X128.142 Y74.285 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c012_r004.jpg 1219 / 2211, ETA: 00:39:29.8983 @ 0.418583 items / sec XY3P: 1220 / 2211 @ c=13, r=4, X128.315 Y74.281 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c013_r004.jpg 1220 / 2211, ETA: 00:39:27.5143 @ 0.418582 items / sec XY3P: 1221 / 2211 @ c=14, r=4, X128.488 Y74.277 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c014_r004.jpg 1221 / 2211, ETA: 00:39:25.1326 @ 0.418581 items / sec XY3P: 1222 / 2211 @ c=15, r=4, X128.660 Y74.273 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c015_r004.jpg 1222 / 2211, ETA: 00:39:22.7503 @ 0.418580 items / sec XY3P: 1223 / 2211 @ c=16, r=4, X128.833 Y74.269 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c016_r004.jpg 1223 / 2211, ETA: 00:39:20.3675 @ 0.418579 items / sec XY3P: 1224 / 2211 @ c=17, r=4, X129.006 Y74.265 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c017_r004.jpg 1224 / 2211, ETA: 00:39:17.9873 @ 0.418577 items / sec XY3P: 1225 / 2211 @ c=18, r=4, X129.179 Y74.261 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c018_r004.jpg 1225 / 2211, ETA: 00:39:15.6026 @ 0.418577 items / sec XY3P: 1226 / 2211 @ c=19, r=4, X129.351 Y74.257 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c019_r004.jpg 1226 / 2211, ETA: 00:39:13.2206 @ 0.418575 items / sec XY3P: 1227 / 2211 @ c=20, r=4, X129.524 Y74.253 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c020_r004.jpg 1227 / 2211, ETA: 00:39:10.8382 @ 0.418574 items / sec XY3P: 1228 / 2211 @ c=21, r=4, X129.697 Y74.249 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c021_r004.jpg 1228 / 2211, ETA: 00:39:08.4554 @ 0.418573 items / sec XY3P: 1229 / 2211 @ c=22, r=4, X129.870 Y74.245 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c022_r004.jpg 1229 / 2211, ETA: 00:39:06.0744 @ 0.418572 items / sec XY3P: 1230 / 2211 @ c=23, r=4, X130.042 Y74.241 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c023_r004.jpg 1230 / 2211, ETA: 00:39:03.6900 @ 0.418571 items / sec XY3P: 1231 / 2211 @ c=24, r=4, X130.215 Y74.237 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c024_r004.jpg 1231 / 2211, ETA: 00:39:01.3079 @ 0.418569 items / sec XY3P: 1232 / 2211 @ c=25, r=4, X130.388 Y74.233 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c025_r004.jpg 1232 / 2211, ETA: 00:38:58.9244 @ 0.418568 items / sec XY3P: 1233 / 2211 @ c=26, r=4, X130.560 Y74.229 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c026_r004.jpg 1233 / 2211, ETA: 00:38:56.5425 @ 0.418567 items / sec XY3P: 1234 / 2211 @ c=27, r=4, X130.733 Y74.225 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c027_r004.jpg 1234 / 2211, ETA: 00:38:54.1612 @ 0.418566 items / sec XY3P: 1235 / 2211 @ c=28, r=4, X130.906 Y74.221 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c028_r004.jpg 1235 / 2211, ETA: 00:38:51.7772 @ 0.418565 items / sec XY3P: 1236 / 2211 @ c=29, r=4, X131.079 Y74.217 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c029_r004.jpg 1236 / 2211, ETA: 00:38:49.3946 @ 0.418564 items / sec XY3P: 1237 / 2211 @ c=30, r=4, X131.251 Y74.213 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c030_r004.jpg 1237 / 2211, ETA: 00:38:46.8561 @ 0.418591 items / sec XY3P: 1238 / 2211 @ c=31, r=4, X131.424 Y74.209 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c031_r004.jpg 1238 / 2211, ETA: 00:38:44.3167 @ 0.418618 items / sec XY3P: 1239 / 2211 @ c=32, r=4, X131.597 Y74.206 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c032_r004.jpg 1239 / 2211, ETA: 00:38:41.9334 @ 0.418617 items / sec XY3P: 1240 / 2211 @ c=33, r=4, X131.770 Y74.202 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c033_r004.jpg 1240 / 2211, ETA: 00:38:39.5512 @ 0.418615 items / sec XY3P: 1241 / 2211 @ c=34, r=4, X131.942 Y74.198 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c034_r004.jpg 1241 / 2211, ETA: 00:38:37.1719 @ 0.418614 items / sec XY3P: 1242 / 2211 @ c=35, r=4, X132.115 Y74.194 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c035_r004.jpg 1242 / 2211, ETA: 00:38:34.7893 @ 0.418613 items / sec XY3P: 1243 / 2211 @ c=36, r=4, X132.288 Y74.190 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c036_r004.jpg 1243 / 2211, ETA: 00:38:32.4100 @ 0.418611 items / sec XY3P: 1244 / 2211 @ c=37, r=4, X132.461 Y74.186 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c037_r004.jpg 1244 / 2211, ETA: 00:38:30.0217 @ 0.418611 items / sec XY3P: 1245 / 2211 @ c=38, r=4, X132.633 Y74.182 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c038_r004.jpg 1245 / 2211, ETA: 00:38:27.6391 @ 0.418610 items / sec XY3P: 1246 / 2211 @ c=39, r=4, X132.806 Y74.178 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c039_r004.jpg 1246 / 2211, ETA: 00:38:25.2598 @ 0.418608 items / sec XY3P: 1247 / 2211 @ c=40, r=4, X132.979 Y74.174 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c040_r004.jpg 1247 / 2211, ETA: 00:38:22.8744 @ 0.418607 items / sec XY3P: 1248 / 2211 @ c=41, r=4, X133.152 Y74.170 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c041_r004.jpg 1248 / 2211, ETA: 00:38:20.4919 @ 0.418606 items / sec XY3P: 1249 / 2211 @ c=42, r=4, X133.325 Y74.166 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c042_r004.jpg 1249 / 2211, ETA: 00:38:18.1095 @ 0.418605 items / sec XY3P: 1250 / 2211 @ c=43, r=4, X133.497 Y74.162 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c043_r004.jpg 1250 / 2211, ETA: 00:38:15.7269 @ 0.418604 items / sec XY3P: 1251 / 2211 @ c=44, r=4, X133.670 Y74.158 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c044_r004.jpg 1251 / 2211, ETA: 00:38:13.3463 @ 0.418602 items / sec XY3P: 1252 / 2211 @ c=45, r=4, X133.843 Y74.154 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c045_r004.jpg 1252 / 2211, ETA: 00:38:10.9628 @ 0.418601 items / sec XY3P: 1253 / 2211 @ c=46, r=4, X134.016 Y74.150 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c046_r004.jpg 1253 / 2211, ETA: 00:38:08.5806 @ 0.418600 items / sec XY3P: 1254 / 2211 @ c=47, r=4, X134.188 Y74.146 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c047_r004.jpg 1254 / 2211, ETA: 00:38:06.1973 @ 0.418599 items / sec XY3P: 1255 / 2211 @ c=48, r=4, X134.361 Y74.142 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c048_r004.jpg 1255 / 2211, ETA: 00:38:03.6626 @ 0.418626 items / sec XY3P: 1256 / 2211 @ c=49, r=4, X134.534 Y74.138 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c049_r004.jpg 1256 / 2211, ETA: 00:38:01.1284 @ 0.418652 items / sec XY3P: 1257 / 2211 @ c=50, r=4, X134.707 Y74.134 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c050_r004.jpg 1257 / 2211, ETA: 00:37:58.5948 @ 0.418679 items / sec XY3P: 1258 / 2211 @ c=51, r=4, X134.879 Y74.130 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c051_r004.jpg 1258 / 2211, ETA: 00:37:56.2120 @ 0.418678 items / sec XY3P: 1259 / 2211 @ c=52, r=4, X135.052 Y74.126 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c052_r004.jpg 1259 / 2211, ETA: 00:37:53.8308 @ 0.418677 items / sec XY3P: 1260 / 2211 @ c=53, r=4, X135.225 Y74.122 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c053_r004.jpg 1260 / 2211, ETA: 00:37:51.4493 @ 0.418675 items / sec XY3P: 1261 / 2211 @ c=54, r=4, X135.398 Y74.118 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c054_r004.jpg 1261 / 2211, ETA: 00:37:49.0687 @ 0.418674 items / sec XY3P: 1262 / 2211 @ c=55, r=4, X135.570 Y74.114 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c055_r004.jpg 1262 / 2211, ETA: 00:37:46.6855 @ 0.418673 items / sec XY3P: 1263 / 2211 @ c=56, r=4, X135.743 Y74.110 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c056_r004.jpg 1263 / 2211, ETA: 00:37:44.3036 @ 0.418672 items / sec XY3P: 1264 / 2211 @ c=57, r=4, X135.916 Y74.106 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c057_r004.jpg 1264 / 2211, ETA: 00:37:41.9213 @ 0.418671 items / sec XY3P: 1265 / 2211 @ c=58, r=4, X136.089 Y74.102 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c058_r004.jpg 1265 / 2211, ETA: 00:37:39.5394 @ 0.418669 items / sec XY3P: 1266 / 2211 @ c=59, r=4, X136.261 Y74.098 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c059_r004.jpg 1266 / 2211, ETA: 00:37:37.1586 @ 0.418668 items / sec XY3P: 1267 / 2211 @ c=60, r=4, X136.434 Y74.094 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c060_r004.jpg 1267 / 2211, ETA: 00:37:34.7754 @ 0.418667 items / sec XY3P: 1268 / 2211 @ c=61, r=4, X136.607 Y74.091 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c061_r004.jpg 1268 / 2211, ETA: 00:37:32.3940 @ 0.418666 items / sec XY3P: 1269 / 2211 @ c=62, r=4, X136.780 Y74.087 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c062_r004.jpg 1269 / 2211, ETA: 00:37:30.0113 @ 0.418665 items / sec XY3P: 1270 / 2211 @ c=63, r=4, X136.952 Y74.083 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c063_r004.jpg 1270 / 2211, ETA: 00:37:27.6294 @ 0.418663 items / sec XY3P: 1271 / 2211 @ c=64, r=4, X137.125 Y74.079 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c064_r004.jpg 1271 / 2211, ETA: 00:37:25.2486 @ 0.418662 items / sec XY3P: 1272 / 2211 @ c=65, r=4, X137.298 Y74.075 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c065_r004.jpg 1272 / 2211, ETA: 00:37:22.8651 @ 0.418661 items / sec XY3P: 1273 / 2211 @ c=66, r=4, X137.471 Y74.071 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c066_r004.jpg 1273 / 2211, ETA: 00:37:20.4829 @ 0.418660 items / sec XY3P: 1274 / 2211 @ c=67, r=4, X137.643 Y74.067 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c067_r004.jpg 1274 / 2211, ETA: 00:37:17.9552 @ 0.418686 items / sec XY3P: 1275 / 2211 @ c=68, r=4, X137.816 Y74.063 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c068_r004.jpg 1275 / 2211, ETA: 00:37:15.4263 @ 0.418712 items / sec XY3P: 1276 / 2211 @ c=69, r=4, X137.989 Y74.059 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c069_r004.jpg 1276 / 2211, ETA: 00:37:13.0440 @ 0.418711 items / sec XY3P: 1277 / 2211 @ c=70, r=4, X138.161 Y74.055 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c070_r004.jpg 1277 / 2211, ETA: 00:37:10.6620 @ 0.418710 items / sec XY3P: 1278 / 2211 @ c=71, r=4, X138.334 Y74.051 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c071_r004.jpg 1278 / 2211, ETA: 00:37:08.2800 @ 0.418709 items / sec XY3P: 1279 / 2211 @ c=72, r=4, X138.507 Y74.047 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c072_r004.jpg 1279 / 2211, ETA: 00:37:05.8978 @ 0.418707 items / sec XY3P: 1280 / 2211 @ c=73, r=4, X138.680 Y74.043 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c073_r004.jpg 1280 / 2211, ETA: 00:37:03.5182 @ 0.418706 items / sec XY3P: 1281 / 2211 @ c=74, r=4, X138.852 Y74.039 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c074_r004.jpg 1281 / 2211, ETA: 00:37:01.1346 @ 0.418705 items / sec XY3P: 1282 / 2211 @ c=75, r=4, X139.025 Y74.035 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c075_r004.jpg 1282 / 2211, ETA: 00:36:58.7528 @ 0.418704 items / sec XY3P: 1283 / 2211 @ c=76, r=4, X139.198 Y74.031 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c076_r004.jpg 1283 / 2211, ETA: 00:36:56.3711 @ 0.418702 items / sec XY3P: 1284 / 2211 @ c=77, r=4, X139.371 Y74.027 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c077_r004.jpg 1284 / 2211, ETA: 00:36:53.9891 @ 0.418701 items / sec XY3P: 1285 / 2211 @ c=78, r=4, X139.543 Y74.023 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c078_r004.jpg 1285 / 2211, ETA: 00:36:51.6082 @ 0.418700 items / sec XY3P: 1286 / 2211 @ c=79, r=4, X139.716 Y74.019 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c079_r004.jpg 1286 / 2211, ETA: 00:36:49.2249 @ 0.418699 items / sec XY3P: 1287 / 2211 @ c=80, r=4, X139.889 Y74.015 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c080_r004.jpg 1287 / 2211, ETA: 00:36:46.8433 @ 0.418698 items / sec XY3P: 1288 / 2211 @ c=81, r=4, X140.062 Y74.011 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c081_r004.jpg 1288 / 2211, ETA: 00:36:44.4614 @ 0.418696 items / sec XY3P: 1289 / 2211 @ c=82, r=4, X140.234 Y74.007 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c082_r004.jpg 1289 / 2211, ETA: 00:36:42.0790 @ 0.418695 items / sec XY3P: 1290 / 2211 @ c=83, r=4, X140.407 Y74.003 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c083_r004.jpg 1290 / 2211, ETA: 00:36:39.6985 @ 0.418694 items / sec XY3P: 1291 / 2211 @ c=84, r=4, X140.580 Y73.999 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c084_r004.jpg 1291 / 2211, ETA: 00:36:37.3155 @ 0.418693 items / sec XY3P: 1292 / 2211 @ c=85, r=4, X140.753 Y73.995 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c085_r004.jpg 1292 / 2211, ETA: 00:36:34.9332 @ 0.418692 items / sec XY3P: 1293 / 2211 @ c=86, r=4, X140.925 Y73.991 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c086_r004.jpg 1293 / 2211, ETA: 00:36:32.4112 @ 0.418717 items / sec XY3P: 1294 / 2211 @ c=87, r=4, X141.098 Y73.987 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c087_r004.jpg 1294 / 2211, ETA: 00:36:29.8872 @ 0.418743 items / sec XY3P: 1295 / 2211 @ c=88, r=4, X141.271 Y73.983 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c088_r004.jpg 1295 / 2211, ETA: 00:36:27.5043 @ 0.418742 items / sec XY3P: 1296 / 2211 @ c=89, r=4, X141.444 Y73.980 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c089_r004.jpg 1296 / 2211, ETA: 00:36:25.1269 @ 0.418740 items / sec XY3P: 1297 / 2211 @ c=90, r=4, X141.617 Y73.976 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c090_r004.jpg 1297 / 2211, ETA: 00:36:22.7406 @ 0.418740 items / sec XY3P: 1298 / 2211 @ c=91, r=4, X141.789 Y73.972 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c091_r004.jpg 1298 / 2211, ETA: 00:36:20.3594 @ 0.418738 items / sec XY3P: 1299 / 2211 @ c=92, r=4, X141.962 Y73.968 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c092_r004.jpg 1299 / 2211, ETA: 00:36:17.9788 @ 0.418737 items / sec XY3P: 1300 / 2211 @ c=93, r=4, X142.135 Y73.964 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c093_r004.jpg 1300 / 2211, ETA: 00:36:15.5960 @ 0.418736 items / sec XY3P: 1301 / 2211 @ c=94, r=4, X142.308 Y73.960 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c094_r004.jpg 1301 / 2211, ETA: 00:36:13.2138 @ 0.418735 items / sec XY3P: 1302 / 2211 @ c=95, r=4, X142.480 Y73.956 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c095_r004.jpg 1302 / 2211, ETA: 00:36:10.8323 @ 0.418733 items / sec XY3P: 1303 / 2211 @ c=96, r=4, X142.653 Y73.952 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c096_r004.jpg 1303 / 2211, ETA: 00:36:08.4505 @ 0.418732 items / sec XY3P: 1304 / 2211 @ c=97, r=4, X142.826 Y73.948 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c097_r004.jpg 1304 / 2211, ETA: 00:36:06.0691 @ 0.418731 items / sec XY3P: 1305 / 2211 @ c=98, r=4, X142.999 Y73.944 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c098_r004.jpg 1305 / 2211, ETA: 00:36:03.6868 @ 0.418730 items / sec XY3P: 1306 / 2211 @ c=99, r=4, X143.171 Y73.940 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c099_r004.jpg 1306 / 2211, ETA: 00:36:01.3047 @ 0.418729 items / sec XY3P: 1307 / 2211 @ c=100, r=4, X143.344 Y73.936 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c100_r004.jpg 1307 / 2211, ETA: 00:35:58.9232 @ 0.418727 items / sec XY3P: 1308 / 2211 @ c=101, r=4, X143.517 Y73.932 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c101_r004.jpg 1308 / 2211, ETA: 00:35:56.5409 @ 0.418726 items / sec XY3P: 1309 / 2211 @ c=102, r=4, X143.690 Y73.928 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c102_r004.jpg 1309 / 2211, ETA: 00:35:54.1601 @ 0.418725 items / sec XY3P: 1310 / 2211 @ c=103, r=4, X143.862 Y73.924 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c103_r004.jpg 1310 / 2211, ETA: 00:35:51.7773 @ 0.418724 items / sec XY3P: 1311 / 2211 @ c=104, r=4, X144.035 Y73.920 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c104_r004.jpg 1311 / 2211, ETA: 00:35:49.3946 @ 0.418723 items / sec XY3P: 1312 / 2211 @ c=105, r=4, X144.208 Y73.916 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c105_r004.jpg 1312 / 2211, ETA: 00:35:46.8777 @ 0.418748 items / sec XY3P: 1313 / 2211 @ c=106, r=4, X144.381 Y73.912 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c106_r004.jpg 1313 / 2211, ETA: 00:35:44.4953 @ 0.418747 items / sec XY3P: 1314 / 2211 @ c=107, r=4, X144.553 Y73.908 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c107_r004.jpg 1314 / 2211, ETA: 00:35:42.1134 @ 0.418745 items / sec XY3P: 1315 / 2211 @ c=108, r=4, X144.726 Y73.904 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c108_r004.jpg 1315 / 2211, ETA: 00:35:39.7326 @ 0.418744 items / sec XY3P: 1316 / 2211 @ c=109, r=4, X144.899 Y73.900 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c109_r004.jpg 1316 / 2211, ETA: 00:35:37.3526 @ 0.418742 items / sec XY3P: 1317 / 2211 @ c=110, r=4, X145.072 Y73.896 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c110_r004.jpg 1317 / 2211, ETA: 00:35:34.9673 @ 0.418742 items / sec XY3P: 1318 / 2211 @ c=111, r=4, X145.244 Y73.892 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c111_r004.jpg 1318 / 2211, ETA: 00:35:32.5866 @ 0.418740 items / sec XY3P: 1319 / 2211 @ c=112, r=4, X145.417 Y73.888 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c112_r004.jpg 1319 / 2211, ETA: 00:35:30.2044 @ 0.418739 items / sec XY3P: 1320 / 2211 @ c=113, r=4, X145.590 Y73.884 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c113_r004.jpg 1320 / 2211, ETA: 00:35:27.8209 @ 0.418738 items / sec XY3P: 1321 / 2211 @ c=114, r=4, X145.762 Y73.880 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c114_r004.jpg 1321 / 2211, ETA: 00:35:25.4398 @ 0.418737 items / sec XY3P: 1322 / 2211 @ c=115, r=4, X145.935 Y73.876 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c115_r004.jpg 1322 / 2211, ETA: 00:35:23.0571 @ 0.418736 items / sec XY3P: 1323 / 2211 @ c=116, r=4, X146.108 Y73.872 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c116_r004.jpg 1323 / 2211, ETA: 00:35:20.6763 @ 0.418734 items / sec XY3P: 1324 / 2211 @ c=117, r=4, X146.281 Y73.868 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c117_r004.jpg 1324 / 2211, ETA: 00:35:18.2935 @ 0.418733 items / sec XY3P: 1325 / 2211 @ c=118, r=4, X146.453 Y73.865 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c118_r004.jpg 1325 / 2211, ETA: 00:35:15.9115 @ 0.418732 items / sec XY3P: 1326 / 2211 @ c=119, r=4, X146.626 Y73.861 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c119_r004.jpg 1326 / 2211, ETA: 00:35:13.5294 @ 0.418731 items / sec XY3P: 1327 / 2211 @ c=120, r=4, X146.799 Y73.857 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c120_r004.jpg 1327 / 2211, ETA: 00:35:11.1511 @ 0.418729 items / sec XY3P: 1328 / 2211 @ c=121, r=4, X146.972 Y73.853 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c121_r004.jpg 1328 / 2211, ETA: 00:35:08.7661 @ 0.418728 items / sec XY3P: 1329 / 2211 @ c=122, r=4, X147.144 Y73.849 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c122_r004.jpg 1329 / 2211, ETA: 00:35:06.3827 @ 0.418727 items / sec XY3P: 1330 / 2211 @ c=123, r=4, X147.317 Y73.845 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c123_r004.jpg 1330 / 2211, ETA: 00:35:03.8681 @ 0.418752 items / sec XY3P: 1331 / 2211 @ c=124, r=4, X147.490 Y73.841 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c124_r004.jpg 1331 / 2211, ETA: 00:35:01.3541 @ 0.418778 items / sec XY3P: 1332 / 2211 @ c=125, r=4, X147.663 Y73.837 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c125_r004.jpg 1332 / 2211, ETA: 00:34:58.9738 @ 0.418776 items / sec XY3P: 1333 / 2211 @ c=126, r=4, X147.835 Y73.833 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c126_r004.jpg 1333 / 2211, ETA: 00:34:56.5903 @ 0.418775 items / sec XY3P: 1334 / 2211 @ c=127, r=4, X148.008 Y73.829 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c127_r004.jpg 1334 / 2211, ETA: 00:34:54.2090 @ 0.418774 items / sec XY3P: 1335 / 2211 @ c=128, r=4, X148.181 Y73.825 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c128_r004.jpg 1335 / 2211, ETA: 00:34:51.8271 @ 0.418773 items / sec XY3P: 1336 / 2211 @ c=129, r=4, X148.354 Y73.821 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c129_r004.jpg 1336 / 2211, ETA: 00:34:49.4456 @ 0.418771 items / sec XY3P: 1337 / 2211 @ c=130, r=4, X148.526 Y73.817 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c130_r004.jpg 1337 / 2211, ETA: 00:34:47.0648 @ 0.418770 items / sec XY3P: 1338 / 2211 @ c=131, r=4, X148.699 Y73.813 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c131_r004.jpg 1338 / 2211, ETA: 00:34:44.6811 @ 0.418769 items / sec XY3P: 1339 / 2211 @ c=132, r=4, X148.872 Y73.809 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c132_r004.jpg 1339 / 2211, ETA: 00:34:42.3000 @ 0.418768 items / sec XY3P: 1340 / 2211 @ c=133, r=4, X149.045 Y73.805 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c133_r004.jpg 1340 / 2211, ETA: 00:34:39.9178 @ 0.418767 items / sec XY3P: 1341 / 2211 @ c=134, r=4, X149.218 Y73.801 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c134_r004.jpg 1341 / 2211, ETA: 00:34:37.5359 @ 0.418765 items / sec XY3P: 1342 / 2211 @ c=135, r=4, X149.390 Y73.797 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c135_r004.jpg 1342 / 2211, ETA: 00:34:35.1550 @ 0.418764 items / sec XY3P: 1343 / 2211 @ c=136, r=4, X149.563 Y73.793 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c136_r004.jpg 1343 / 2211, ETA: 00:34:32.7712 @ 0.418763 items / sec XY3P: 1344 / 2211 @ c=137, r=4, X149.736 Y73.789 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c137_r004.jpg 1344 / 2211, ETA: 00:34:30.3903 @ 0.418762 items / sec XY3P: 1345 / 2211 @ c=138, r=4, X149.909 Y73.785 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c138_r004.jpg 1345 / 2211, ETA: 00:34:28.0081 @ 0.418760 items / sec XY3P: 1346 / 2211 @ c=139, r=4, X150.081 Y73.781 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c139_r004.jpg 1346 / 2211, ETA: 00:34:25.6259 @ 0.418759 items / sec XY3P: 1347 / 2211 @ c=140, r=4, X150.254 Y73.777 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c140_r004.jpg 1347 / 2211, ETA: 00:34:23.2451 @ 0.418758 items / sec XY3P: 1348 / 2211 @ c=141, r=4, X150.427 Y73.773 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c141_r004.jpg 1348 / 2211, ETA: 00:34:20.8613 @ 0.418757 items / sec XY3P: 1349 / 2211 @ c=142, r=4, X150.600 Y73.769 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c142_r004.jpg 1349 / 2211, ETA: 00:34:18.3522 @ 0.418782 items / sec XY3P: 1350 / 2211 @ c=143, r=4, X150.772 Y73.765 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c143_r004.jpg 1350 / 2211, ETA: 00:34:15.8429 @ 0.418806 items / sec XY3P: 1351 / 2211 @ c=144, r=4, X150.945 Y73.761 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c144_r004.jpg 1351 / 2211, ETA: 00:34:13.4621 @ 0.418805 items / sec XY3P: 1352 / 2211 @ c=145, r=4, X151.118 Y73.757 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c145_r004.jpg 1352 / 2211, ETA: 00:34:11.0793 @ 0.418804 items / sec XY3P: 1353 / 2211 @ c=146, r=4, X151.291 Y73.754 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c146_r004.jpg 1353 / 2211, ETA: 00:34:08.6982 @ 0.418803 items / sec XY3P: 1354 / 2211 @ c=147, r=4, X151.463 Y73.750 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c147_r004.jpg 1354 / 2211, ETA: 00:34:06.3161 @ 0.418801 items / sec XY3P: 1355 / 2211 @ c=148, r=4, X151.636 Y73.746 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c148_r004.jpg 1355 / 2211, ETA: 00:34:03.9344 @ 0.418800 items / sec XY3P: 1356 / 2211 @ c=149, r=4, X151.809 Y73.742 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c149_r004.jpg 1356 / 2211, ETA: 00:34:01.5536 @ 0.418799 items / sec XY3P: 1357 / 2211 @ c=150, r=4, X151.982 Y73.738 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c150_r004.jpg 1357 / 2211, ETA: 00:33:59.1707 @ 0.418798 items / sec XY3P: 1358 / 2211 @ c=151, r=4, X152.154 Y73.734 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c151_r004.jpg 1358 / 2211, ETA: 00:33:56.7890 @ 0.418796 items / sec XY3P: 1359 / 2211 @ c=152, r=4, X152.327 Y73.730 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c152_r004.jpg 1359 / 2211, ETA: 00:33:54.4071 @ 0.418795 items / sec XY3P: 1360 / 2211 @ c=153, r=4, X152.500 Y73.726 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c153_r004.jpg 1360 / 2211, ETA: 00:33:52.0249 @ 0.418794 items / sec XY3P: 1361 / 2211 @ c=154, r=4, X152.673 Y73.722 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c154_r004.jpg 1361 / 2211, ETA: 00:33:49.6437 @ 0.418793 items / sec XY3P: 1362 / 2211 @ c=155, r=4, X152.845 Y73.718 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c155_r004.jpg 1362 / 2211, ETA: 00:33:47.2609 @ 0.418792 items / sec XY3P: 1363 / 2211 @ c=156, r=4, X153.018 Y73.714 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c156_r004.jpg 1363 / 2211, ETA: 00:33:44.8792 @ 0.418790 items / sec XY3P: 1364 / 2211 @ c=157, r=4, X153.191 Y73.710 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c157_r004.jpg 1364 / 2211, ETA: 00:33:42.4975 @ 0.418789 items / sec XY3P: 1365 / 2211 @ c=158, r=4, X153.363 Y73.706 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c158_r004.jpg 1365 / 2211, ETA: 00:33:40.1158 @ 0.418788 items / sec XY3P: 1366 / 2211 @ c=159, r=4, X153.536 Y73.702 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c159_r004.jpg 1366 / 2211, ETA: 00:33:37.7343 @ 0.418787 items / sec XY3P: 1367 / 2211 @ c=160, r=4, X153.709 Y73.698 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c160_r004.jpg 1367 / 2211, ETA: 00:33:35.3511 @ 0.418786 items / sec XY3P: 1368 / 2211 @ c=161, r=4, X153.882 Y73.694 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c161_r004.jpg 1368 / 2211, ETA: 00:33:32.8463 @ 0.418810 items / sec XY3P: 1369 / 2211 @ c=162, r=4, X154.054 Y73.690 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c162_r004.jpg 1369 / 2211, ETA: 00:33:30.3415 @ 0.418834 items / sec XY3P: 1370 / 2211 @ c=163, r=4, X154.227 Y73.686 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c163_r004.jpg 1370 / 2211, ETA: 00:33:27.9605 @ 0.418833 items / sec XY3P: 1371 / 2211 @ c=164, r=4, X154.400 Y73.682 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c164_r004.jpg 1371 / 2211, ETA: 00:33:25.5779 @ 0.418832 items / sec XY3P: 1372 / 2211 @ c=165, r=4, X154.573 Y73.678 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c165_r004.jpg 1372 / 2211, ETA: 00:33:23.1960 @ 0.418831 items / sec XY3P: 1373 / 2211 @ c=166, r=4, X154.745 Y73.674 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c166_r004.jpg 1373 / 2211, ETA: 00:33:20.8145 @ 0.418829 items / sec XY3P: 1374 / 2211 @ c=167, r=4, X154.918 Y73.670 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c167_r004.jpg 1374 / 2211, ETA: 00:33:18.4329 @ 0.418828 items / sec XY3P: 1375 / 2211 @ c=168, r=4, X155.091 Y73.666 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c168_r004.jpg 1375 / 2211, ETA: 00:33:16.0519 @ 0.418827 items / sec XY3P: 1376 / 2211 @ c=169, r=4, X155.264 Y73.662 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c169_r004.jpg 1376 / 2211, ETA: 00:33:13.6694 @ 0.418826 items / sec XY3P: 1377 / 2211 @ c=170, r=4, X155.436 Y73.658 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c170_r004.jpg 1377 / 2211, ETA: 00:33:11.2876 @ 0.418824 items / sec XY3P: 1378 / 2211 @ c=171, r=4, X155.609 Y73.654 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c171_r004.jpg 1378 / 2211, ETA: 00:33:08.9060 @ 0.418823 items / sec XY3P: 1379 / 2211 @ c=172, r=4, X155.782 Y73.650 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c172_r004.jpg 1379 / 2211, ETA: 00:33:06.5249 @ 0.418822 items / sec XY3P: 1380 / 2211 @ c=173, r=4, X155.955 Y73.646 Z-15.066 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c173_r004.jpg 1380 / 2211, ETA: 00:33:04.1431 @ 0.418821 items / sec XY3P: 1381 / 2211 @ c=174, r=4, X156.127 Y73.642 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c174_r004.jpg 1381 / 2211, ETA: 00:33:01.7602 @ 0.418820 items / sec XY3P: 1382 / 2211 @ c=175, r=4, X156.300 Y73.639 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c175_r004.jpg 1382 / 2211, ETA: 00:32:59.3784 @ 0.418818 items / sec XY3P: 1383 / 2211 @ c=176, r=4, X156.473 Y73.635 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c176_r004.jpg 1383 / 2211, ETA: 00:32:56.9963 @ 0.418817 items / sec XY3P: 1384 / 2211 @ c=177, r=4, X156.646 Y73.631 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c177_r004.jpg 1384 / 2211, ETA: 00:32:54.6147 @ 0.418816 items / sec XY3P: 1385 / 2211 @ c=178, r=4, X156.819 Y73.627 Z-15.063 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c178_r004.jpg 1385 / 2211, ETA: 00:32:52.2335 @ 0.418815 items / sec XY3P: 1386 / 2211 @ c=179, r=4, X156.991 Y73.623 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c179_r004.jpg 1386 / 2211, ETA: 00:32:49.8545 @ 0.418813 items / sec XY3P: 1387 / 2211 @ c=180, r=4, X157.164 Y73.619 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c180_r004.jpg 1387 / 2211, ETA: 00:32:47.4691 @ 0.418812 items / sec XY3P: 1388 / 2211 @ c=181, r=4, X157.337 Y73.615 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c181_r004.jpg 1388 / 2211, ETA: 00:32:45.0883 @ 0.418811 items / sec XY3P: 1389 / 2211 @ c=182, r=4, X157.510 Y73.611 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c182_r004.jpg 1389 / 2211, ETA: 00:32:42.7066 @ 0.418809 items / sec XY3P: 1390 / 2211 @ c=183, r=4, X157.682 Y73.607 Z-15.060 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c183_r004.jpg 1390 / 2211, ETA: 00:32:40.3273 @ 0.418808 items / sec XY3P: 1391 / 2211 @ c=184, r=4, X157.855 Y73.603 Z-15.059 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c184_r004.jpg 1391 / 2211, ETA: 00:32:37.9458 @ 0.418806 items / sec XY3P: 1392 / 2211 @ c=185, r=4, X158.028 Y73.599 Z-15.059 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c185_r004.jpg 1392 / 2211, ETA: 00:32:35.5579 @ 0.418806 items / sec XY3P: 1393 / 2211 @ c=186, r=4, X158.201 Y73.595 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c186_r004.jpg 1393 / 2211, ETA: 00:32:33.1806 @ 0.418804 items / sec XY3P: 1394 / 2211 @ c=187, r=4, X158.373 Y73.591 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c187_r004.jpg 1394 / 2211, ETA: 00:32:30.7934 @ 0.418804 items / sec XY3P: 1395 / 2211 @ c=188, r=4, X158.546 Y73.587 Z-15.057 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c188_r004.jpg 1395 / 2211, ETA: 00:32:28.4115 @ 0.418803 items / sec XY3P: 1396 / 2211 @ c=189, r=4, X158.719 Y73.583 Z-15.056 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c189_r004.jpg 1396 / 2211, ETA: 00:32:26.0290 @ 0.418802 items / sec XY3P: 1397 / 2211 @ c=190, r=4, X158.892 Y73.579 Z-15.056 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c190_r004.jpg 1397 / 2211, ETA: 00:32:23.6471 @ 0.418800 items / sec XY3P: 1398 / 2211 @ c=191, r=4, X159.064 Y73.575 Z-15.055 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c191_r004.jpg 1398 / 2211, ETA: 00:32:21.2658 @ 0.418799 items / sec XY3P: 1399 / 2211 @ c=192, r=4, X159.237 Y73.571 Z-15.055 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c192_r004.jpg 1399 / 2211, ETA: 00:32:18.8825 @ 0.418798 items / sec XY3P: 1400 / 2211 @ c=193, r=4, X159.410 Y73.567 Z-15.054 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c193_r004.jpg 1400 / 2211, ETA: 00:32:16.5002 @ 0.418797 items / sec XY3P: 1401 / 2211 @ c=194, r=4, X159.583 Y73.563 Z-15.054 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c194_r004.jpg 1401 / 2211, ETA: 00:32:14.1178 @ 0.418796 items / sec XY3P: 1402 / 2211 @ c=195, r=4, X159.755 Y73.559 Z-15.053 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c195_r004.jpg 1402 / 2211, ETA: 00:32:11.7357 @ 0.418794 items / sec XY3P: 1403 / 2211 @ c=196, r=4, X159.928 Y73.555 Z-15.052 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c196_r004.jpg 1403 / 2211, ETA: 00:32:09.3546 @ 0.418793 items / sec XY3P: 1404 / 2211 @ c=197, r=4, X160.101 Y73.551 Z-15.052 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c197_r004.jpg 1404 / 2211, ETA: 00:32:06.9708 @ 0.418792 items / sec XY3P: 1405 / 2211 @ c=198, r=4, X160.274 Y73.547 Z-15.051 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c198_r004.jpg 1405 / 2211, ETA: 00:32:04.4740 @ 0.418816 items / sec XY3P: 1406 / 2211 @ c=199, r=4, X160.446 Y73.543 Z-15.051 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c199_r004.jpg 1406 / 2211, ETA: 00:32:01.9773 @ 0.418839 items / sec XY3P: 1407 / 2211 @ c=200, r=4, X160.619 Y73.539 Z-15.050 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c200_r004.jpg 1407 / 2211, ETA: 00:31:59.5962 @ 0.418838 items / sec XY3P: 1408 / 2211 @ c=200, r=3, X160.619 Y73.700 Z-15.046 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c200_r003.jpg 1408 / 2211, ETA: 00:31:57.2133 @ 0.418837 items / sec XY3P: 1409 / 2211 @ c=199, r=3, X160.446 Y73.704 Z-15.047 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c199_r003.jpg 1409 / 2211, ETA: 00:31:54.8309 @ 0.418836 items / sec XY3P: 1410 / 2211 @ c=198, r=3, X160.274 Y73.708 Z-15.048 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c198_r003.jpg 1410 / 2211, ETA: 00:31:52.4491 @ 0.418835 items / sec XY3P: 1411 / 2211 @ c=197, r=3, X160.101 Y73.712 Z-15.048 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c197_r003.jpg 1411 / 2211, ETA: 00:31:50.0672 @ 0.418833 items / sec XY3P: 1412 / 2211 @ c=196, r=3, X159.928 Y73.716 Z-15.049 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c196_r003.jpg 1412 / 2211, ETA: 00:31:47.6856 @ 0.418832 items / sec XY3P: 1413 / 2211 @ c=195, r=3, X159.755 Y73.720 Z-15.049 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c195_r003.jpg 1413 / 2211, ETA: 00:31:45.3029 @ 0.418831 items / sec XY3P: 1414 / 2211 @ c=194, r=3, X159.583 Y73.724 Z-15.050 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c194_r003.jpg 1414 / 2211, ETA: 00:31:42.9206 @ 0.418830 items / sec XY3P: 1415 / 2211 @ c=193, r=3, X159.410 Y73.728 Z-15.051 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c193_r003.jpg 1415 / 2211, ETA: 00:31:40.5385 @ 0.418829 items / sec XY3P: 1416 / 2211 @ c=192, r=3, X159.237 Y73.732 Z-15.051 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c192_r003.jpg 1416 / 2211, ETA: 00:31:38.1558 @ 0.418828 items / sec XY3P: 1417 / 2211 @ c=191, r=3, X159.064 Y73.736 Z-15.052 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c191_r003.jpg 1417 / 2211, ETA: 00:31:35.7754 @ 0.418826 items / sec XY3P: 1418 / 2211 @ c=190, r=3, X158.892 Y73.740 Z-15.052 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c190_r003.jpg 1418 / 2211, ETA: 00:31:33.3918 @ 0.418825 items / sec XY3P: 1419 / 2211 @ c=189, r=3, X158.719 Y73.744 Z-15.053 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c189_r003.jpg 1419 / 2211, ETA: 00:31:31.0097 @ 0.418824 items / sec XY3P: 1420 / 2211 @ c=188, r=3, X158.546 Y73.748 Z-15.054 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c188_r003.jpg 1420 / 2211, ETA: 00:31:28.6273 @ 0.418823 items / sec XY3P: 1421 / 2211 @ c=187, r=3, X158.373 Y73.752 Z-15.054 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c187_r003.jpg 1421 / 2211, ETA: 00:31:26.2452 @ 0.418821 items / sec XY3P: 1422 / 2211 @ c=186, r=3, X158.201 Y73.756 Z-15.055 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c186_r003.jpg 1422 / 2211, ETA: 00:31:23.8637 @ 0.418820 items / sec XY3P: 1423 / 2211 @ c=185, r=3, X158.028 Y73.760 Z-15.055 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c185_r003.jpg 1423 / 2211, ETA: 00:31:21.4801 @ 0.418819 items / sec XY3P: 1424 / 2211 @ c=184, r=3, X157.855 Y73.764 Z-15.056 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c184_r003.jpg 1424 / 2211, ETA: 00:31:19.0983 @ 0.418818 items / sec XY3P: 1425 / 2211 @ c=183, r=3, X157.682 Y73.768 Z-15.057 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c183_r003.jpg 1425 / 2211, ETA: 00:31:16.7157 @ 0.418817 items / sec XY3P: 1426 / 2211 @ c=182, r=3, X157.510 Y73.772 Z-15.057 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c182_r003.jpg 1426 / 2211, ETA: 00:31:14.3332 @ 0.418816 items / sec XY3P: 1427 / 2211 @ c=181, r=3, X157.337 Y73.776 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c181_r003.jpg 1427 / 2211, ETA: 00:31:11.9520 @ 0.418814 items / sec XY3P: 1428 / 2211 @ c=180, r=3, X157.164 Y73.780 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c180_r003.jpg 1428 / 2211, ETA: 00:31:09.4596 @ 0.418838 items / sec XY3P: 1429 / 2211 @ c=179, r=3, X156.991 Y73.784 Z-15.059 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c179_r003.jpg 1429 / 2211, ETA: 00:31:07.0767 @ 0.418837 items / sec XY3P: 1430 / 2211 @ c=178, r=3, X156.819 Y73.788 Z-15.059 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c178_r003.jpg 1430 / 2211, ETA: 00:31:04.6944 @ 0.418835 items / sec XY3P: 1431 / 2211 @ c=177, r=3, X156.646 Y73.791 Z-15.060 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c177_r003.jpg 1431 / 2211, ETA: 00:31:02.3122 @ 0.418834 items / sec XY3P: 1432 / 2211 @ c=176, r=3, X156.473 Y73.795 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c176_r003.jpg 1432 / 2211, ETA: 00:30:59.9296 @ 0.418833 items / sec XY3P: 1433 / 2211 @ c=175, r=3, X156.300 Y73.799 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c175_r003.jpg 1433 / 2211, ETA: 00:30:57.5484 @ 0.418832 items / sec XY3P: 1434 / 2211 @ c=174, r=3, X156.127 Y73.803 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c174_r003.jpg 1434 / 2211, ETA: 00:30:55.1652 @ 0.418831 items / sec XY3P: 1435 / 2211 @ c=173, r=3, X155.955 Y73.807 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c173_r003.jpg 1435 / 2211, ETA: 00:30:52.7827 @ 0.418829 items / sec XY3P: 1436 / 2211 @ c=172, r=3, X155.782 Y73.811 Z-15.063 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c172_r003.jpg 1436 / 2211, ETA: 00:30:50.4003 @ 0.418828 items / sec XY3P: 1437 / 2211 @ c=171, r=3, X155.609 Y73.815 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c171_r003.jpg 1437 / 2211, ETA: 00:30:48.0185 @ 0.418827 items / sec XY3P: 1438 / 2211 @ c=170, r=3, X155.436 Y73.819 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c170_r003.jpg 1438 / 2211, ETA: 00:30:45.6366 @ 0.418826 items / sec XY3P: 1439 / 2211 @ c=169, r=3, X155.264 Y73.823 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c169_r003.jpg 1439 / 2211, ETA: 00:30:43.2526 @ 0.418825 items / sec XY3P: 1440 / 2211 @ c=168, r=3, X155.091 Y73.827 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c168_r003.jpg 1440 / 2211, ETA: 00:30:40.8708 @ 0.418824 items / sec XY3P: 1441 / 2211 @ c=167, r=3, X154.918 Y73.831 Z-15.066 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c167_r003.jpg 1441 / 2211, ETA: 00:30:38.4882 @ 0.418822 items / sec XY3P: 1442 / 2211 @ c=166, r=3, X154.745 Y73.835 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c166_r003.jpg 1442 / 2211, ETA: 00:30:36.1054 @ 0.418821 items / sec XY3P: 1443 / 2211 @ c=165, r=3, X154.573 Y73.839 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c165_r003.jpg 1443 / 2211, ETA: 00:30:33.7236 @ 0.418820 items / sec XY3P: 1444 / 2211 @ c=164, r=3, X154.400 Y73.843 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c164_r003.jpg 1444 / 2211, ETA: 00:30:31.3405 @ 0.418819 items / sec XY3P: 1445 / 2211 @ c=163, r=3, X154.227 Y73.847 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c163_r003.jpg 1445 / 2211, ETA: 00:30:28.9576 @ 0.418818 items / sec XY3P: 1446 / 2211 @ c=162, r=3, X154.054 Y73.851 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c162_r003.jpg 1446 / 2211, ETA: 00:30:26.5749 @ 0.418817 items / sec XY3P: 1447 / 2211 @ c=161, r=3, X153.882 Y73.855 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c161_r003.jpg 1447 / 2211, ETA: 00:30:24.1927 @ 0.418815 items / sec XY3P: 1448 / 2211 @ c=160, r=3, X153.709 Y73.859 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c160_r003.jpg 1448 / 2211, ETA: 00:30:21.8102 @ 0.418814 items / sec XY3P: 1449 / 2211 @ c=159, r=3, X153.536 Y73.863 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c159_r003.jpg 1449 / 2211, ETA: 00:30:19.4273 @ 0.418813 items / sec XY3P: 1450 / 2211 @ c=158, r=3, X153.363 Y73.867 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c158_r003.jpg 1450 / 2211, ETA: 00:30:17.0445 @ 0.418812 items / sec XY3P: 1451 / 2211 @ c=157, r=3, X153.191 Y73.871 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c157_r003.jpg 1451 / 2211, ETA: 00:30:14.6620 @ 0.418811 items / sec XY3P: 1452 / 2211 @ c=156, r=3, X153.018 Y73.875 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c156_r003.jpg 1452 / 2211, ETA: 00:30:12.2793 @ 0.418810 items / sec XY3P: 1453 / 2211 @ c=155, r=3, X152.845 Y73.879 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c155_r003.jpg 1453 / 2211, ETA: 00:30:09.7924 @ 0.418833 items / sec XY3P: 1454 / 2211 @ c=154, r=3, X152.673 Y73.883 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c154_r003.jpg 1454 / 2211, ETA: 00:30:07.4129 @ 0.418831 items / sec XY3P: 1455 / 2211 @ c=153, r=3, X152.500 Y73.887 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c153_r003.jpg 1455 / 2211, ETA: 00:30:05.0269 @ 0.418830 items / sec XY3P: 1456 / 2211 @ c=152, r=3, X152.327 Y73.891 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c152_r003.jpg 1456 / 2211, ETA: 00:30:02.6458 @ 0.418829 items / sec XY3P: 1457 / 2211 @ c=151, r=3, X152.154 Y73.895 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c151_r003.jpg 1457 / 2211, ETA: 00:30:00.2619 @ 0.418828 items / sec XY3P: 1458 / 2211 @ c=150, r=3, X151.982 Y73.899 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c150_r003.jpg 1458 / 2211, ETA: 00:29:57.8793 @ 0.418827 items / sec XY3P: 1459 / 2211 @ c=149, r=3, X151.809 Y73.903 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c149_r003.jpg 1459 / 2211, ETA: 00:29:55.4965 @ 0.418826 items / sec XY3P: 1460 / 2211 @ c=148, r=3, X151.636 Y73.906 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c148_r003.jpg 1460 / 2211, ETA: 00:29:53.1143 @ 0.418824 items / sec XY3P: 1461 / 2211 @ c=147, r=3, X151.463 Y73.910 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c147_r003.jpg 1461 / 2211, ETA: 00:29:50.7329 @ 0.418823 items / sec XY3P: 1462 / 2211 @ c=146, r=3, X151.291 Y73.914 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c146_r003.jpg 1462 / 2211, ETA: 00:29:48.3507 @ 0.418822 items / sec XY3P: 1463 / 2211 @ c=145, r=3, X151.118 Y73.918 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c145_r003.jpg 1463 / 2211, ETA: 00:29:45.9685 @ 0.418820 items / sec XY3P: 1464 / 2211 @ c=144, r=3, X150.945 Y73.922 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c144_r003.jpg 1464 / 2211, ETA: 00:29:43.5828 @ 0.418820 items / sec XY3P: 1465 / 2211 @ c=143, r=3, X150.772 Y73.926 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c143_r003.jpg 1465 / 2211, ETA: 00:29:41.2005 @ 0.418819 items / sec XY3P: 1466 / 2211 @ c=142, r=3, X150.600 Y73.930 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c142_r003.jpg 1466 / 2211, ETA: 00:29:38.7168 @ 0.418841 items / sec XY3P: 1467 / 2211 @ c=141, r=3, X150.427 Y73.934 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c141_r003.jpg 1467 / 2211, ETA: 00:29:36.3335 @ 0.418840 items / sec XY3P: 1468 / 2211 @ c=140, r=3, X150.254 Y73.938 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c140_r003.jpg 1468 / 2211, ETA: 00:29:33.9510 @ 0.418839 items / sec XY3P: 1469 / 2211 @ c=139, r=3, X150.081 Y73.942 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c139_r003.jpg 1469 / 2211, ETA: 00:29:31.5682 @ 0.418838 items / sec XY3P: 1470 / 2211 @ c=138, r=3, X149.909 Y73.946 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c138_r003.jpg 1470 / 2211, ETA: 00:29:29.1865 @ 0.418837 items / sec XY3P: 1471 / 2211 @ c=137, r=3, X149.736 Y73.950 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c137_r003.jpg 1471 / 2211, ETA: 00:29:26.8024 @ 0.418836 items / sec XY3P: 1472 / 2211 @ c=136, r=3, X149.563 Y73.954 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c136_r003.jpg 1472 / 2211, ETA: 00:29:24.4202 @ 0.418834 items / sec XY3P: 1473 / 2211 @ c=135, r=3, X149.390 Y73.958 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c135_r003.jpg 1473 / 2211, ETA: 00:29:22.0374 @ 0.418833 items / sec XY3P: 1474 / 2211 @ c=134, r=3, X149.218 Y73.962 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c134_r003.jpg 1474 / 2211, ETA: 00:29:19.6547 @ 0.418832 items / sec XY3P: 1475 / 2211 @ c=133, r=3, X149.045 Y73.966 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c133_r003.jpg 1475 / 2211, ETA: 00:29:17.2728 @ 0.418831 items / sec XY3P: 1476 / 2211 @ c=132, r=3, X148.872 Y73.970 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c132_r003.jpg 1476 / 2211, ETA: 00:29:14.8890 @ 0.418830 items / sec XY3P: 1477 / 2211 @ c=131, r=3, X148.699 Y73.974 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c131_r003.jpg 1477 / 2211, ETA: 00:29:12.5067 @ 0.418829 items / sec XY3P: 1478 / 2211 @ c=130, r=3, X148.526 Y73.978 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c130_r003.jpg 1478 / 2211, ETA: 00:29:10.1266 @ 0.418827 items / sec XY3P: 1479 / 2211 @ c=129, r=3, X148.354 Y73.982 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c129_r003.jpg 1479 / 2211, ETA: 00:29:07.7404 @ 0.418826 items / sec XY3P: 1480 / 2211 @ c=128, r=3, X148.181 Y73.986 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c128_r003.jpg 1480 / 2211, ETA: 00:29:05.3587 @ 0.418825 items / sec XY3P: 1481 / 2211 @ c=127, r=3, X148.008 Y73.990 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c127_r003.jpg 1481 / 2211, ETA: 00:29:02.9749 @ 0.418824 items / sec XY3P: 1482 / 2211 @ c=126, r=3, X147.835 Y73.994 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c126_r003.jpg 1482 / 2211, ETA: 00:29:00.5920 @ 0.418823 items / sec XY3P: 1483 / 2211 @ c=125, r=3, X147.663 Y73.998 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c125_r003.jpg 1483 / 2211, ETA: 00:28:58.2096 @ 0.418822 items / sec XY3P: 1484 / 2211 @ c=124, r=3, X147.490 Y74.002 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c124_r003.jpg 1484 / 2211, ETA: 00:28:55.8263 @ 0.418821 items / sec XY3P: 1485 / 2211 @ c=123, r=3, X147.317 Y74.006 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c123_r003.jpg 1485 / 2211, ETA: 00:28:53.4473 @ 0.418819 items / sec XY3P: 1486 / 2211 @ c=122, r=3, X147.144 Y74.010 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c122_r003.jpg 1486 / 2211, ETA: 00:28:51.0607 @ 0.418818 items / sec XY3P: 1487 / 2211 @ c=121, r=3, X146.972 Y74.014 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c121_r003.jpg 1487 / 2211, ETA: 00:28:48.6773 @ 0.418817 items / sec XY3P: 1488 / 2211 @ c=120, r=3, X146.799 Y74.017 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c120_r003.jpg 1488 / 2211, ETA: 00:28:46.2944 @ 0.418816 items / sec XY3P: 1489 / 2211 @ c=119, r=3, X146.626 Y74.021 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c119_r003.jpg 1489 / 2211, ETA: 00:28:43.9112 @ 0.418815 items / sec XY3P: 1490 / 2211 @ c=118, r=3, X146.453 Y74.025 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c118_r003.jpg 1490 / 2211, ETA: 00:28:41.5291 @ 0.418814 items / sec XY3P: 1491 / 2211 @ c=117, r=3, X146.281 Y74.029 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c117_r003.jpg 1491 / 2211, ETA: 00:28:39.1451 @ 0.418813 items / sec XY3P: 1492 / 2211 @ c=116, r=3, X146.108 Y74.033 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c116_r003.jpg 1492 / 2211, ETA: 00:28:36.7648 @ 0.418811 items / sec XY3P: 1493 / 2211 @ c=115, r=3, X145.935 Y74.037 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c115_r003.jpg 1493 / 2211, ETA: 00:28:34.3787 @ 0.418811 items / sec XY3P: 1494 / 2211 @ c=114, r=3, X145.762 Y74.041 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c114_r003.jpg 1494 / 2211, ETA: 00:28:31.9957 @ 0.418809 items / sec XY3P: 1495 / 2211 @ c=113, r=3, X145.590 Y74.045 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c113_r003.jpg 1495 / 2211, ETA: 00:28:29.6133 @ 0.418808 items / sec XY3P: 1496 / 2211 @ c=112, r=3, X145.417 Y74.049 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c112_r003.jpg 1496 / 2211, ETA: 00:28:27.2293 @ 0.418807 items / sec XY3P: 1497 / 2211 @ c=111, r=3, X145.244 Y74.053 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c111_r003.jpg 1497 / 2211, ETA: 00:28:24.8463 @ 0.418806 items / sec XY3P: 1498 / 2211 @ c=110, r=3, X145.072 Y74.057 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c110_r003.jpg 1498 / 2211, ETA: 00:28:22.4632 @ 0.418805 items / sec XY3P: 1499 / 2211 @ c=109, r=3, X144.899 Y74.061 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c109_r003.jpg 1499 / 2211, ETA: 00:28:20.0826 @ 0.418803 items / sec XY3P: 1500 / 2211 @ c=108, r=3, X144.726 Y74.065 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c108_r003.jpg 1500 / 2211, ETA: 00:28:17.6972 @ 0.418803 items / sec XY3P: 1501 / 2211 @ c=107, r=3, X144.553 Y74.069 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c107_r003.jpg 1501 / 2211, ETA: 00:28:15.2197 @ 0.418825 items / sec XY3P: 1502 / 2211 @ c=106, r=3, X144.381 Y74.073 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c106_r003.jpg 1502 / 2211, ETA: 00:28:12.8357 @ 0.418824 items / sec XY3P: 1503 / 2211 @ c=105, r=3, X144.208 Y74.077 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c105_r003.jpg 1503 / 2211, ETA: 00:28:10.4526 @ 0.418823 items / sec XY3P: 1504 / 2211 @ c=104, r=3, X144.035 Y74.081 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c104_r003.jpg 1504 / 2211, ETA: 00:28:08.0693 @ 0.418822 items / sec XY3P: 1505 / 2211 @ c=103, r=3, X143.862 Y74.085 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c103_r003.jpg 1505 / 2211, ETA: 00:28:05.6865 @ 0.418820 items / sec XY3P: 1506 / 2211 @ c=102, r=3, X143.690 Y74.089 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c102_r003.jpg 1506 / 2211, ETA: 00:28:03.3042 @ 0.418819 items / sec XY3P: 1507 / 2211 @ c=101, r=3, X143.517 Y74.093 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c101_r003.jpg 1507 / 2211, ETA: 00:28:00.9200 @ 0.418818 items / sec XY3P: 1508 / 2211 @ c=100, r=3, X143.344 Y74.097 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c100_r003.jpg 1508 / 2211, ETA: 00:27:58.4439 @ 0.418840 items / sec XY3P: 1509 / 2211 @ c=99, r=3, X143.171 Y74.101 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c099_r003.jpg 1509 / 2211, ETA: 00:27:56.0616 @ 0.418839 items / sec XY3P: 1510 / 2211 @ c=98, r=3, X142.999 Y74.105 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c098_r003.jpg 1510 / 2211, ETA: 00:27:53.6777 @ 0.418838 items / sec XY3P: 1511 / 2211 @ c=97, r=3, X142.826 Y74.109 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c097_r003.jpg 1511 / 2211, ETA: 00:27:51.2946 @ 0.418837 items / sec XY3P: 1512 / 2211 @ c=96, r=3, X142.653 Y74.113 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c096_r003.jpg 1512 / 2211, ETA: 00:27:48.9116 @ 0.418836 items / sec XY3P: 1513 / 2211 @ c=95, r=3, X142.480 Y74.117 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c095_r003.jpg 1513 / 2211, ETA: 00:27:46.5283 @ 0.418835 items / sec XY3P: 1514 / 2211 @ c=94, r=3, X142.308 Y74.121 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c094_r003.jpg 1514 / 2211, ETA: 00:27:44.1488 @ 0.418833 items / sec XY3P: 1515 / 2211 @ c=93, r=3, X142.135 Y74.125 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c093_r003.jpg 1515 / 2211, ETA: 00:27:41.7621 @ 0.418832 items / sec XY3P: 1516 / 2211 @ c=92, r=3, X141.962 Y74.129 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c092_r003.jpg 1516 / 2211, ETA: 00:27:39.3790 @ 0.418831 items / sec XY3P: 1517 / 2211 @ c=91, r=3, X141.789 Y74.132 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c091_r003.jpg 1517 / 2211, ETA: 00:27:36.9954 @ 0.418830 items / sec XY3P: 1518 / 2211 @ c=90, r=3, X141.617 Y74.136 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c090_r003.jpg 1518 / 2211, ETA: 00:27:34.6127 @ 0.418829 items / sec XY3P: 1519 / 2211 @ c=89, r=3, X141.444 Y74.140 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c089_r003.jpg 1519 / 2211, ETA: 00:27:32.2301 @ 0.418828 items / sec XY3P: 1520 / 2211 @ c=88, r=3, X141.271 Y74.144 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c088_r003.jpg 1520 / 2211, ETA: 00:27:29.8463 @ 0.418827 items / sec XY3P: 1521 / 2211 @ c=87, r=3, X141.098 Y74.148 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c087_r003.jpg 1521 / 2211, ETA: 00:27:27.4629 @ 0.418826 items / sec XY3P: 1522 / 2211 @ c=86, r=3, X140.925 Y74.152 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c086_r003.jpg 1522 / 2211, ETA: 00:27:25.0796 @ 0.418825 items / sec XY3P: 1523 / 2211 @ c=85, r=3, X140.753 Y74.156 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c085_r003.jpg 1523 / 2211, ETA: 00:27:22.6966 @ 0.418824 items / sec XY3P: 1524 / 2211 @ c=84, r=3, X140.580 Y74.160 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c084_r003.jpg 1524 / 2211, ETA: 00:27:20.3137 @ 0.418822 items / sec XY3P: 1525 / 2211 @ c=83, r=3, X140.407 Y74.164 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c083_r003.jpg 1525 / 2211, ETA: 00:27:17.9297 @ 0.418821 items / sec XY3P: 1526 / 2211 @ c=82, r=3, X140.234 Y74.168 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c082_r003.jpg 1526 / 2211, ETA: 00:27:15.5464 @ 0.418820 items / sec XY3P: 1527 / 2211 @ c=81, r=3, X140.062 Y74.172 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c081_r003.jpg 1527 / 2211, ETA: 00:27:13.1627 @ 0.418819 items / sec XY3P: 1528 / 2211 @ c=80, r=3, X139.889 Y74.176 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c080_r003.jpg 1528 / 2211, ETA: 00:27:10.7800 @ 0.418818 items / sec XY3P: 1529 / 2211 @ c=79, r=3, X139.716 Y74.180 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c079_r003.jpg 1529 / 2211, ETA: 00:27:08.3970 @ 0.418817 items / sec XY3P: 1530 / 2211 @ c=78, r=3, X139.543 Y74.184 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c078_r003.jpg 1530 / 2211, ETA: 00:27:06.0129 @ 0.418816 items / sec XY3P: 1531 / 2211 @ c=77, r=3, X139.371 Y74.188 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c077_r003.jpg 1531 / 2211, ETA: 00:27:03.6321 @ 0.418814 items / sec XY3P: 1532 / 2211 @ c=76, r=3, X139.198 Y74.192 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c076_r003.jpg 1532 / 2211, ETA: 00:27:01.2460 @ 0.418814 items / sec XY3P: 1533 / 2211 @ c=75, r=3, X139.025 Y74.196 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c075_r003.jpg 1533 / 2211, ETA: 00:26:58.8631 @ 0.418812 items / sec XY3P: 1534 / 2211 @ c=74, r=3, X138.852 Y74.200 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c074_r003.jpg 1534 / 2211, ETA: 00:26:56.4802 @ 0.418811 items / sec XY3P: 1535 / 2211 @ c=73, r=3, X138.680 Y74.204 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c073_r003.jpg 1535 / 2211, ETA: 00:26:54.0970 @ 0.418810 items / sec XY3P: 1536 / 2211 @ c=72, r=3, X138.507 Y74.208 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c072_r003.jpg 1536 / 2211, ETA: 00:26:51.7140 @ 0.418809 items / sec XY3P: 1537 / 2211 @ c=71, r=3, X138.334 Y74.212 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c071_r003.jpg 1537 / 2211, ETA: 00:26:49.3311 @ 0.418808 items / sec XY3P: 1538 / 2211 @ c=70, r=3, X138.161 Y74.216 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c070_r003.jpg 1538 / 2211, ETA: 00:26:46.9447 @ 0.418807 items / sec XY3P: 1539 / 2211 @ c=69, r=3, X137.989 Y74.220 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c069_r003.jpg 1539 / 2211, ETA: 00:26:44.5615 @ 0.418806 items / sec XY3P: 1540 / 2211 @ c=68, r=3, X137.816 Y74.224 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c068_r003.jpg 1540 / 2211, ETA: 00:26:42.1788 @ 0.418805 items / sec XY3P: 1541 / 2211 @ c=67, r=3, X137.643 Y74.228 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c067_r003.jpg 1541 / 2211, ETA: 00:26:39.7942 @ 0.418804 items / sec XY3P: 1542 / 2211 @ c=66, r=3, X137.471 Y74.232 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c066_r003.jpg 1542 / 2211, ETA: 00:26:37.4104 @ 0.418803 items / sec XY3P: 1543 / 2211 @ c=65, r=3, X137.298 Y74.236 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c065_r003.jpg 1543 / 2211, ETA: 00:26:35.0267 @ 0.418802 items / sec XY3P: 1544 / 2211 @ c=64, r=3, X137.125 Y74.240 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c064_r003.jpg 1544 / 2211, ETA: 00:26:32.6430 @ 0.418801 items / sec XY3P: 1545 / 2211 @ c=63, r=3, X136.952 Y74.244 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c063_r003.jpg 1545 / 2211, ETA: 00:26:30.2627 @ 0.418799 items / sec XY3P: 1546 / 2211 @ c=62, r=3, X136.780 Y74.247 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c062_r003.jpg 1546 / 2211, ETA: 00:26:27.8758 @ 0.418798 items / sec XY3P: 1547 / 2211 @ c=61, r=3, X136.607 Y74.251 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c061_r003.jpg 1547 / 2211, ETA: 00:26:25.4946 @ 0.418797 items / sec XY3P: 1548 / 2211 @ c=60, r=3, X136.434 Y74.255 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c060_r003.jpg 1548 / 2211, ETA: 00:26:23.1083 @ 0.418796 items / sec XY3P: 1549 / 2211 @ c=59, r=3, X136.261 Y74.259 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c059_r003.jpg 1549 / 2211, ETA: 00:26:20.7248 @ 0.418795 items / sec XY3P: 1550 / 2211 @ c=58, r=3, X136.089 Y74.263 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c058_r003.jpg 1550 / 2211, ETA: 00:26:18.3418 @ 0.418794 items / sec XY3P: 1551 / 2211 @ c=57, r=3, X135.916 Y74.267 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c057_r003.jpg 1551 / 2211, ETA: 00:26:15.9571 @ 0.418793 items / sec XY3P: 1552 / 2211 @ c=56, r=3, X135.743 Y74.271 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c056_r003.jpg 1552 / 2211, ETA: 00:26:13.5730 @ 0.418792 items / sec XY3P: 1553 / 2211 @ c=55, r=3, X135.570 Y74.275 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c055_r003.jpg 1553 / 2211, ETA: 00:26:11.1894 @ 0.418791 items / sec XY3P: 1554 / 2211 @ c=54, r=3, X135.398 Y74.279 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c054_r003.jpg 1554 / 2211, ETA: 00:26:08.8056 @ 0.418790 items / sec XY3P: 1555 / 2211 @ c=53, r=3, X135.225 Y74.283 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c053_r003.jpg 1555 / 2211, ETA: 00:26:06.4227 @ 0.418789 items / sec XY3P: 1556 / 2211 @ c=52, r=3, X135.052 Y74.287 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c052_r003.jpg 1556 / 2211, ETA: 00:26:04.0405 @ 0.418787 items / sec XY3P: 1557 / 2211 @ c=51, r=3, X134.879 Y74.291 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c051_r003.jpg 1557 / 2211, ETA: 00:26:01.6537 @ 0.418787 items / sec XY3P: 1558 / 2211 @ c=50, r=3, X134.707 Y74.295 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c050_r003.jpg 1558 / 2211, ETA: 00:25:59.2700 @ 0.418786 items / sec XY3P: 1559 / 2211 @ c=49, r=3, X134.534 Y74.299 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c049_r003.jpg 1559 / 2211, ETA: 00:25:56.8863 @ 0.418785 items / sec XY3P: 1560 / 2211 @ c=48, r=3, X134.361 Y74.303 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c048_r003.jpg 1560 / 2211, ETA: 00:25:54.5031 @ 0.418783 items / sec XY3P: 1561 / 2211 @ c=47, r=3, X134.188 Y74.307 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c047_r003.jpg 1561 / 2211, ETA: 00:25:52.1183 @ 0.418783 items / sec XY3P: 1562 / 2211 @ c=46, r=3, X134.016 Y74.311 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c046_r003.jpg 1562 / 2211, ETA: 00:25:49.7341 @ 0.418782 items / sec XY3P: 1563 / 2211 @ c=45, r=3, X133.843 Y74.315 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c045_r003.jpg 1563 / 2211, ETA: 00:25:47.3531 @ 0.418780 items / sec XY3P: 1564 / 2211 @ c=44, r=3, X133.670 Y74.319 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c044_r003.jpg 1564 / 2211, ETA: 00:25:44.9665 @ 0.418779 items / sec XY3P: 1565 / 2211 @ c=43, r=3, X133.497 Y74.323 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c043_r003.jpg 1565 / 2211, ETA: 00:25:42.5831 @ 0.418778 items / sec XY3P: 1566 / 2211 @ c=42, r=3, X133.325 Y74.327 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c042_r003.jpg 1566 / 2211, ETA: 00:25:40.1985 @ 0.418777 items / sec XY3P: 1567 / 2211 @ c=41, r=3, X133.152 Y74.331 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c041_r003.jpg 1567 / 2211, ETA: 00:25:37.8140 @ 0.418776 items / sec XY3P: 1568 / 2211 @ c=40, r=3, X132.979 Y74.335 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c040_r003.jpg 1568 / 2211, ETA: 00:25:35.4300 @ 0.418775 items / sec XY3P: 1569 / 2211 @ c=39, r=3, X132.806 Y74.339 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c039_r003.jpg 1569 / 2211, ETA: 00:25:33.0460 @ 0.418774 items / sec XY3P: 1570 / 2211 @ c=38, r=3, X132.633 Y74.343 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c038_r003.jpg 1570 / 2211, ETA: 00:25:30.6626 @ 0.418773 items / sec XY3P: 1571 / 2211 @ c=37, r=3, X132.461 Y74.347 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c037_r003.jpg 1571 / 2211, ETA: 00:25:28.2787 @ 0.418772 items / sec XY3P: 1572 / 2211 @ c=36, r=3, X132.288 Y74.351 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c036_r003.jpg 1572 / 2211, ETA: 00:25:25.8930 @ 0.418771 items / sec XY3P: 1573 / 2211 @ c=35, r=3, X132.115 Y74.355 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c035_r003.jpg 1573 / 2211, ETA: 00:25:23.5095 @ 0.418770 items / sec XY3P: 1574 / 2211 @ c=34, r=3, X131.942 Y74.358 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c034_r003.jpg 1574 / 2211, ETA: 00:25:21.1254 @ 0.418769 items / sec XY3P: 1575 / 2211 @ c=33, r=3, X131.770 Y74.362 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c033_r003.jpg 1575 / 2211, ETA: 00:25:18.7420 @ 0.418768 items / sec XY3P: 1576 / 2211 @ c=32, r=3, X131.597 Y74.366 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c032_r003.jpg 1576 / 2211, ETA: 00:25:16.3568 @ 0.418767 items / sec XY3P: 1577 / 2211 @ c=31, r=3, X131.424 Y74.370 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c031_r003.jpg 1577 / 2211, ETA: 00:25:13.9728 @ 0.418766 items / sec XY3P: 1578 / 2211 @ c=30, r=3, X131.251 Y74.374 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c030_r003.jpg 1578 / 2211, ETA: 00:25:11.5886 @ 0.418765 items / sec XY3P: 1579 / 2211 @ c=29, r=3, X131.079 Y74.378 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c029_r003.jpg 1579 / 2211, ETA: 00:25:09.2042 @ 0.418764 items / sec XY3P: 1580 / 2211 @ c=28, r=3, X130.906 Y74.382 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c028_r003.jpg 1580 / 2211, ETA: 00:25:06.8231 @ 0.418762 items / sec XY3P: 1581 / 2211 @ c=27, r=3, X130.733 Y74.386 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c027_r003.jpg 1581 / 2211, ETA: 00:25:04.4356 @ 0.418762 items / sec XY3P: 1582 / 2211 @ c=26, r=3, X130.560 Y74.390 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c026_r003.jpg 1582 / 2211, ETA: 00:25:02.0513 @ 0.418761 items / sec XY3P: 1583 / 2211 @ c=25, r=3, X130.388 Y74.394 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c025_r003.jpg 1583 / 2211, ETA: 00:24:59.6671 @ 0.418760 items / sec XY3P: 1584 / 2211 @ c=24, r=3, X130.215 Y74.398 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c024_r003.jpg 1584 / 2211, ETA: 00:24:57.2828 @ 0.418759 items / sec XY3P: 1585 / 2211 @ c=23, r=3, X130.042 Y74.402 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c023_r003.jpg 1585 / 2211, ETA: 00:24:54.8991 @ 0.418757 items / sec XY3P: 1586 / 2211 @ c=22, r=3, X129.870 Y74.406 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c022_r003.jpg 1586 / 2211, ETA: 00:24:52.5141 @ 0.418757 items / sec XY3P: 1587 / 2211 @ c=21, r=3, X129.697 Y74.410 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c021_r003.jpg 1587 / 2211, ETA: 00:24:50.1295 @ 0.418756 items / sec XY3P: 1588 / 2211 @ c=20, r=3, X129.524 Y74.414 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c020_r003.jpg 1588 / 2211, ETA: 00:24:47.7451 @ 0.418755 items / sec XY3P: 1589 / 2211 @ c=19, r=3, X129.351 Y74.418 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c019_r003.jpg 1589 / 2211, ETA: 00:24:45.3609 @ 0.418753 items / sec XY3P: 1590 / 2211 @ c=18, r=3, X129.179 Y74.422 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c018_r003.jpg 1590 / 2211, ETA: 00:24:42.9769 @ 0.418752 items / sec XY3P: 1591 / 2211 @ c=17, r=3, X129.006 Y74.426 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c017_r003.jpg 1591 / 2211, ETA: 00:24:40.5920 @ 0.418751 items / sec XY3P: 1592 / 2211 @ c=16, r=3, X128.833 Y74.430 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c016_r003.jpg 1592 / 2211, ETA: 00:24:38.2073 @ 0.418750 items / sec XY3P: 1593 / 2211 @ c=15, r=3, X128.660 Y74.434 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c015_r003.jpg 1593 / 2211, ETA: 00:24:35.8229 @ 0.418749 items / sec XY3P: 1594 / 2211 @ c=14, r=3, X128.488 Y74.438 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c014_r003.jpg 1594 / 2211, ETA: 00:24:33.4406 @ 0.418748 items / sec XY3P: 1595 / 2211 @ c=13, r=3, X128.315 Y74.442 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c013_r003.jpg 1595 / 2211, ETA: 00:24:31.0546 @ 0.418747 items / sec XY3P: 1596 / 2211 @ c=12, r=3, X128.142 Y74.446 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c012_r003.jpg 1596 / 2211, ETA: 00:24:28.6695 @ 0.418746 items / sec XY3P: 1597 / 2211 @ c=11, r=3, X127.969 Y74.450 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c011_r003.jpg 1597 / 2211, ETA: 00:24:26.2847 @ 0.418745 items / sec XY3P: 1598 / 2211 @ c=10, r=3, X127.797 Y74.454 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c010_r003.jpg 1598 / 2211, ETA: 00:24:23.9003 @ 0.418744 items / sec XY3P: 1599 / 2211 @ c=9, r=3, X127.624 Y74.458 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c009_r003.jpg 1599 / 2211, ETA: 00:24:21.5159 @ 0.418743 items / sec XY3P: 1600 / 2211 @ c=8, r=3, X127.451 Y74.462 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c008_r003.jpg 1600 / 2211, ETA: 00:24:19.1315 @ 0.418742 items / sec XY3P: 1601 / 2211 @ c=7, r=3, X127.278 Y74.466 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c007_r003.jpg 1601 / 2211, ETA: 00:24:16.7464 @ 0.418741 items / sec XY3P: 1602 / 2211 @ c=6, r=3, X127.106 Y74.470 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c006_r003.jpg 1602 / 2211, ETA: 00:24:14.3619 @ 0.418740 items / sec XY3P: 1603 / 2211 @ c=5, r=3, X126.933 Y74.473 Z-15.162 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c005_r003.jpg 1603 / 2211, ETA: 00:24:11.9772 @ 0.418739 items / sec XY3P: 1604 / 2211 @ c=4, r=3, X126.760 Y74.477 Z-15.162 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c004_r003.jpg 1604 / 2211, ETA: 00:24:09.5924 @ 0.418738 items / sec XY3P: 1605 / 2211 @ c=3, r=3, X126.587 Y74.481 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c003_r003.jpg 1605 / 2211, ETA: 00:24:07.2084 @ 0.418737 items / sec XY3P: 1606 / 2211 @ c=2, r=3, X126.415 Y74.485 Z-15.163 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c002_r003.jpg 1606 / 2211, ETA: 00:24:04.8239 @ 0.418736 items / sec XY3P: 1607 / 2211 @ c=1, r=3, X126.242 Y74.489 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c001_r003.jpg 1607 / 2211, ETA: 00:24:02.4388 @ 0.418735 items / sec XY3P: 1608 / 2211 @ c=0, r=3, X126.069 Y74.493 Z-15.164 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c000_r003.jpg 1608 / 2211, ETA: 00:24:00.0548 @ 0.418734 items / sec XY3P: 1609 / 2211 @ c=0, r=2, X126.069 Y74.654 Z-15.161 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c000_r002.jpg 1609 / 2211, ETA: 00:23:57.6704 @ 0.418733 items / sec XY3P: 1610 / 2211 @ c=1, r=2, X126.242 Y74.650 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c001_r002.jpg 1610 / 2211, ETA: 00:23:55.2873 @ 0.418731 items / sec XY3P: 1611 / 2211 @ c=2, r=2, X126.415 Y74.646 Z-15.160 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c002_r002.jpg 1611 / 2211, ETA: 00:23:52.8994 @ 0.418731 items / sec XY3P: 1612 / 2211 @ c=3, r=2, X126.587 Y74.642 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c003_r002.jpg 1612 / 2211, ETA: 00:23:50.5147 @ 0.418730 items / sec XY3P: 1613 / 2211 @ c=4, r=2, X126.760 Y74.638 Z-15.159 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c004_r002.jpg 1613 / 2211, ETA: 00:23:48.1317 @ 0.418729 items / sec XY3P: 1614 / 2211 @ c=5, r=2, X126.933 Y74.634 Z-15.158 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c005_r002.jpg 1614 / 2211, ETA: 00:23:45.7449 @ 0.418728 items / sec XY3P: 1615 / 2211 @ c=6, r=2, X127.106 Y74.630 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c006_r002.jpg 1615 / 2211, ETA: 00:23:43.3601 @ 0.418727 items / sec XY3P: 1616 / 2211 @ c=7, r=2, X127.278 Y74.626 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c007_r002.jpg 1616 / 2211, ETA: 00:23:40.9754 @ 0.418726 items / sec XY3P: 1617 / 2211 @ c=8, r=2, X127.451 Y74.622 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c008_r002.jpg 1617 / 2211, ETA: 00:23:38.5904 @ 0.418725 items / sec XY3P: 1618 / 2211 @ c=9, r=2, X127.624 Y74.619 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c009_r002.jpg 1618 / 2211, ETA: 00:23:36.2063 @ 0.418724 items / sec XY3P: 1619 / 2211 @ c=10, r=2, X127.797 Y74.615 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c010_r002.jpg 1619 / 2211, ETA: 00:23:33.8209 @ 0.418723 items / sec XY3P: 1620 / 2211 @ c=11, r=2, X127.969 Y74.611 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c011_r002.jpg 1620 / 2211, ETA: 00:23:31.4360 @ 0.418722 items / sec XY3P: 1621 / 2211 @ c=12, r=2, X128.142 Y74.607 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c012_r002.jpg 1621 / 2211, ETA: 00:23:29.0508 @ 0.418722 items / sec XY3P: 1622 / 2211 @ c=13, r=2, X128.315 Y74.603 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c013_r002.jpg 1622 / 2211, ETA: 00:23:26.6660 @ 0.418721 items / sec XY3P: 1623 / 2211 @ c=14, r=2, X128.488 Y74.599 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c014_r002.jpg 1623 / 2211, ETA: 00:23:24.2816 @ 0.418719 items / sec XY3P: 1624 / 2211 @ c=15, r=2, X128.660 Y74.595 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c015_r002.jpg 1624 / 2211, ETA: 00:23:21.8960 @ 0.418719 items / sec XY3P: 1625 / 2211 @ c=16, r=2, X128.833 Y74.591 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c016_r002.jpg 1625 / 2211, ETA: 00:23:19.5110 @ 0.418718 items / sec XY3P: 1626 / 2211 @ c=17, r=2, X129.006 Y74.587 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c017_r002.jpg 1626 / 2211, ETA: 00:23:17.1260 @ 0.418717 items / sec XY3P: 1627 / 2211 @ c=18, r=2, X129.179 Y74.583 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c018_r002.jpg 1627 / 2211, ETA: 00:23:14.7412 @ 0.418716 items / sec XY3P: 1628 / 2211 @ c=19, r=2, X129.351 Y74.579 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c019_r002.jpg 1628 / 2211, ETA: 00:23:12.2844 @ 0.418736 items / sec XY3P: 1629 / 2211 @ c=20, r=2, X129.524 Y74.575 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c020_r002.jpg 1629 / 2211, ETA: 00:23:09.8282 @ 0.418757 items / sec XY3P: 1630 / 2211 @ c=21, r=2, X129.697 Y74.571 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c021_r002.jpg 1630 / 2211, ETA: 00:23:07.4436 @ 0.418756 items / sec XY3P: 1631 / 2211 @ c=22, r=2, X129.870 Y74.567 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c022_r002.jpg 1631 / 2211, ETA: 00:23:05.0586 @ 0.418755 items / sec XY3P: 1632 / 2211 @ c=23, r=2, X130.042 Y74.563 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c023_r002.jpg 1632 / 2211, ETA: 00:23:02.6747 @ 0.418754 items / sec XY3P: 1633 / 2211 @ c=24, r=2, X130.215 Y74.559 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c024_r002.jpg 1633 / 2211, ETA: 00:23:00.2892 @ 0.418753 items / sec XY3P: 1634 / 2211 @ c=25, r=2, X130.388 Y74.555 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c025_r002.jpg 1634 / 2211, ETA: 00:22:57.9041 @ 0.418752 items / sec XY3P: 1635 / 2211 @ c=26, r=2, X130.560 Y74.551 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c026_r002.jpg 1635 / 2211, ETA: 00:22:55.5195 @ 0.418751 items / sec XY3P: 1636 / 2211 @ c=27, r=2, X130.733 Y74.547 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c027_r002.jpg 1636 / 2211, ETA: 00:22:53.1349 @ 0.418750 items / sec XY3P: 1637 / 2211 @ c=28, r=2, X130.906 Y74.543 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c028_r002.jpg 1637 / 2211, ETA: 00:22:50.7506 @ 0.418749 items / sec XY3P: 1638 / 2211 @ c=29, r=2, X131.079 Y74.539 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c029_r002.jpg 1638 / 2211, ETA: 00:22:48.3649 @ 0.418748 items / sec XY3P: 1639 / 2211 @ c=30, r=2, X131.251 Y74.535 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c030_r002.jpg 1639 / 2211, ETA: 00:22:45.9806 @ 0.418747 items / sec XY3P: 1640 / 2211 @ c=31, r=2, X131.424 Y74.531 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c031_r002.jpg 1640 / 2211, ETA: 00:22:43.5954 @ 0.418746 items / sec XY3P: 1641 / 2211 @ c=32, r=2, X131.597 Y74.527 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c032_r002.jpg 1641 / 2211, ETA: 00:22:41.2103 @ 0.418745 items / sec XY3P: 1642 / 2211 @ c=33, r=2, X131.770 Y74.523 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c033_r002.jpg 1642 / 2211, ETA: 00:22:38.8262 @ 0.418744 items / sec XY3P: 1643 / 2211 @ c=34, r=2, X131.942 Y74.519 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c034_r002.jpg 1643 / 2211, ETA: 00:22:36.4405 @ 0.418743 items / sec XY3P: 1644 / 2211 @ c=35, r=2, X132.115 Y74.515 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c035_r002.jpg 1644 / 2211, ETA: 00:22:34.0555 @ 0.418742 items / sec XY3P: 1645 / 2211 @ c=36, r=2, X132.288 Y74.511 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c036_r002.jpg 1645 / 2211, ETA: 00:22:31.6704 @ 0.418741 items / sec XY3P: 1646 / 2211 @ c=37, r=2, X132.461 Y74.507 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c037_r002.jpg 1646 / 2211, ETA: 00:22:29.2172 @ 0.418761 items / sec XY3P: 1647 / 2211 @ c=38, r=2, X132.633 Y74.504 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c038_r002.jpg 1647 / 2211, ETA: 00:22:26.7639 @ 0.418782 items / sec XY3P: 1648 / 2211 @ c=39, r=2, X132.806 Y74.500 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c039_r002.jpg 1648 / 2211, ETA: 00:22:24.3110 @ 0.418802 items / sec XY3P: 1649 / 2211 @ c=40, r=2, X132.979 Y74.496 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c040_r002.jpg 1649 / 2211, ETA: 00:22:21.9266 @ 0.418801 items / sec XY3P: 1650 / 2211 @ c=41, r=2, X133.152 Y74.492 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c041_r002.jpg 1650 / 2211, ETA: 00:22:19.5419 @ 0.418800 items / sec XY3P: 1651 / 2211 @ c=42, r=2, X133.325 Y74.488 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c042_r002.jpg 1651 / 2211, ETA: 00:22:17.1572 @ 0.418799 items / sec XY3P: 1652 / 2211 @ c=43, r=2, X133.497 Y74.484 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c043_r002.jpg 1652 / 2211, ETA: 00:22:14.7735 @ 0.418798 items / sec XY3P: 1653 / 2211 @ c=44, r=2, X133.670 Y74.480 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c044_r002.jpg 1653 / 2211, ETA: 00:22:12.3883 @ 0.418797 items / sec XY3P: 1654 / 2211 @ c=45, r=2, X133.843 Y74.476 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c045_r002.jpg 1654 / 2211, ETA: 00:22:10.0039 @ 0.418796 items / sec XY3P: 1655 / 2211 @ c=46, r=2, X134.016 Y74.472 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c046_r002.jpg 1655 / 2211, ETA: 00:22:07.6191 @ 0.418795 items / sec XY3P: 1656 / 2211 @ c=47, r=2, X134.188 Y74.468 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c047_r002.jpg 1656 / 2211, ETA: 00:22:05.2343 @ 0.418794 items / sec XY3P: 1657 / 2211 @ c=48, r=2, X134.361 Y74.464 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c048_r002.jpg 1657 / 2211, ETA: 00:22:02.8503 @ 0.418793 items / sec XY3P: 1658 / 2211 @ c=49, r=2, X134.534 Y74.460 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c049_r002.jpg 1658 / 2211, ETA: 00:22:00.4648 @ 0.418792 items / sec XY3P: 1659 / 2211 @ c=50, r=2, X134.707 Y74.456 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c050_r002.jpg 1659 / 2211, ETA: 00:21:58.0142 @ 0.418812 items / sec XY3P: 1660 / 2211 @ c=51, r=2, X134.879 Y74.452 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c051_r002.jpg 1660 / 2211, ETA: 00:21:55.6311 @ 0.418810 items / sec XY3P: 1661 / 2211 @ c=52, r=2, X135.052 Y74.448 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c052_r002.jpg 1661 / 2211, ETA: 00:21:53.2450 @ 0.418810 items / sec XY3P: 1662 / 2211 @ c=53, r=2, X135.225 Y74.444 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c053_r002.jpg 1662 / 2211, ETA: 00:21:50.8604 @ 0.418809 items / sec XY3P: 1663 / 2211 @ c=54, r=2, X135.398 Y74.440 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c054_r002.jpg 1663 / 2211, ETA: 00:21:48.4757 @ 0.418808 items / sec XY3P: 1664 / 2211 @ c=55, r=2, X135.570 Y74.436 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c055_r002.jpg 1664 / 2211, ETA: 00:21:46.0913 @ 0.418807 items / sec XY3P: 1665 / 2211 @ c=56, r=2, X135.743 Y74.432 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c056_r002.jpg 1665 / 2211, ETA: 00:21:43.6410 @ 0.418827 items / sec XY3P: 1666 / 2211 @ c=57, r=2, X135.916 Y74.428 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c057_r002.jpg 1666 / 2211, ETA: 00:21:41.1912 @ 0.418847 items / sec XY3P: 1667 / 2211 @ c=58, r=2, X136.089 Y74.424 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c058_r002.jpg 1667 / 2211, ETA: 00:21:38.8069 @ 0.418846 items / sec XY3P: 1668 / 2211 @ c=59, r=2, X136.261 Y74.420 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c059_r002.jpg 1668 / 2211, ETA: 00:21:36.4226 @ 0.418845 items / sec XY3P: 1669 / 2211 @ c=60, r=2, X136.434 Y74.416 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c060_r002.jpg 1669 / 2211, ETA: 00:21:34.0390 @ 0.418844 items / sec XY3P: 1670 / 2211 @ c=61, r=2, X136.607 Y74.412 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c061_r002.jpg 1670 / 2211, ETA: 00:21:31.6540 @ 0.418843 items / sec XY3P: 1671 / 2211 @ c=62, r=2, X136.780 Y74.408 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c062_r002.jpg 1671 / 2211, ETA: 00:21:29.2693 @ 0.418842 items / sec XY3P: 1672 / 2211 @ c=63, r=2, X136.952 Y74.404 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c063_r002.jpg 1672 / 2211, ETA: 00:21:26.8850 @ 0.418841 items / sec XY3P: 1673 / 2211 @ c=64, r=2, X137.125 Y74.400 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c064_r002.jpg 1673 / 2211, ETA: 00:21:24.5006 @ 0.418840 items / sec XY3P: 1674 / 2211 @ c=65, r=2, X137.298 Y74.396 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c065_r002.jpg 1674 / 2211, ETA: 00:21:22.1189 @ 0.418838 items / sec XY3P: 1675 / 2211 @ c=66, r=2, X137.471 Y74.393 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c066_r002.jpg 1675 / 2211, ETA: 00:21:19.7318 @ 0.418838 items / sec XY3P: 1676 / 2211 @ c=67, r=2, X137.643 Y74.389 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c067_r002.jpg 1676 / 2211, ETA: 00:21:17.3473 @ 0.418837 items / sec XY3P: 1677 / 2211 @ c=68, r=2, X137.816 Y74.385 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c068_r002.jpg 1677 / 2211, ETA: 00:21:14.9628 @ 0.418836 items / sec XY3P: 1678 / 2211 @ c=69, r=2, X137.989 Y74.381 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c069_r002.jpg 1678 / 2211, ETA: 00:21:12.5784 @ 0.418835 items / sec XY3P: 1679 / 2211 @ c=70, r=2, X138.161 Y74.377 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c070_r002.jpg 1679 / 2211, ETA: 00:21:10.1945 @ 0.418833 items / sec XY3P: 1680 / 2211 @ c=71, r=2, X138.334 Y74.373 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c071_r002.jpg 1680 / 2211, ETA: 00:21:07.8094 @ 0.418833 items / sec XY3P: 1681 / 2211 @ c=72, r=2, X138.507 Y74.369 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c072_r002.jpg 1681 / 2211, ETA: 00:21:05.4251 @ 0.418832 items / sec XY3P: 1682 / 2211 @ c=73, r=2, X138.680 Y74.365 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c073_r002.jpg 1682 / 2211, ETA: 00:21:03.0409 @ 0.418830 items / sec XY3P: 1683 / 2211 @ c=74, r=2, X138.852 Y74.361 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c074_r002.jpg 1683 / 2211, ETA: 00:21:00.6570 @ 0.418829 items / sec XY3P: 1684 / 2211 @ c=75, r=2, X139.025 Y74.357 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c075_r002.jpg 1684 / 2211, ETA: 00:20:58.2710 @ 0.418829 items / sec XY3P: 1685 / 2211 @ c=76, r=2, X139.198 Y74.353 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c076_r002.jpg 1685 / 2211, ETA: 00:20:55.8871 @ 0.418827 items / sec XY3P: 1686 / 2211 @ c=77, r=2, X139.371 Y74.349 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c077_r002.jpg 1686 / 2211, ETA: 00:20:53.5019 @ 0.418827 items / sec XY3P: 1687 / 2211 @ c=78, r=2, X139.543 Y74.345 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c078_r002.jpg 1687 / 2211, ETA: 00:20:51.1171 @ 0.418826 items / sec XY3P: 1688 / 2211 @ c=79, r=2, X139.716 Y74.341 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c079_r002.jpg 1688 / 2211, ETA: 00:20:48.7326 @ 0.418825 items / sec XY3P: 1689 / 2211 @ c=80, r=2, X139.889 Y74.337 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c080_r002.jpg 1689 / 2211, ETA: 00:20:46.3480 @ 0.418824 items / sec XY3P: 1690 / 2211 @ c=81, r=2, X140.062 Y74.333 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c081_r002.jpg 1690 / 2211, ETA: 00:20:43.9639 @ 0.418822 items / sec XY3P: 1691 / 2211 @ c=82, r=2, X140.234 Y74.329 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c082_r002.jpg 1691 / 2211, ETA: 00:20:41.5785 @ 0.418822 items / sec XY3P: 1692 / 2211 @ c=83, r=2, X140.407 Y74.325 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c083_r002.jpg 1692 / 2211, ETA: 00:20:39.1938 @ 0.418821 items / sec XY3P: 1693 / 2211 @ c=84, r=2, X140.580 Y74.321 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c084_r002.jpg 1693 / 2211, ETA: 00:20:36.8089 @ 0.418820 items / sec XY3P: 1694 / 2211 @ c=85, r=2, X140.753 Y74.317 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c085_r002.jpg 1694 / 2211, ETA: 00:20:34.4245 @ 0.418819 items / sec XY3P: 1695 / 2211 @ c=86, r=2, X140.925 Y74.313 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c086_r002.jpg 1695 / 2211, ETA: 00:20:32.0401 @ 0.418818 items / sec XY3P: 1696 / 2211 @ c=87, r=2, X141.098 Y74.309 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c087_r002.jpg 1696 / 2211, ETA: 00:20:29.6551 @ 0.418817 items / sec XY3P: 1697 / 2211 @ c=88, r=2, X141.271 Y74.305 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c088_r002.jpg 1697 / 2211, ETA: 00:20:27.2707 @ 0.418816 items / sec XY3P: 1698 / 2211 @ c=89, r=2, X141.444 Y74.301 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c089_r002.jpg 1698 / 2211, ETA: 00:20:24.8850 @ 0.418815 items / sec XY3P: 1699 / 2211 @ c=90, r=2, X141.617 Y74.297 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c090_r002.jpg 1699 / 2211, ETA: 00:20:22.5004 @ 0.418814 items / sec XY3P: 1700 / 2211 @ c=91, r=2, X141.789 Y74.293 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c091_r002.jpg 1700 / 2211, ETA: 00:20:20.1162 @ 0.418813 items / sec XY3P: 1701 / 2211 @ c=92, r=2, X141.962 Y74.289 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c092_r002.jpg 1701 / 2211, ETA: 00:20:17.7309 @ 0.418812 items / sec XY3P: 1702 / 2211 @ c=93, r=2, X142.135 Y74.285 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c093_r002.jpg 1702 / 2211, ETA: 00:20:15.3459 @ 0.418811 items / sec XY3P: 1703 / 2211 @ c=94, r=2, X142.308 Y74.281 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c094_r002.jpg 1703 / 2211, ETA: 00:20:12.9021 @ 0.418830 items / sec XY3P: 1704 / 2211 @ c=95, r=2, X142.480 Y74.278 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c095_r002.jpg 1704 / 2211, ETA: 00:20:10.5189 @ 0.418829 items / sec XY3P: 1705 / 2211 @ c=96, r=2, X142.653 Y74.274 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c096_r002.jpg 1705 / 2211, ETA: 00:20:08.1322 @ 0.418828 items / sec XY3P: 1706 / 2211 @ c=97, r=2, X142.826 Y74.270 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c097_r002.jpg 1706 / 2211, ETA: 00:20:05.7473 @ 0.418827 items / sec XY3P: 1707 / 2211 @ c=98, r=2, X142.999 Y74.266 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c098_r002.jpg 1707 / 2211, ETA: 00:20:03.3625 @ 0.418826 items / sec XY3P: 1708 / 2211 @ c=99, r=2, X143.171 Y74.262 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c099_r002.jpg 1708 / 2211, ETA: 00:20:00.9784 @ 0.418825 items / sec XY3P: 1709 / 2211 @ c=100, r=2, X143.344 Y74.258 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c100_r002.jpg 1709 / 2211, ETA: 00:19:58.5938 @ 0.418824 items / sec XY3P: 1710 / 2211 @ c=101, r=2, X143.517 Y74.254 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c101_r002.jpg 1710 / 2211, ETA: 00:19:56.2082 @ 0.418823 items / sec XY3P: 1711 / 2211 @ c=102, r=2, X143.690 Y74.250 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c102_r002.jpg 1711 / 2211, ETA: 00:19:53.8233 @ 0.418822 items / sec XY3P: 1712 / 2211 @ c=103, r=2, X143.862 Y74.246 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c103_r002.jpg 1712 / 2211, ETA: 00:19:51.4385 @ 0.418821 items / sec XY3P: 1713 / 2211 @ c=104, r=2, X144.035 Y74.242 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c104_r002.jpg 1713 / 2211, ETA: 00:19:49.0540 @ 0.418820 items / sec XY3P: 1714 / 2211 @ c=105, r=2, X144.208 Y74.238 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c105_r002.jpg 1714 / 2211, ETA: 00:19:46.6686 @ 0.418820 items / sec XY3P: 1715 / 2211 @ c=106, r=2, X144.381 Y74.234 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c106_r002.jpg 1715 / 2211, ETA: 00:19:44.2839 @ 0.418818 items / sec XY3P: 1716 / 2211 @ c=107, r=2, X144.553 Y74.230 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c107_r002.jpg 1716 / 2211, ETA: 00:19:41.8990 @ 0.418818 items / sec XY3P: 1717 / 2211 @ c=108, r=2, X144.726 Y74.226 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c108_r002.jpg 1717 / 2211, ETA: 00:19:39.5158 @ 0.418816 items / sec XY3P: 1718 / 2211 @ c=109, r=2, X144.899 Y74.222 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c109_r002.jpg 1718 / 2211, ETA: 00:19:37.1297 @ 0.418815 items / sec XY3P: 1719 / 2211 @ c=110, r=2, X145.072 Y74.218 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c110_r002.jpg 1719 / 2211, ETA: 00:19:34.7439 @ 0.418815 items / sec XY3P: 1720 / 2211 @ c=111, r=2, X145.244 Y74.214 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c111_r002.jpg 1720 / 2211, ETA: 00:19:32.3592 @ 0.418814 items / sec XY3P: 1721 / 2211 @ c=112, r=2, X145.417 Y74.210 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c112_r002.jpg 1721 / 2211, ETA: 00:19:29.9175 @ 0.418833 items / sec XY3P: 1722 / 2211 @ c=113, r=2, X145.590 Y74.206 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c113_r002.jpg 1722 / 2211, ETA: 00:19:27.4764 @ 0.418852 items / sec XY3P: 1723 / 2211 @ c=114, r=2, X145.762 Y74.202 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c114_r002.jpg 1723 / 2211, ETA: 00:19:25.0911 @ 0.418851 items / sec XY3P: 1724 / 2211 @ c=115, r=2, X145.935 Y74.198 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c115_r002.jpg 1724 / 2211, ETA: 00:19:22.7062 @ 0.418850 items / sec XY3P: 1725 / 2211 @ c=116, r=2, X146.108 Y74.194 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c116_r002.jpg 1725 / 2211, ETA: 00:19:20.3214 @ 0.418849 items / sec XY3P: 1726 / 2211 @ c=117, r=2, X146.281 Y74.190 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c117_r002.jpg 1726 / 2211, ETA: 00:19:17.9369 @ 0.418848 items / sec XY3P: 1727 / 2211 @ c=118, r=2, X146.453 Y74.186 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c118_r002.jpg 1727 / 2211, ETA: 00:19:15.5528 @ 0.418847 items / sec XY3P: 1728 / 2211 @ c=119, r=2, X146.626 Y74.182 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c119_r002.jpg 1728 / 2211, ETA: 00:19:13.1673 @ 0.418846 items / sec XY3P: 1729 / 2211 @ c=120, r=2, X146.799 Y74.178 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c120_r002.jpg 1729 / 2211, ETA: 00:19:10.7825 @ 0.418845 items / sec XY3P: 1730 / 2211 @ c=121, r=2, X146.972 Y74.174 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c121_r002.jpg 1730 / 2211, ETA: 00:19:08.3974 @ 0.418845 items / sec XY3P: 1731 / 2211 @ c=122, r=2, X147.144 Y74.170 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c122_r002.jpg 1731 / 2211, ETA: 00:19:06.0127 @ 0.418843 items / sec XY3P: 1732 / 2211 @ c=123, r=2, X147.317 Y74.167 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c123_r002.jpg 1732 / 2211, ETA: 00:19:03.6287 @ 0.418842 items / sec XY3P: 1733 / 2211 @ c=124, r=2, X147.490 Y74.163 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c124_r002.jpg 1733 / 2211, ETA: 00:19:01.2431 @ 0.418841 items / sec XY3P: 1734 / 2211 @ c=125, r=2, X147.663 Y74.159 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c125_r002.jpg 1734 / 2211, ETA: 00:18:58.8584 @ 0.418840 items / sec XY3P: 1735 / 2211 @ c=126, r=2, X147.835 Y74.155 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c126_r002.jpg 1735 / 2211, ETA: 00:18:56.4735 @ 0.418839 items / sec XY3P: 1736 / 2211 @ c=127, r=2, X148.008 Y74.151 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c127_r002.jpg 1736 / 2211, ETA: 00:18:54.0885 @ 0.418839 items / sec XY3P: 1737 / 2211 @ c=128, r=2, X148.181 Y74.147 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c128_r002.jpg 1737 / 2211, ETA: 00:18:51.7042 @ 0.418837 items / sec XY3P: 1738 / 2211 @ c=129, r=2, X148.354 Y74.143 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c129_r002.jpg 1738 / 2211, ETA: 00:18:49.3186 @ 0.418837 items / sec XY3P: 1739 / 2211 @ c=130, r=2, X148.526 Y74.139 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c130_r002.jpg 1739 / 2211, ETA: 00:18:46.8796 @ 0.418856 items / sec XY3P: 1740 / 2211 @ c=131, r=2, X148.699 Y74.135 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c131_r002.jpg 1740 / 2211, ETA: 00:18:44.4408 @ 0.418875 items / sec XY3P: 1741 / 2211 @ c=132, r=2, X148.872 Y74.131 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c132_r002.jpg 1741 / 2211, ETA: 00:18:42.0025 @ 0.418894 items / sec XY3P: 1742 / 2211 @ c=133, r=2, X149.045 Y74.127 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c133_r002.jpg 1742 / 2211, ETA: 00:18:39.6180 @ 0.418893 items / sec XY3P: 1743 / 2211 @ c=134, r=2, X149.218 Y74.123 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c134_r002.jpg 1743 / 2211, ETA: 00:18:37.2330 @ 0.418892 items / sec XY3P: 1744 / 2211 @ c=135, r=2, X149.390 Y74.119 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c135_r002.jpg 1744 / 2211, ETA: 00:18:34.8498 @ 0.418890 items / sec XY3P: 1745 / 2211 @ c=136, r=2, X149.563 Y74.115 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c136_r002.jpg 1745 / 2211, ETA: 00:18:32.4637 @ 0.418890 items / sec XY3P: 1746 / 2211 @ c=137, r=2, X149.736 Y74.111 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c137_r002.jpg 1746 / 2211, ETA: 00:18:30.0793 @ 0.418889 items / sec XY3P: 1747 / 2211 @ c=138, r=2, X149.909 Y74.107 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c138_r002.jpg 1747 / 2211, ETA: 00:18:27.6950 @ 0.418888 items / sec XY3P: 1748 / 2211 @ c=139, r=2, X150.081 Y74.103 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c139_r002.jpg 1748 / 2211, ETA: 00:18:25.3100 @ 0.418887 items / sec XY3P: 1749 / 2211 @ c=140, r=2, X150.254 Y74.099 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c140_r002.jpg 1749 / 2211, ETA: 00:18:22.9254 @ 0.418886 items / sec XY3P: 1750 / 2211 @ c=141, r=2, X150.427 Y74.095 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c141_r002.jpg 1750 / 2211, ETA: 00:18:20.5407 @ 0.418885 items / sec XY3P: 1751 / 2211 @ c=142, r=2, X150.600 Y74.091 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c142_r002.jpg 1751 / 2211, ETA: 00:18:18.1560 @ 0.418884 items / sec XY3P: 1752 / 2211 @ c=143, r=2, X150.772 Y74.087 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c143_r002.jpg 1752 / 2211, ETA: 00:18:15.7718 @ 0.418883 items / sec XY3P: 1753 / 2211 @ c=144, r=2, X150.945 Y74.083 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c144_r002.jpg 1753 / 2211, ETA: 00:18:13.3868 @ 0.418882 items / sec XY3P: 1754 / 2211 @ c=145, r=2, X151.118 Y74.079 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c145_r002.jpg 1754 / 2211, ETA: 00:18:11.0023 @ 0.418881 items / sec XY3P: 1755 / 2211 @ c=146, r=2, X151.291 Y74.075 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c146_r002.jpg 1755 / 2211, ETA: 00:18:08.6188 @ 0.418879 items / sec XY3P: 1756 / 2211 @ c=147, r=2, X151.463 Y74.071 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c147_r002.jpg 1756 / 2211, ETA: 00:18:06.2333 @ 0.418879 items / sec XY3P: 1757 / 2211 @ c=148, r=2, X151.636 Y74.067 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c148_r002.jpg 1757 / 2211, ETA: 00:18:03.8497 @ 0.418877 items / sec XY3P: 1758 / 2211 @ c=149, r=2, X151.809 Y74.063 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c149_r002.jpg 1758 / 2211, ETA: 00:18:01.4652 @ 0.418876 items / sec XY3P: 1759 / 2211 @ c=150, r=2, X151.982 Y74.059 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c150_r002.jpg 1759 / 2211, ETA: 00:17:59.0782 @ 0.418876 items / sec XY3P: 1760 / 2211 @ c=151, r=2, X152.154 Y74.055 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c151_r002.jpg 1760 / 2211, ETA: 00:17:56.6426 @ 0.418895 items / sec XY3P: 1761 / 2211 @ c=152, r=2, X152.327 Y74.052 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c152_r002.jpg 1761 / 2211, ETA: 00:17:54.2595 @ 0.418893 items / sec XY3P: 1762 / 2211 @ c=153, r=2, X152.500 Y74.048 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c153_r002.jpg 1762 / 2211, ETA: 00:17:51.8730 @ 0.418893 items / sec XY3P: 1763 / 2211 @ c=154, r=2, X152.673 Y74.044 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c154_r002.jpg 1763 / 2211, ETA: 00:17:49.4881 @ 0.418892 items / sec XY3P: 1764 / 2211 @ c=155, r=2, X152.845 Y74.040 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c155_r002.jpg 1764 / 2211, ETA: 00:17:47.1036 @ 0.418891 items / sec XY3P: 1765 / 2211 @ c=156, r=2, X153.018 Y74.036 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c156_r002.jpg 1765 / 2211, ETA: 00:17:44.7188 @ 0.418890 items / sec XY3P: 1766 / 2211 @ c=157, r=2, X153.191 Y74.032 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c157_r002.jpg 1766 / 2211, ETA: 00:17:42.3345 @ 0.418889 items / sec XY3P: 1767 / 2211 @ c=158, r=2, X153.363 Y74.028 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c158_r002.jpg 1767 / 2211, ETA: 00:17:39.9492 @ 0.418888 items / sec XY3P: 1768 / 2211 @ c=159, r=2, X153.536 Y74.024 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c159_r002.jpg 1768 / 2211, ETA: 00:17:37.5661 @ 0.418886 items / sec XY3P: 1769 / 2211 @ c=160, r=2, X153.709 Y74.020 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c160_r002.jpg 1769 / 2211, ETA: 00:17:35.1797 @ 0.418886 items / sec XY3P: 1770 / 2211 @ c=161, r=2, X153.882 Y74.016 Z-15.066 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c161_r002.jpg 1770 / 2211, ETA: 00:17:32.7950 @ 0.418885 items / sec XY3P: 1771 / 2211 @ c=162, r=2, X154.054 Y74.012 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c162_r002.jpg 1771 / 2211, ETA: 00:17:30.4105 @ 0.418884 items / sec XY3P: 1772 / 2211 @ c=163, r=2, X154.227 Y74.008 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c163_r002.jpg 1772 / 2211, ETA: 00:17:28.0250 @ 0.418883 items / sec XY3P: 1773 / 2211 @ c=164, r=2, X154.400 Y74.004 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c164_r002.jpg 1773 / 2211, ETA: 00:17:25.6402 @ 0.418882 items / sec XY3P: 1774 / 2211 @ c=165, r=2, X154.573 Y74.000 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c165_r002.jpg 1774 / 2211, ETA: 00:17:23.2557 @ 0.418881 items / sec XY3P: 1775 / 2211 @ c=166, r=2, X154.745 Y73.996 Z-15.063 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c166_r002.jpg 1775 / 2211, ETA: 00:17:20.8707 @ 0.418880 items / sec XY3P: 1776 / 2211 @ c=167, r=2, X154.918 Y73.992 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c167_r002.jpg 1776 / 2211, ETA: 00:17:18.4863 @ 0.418879 items / sec XY3P: 1777 / 2211 @ c=168, r=2, X155.091 Y73.988 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c168_r002.jpg 1777 / 2211, ETA: 00:17:16.1009 @ 0.418878 items / sec XY3P: 1778 / 2211 @ c=169, r=2, X155.264 Y73.984 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c169_r002.jpg 1778 / 2211, ETA: 00:17:13.6688 @ 0.418896 items / sec XY3P: 1779 / 2211 @ c=170, r=2, X155.436 Y73.980 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c170_r002.jpg 1779 / 2211, ETA: 00:17:11.2830 @ 0.418896 items / sec XY3P: 1780 / 2211 @ c=171, r=2, X155.609 Y73.976 Z-15.060 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c171_r002.jpg 1780 / 2211, ETA: 00:17:08.8978 @ 0.418895 items / sec XY3P: 1781 / 2211 @ c=172, r=2, X155.782 Y73.972 Z-15.060 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c172_r002.jpg 1781 / 2211, ETA: 00:17:06.5128 @ 0.418894 items / sec XY3P: 1782 / 2211 @ c=173, r=2, X155.955 Y73.968 Z-15.059 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c173_r002.jpg 1782 / 2211, ETA: 00:17:04.1282 @ 0.418893 items / sec XY3P: 1783 / 2211 @ c=174, r=2, X156.127 Y73.964 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c174_r002.jpg 1783 / 2211, ETA: 00:17:01.7434 @ 0.418892 items / sec XY3P: 1784 / 2211 @ c=175, r=2, X156.300 Y73.960 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c175_r002.jpg 1784 / 2211, ETA: 00:16:59.3591 @ 0.418891 items / sec XY3P: 1785 / 2211 @ c=176, r=2, X156.473 Y73.956 Z-15.057 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c176_r002.jpg 1785 / 2211, ETA: 00:16:56.9736 @ 0.418890 items / sec XY3P: 1786 / 2211 @ c=177, r=2, X156.646 Y73.952 Z-15.057 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c177_r002.jpg 1786 / 2211, ETA: 00:16:54.5888 @ 0.418889 items / sec XY3P: 1787 / 2211 @ c=178, r=2, X156.819 Y73.948 Z-15.056 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c178_r002.jpg 1787 / 2211, ETA: 00:16:52.2039 @ 0.418888 items / sec XY3P: 1788 / 2211 @ c=179, r=2, X156.991 Y73.944 Z-15.055 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c179_r002.jpg 1788 / 2211, ETA: 00:16:49.8189 @ 0.418887 items / sec XY3P: 1789 / 2211 @ c=180, r=2, X157.164 Y73.940 Z-15.055 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c180_r002.jpg 1789 / 2211, ETA: 00:16:47.4344 @ 0.418886 items / sec XY3P: 1790 / 2211 @ c=181, r=2, X157.337 Y73.937 Z-15.054 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c181_r002.jpg 1790 / 2211, ETA: 00:16:45.0491 @ 0.418885 items / sec XY3P: 1791 / 2211 @ c=182, r=2, X157.510 Y73.933 Z-15.054 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c182_r002.jpg 1791 / 2211, ETA: 00:16:42.6641 @ 0.418884 items / sec XY3P: 1792 / 2211 @ c=183, r=2, X157.682 Y73.929 Z-15.053 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c183_r002.jpg 1792 / 2211, ETA: 00:16:40.2792 @ 0.418883 items / sec XY3P: 1793 / 2211 @ c=184, r=2, X157.855 Y73.925 Z-15.052 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c184_r002.jpg 1793 / 2211, ETA: 00:16:37.8942 @ 0.418882 items / sec XY3P: 1794 / 2211 @ c=185, r=2, X158.028 Y73.921 Z-15.052 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c185_r002.jpg 1794 / 2211, ETA: 00:16:35.5097 @ 0.418881 items / sec XY3P: 1795 / 2211 @ c=186, r=2, X158.201 Y73.917 Z-15.051 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c186_r002.jpg 1795 / 2211, ETA: 00:16:33.1239 @ 0.418880 items / sec XY3P: 1796 / 2211 @ c=187, r=2, X158.373 Y73.913 Z-15.051 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c187_r002.jpg 1796 / 2211, ETA: 00:16:30.6931 @ 0.418899 items / sec XY3P: 1797 / 2211 @ c=188, r=2, X158.546 Y73.909 Z-15.050 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c188_r002.jpg 1797 / 2211, ETA: 00:16:28.2620 @ 0.418917 items / sec XY3P: 1798 / 2211 @ c=189, r=2, X158.719 Y73.905 Z-15.049 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c189_r002.jpg 1798 / 2211, ETA: 00:16:25.8778 @ 0.418916 items / sec XY3P: 1799 / 2211 @ c=190, r=2, X158.892 Y73.901 Z-15.049 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c190_r002.jpg 1799 / 2211, ETA: 00:16:23.4923 @ 0.418915 items / sec XY3P: 1800 / 2211 @ c=191, r=2, X159.064 Y73.897 Z-15.048 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c191_r002.jpg 1800 / 2211, ETA: 00:16:21.1090 @ 0.418914 items / sec XY3P: 1801 / 2211 @ c=192, r=2, X159.237 Y73.893 Z-15.048 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c192_r002.jpg 1801 / 2211, ETA: 00:16:18.7228 @ 0.418913 items / sec XY3P: 1802 / 2211 @ c=193, r=2, X159.410 Y73.889 Z-15.047 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c193_r002.jpg 1802 / 2211, ETA: 00:16:16.3381 @ 0.418912 items / sec XY3P: 1803 / 2211 @ c=194, r=2, X159.583 Y73.885 Z-15.047 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c194_r002.jpg 1803 / 2211, ETA: 00:16:13.9537 @ 0.418911 items / sec XY3P: 1804 / 2211 @ c=195, r=2, X159.755 Y73.881 Z-15.046 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c195_r002.jpg 1804 / 2211, ETA: 00:16:11.5684 @ 0.418910 items / sec XY3P: 1805 / 2211 @ c=196, r=2, X159.928 Y73.877 Z-15.045 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c196_r002.jpg 1805 / 2211, ETA: 00:16:09.1833 @ 0.418909 items / sec XY3P: 1806 / 2211 @ c=197, r=2, X160.101 Y73.873 Z-15.045 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c197_r002.jpg 1806 / 2211, ETA: 00:16:06.7985 @ 0.418908 items / sec XY3P: 1807 / 2211 @ c=198, r=2, X160.274 Y73.869 Z-15.044 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c198_r002.jpg 1807 / 2211, ETA: 00:16:04.4137 @ 0.418907 items / sec XY3P: 1808 / 2211 @ c=199, r=2, X160.446 Y73.865 Z-15.044 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c199_r002.jpg 1808 / 2211, ETA: 00:16:02.0292 @ 0.418906 items / sec XY3P: 1809 / 2211 @ c=200, r=2, X160.619 Y73.861 Z-15.043 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c200_r002.jpg 1809 / 2211, ETA: 00:15:59.6439 @ 0.418905 items / sec XY3P: 1810 / 2211 @ c=200, r=1, X160.619 Y74.022 Z-15.039 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c200_r001.jpg 1810 / 2211, ETA: 00:15:57.2588 @ 0.418904 items / sec XY3P: 1811 / 2211 @ c=199, r=1, X160.446 Y74.026 Z-15.040 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c199_r001.jpg 1811 / 2211, ETA: 00:15:54.8740 @ 0.418903 items / sec XY3P: 1812 / 2211 @ c=198, r=1, X160.274 Y74.030 Z-15.041 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c198_r001.jpg 1812 / 2211, ETA: 00:15:52.4890 @ 0.418902 items / sec XY3P: 1813 / 2211 @ c=197, r=1, X160.101 Y74.034 Z-15.041 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c197_r001.jpg 1813 / 2211, ETA: 00:15:50.1043 @ 0.418901 items / sec XY3P: 1814 / 2211 @ c=196, r=1, X159.928 Y74.038 Z-15.042 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c196_r001.jpg 1814 / 2211, ETA: 00:15:47.7190 @ 0.418901 items / sec XY3P: 1815 / 2211 @ c=195, r=1, X159.755 Y74.042 Z-15.042 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c195_r001.jpg 1815 / 2211, ETA: 00:15:45.3339 @ 0.418900 items / sec XY3P: 1816 / 2211 @ c=194, r=1, X159.583 Y74.046 Z-15.043 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c194_r001.jpg 1816 / 2211, ETA: 00:15:42.9492 @ 0.418898 items / sec XY3P: 1817 / 2211 @ c=193, r=1, X159.410 Y74.050 Z-15.044 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c193_r001.jpg 1817 / 2211, ETA: 00:15:40.5640 @ 0.418898 items / sec XY3P: 1818 / 2211 @ c=192, r=1, X159.237 Y74.054 Z-15.044 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c192_r001.jpg 1818 / 2211, ETA: 00:15:38.1794 @ 0.418896 items / sec XY3P: 1819 / 2211 @ c=191, r=1, X159.064 Y74.058 Z-15.045 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c191_r001.jpg 1819 / 2211, ETA: 00:15:35.7939 @ 0.418896 items / sec XY3P: 1820 / 2211 @ c=190, r=1, X158.892 Y74.062 Z-15.045 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c190_r001.jpg 1820 / 2211, ETA: 00:15:33.4088 @ 0.418895 items / sec XY3P: 1821 / 2211 @ c=189, r=1, X158.719 Y74.066 Z-15.046 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c189_r001.jpg 1821 / 2211, ETA: 00:15:31.0237 @ 0.418894 items / sec XY3P: 1822 / 2211 @ c=188, r=1, X158.546 Y74.070 Z-15.047 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c188_r001.jpg 1822 / 2211, ETA: 00:15:28.6386 @ 0.418893 items / sec XY3P: 1823 / 2211 @ c=187, r=1, X158.373 Y74.074 Z-15.047 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c187_r001.jpg 1823 / 2211, ETA: 00:15:26.2540 @ 0.418892 items / sec XY3P: 1824 / 2211 @ c=186, r=1, X158.201 Y74.078 Z-15.048 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c186_r001.jpg 1824 / 2211, ETA: 00:15:23.8684 @ 0.418891 items / sec XY3P: 1825 / 2211 @ c=185, r=1, X158.028 Y74.082 Z-15.048 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c185_r001.jpg 1825 / 2211, ETA: 00:15:21.4829 @ 0.418890 items / sec XY3P: 1826 / 2211 @ c=184, r=1, X157.855 Y74.086 Z-15.049 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c184_r001.jpg 1826 / 2211, ETA: 00:15:19.0980 @ 0.418889 items / sec XY3P: 1827 / 2211 @ c=183, r=1, X157.682 Y74.090 Z-15.050 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c183_r001.jpg 1827 / 2211, ETA: 00:15:16.7131 @ 0.418888 items / sec XY3P: 1828 / 2211 @ c=182, r=1, X157.510 Y74.093 Z-15.050 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c182_r001.jpg 1828 / 2211, ETA: 00:15:14.3284 @ 0.418887 items / sec XY3P: 1829 / 2211 @ c=181, r=1, X157.337 Y74.097 Z-15.051 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c181_r001.jpg 1829 / 2211, ETA: 00:15:11.9431 @ 0.418886 items / sec XY3P: 1830 / 2211 @ c=180, r=1, X157.164 Y74.101 Z-15.051 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c180_r001.jpg 1830 / 2211, ETA: 00:15:09.5582 @ 0.418885 items / sec XY3P: 1831 / 2211 @ c=179, r=1, X156.991 Y74.105 Z-15.052 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c179_r001.jpg 1831 / 2211, ETA: 00:15:07.1721 @ 0.418884 items / sec XY3P: 1832 / 2211 @ c=178, r=1, X156.819 Y74.109 Z-15.052 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c178_r001.jpg 1832 / 2211, ETA: 00:15:04.7869 @ 0.418883 items / sec XY3P: 1833 / 2211 @ c=177, r=1, X156.646 Y74.113 Z-15.053 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c177_r001.jpg 1833 / 2211, ETA: 00:15:02.4017 @ 0.418882 items / sec XY3P: 1834 / 2211 @ c=176, r=1, X156.473 Y74.117 Z-15.054 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c176_r001.jpg 1834 / 2211, ETA: 00:15:00.0170 @ 0.418881 items / sec XY3P: 1835 / 2211 @ c=175, r=1, X156.300 Y74.121 Z-15.054 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c175_r001.jpg 1835 / 2211, ETA: 00:14:57.6312 @ 0.418880 items / sec XY3P: 1836 / 2211 @ c=174, r=1, X156.127 Y74.125 Z-15.055 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c174_r001.jpg 1836 / 2211, ETA: 00:14:55.2458 @ 0.418879 items / sec XY3P: 1837 / 2211 @ c=173, r=1, X155.955 Y74.129 Z-15.055 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c173_r001.jpg 1837 / 2211, ETA: 00:14:52.8617 @ 0.418878 items / sec XY3P: 1838 / 2211 @ c=172, r=1, X155.782 Y74.133 Z-15.056 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c172_r001.jpg 1838 / 2211, ETA: 00:14:50.4765 @ 0.418877 items / sec XY3P: 1839 / 2211 @ c=171, r=1, X155.609 Y74.137 Z-15.057 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c171_r001.jpg 1839 / 2211, ETA: 00:14:48.0902 @ 0.418876 items / sec XY3P: 1840 / 2211 @ c=170, r=1, X155.436 Y74.141 Z-15.057 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c170_r001.jpg 1840 / 2211, ETA: 00:14:45.7060 @ 0.418875 items / sec XY3P: 1841 / 2211 @ c=169, r=1, X155.264 Y74.145 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c169_r001.jpg 1841 / 2211, ETA: 00:14:43.3204 @ 0.418874 items / sec XY3P: 1842 / 2211 @ c=168, r=1, X155.091 Y74.149 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c168_r001.jpg 1842 / 2211, ETA: 00:14:40.9338 @ 0.418874 items / sec XY3P: 1843 / 2211 @ c=167, r=1, X154.918 Y74.153 Z-15.059 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c167_r001.jpg 1843 / 2211, ETA: 00:14:38.5485 @ 0.418873 items / sec XY3P: 1844 / 2211 @ c=166, r=1, X154.745 Y74.157 Z-15.060 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c166_r001.jpg 1844 / 2211, ETA: 00:14:36.1634 @ 0.418872 items / sec XY3P: 1845 / 2211 @ c=165, r=1, X154.573 Y74.161 Z-15.060 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c165_r001.jpg 1845 / 2211, ETA: 00:14:33.7777 @ 0.418871 items / sec XY3P: 1846 / 2211 @ c=164, r=1, X154.400 Y74.165 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c164_r001.jpg 1846 / 2211, ETA: 00:14:31.3922 @ 0.418870 items / sec XY3P: 1847 / 2211 @ c=163, r=1, X154.227 Y74.169 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c163_r001.jpg 1847 / 2211, ETA: 00:14:29.0068 @ 0.418869 items / sec XY3P: 1848 / 2211 @ c=162, r=1, X154.054 Y74.173 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c162_r001.jpg 1848 / 2211, ETA: 00:14:26.6225 @ 0.418867 items / sec XY3P: 1849 / 2211 @ c=161, r=1, X153.882 Y74.177 Z-15.063 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c161_r001.jpg 1849 / 2211, ETA: 00:14:24.2363 @ 0.418867 items / sec XY3P: 1850 / 2211 @ c=160, r=1, X153.709 Y74.181 Z-15.063 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c160_r001.jpg 1850 / 2211, ETA: 00:14:21.8505 @ 0.418866 items / sec XY3P: 1851 / 2211 @ c=159, r=1, X153.536 Y74.185 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c159_r001.jpg 1851 / 2211, ETA: 00:14:19.4651 @ 0.418865 items / sec XY3P: 1852 / 2211 @ c=158, r=1, X153.363 Y74.189 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c158_r001.jpg 1852 / 2211, ETA: 00:14:17.0795 @ 0.418864 items / sec XY3P: 1853 / 2211 @ c=157, r=1, X153.191 Y74.193 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c157_r001.jpg 1853 / 2211, ETA: 00:14:14.6943 @ 0.418863 items / sec XY3P: 1854 / 2211 @ c=156, r=1, X153.018 Y74.197 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c156_r001.jpg 1854 / 2211, ETA: 00:14:12.3088 @ 0.418862 items / sec XY3P: 1855 / 2211 @ c=155, r=1, X152.845 Y74.201 Z-15.066 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c155_r001.jpg 1855 / 2211, ETA: 00:14:09.8848 @ 0.418880 items / sec XY3P: 1856 / 2211 @ c=154, r=1, X152.673 Y74.204 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c154_r001.jpg 1856 / 2211, ETA: 00:14:07.4990 @ 0.418880 items / sec XY3P: 1857 / 2211 @ c=153, r=1, X152.500 Y74.208 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c153_r001.jpg 1857 / 2211, ETA: 00:14:05.1153 @ 0.418878 items / sec XY3P: 1858 / 2211 @ c=152, r=1, X152.327 Y74.212 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c152_r001.jpg 1858 / 2211, ETA: 00:14:02.7283 @ 0.418878 items / sec XY3P: 1859 / 2211 @ c=151, r=1, X152.154 Y74.216 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c151_r001.jpg 1859 / 2211, ETA: 00:14:00.3429 @ 0.418877 items / sec XY3P: 1860 / 2211 @ c=150, r=1, X151.982 Y74.220 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c150_r001.jpg 1860 / 2211, ETA: 00:13:57.9576 @ 0.418876 items / sec XY3P: 1861 / 2211 @ c=149, r=1, X151.809 Y74.224 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c149_r001.jpg 1861 / 2211, ETA: 00:13:55.5720 @ 0.418875 items / sec XY3P: 1862 / 2211 @ c=148, r=1, X151.636 Y74.228 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c148_r001.jpg 1862 / 2211, ETA: 00:13:53.1868 @ 0.418874 items / sec XY3P: 1863 / 2211 @ c=147, r=1, X151.463 Y74.232 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c147_r001.jpg 1863 / 2211, ETA: 00:13:50.7640 @ 0.418892 items / sec XY3P: 1864 / 2211 @ c=146, r=1, X151.291 Y74.236 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c146_r001.jpg 1864 / 2211, ETA: 00:13:48.3784 @ 0.418891 items / sec XY3P: 1865 / 2211 @ c=145, r=1, X151.118 Y74.240 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c145_r001.jpg 1865 / 2211, ETA: 00:13:45.9940 @ 0.418889 items / sec XY3P: 1866 / 2211 @ c=144, r=1, X150.945 Y74.244 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c144_r001.jpg 1866 / 2211, ETA: 00:13:43.6074 @ 0.418889 items / sec XY3P: 1867 / 2211 @ c=143, r=1, X150.772 Y74.248 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c143_r001.jpg 1867 / 2211, ETA: 00:13:41.2220 @ 0.418888 items / sec XY3P: 1868 / 2211 @ c=142, r=1, X150.600 Y74.252 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c142_r001.jpg 1868 / 2211, ETA: 00:13:38.8369 @ 0.418887 items / sec XY3P: 1869 / 2211 @ c=141, r=1, X150.427 Y74.256 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c141_r001.jpg 1869 / 2211, ETA: 00:13:36.4512 @ 0.418886 items / sec XY3P: 1870 / 2211 @ c=140, r=1, X150.254 Y74.260 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c140_r001.jpg 1870 / 2211, ETA: 00:13:34.0656 @ 0.418885 items / sec XY3P: 1871 / 2211 @ c=139, r=1, X150.081 Y74.264 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c139_r001.jpg 1871 / 2211, ETA: 00:13:31.6802 @ 0.418884 items / sec XY3P: 1872 / 2211 @ c=138, r=1, X149.909 Y74.268 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c138_r001.jpg 1872 / 2211, ETA: 00:13:29.2945 @ 0.418883 items / sec XY3P: 1873 / 2211 @ c=137, r=1, X149.736 Y74.272 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c137_r001.jpg 1873 / 2211, ETA: 00:13:26.9094 @ 0.418882 items / sec XY3P: 1874 / 2211 @ c=136, r=1, X149.563 Y74.276 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c136_r001.jpg 1874 / 2211, ETA: 00:13:24.5238 @ 0.418881 items / sec XY3P: 1875 / 2211 @ c=135, r=1, X149.390 Y74.280 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c135_r001.jpg 1875 / 2211, ETA: 00:13:22.1382 @ 0.418880 items / sec XY3P: 1876 / 2211 @ c=134, r=1, X149.218 Y74.284 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c134_r001.jpg 1876 / 2211, ETA: 00:13:19.7526 @ 0.418879 items / sec XY3P: 1877 / 2211 @ c=133, r=1, X149.045 Y74.288 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c133_r001.jpg 1877 / 2211, ETA: 00:13:17.3670 @ 0.418879 items / sec XY3P: 1878 / 2211 @ c=132, r=1, X148.872 Y74.292 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c132_r001.jpg 1878 / 2211, ETA: 00:13:14.9818 @ 0.418877 items / sec XY3P: 1879 / 2211 @ c=131, r=1, X148.699 Y74.296 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c131_r001.jpg 1879 / 2211, ETA: 00:13:12.5959 @ 0.418877 items / sec XY3P: 1880 / 2211 @ c=130, r=1, X148.526 Y74.300 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c130_r001.jpg 1880 / 2211, ETA: 00:13:10.2113 @ 0.418875 items / sec XY3P: 1881 / 2211 @ c=129, r=1, X148.354 Y74.304 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c129_r001.jpg 1881 / 2211, ETA: 00:13:07.8247 @ 0.418875 items / sec XY3P: 1882 / 2211 @ c=128, r=1, X148.181 Y74.308 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c128_r001.jpg 1882 / 2211, ETA: 00:13:05.4390 @ 0.418874 items / sec XY3P: 1883 / 2211 @ c=127, r=1, X148.008 Y74.312 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c127_r001.jpg 1883 / 2211, ETA: 00:13:03.0187 @ 0.418892 items / sec XY3P: 1884 / 2211 @ c=126, r=1, X147.835 Y74.316 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c126_r001.jpg 1884 / 2211, ETA: 00:13:00.6332 @ 0.418891 items / sec XY3P: 1885 / 2211 @ c=125, r=1, X147.663 Y74.319 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c125_r001.jpg 1885 / 2211, ETA: 00:12:58.2476 @ 0.418890 items / sec XY3P: 1886 / 2211 @ c=124, r=1, X147.490 Y74.323 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c124_r001.jpg 1886 / 2211, ETA: 00:12:55.8626 @ 0.418889 items / sec XY3P: 1887 / 2211 @ c=123, r=1, X147.317 Y74.327 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c123_r001.jpg 1887 / 2211, ETA: 00:12:53.4767 @ 0.418888 items / sec XY3P: 1888 / 2211 @ c=122, r=1, X147.144 Y74.331 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c122_r001.jpg 1888 / 2211, ETA: 00:12:51.0910 @ 0.418887 items / sec XY3P: 1889 / 2211 @ c=121, r=1, X146.972 Y74.335 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c121_r001.jpg 1889 / 2211, ETA: 00:12:48.7055 @ 0.418886 items / sec XY3P: 1890 / 2211 @ c=120, r=1, X146.799 Y74.339 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c120_r001.jpg 1890 / 2211, ETA: 00:12:46.3198 @ 0.418885 items / sec XY3P: 1891 / 2211 @ c=119, r=1, X146.626 Y74.343 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c119_r001.jpg 1891 / 2211, ETA: 00:12:43.9346 @ 0.418884 items / sec XY3P: 1892 / 2211 @ c=118, r=1, X146.453 Y74.347 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c118_r001.jpg 1892 / 2211, ETA: 00:12:41.5486 @ 0.418883 items / sec XY3P: 1893 / 2211 @ c=117, r=1, X146.281 Y74.351 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c117_r001.jpg 1893 / 2211, ETA: 00:12:39.1630 @ 0.418882 items / sec XY3P: 1894 / 2211 @ c=116, r=1, X146.108 Y74.355 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c116_r001.jpg 1894 / 2211, ETA: 00:12:36.7772 @ 0.418882 items / sec XY3P: 1895 / 2211 @ c=115, r=1, X145.935 Y74.359 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c115_r001.jpg 1895 / 2211, ETA: 00:12:34.3917 @ 0.418881 items / sec XY3P: 1896 / 2211 @ c=114, r=1, X145.762 Y74.363 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c114_r001.jpg 1896 / 2211, ETA: 00:12:32.0074 @ 0.418879 items / sec XY3P: 1897 / 2211 @ c=113, r=1, X145.590 Y74.367 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c113_r001.jpg 1897 / 2211, ETA: 00:12:29.6203 @ 0.418879 items / sec XY3P: 1898 / 2211 @ c=112, r=1, X145.417 Y74.371 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c112_r001.jpg 1898 / 2211, ETA: 00:12:27.2356 @ 0.418877 items / sec XY3P: 1899 / 2211 @ c=111, r=1, X145.244 Y74.375 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c111_r001.jpg 1899 / 2211, ETA: 00:12:24.8489 @ 0.418877 items / sec XY3P: 1900 / 2211 @ c=110, r=1, X145.072 Y74.379 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c110_r001.jpg 1900 / 2211, ETA: 00:12:22.4960 @ 0.418857 items / sec XY3P: 1901 / 2211 @ c=109, r=1, X144.899 Y74.383 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c109_r001.jpg 1901 / 2211, ETA: 00:12:20.1113 @ 0.418856 items / sec XY3P: 1902 / 2211 @ c=108, r=1, X144.726 Y74.387 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c108_r001.jpg 1902 / 2211, ETA: 00:12:17.7244 @ 0.418856 items / sec XY3P: 1903 / 2211 @ c=107, r=1, X144.553 Y74.391 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c107_r001.jpg 1903 / 2211, ETA: 00:12:15.3391 @ 0.418854 items / sec XY3P: 1904 / 2211 @ c=106, r=1, X144.381 Y74.395 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c106_r001.jpg 1904 / 2211, ETA: 00:12:12.9534 @ 0.418853 items / sec XY3P: 1905 / 2211 @ c=105, r=1, X144.208 Y74.399 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c105_r001.jpg 1905 / 2211, ETA: 00:12:10.5667 @ 0.418853 items / sec XY3P: 1906 / 2211 @ c=104, r=1, X144.035 Y74.403 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c104_r001.jpg 1906 / 2211, ETA: 00:12:08.1812 @ 0.418852 items / sec XY3P: 1907 / 2211 @ c=103, r=1, X143.862 Y74.407 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c103_r001.jpg 1907 / 2211, ETA: 00:12:05.7951 @ 0.418851 items / sec XY3P: 1908 / 2211 @ c=102, r=1, X143.690 Y74.411 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c102_r001.jpg 1908 / 2211, ETA: 00:12:03.4088 @ 0.418850 items / sec XY3P: 1909 / 2211 @ c=101, r=1, X143.517 Y74.415 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c101_r001.jpg 1909 / 2211, ETA: 00:12:01.0229 @ 0.418849 items / sec XY3P: 1910 / 2211 @ c=100, r=1, X143.344 Y74.419 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c100_r001.jpg 1910 / 2211, ETA: 00:11:58.6370 @ 0.418848 items / sec XY3P: 1911 / 2211 @ c=99, r=1, X143.171 Y74.423 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c099_r001.jpg 1911 / 2211, ETA: 00:11:56.2514 @ 0.418847 items / sec XY3P: 1912 / 2211 @ c=98, r=1, X142.999 Y74.427 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c098_r001.jpg 1912 / 2211, ETA: 00:11:53.8650 @ 0.418847 items / sec XY3P: 1913 / 2211 @ c=97, r=1, X142.826 Y74.430 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c097_r001.jpg 1913 / 2211, ETA: 00:11:51.4791 @ 0.418846 items / sec XY3P: 1914 / 2211 @ c=96, r=1, X142.653 Y74.434 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c096_r001.jpg 1914 / 2211, ETA: 00:11:49.0930 @ 0.418845 items / sec XY3P: 1915 / 2211 @ c=95, r=1, X142.480 Y74.438 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c095_r001.jpg 1915 / 2211, ETA: 00:11:46.7070 @ 0.418844 items / sec XY3P: 1916 / 2211 @ c=94, r=1, X142.308 Y74.442 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c094_r001.jpg 1916 / 2211, ETA: 00:11:44.3213 @ 0.418843 items / sec XY3P: 1917 / 2211 @ c=93, r=1, X142.135 Y74.446 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c093_r001.jpg 1917 / 2211, ETA: 00:11:41.9350 @ 0.418842 items / sec XY3P: 1918 / 2211 @ c=92, r=1, X141.962 Y74.450 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c092_r001.jpg 1918 / 2211, ETA: 00:11:39.5489 @ 0.418841 items / sec XY3P: 1919 / 2211 @ c=91, r=1, X141.789 Y74.454 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c091_r001.jpg 1919 / 2211, ETA: 00:11:37.1628 @ 0.418840 items / sec XY3P: 1920 / 2211 @ c=90, r=1, X141.617 Y74.458 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c090_r001.jpg 1920 / 2211, ETA: 00:11:34.7769 @ 0.418839 items / sec XY3P: 1921 / 2211 @ c=89, r=1, X141.444 Y74.462 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c089_r001.jpg 1921 / 2211, ETA: 00:11:32.3910 @ 0.418838 items / sec XY3P: 1922 / 2211 @ c=88, r=1, X141.271 Y74.466 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c088_r001.jpg 1922 / 2211, ETA: 00:11:30.0046 @ 0.418838 items / sec XY3P: 1923 / 2211 @ c=87, r=1, X141.098 Y74.470 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c087_r001.jpg 1923 / 2211, ETA: 00:11:27.6185 @ 0.418837 items / sec XY3P: 1924 / 2211 @ c=86, r=1, X140.925 Y74.474 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c086_r001.jpg 1924 / 2211, ETA: 00:11:25.2324 @ 0.418836 items / sec XY3P: 1925 / 2211 @ c=85, r=1, X140.753 Y74.478 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c085_r001.jpg 1925 / 2211, ETA: 00:11:22.8463 @ 0.418835 items / sec XY3P: 1926 / 2211 @ c=84, r=1, X140.580 Y74.482 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c084_r001.jpg 1926 / 2211, ETA: 00:11:20.4604 @ 0.418834 items / sec XY3P: 1927 / 2211 @ c=83, r=1, X140.407 Y74.486 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c083_r001.jpg 1927 / 2211, ETA: 00:11:18.0740 @ 0.418833 items / sec XY3P: 1928 / 2211 @ c=82, r=1, X140.234 Y74.490 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c082_r001.jpg 1928 / 2211, ETA: 00:11:15.6887 @ 0.418832 items / sec XY3P: 1929 / 2211 @ c=81, r=1, X140.062 Y74.494 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c081_r001.jpg 1929 / 2211, ETA: 00:11:13.3016 @ 0.418832 items / sec XY3P: 1930 / 2211 @ c=80, r=1, X139.889 Y74.498 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c080_r001.jpg 1930 / 2211, ETA: 00:11:10.9155 @ 0.418831 items / sec XY3P: 1931 / 2211 @ c=79, r=1, X139.716 Y74.502 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c079_r001.jpg 1931 / 2211, ETA: 00:11:08.5295 @ 0.418830 items / sec XY3P: 1932 / 2211 @ c=78, r=1, X139.543 Y74.506 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c078_r001.jpg 1932 / 2211, ETA: 00:11:06.1430 @ 0.418829 items / sec XY3P: 1933 / 2211 @ c=77, r=1, X139.371 Y74.510 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c077_r001.jpg 1933 / 2211, ETA: 00:11:03.7567 @ 0.418828 items / sec XY3P: 1934 / 2211 @ c=76, r=1, X139.198 Y74.514 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c076_r001.jpg 1934 / 2211, ETA: 00:11:01.3707 @ 0.418827 items / sec XY3P: 1935 / 2211 @ c=75, r=1, X139.025 Y74.518 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c075_r001.jpg 1935 / 2211, ETA: 00:10:58.9843 @ 0.418826 items / sec XY3P: 1936 / 2211 @ c=74, r=1, X138.852 Y74.522 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c074_r001.jpg 1936 / 2211, ETA: 00:10:56.5984 @ 0.418825 items / sec XY3P: 1937 / 2211 @ c=73, r=1, X138.680 Y74.526 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c073_r001.jpg 1937 / 2211, ETA: 00:10:54.2118 @ 0.418825 items / sec XY3P: 1938 / 2211 @ c=72, r=1, X138.507 Y74.530 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c072_r001.jpg 1938 / 2211, ETA: 00:10:51.8255 @ 0.418824 items / sec XY3P: 1939 / 2211 @ c=71, r=1, X138.334 Y74.534 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c071_r001.jpg 1939 / 2211, ETA: 00:10:49.4393 @ 0.418823 items / sec XY3P: 1940 / 2211 @ c=70, r=1, X138.161 Y74.538 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c070_r001.jpg 1940 / 2211, ETA: 00:10:47.0529 @ 0.418822 items / sec XY3P: 1941 / 2211 @ c=69, r=1, X137.989 Y74.542 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c069_r001.jpg 1941 / 2211, ETA: 00:10:44.6672 @ 0.418821 items / sec XY3P: 1942 / 2211 @ c=68, r=1, X137.816 Y74.545 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c068_r001.jpg 1942 / 2211, ETA: 00:10:42.2804 @ 0.418820 items / sec XY3P: 1943 / 2211 @ c=67, r=1, X137.643 Y74.549 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c067_r001.jpg 1943 / 2211, ETA: 00:10:39.8938 @ 0.418819 items / sec XY3P: 1944 / 2211 @ c=66, r=1, X137.471 Y74.553 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c066_r001.jpg 1944 / 2211, ETA: 00:10:37.5076 @ 0.418819 items / sec XY3P: 1945 / 2211 @ c=65, r=1, X137.298 Y74.557 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c065_r001.jpg 1945 / 2211, ETA: 00:10:35.1212 @ 0.418818 items / sec XY3P: 1946 / 2211 @ c=64, r=1, X137.125 Y74.561 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c064_r001.jpg 1946 / 2211, ETA: 00:10:32.7351 @ 0.418817 items / sec XY3P: 1947 / 2211 @ c=63, r=1, X136.952 Y74.565 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c063_r001.jpg 1947 / 2211, ETA: 00:10:30.3486 @ 0.418816 items / sec XY3P: 1948 / 2211 @ c=62, r=1, X136.780 Y74.569 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c062_r001.jpg 1948 / 2211, ETA: 00:10:27.9621 @ 0.418815 items / sec XY3P: 1949 / 2211 @ c=61, r=1, X136.607 Y74.573 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c061_r001.jpg 1949 / 2211, ETA: 00:10:25.5757 @ 0.418814 items / sec XY3P: 1950 / 2211 @ c=60, r=1, X136.434 Y74.577 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c060_r001.jpg 1950 / 2211, ETA: 00:10:23.1893 @ 0.418813 items / sec XY3P: 1951 / 2211 @ c=59, r=1, X136.261 Y74.581 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c059_r001.jpg 1951 / 2211, ETA: 00:10:20.8031 @ 0.418812 items / sec XY3P: 1952 / 2211 @ c=58, r=1, X136.089 Y74.585 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c058_r001.jpg 1952 / 2211, ETA: 00:10:18.4165 @ 0.418812 items / sec XY3P: 1953 / 2211 @ c=57, r=1, X135.916 Y74.589 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c057_r001.jpg 1953 / 2211, ETA: 00:10:16.0298 @ 0.418811 items / sec XY3P: 1954 / 2211 @ c=56, r=1, X135.743 Y74.593 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c056_r001.jpg 1954 / 2211, ETA: 00:10:13.6435 @ 0.418810 items / sec XY3P: 1955 / 2211 @ c=55, r=1, X135.570 Y74.597 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c055_r001.jpg 1955 / 2211, ETA: 00:10:11.2572 @ 0.418809 items / sec XY3P: 1956 / 2211 @ c=54, r=1, X135.398 Y74.601 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c054_r001.jpg 1956 / 2211, ETA: 00:10:08.8708 @ 0.418808 items / sec XY3P: 1957 / 2211 @ c=53, r=1, X135.225 Y74.605 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c053_r001.jpg 1957 / 2211, ETA: 00:10:06.4841 @ 0.418807 items / sec XY3P: 1958 / 2211 @ c=52, r=1, X135.052 Y74.609 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c052_r001.jpg 1958 / 2211, ETA: 00:10:04.0975 @ 0.418807 items / sec XY3P: 1959 / 2211 @ c=51, r=1, X134.879 Y74.613 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c051_r001.jpg 1959 / 2211, ETA: 00:10:01.7111 @ 0.418806 items / sec XY3P: 1960 / 2211 @ c=50, r=1, X134.707 Y74.617 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c050_r001.jpg 1960 / 2211, ETA: 00:09:59.3246 @ 0.418805 items / sec XY3P: 1961 / 2211 @ c=49, r=1, X134.534 Y74.621 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c049_r001.jpg 1961 / 2211, ETA: 00:09:56.9383 @ 0.418804 items / sec XY3P: 1962 / 2211 @ c=48, r=1, X134.361 Y74.625 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c048_r001.jpg 1962 / 2211, ETA: 00:09:54.5515 @ 0.418803 items / sec XY3P: 1963 / 2211 @ c=47, r=1, X134.188 Y74.629 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c047_r001.jpg 1963 / 2211, ETA: 00:09:52.1649 @ 0.418802 items / sec XY3P: 1964 / 2211 @ c=46, r=1, X134.016 Y74.633 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c046_r001.jpg 1964 / 2211, ETA: 00:09:49.7783 @ 0.418801 items / sec XY3P: 1965 / 2211 @ c=45, r=1, X133.843 Y74.637 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c045_r001.jpg 1965 / 2211, ETA: 00:09:47.3918 @ 0.418801 items / sec XY3P: 1966 / 2211 @ c=44, r=1, X133.670 Y74.641 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c044_r001.jpg 1966 / 2211, ETA: 00:09:45.0055 @ 0.418799 items / sec XY3P: 1967 / 2211 @ c=43, r=1, X133.497 Y74.645 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c043_r001.jpg 1967 / 2211, ETA: 00:09:42.6187 @ 0.418799 items / sec XY3P: 1968 / 2211 @ c=42, r=1, X133.325 Y74.649 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c042_r001.jpg 1968 / 2211, ETA: 00:09:40.2320 @ 0.418798 items / sec XY3P: 1969 / 2211 @ c=41, r=1, X133.152 Y74.653 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c041_r001.jpg 1969 / 2211, ETA: 00:09:37.8454 @ 0.418797 items / sec XY3P: 1970 / 2211 @ c=40, r=1, X132.979 Y74.656 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c040_r001.jpg 1970 / 2211, ETA: 00:09:35.4587 @ 0.418796 items / sec XY3P: 1971 / 2211 @ c=39, r=1, X132.806 Y74.660 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c039_r001.jpg 1971 / 2211, ETA: 00:09:33.0724 @ 0.418795 items / sec XY3P: 1972 / 2211 @ c=38, r=1, X132.633 Y74.664 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c038_r001.jpg 1972 / 2211, ETA: 00:09:30.6854 @ 0.418795 items / sec XY3P: 1973 / 2211 @ c=37, r=1, X132.461 Y74.668 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c037_r001.jpg 1973 / 2211, ETA: 00:09:28.2988 @ 0.418794 items / sec XY3P: 1974 / 2211 @ c=36, r=1, X132.288 Y74.672 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c036_r001.jpg 1974 / 2211, ETA: 00:09:25.9122 @ 0.418793 items / sec XY3P: 1975 / 2211 @ c=35, r=1, X132.115 Y74.676 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c035_r001.jpg 1975 / 2211, ETA: 00:09:23.5255 @ 0.418792 items / sec XY3P: 1976 / 2211 @ c=34, r=1, X131.942 Y74.680 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c034_r001.jpg 1976 / 2211, ETA: 00:09:21.1393 @ 0.418791 items / sec XY3P: 1977 / 2211 @ c=33, r=1, X131.770 Y74.684 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c033_r001.jpg 1977 / 2211, ETA: 00:09:18.7529 @ 0.418790 items / sec XY3P: 1978 / 2211 @ c=32, r=1, X131.597 Y74.688 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c032_r001.jpg 1978 / 2211, ETA: 00:09:16.3664 @ 0.418789 items / sec XY3P: 1979 / 2211 @ c=31, r=1, X131.424 Y74.692 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c031_r001.jpg 1979 / 2211, ETA: 00:09:13.9785 @ 0.418789 items / sec XY3P: 1980 / 2211 @ c=30, r=1, X131.251 Y74.696 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c030_r001.jpg 1980 / 2211, ETA: 00:09:11.5920 @ 0.418788 items / sec XY3P: 1981 / 2211 @ c=29, r=1, X131.079 Y74.700 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c029_r001.jpg 1981 / 2211, ETA: 00:09:09.2051 @ 0.418787 items / sec XY3P: 1982 / 2211 @ c=28, r=1, X130.906 Y74.704 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c028_r001.jpg 1982 / 2211, ETA: 00:09:06.8186 @ 0.418786 items / sec XY3P: 1983 / 2211 @ c=27, r=1, X130.733 Y74.708 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c027_r001.jpg 1983 / 2211, ETA: 00:09:04.4316 @ 0.418785 items / sec XY3P: 1984 / 2211 @ c=26, r=1, X130.560 Y74.712 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c026_r001.jpg 1984 / 2211, ETA: 00:09:02.0447 @ 0.418785 items / sec XY3P: 1985 / 2211 @ c=25, r=1, X130.388 Y74.716 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c025_r001.jpg 1985 / 2211, ETA: 00:08:59.6579 @ 0.418784 items / sec XY3P: 1986 / 2211 @ c=24, r=1, X130.215 Y74.720 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c024_r001.jpg 1986 / 2211, ETA: 00:08:57.2712 @ 0.418783 items / sec XY3P: 1987 / 2211 @ c=23, r=1, X130.042 Y74.724 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c023_r001.jpg 1987 / 2211, ETA: 00:08:54.8845 @ 0.418782 items / sec XY3P: 1988 / 2211 @ c=22, r=1, X129.870 Y74.728 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c022_r001.jpg 1988 / 2211, ETA: 00:08:52.4975 @ 0.418781 items / sec XY3P: 1989 / 2211 @ c=21, r=1, X129.697 Y74.732 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c021_r001.jpg 1989 / 2211, ETA: 00:08:50.1107 @ 0.418780 items / sec XY3P: 1990 / 2211 @ c=20, r=1, X129.524 Y74.736 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c020_r001.jpg 1990 / 2211, ETA: 00:08:47.7238 @ 0.418780 items / sec XY3P: 1991 / 2211 @ c=19, r=1, X129.351 Y74.740 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c019_r001.jpg 1991 / 2211, ETA: 00:08:45.3593 @ 0.418761 items / sec XY3P: 1992 / 2211 @ c=18, r=1, X129.179 Y74.744 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c018_r001.jpg 1992 / 2211, ETA: 00:08:42.9721 @ 0.418760 items / sec XY3P: 1993 / 2211 @ c=17, r=1, X129.006 Y74.748 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c017_r001.jpg 1993 / 2211, ETA: 00:08:40.5632 @ 0.418777 items / sec XY3P: 1994 / 2211 @ c=16, r=1, X128.833 Y74.752 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c016_r001.jpg 1994 / 2211, ETA: 00:08:38.1770 @ 0.418776 items / sec XY3P: 1995 / 2211 @ c=15, r=1, X128.660 Y74.756 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c015_r001.jpg 1995 / 2211, ETA: 00:08:35.7895 @ 0.418775 items / sec XY3P: 1996 / 2211 @ c=14, r=1, X128.488 Y74.760 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c014_r001.jpg 1996 / 2211, ETA: 00:08:33.4026 @ 0.418775 items / sec XY3P: 1997 / 2211 @ c=13, r=1, X128.315 Y74.764 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c013_r001.jpg 1997 / 2211, ETA: 00:08:31.0159 @ 0.418774 items / sec XY3P: 1998 / 2211 @ c=12, r=1, X128.142 Y74.768 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c012_r001.jpg 1998 / 2211, ETA: 00:08:28.6287 @ 0.418773 items / sec XY3P: 1999 / 2211 @ c=11, r=1, X127.969 Y74.771 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c011_r001.jpg 1999 / 2211, ETA: 00:08:26.2417 @ 0.418772 items / sec XY3P: 2000 / 2211 @ c=10, r=1, X127.797 Y74.775 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c010_r001.jpg 2000 / 2211, ETA: 00:08:23.8548 @ 0.418771 items / sec XY3P: 2001 / 2211 @ c=9, r=1, X127.624 Y74.779 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c009_r001.jpg 2001 / 2211, ETA: 00:08:21.4679 @ 0.418771 items / sec XY3P: 2002 / 2211 @ c=8, r=1, X127.451 Y74.783 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c008_r001.jpg 2002 / 2211, ETA: 00:08:19.0811 @ 0.418770 items / sec XY3P: 2003 / 2211 @ c=7, r=1, X127.278 Y74.787 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c007_r001.jpg 2003 / 2211, ETA: 00:08:16.6939 @ 0.418769 items / sec XY3P: 2004 / 2211 @ c=6, r=1, X127.106 Y74.791 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c006_r001.jpg 2004 / 2211, ETA: 00:08:14.3069 @ 0.418768 items / sec XY3P: 2005 / 2211 @ c=5, r=1, X126.933 Y74.795 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c005_r001.jpg 2005 / 2211, ETA: 00:08:11.9200 @ 0.418767 items / sec XY3P: 2006 / 2211 @ c=4, r=1, X126.760 Y74.799 Z-15.155 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c004_r001.jpg 2006 / 2211, ETA: 00:08:09.5329 @ 0.418766 items / sec XY3P: 2007 / 2211 @ c=3, r=1, X126.587 Y74.803 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c003_r001.jpg 2007 / 2211, ETA: 00:08:07.1467 @ 0.418765 items / sec XY3P: 2008 / 2211 @ c=2, r=1, X126.415 Y74.807 Z-15.156 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c002_r001.jpg 2008 / 2211, ETA: 00:08:04.7589 @ 0.418765 items / sec XY3P: 2009 / 2211 @ c=1, r=1, X126.242 Y74.811 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c001_r001.jpg 2009 / 2211, ETA: 00:08:02.3717 @ 0.418764 items / sec XY3P: 2010 / 2211 @ c=0, r=1, X126.069 Y74.815 Z-15.157 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c000_r001.jpg 2010 / 2211, ETA: 00:07:59.9848 @ 0.418763 items / sec XY3P: 2011 / 2211 @ c=0, r=0, X126.069 Y74.976 Z-15.154 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c000_r000.jpg 2011 / 2211, ETA: 00:07:57.5977 @ 0.418762 items / sec XY3P: 2012 / 2211 @ c=1, r=0, X126.242 Y74.972 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c001_r000.jpg 2012 / 2211, ETA: 00:07:55.2109 @ 0.418761 items / sec XY3P: 2013 / 2211 @ c=2, r=0, X126.415 Y74.968 Z-15.153 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c002_r000.jpg 2013 / 2211, ETA: 00:07:52.8242 @ 0.418760 items / sec XY3P: 2014 / 2211 @ c=3, r=0, X126.587 Y74.964 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c003_r000.jpg 2014 / 2211, ETA: 00:07:50.4364 @ 0.418760 items / sec XY3P: 2015 / 2211 @ c=4, r=0, X126.760 Y74.960 Z-15.152 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c004_r000.jpg 2015 / 2211, ETA: 00:07:48.0494 @ 0.418759 items / sec XY3P: 2016 / 2211 @ c=5, r=0, X126.933 Y74.956 Z-15.151 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c005_r000.jpg 2016 / 2211, ETA: 00:07:45.6622 @ 0.418758 items / sec XY3P: 2017 / 2211 @ c=6, r=0, X127.106 Y74.952 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c006_r000.jpg 2017 / 2211, ETA: 00:07:43.2753 @ 0.418757 items / sec XY3P: 2018 / 2211 @ c=7, r=0, X127.278 Y74.948 Z-15.150 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c007_r000.jpg 2018 / 2211, ETA: 00:07:40.8880 @ 0.418757 items / sec XY3P: 2019 / 2211 @ c=8, r=0, X127.451 Y74.944 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c008_r000.jpg 2019 / 2211, ETA: 00:07:38.5010 @ 0.418756 items / sec XY3P: 2020 / 2211 @ c=9, r=0, X127.624 Y74.940 Z-15.149 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c009_r000.jpg 2020 / 2211, ETA: 00:07:36.0950 @ 0.418772 items / sec XY3P: 2021 / 2211 @ c=10, r=0, X127.797 Y74.936 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c010_r000.jpg 2021 / 2211, ETA: 00:07:33.7078 @ 0.418772 items / sec XY3P: 2022 / 2211 @ c=11, r=0, X127.969 Y74.932 Z-15.148 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c011_r000.jpg 2022 / 2211, ETA: 00:07:31.3207 @ 0.418771 items / sec XY3P: 2023 / 2211 @ c=12, r=0, X128.142 Y74.928 Z-15.147 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c012_r000.jpg 2023 / 2211, ETA: 00:07:28.9336 @ 0.418770 items / sec XY3P: 2024 / 2211 @ c=13, r=0, X128.315 Y74.924 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c013_r000.jpg 2024 / 2211, ETA: 00:07:26.5465 @ 0.418769 items / sec XY3P: 2025 / 2211 @ c=14, r=0, X128.488 Y74.920 Z-15.146 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c014_r000.jpg 2025 / 2211, ETA: 00:07:24.1602 @ 0.418768 items / sec XY3P: 2026 / 2211 @ c=15, r=0, X128.660 Y74.917 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c015_r000.jpg 2026 / 2211, ETA: 00:07:21.7724 @ 0.418768 items / sec XY3P: 2027 / 2211 @ c=16, r=0, X128.833 Y74.913 Z-15.145 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c016_r000.jpg 2027 / 2211, ETA: 00:07:19.3853 @ 0.418767 items / sec XY3P: 2028 / 2211 @ c=17, r=0, X129.006 Y74.909 Z-15.144 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c017_r000.jpg 2028 / 2211, ETA: 00:07:16.9981 @ 0.418766 items / sec XY3P: 2029 / 2211 @ c=18, r=0, X129.179 Y74.905 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c018_r000.jpg 2029 / 2211, ETA: 00:07:14.6115 @ 0.418765 items / sec XY3P: 2030 / 2211 @ c=19, r=0, X129.351 Y74.901 Z-15.143 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c019_r000.jpg 2030 / 2211, ETA: 00:07:12.2239 @ 0.418764 items / sec XY3P: 2031 / 2211 @ c=20, r=0, X129.524 Y74.897 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c020_r000.jpg 2031 / 2211, ETA: 00:07:09.8367 @ 0.418764 items / sec XY3P: 2032 / 2211 @ c=21, r=0, X129.697 Y74.893 Z-15.142 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c021_r000.jpg 2032 / 2211, ETA: 00:07:07.4495 @ 0.418763 items / sec XY3P: 2033 / 2211 @ c=22, r=0, X129.870 Y74.889 Z-15.141 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c022_r000.jpg 2033 / 2211, ETA: 00:07:05.0623 @ 0.418762 items / sec XY3P: 2034 / 2211 @ c=23, r=0, X130.042 Y74.885 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c023_r000.jpg 2034 / 2211, ETA: 00:07:02.6752 @ 0.418761 items / sec XY3P: 2035 / 2211 @ c=24, r=0, X130.215 Y74.881 Z-15.140 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c024_r000.jpg 2035 / 2211, ETA: 00:07:00.2881 @ 0.418760 items / sec XY3P: 2036 / 2211 @ c=25, r=0, X130.388 Y74.877 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c025_r000.jpg 2036 / 2211, ETA: 00:06:57.9012 @ 0.418759 items / sec XY3P: 2037 / 2211 @ c=26, r=0, X130.560 Y74.873 Z-15.139 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c026_r000.jpg 2037 / 2211, ETA: 00:06:55.5135 @ 0.418759 items / sec XY3P: 2038 / 2211 @ c=27, r=0, X130.733 Y74.869 Z-15.138 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c027_r000.jpg 2038 / 2211, ETA: 00:06:53.1094 @ 0.418775 items / sec XY3P: 2039 / 2211 @ c=28, r=0, X130.906 Y74.865 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c028_r000.jpg 2039 / 2211, ETA: 00:06:50.7222 @ 0.418774 items / sec XY3P: 2040 / 2211 @ c=29, r=0, X131.079 Y74.861 Z-15.137 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c029_r000.jpg 2040 / 2211, ETA: 00:06:48.3351 @ 0.418774 items / sec XY3P: 2041 / 2211 @ c=30, r=0, X131.251 Y74.857 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c030_r000.jpg 2041 / 2211, ETA: 00:06:45.9481 @ 0.418773 items / sec XY3P: 2042 / 2211 @ c=31, r=0, X131.424 Y74.853 Z-15.136 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c031_r000.jpg 2042 / 2211, ETA: 00:06:43.5608 @ 0.418772 items / sec XY3P: 2043 / 2211 @ c=32, r=0, X131.597 Y74.849 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c032_r000.jpg 2043 / 2211, ETA: 00:06:41.1736 @ 0.418771 items / sec XY3P: 2044 / 2211 @ c=33, r=0, X131.770 Y74.845 Z-15.135 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c033_r000.jpg 2044 / 2211, ETA: 00:06:38.7865 @ 0.418770 items / sec XY3P: 2045 / 2211 @ c=34, r=0, X131.942 Y74.841 Z-15.134 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c034_r000.jpg 2045 / 2211, ETA: 00:06:36.3993 @ 0.418770 items / sec XY3P: 2046 / 2211 @ c=35, r=0, X132.115 Y74.837 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c035_r000.jpg 2046 / 2211, ETA: 00:06:34.0122 @ 0.418769 items / sec XY3P: 2047 / 2211 @ c=36, r=0, X132.288 Y74.833 Z-15.133 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c036_r000.jpg 2047 / 2211, ETA: 00:06:31.6249 @ 0.418768 items / sec XY3P: 2048 / 2211 @ c=37, r=0, X132.461 Y74.829 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c037_r000.jpg 2048 / 2211, ETA: 00:06:29.2377 @ 0.418767 items / sec XY3P: 2049 / 2211 @ c=38, r=0, X132.633 Y74.825 Z-15.132 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c038_r000.jpg 2049 / 2211, ETA: 00:06:26.8508 @ 0.418766 items / sec XY3P: 2050 / 2211 @ c=39, r=0, X132.806 Y74.821 Z-15.131 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c039_r000.jpg 2050 / 2211, ETA: 00:06:24.4636 @ 0.418765 items / sec XY3P: 2051 / 2211 @ c=40, r=0, X132.979 Y74.817 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c040_r000.jpg 2051 / 2211, ETA: 00:06:22.0759 @ 0.418765 items / sec XY3P: 2052 / 2211 @ c=41, r=0, X133.152 Y74.813 Z-15.130 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c041_r000.jpg 2052 / 2211, ETA: 00:06:19.6895 @ 0.418763 items / sec XY3P: 2053 / 2211 @ c=42, r=0, X133.325 Y74.809 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c042_r000.jpg 2053 / 2211, ETA: 00:06:17.3015 @ 0.418763 items / sec XY3P: 2054 / 2211 @ c=43, r=0, X133.497 Y74.806 Z-15.129 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c043_r000.jpg 2054 / 2211, ETA: 00:06:14.9144 @ 0.418762 items / sec XY3P: 2055 / 2211 @ c=44, r=0, X133.670 Y74.802 Z-15.128 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c044_r000.jpg 2055 / 2211, ETA: 00:06:12.5273 @ 0.418761 items / sec XY3P: 2056 / 2211 @ c=45, r=0, X133.843 Y74.798 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c045_r000.jpg 2056 / 2211, ETA: 00:06:10.1400 @ 0.418760 items / sec XY3P: 2057 / 2211 @ c=46, r=0, X134.016 Y74.794 Z-15.127 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c046_r000.jpg 2057 / 2211, ETA: 00:06:07.7524 @ 0.418760 items / sec XY3P: 2058 / 2211 @ c=47, r=0, X134.188 Y74.790 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c047_r000.jpg 2058 / 2211, ETA: 00:06:05.3650 @ 0.418759 items / sec XY3P: 2059 / 2211 @ c=48, r=0, X134.361 Y74.786 Z-15.126 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c048_r000.jpg 2059 / 2211, ETA: 00:06:02.9778 @ 0.418758 items / sec XY3P: 2060 / 2211 @ c=49, r=0, X134.534 Y74.782 Z-15.125 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c049_r000.jpg 2060 / 2211, ETA: 00:06:00.5903 @ 0.418758 items / sec XY3P: 2061 / 2211 @ c=50, r=0, X134.707 Y74.778 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c050_r000.jpg 2061 / 2211, ETA: 00:05:58.2029 @ 0.418757 items / sec XY3P: 2062 / 2211 @ c=51, r=0, X134.879 Y74.774 Z-15.124 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c051_r000.jpg 2062 / 2211, ETA: 00:05:55.8156 @ 0.418756 items / sec XY3P: 2063 / 2211 @ c=52, r=0, X135.052 Y74.770 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c052_r000.jpg 2063 / 2211, ETA: 00:05:53.4283 @ 0.418755 items / sec XY3P: 2064 / 2211 @ c=53, r=0, X135.225 Y74.766 Z-15.123 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c053_r000.jpg 2064 / 2211, ETA: 00:05:51.0410 @ 0.418754 items / sec XY3P: 2065 / 2211 @ c=54, r=0, X135.398 Y74.762 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c054_r000.jpg 2065 / 2211, ETA: 00:05:48.6535 @ 0.418754 items / sec XY3P: 2066 / 2211 @ c=55, r=0, X135.570 Y74.758 Z-15.122 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c055_r000.jpg 2066 / 2211, ETA: 00:05:46.2660 @ 0.418753 items / sec XY3P: 2067 / 2211 @ c=56, r=0, X135.743 Y74.754 Z-15.121 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c056_r000.jpg 2067 / 2211, ETA: 00:05:43.8787 @ 0.418752 items / sec XY3P: 2068 / 2211 @ c=57, r=0, X135.916 Y74.750 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c057_r000.jpg 2068 / 2211, ETA: 00:05:41.4913 @ 0.418751 items / sec XY3P: 2069 / 2211 @ c=58, r=0, X136.089 Y74.746 Z-15.120 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c058_r000.jpg 2069 / 2211, ETA: 00:05:39.1040 @ 0.418751 items / sec XY3P: 2070 / 2211 @ c=59, r=0, X136.261 Y74.742 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c059_r000.jpg 2070 / 2211, ETA: 00:05:36.7164 @ 0.418750 items / sec XY3P: 2071 / 2211 @ c=60, r=0, X136.434 Y74.738 Z-15.119 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c060_r000.jpg 2071 / 2211, ETA: 00:05:34.3289 @ 0.418749 items / sec XY3P: 2072 / 2211 @ c=61, r=0, X136.607 Y74.734 Z-15.118 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c061_r000.jpg 2072 / 2211, ETA: 00:05:31.9416 @ 0.418748 items / sec XY3P: 2073 / 2211 @ c=62, r=0, X136.780 Y74.730 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c062_r000.jpg 2073 / 2211, ETA: 00:05:29.5541 @ 0.418748 items / sec XY3P: 2074 / 2211 @ c=63, r=0, X136.952 Y74.726 Z-15.117 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c063_r000.jpg 2074 / 2211, ETA: 00:05:27.1534 @ 0.418764 items / sec XY3P: 2075 / 2211 @ c=64, r=0, X137.125 Y74.722 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c064_r000.jpg 2075 / 2211, ETA: 00:05:24.7530 @ 0.418780 items / sec XY3P: 2076 / 2211 @ c=65, r=0, X137.298 Y74.718 Z-15.116 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c065_r000.jpg 2076 / 2211, ETA: 00:05:22.3657 @ 0.418779 items / sec XY3P: 2077 / 2211 @ c=66, r=0, X137.471 Y74.714 Z-15.115 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c066_r000.jpg 2077 / 2211, ETA: 00:05:19.9783 @ 0.418778 items / sec XY3P: 2078 / 2211 @ c=67, r=0, X137.643 Y74.710 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c067_r000.jpg 2078 / 2211, ETA: 00:05:17.5912 @ 0.418777 items / sec XY3P: 2079 / 2211 @ c=68, r=0, X137.816 Y74.706 Z-15.114 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c068_r000.jpg 2079 / 2211, ETA: 00:05:15.2038 @ 0.418777 items / sec XY3P: 2080 / 2211 @ c=69, r=0, X137.989 Y74.702 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c069_r000.jpg 2080 / 2211, ETA: 00:05:12.8165 @ 0.418776 items / sec XY3P: 2081 / 2211 @ c=70, r=0, X138.161 Y74.698 Z-15.113 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c070_r000.jpg 2081 / 2211, ETA: 00:05:10.4291 @ 0.418775 items / sec XY3P: 2082 / 2211 @ c=71, r=0, X138.334 Y74.694 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c071_r000.jpg 2082 / 2211, ETA: 00:05:08.0418 @ 0.418774 items / sec XY3P: 2083 / 2211 @ c=72, r=0, X138.507 Y74.691 Z-15.112 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c072_r000.jpg 2083 / 2211, ETA: 00:05:05.6546 @ 0.418773 items / sec XY3P: 2084 / 2211 @ c=73, r=0, X138.680 Y74.687 Z-15.111 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c073_r000.jpg 2084 / 2211, ETA: 00:05:03.2671 @ 0.418773 items / sec XY3P: 2085 / 2211 @ c=74, r=0, X138.852 Y74.683 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c074_r000.jpg 2085 / 2211, ETA: 00:05:00.8797 @ 0.418772 items / sec XY3P: 2086 / 2211 @ c=75, r=0, X139.025 Y74.679 Z-15.110 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c075_r000.jpg 2086 / 2211, ETA: 00:04:58.4924 @ 0.418771 items / sec XY3P: 2087 / 2211 @ c=76, r=0, X139.198 Y74.675 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c076_r000.jpg 2087 / 2211, ETA: 00:04:56.1049 @ 0.418770 items / sec XY3P: 2088 / 2211 @ c=77, r=0, X139.371 Y74.671 Z-15.109 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c077_r000.jpg 2088 / 2211, ETA: 00:04:53.7177 @ 0.418769 items / sec XY3P: 2089 / 2211 @ c=78, r=0, X139.543 Y74.667 Z-15.108 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c078_r000.jpg 2089 / 2211, ETA: 00:04:51.3301 @ 0.418769 items / sec XY3P: 2090 / 2211 @ c=79, r=0, X139.716 Y74.663 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c079_r000.jpg 2090 / 2211, ETA: 00:04:48.9428 @ 0.418768 items / sec XY3P: 2091 / 2211 @ c=80, r=0, X139.889 Y74.659 Z-15.107 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c080_r000.jpg 2091 / 2211, ETA: 00:04:46.5553 @ 0.418767 items / sec XY3P: 2092 / 2211 @ c=81, r=0, X140.062 Y74.655 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c081_r000.jpg 2092 / 2211, ETA: 00:04:44.1679 @ 0.418766 items / sec XY3P: 2093 / 2211 @ c=82, r=0, X140.234 Y74.651 Z-15.106 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c082_r000.jpg 2093 / 2211, ETA: 00:04:41.7692 @ 0.418782 items / sec XY3P: 2094 / 2211 @ c=83, r=0, X140.407 Y74.647 Z-15.105 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c083_r000.jpg 2094 / 2211, ETA: 00:04:39.3707 @ 0.418798 items / sec XY3P: 2095 / 2211 @ c=84, r=0, X140.580 Y74.643 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c084_r000.jpg 2095 / 2211, ETA: 00:04:36.9834 @ 0.418798 items / sec XY3P: 2096 / 2211 @ c=85, r=0, X140.753 Y74.639 Z-15.104 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c085_r000.jpg 2096 / 2211, ETA: 00:04:34.5962 @ 0.418797 items / sec XY3P: 2097 / 2211 @ c=86, r=0, X140.925 Y74.635 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c086_r000.jpg 2097 / 2211, ETA: 00:04:32.2090 @ 0.418796 items / sec XY3P: 2098 / 2211 @ c=87, r=0, X141.098 Y74.631 Z-15.103 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c087_r000.jpg 2098 / 2211, ETA: 00:04:29.8216 @ 0.418795 items / sec XY3P: 2099 / 2211 @ c=88, r=0, X141.271 Y74.627 Z-15.102 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c088_r000.jpg 2099 / 2211, ETA: 00:04:27.4343 @ 0.418794 items / sec XY3P: 2100 / 2211 @ c=89, r=0, X141.444 Y74.623 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c089_r000.jpg 2100 / 2211, ETA: 00:04:25.0470 @ 0.418794 items / sec XY3P: 2101 / 2211 @ c=90, r=0, X141.617 Y74.619 Z-15.101 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c090_r000.jpg 2101 / 2211, ETA: 00:04:22.6597 @ 0.418793 items / sec XY3P: 2102 / 2211 @ c=91, r=0, X141.789 Y74.615 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c091_r000.jpg 2102 / 2211, ETA: 00:04:20.2725 @ 0.418792 items / sec XY3P: 2103 / 2211 @ c=92, r=0, X141.962 Y74.611 Z-15.100 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c092_r000.jpg 2103 / 2211, ETA: 00:04:17.8850 @ 0.418791 items / sec XY3P: 2104 / 2211 @ c=93, r=0, X142.135 Y74.607 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c093_r000.jpg 2104 / 2211, ETA: 00:04:15.4977 @ 0.418790 items / sec XY3P: 2105 / 2211 @ c=94, r=0, X142.308 Y74.603 Z-15.099 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c094_r000.jpg 2105 / 2211, ETA: 00:04:13.1103 @ 0.418790 items / sec XY3P: 2106 / 2211 @ c=95, r=0, X142.480 Y74.599 Z-15.098 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c095_r000.jpg 2106 / 2211, ETA: 00:04:10.7229 @ 0.418789 items / sec XY3P: 2107 / 2211 @ c=96, r=0, X142.653 Y74.595 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c096_r000.jpg 2107 / 2211, ETA: 00:04:08.3356 @ 0.418788 items / sec XY3P: 2108 / 2211 @ c=97, r=0, X142.826 Y74.591 Z-15.097 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c097_r000.jpg 2108 / 2211, ETA: 00:04:05.9482 @ 0.418787 items / sec XY3P: 2109 / 2211 @ c=98, r=0, X142.999 Y74.587 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c098_r000.jpg 2109 / 2211, ETA: 00:04:03.5608 @ 0.418787 items / sec XY3P: 2110 / 2211 @ c=99, r=0, X143.171 Y74.583 Z-15.096 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c099_r000.jpg 2110 / 2211, ETA: 00:04:01.1734 @ 0.418786 items / sec XY3P: 2111 / 2211 @ c=100, r=0, X143.344 Y74.579 Z-15.095 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c100_r000.jpg 2111 / 2211, ETA: 00:03:58.7765 @ 0.418802 items / sec XY3P: 2112 / 2211 @ c=101, r=0, X143.517 Y74.576 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c101_r000.jpg 2112 / 2211, ETA: 00:03:56.3798 @ 0.418817 items / sec XY3P: 2113 / 2211 @ c=102, r=0, X143.690 Y74.572 Z-15.094 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c102_r000.jpg 2113 / 2211, ETA: 00:03:53.9833 @ 0.418833 items / sec XY3P: 2114 / 2211 @ c=103, r=0, X143.862 Y74.568 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c103_r000.jpg 2114 / 2211, ETA: 00:03:51.5962 @ 0.418832 items / sec XY3P: 2115 / 2211 @ c=104, r=0, X144.035 Y74.564 Z-15.093 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c104_r000.jpg 2115 / 2211, ETA: 00:03:49.2091 @ 0.418832 items / sec XY3P: 2116 / 2211 @ c=105, r=0, X144.208 Y74.560 Z-15.092 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c105_r000.jpg 2116 / 2211, ETA: 00:03:46.8219 @ 0.418831 items / sec XY3P: 2117 / 2211 @ c=106, r=0, X144.381 Y74.556 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c106_r000.jpg 2117 / 2211, ETA: 00:03:44.4348 @ 0.418830 items / sec XY3P: 2118 / 2211 @ c=107, r=0, X144.553 Y74.552 Z-15.091 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c107_r000.jpg 2118 / 2211, ETA: 00:03:42.0475 @ 0.418829 items / sec XY3P: 2119 / 2211 @ c=108, r=0, X144.726 Y74.548 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c108_r000.jpg 2119 / 2211, ETA: 00:03:39.6604 @ 0.418828 items / sec XY3P: 2120 / 2211 @ c=109, r=0, X144.899 Y74.544 Z-15.090 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c109_r000.jpg 2120 / 2211, ETA: 00:03:37.2731 @ 0.418828 items / sec XY3P: 2121 / 2211 @ c=110, r=0, X145.072 Y74.540 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c110_r000.jpg 2121 / 2211, ETA: 00:03:34.8860 @ 0.418827 items / sec XY3P: 2122 / 2211 @ c=111, r=0, X145.244 Y74.536 Z-15.089 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c111_r000.jpg 2122 / 2211, ETA: 00:03:32.4989 @ 0.418826 items / sec XY3P: 2123 / 2211 @ c=112, r=0, X145.417 Y74.532 Z-15.088 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c112_r000.jpg 2123 / 2211, ETA: 00:03:30.1117 @ 0.418825 items / sec XY3P: 2124 / 2211 @ c=113, r=0, X145.590 Y74.528 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c113_r000.jpg 2124 / 2211, ETA: 00:03:27.7245 @ 0.418824 items / sec XY3P: 2125 / 2211 @ c=114, r=0, X145.762 Y74.524 Z-15.087 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c114_r000.jpg 2125 / 2211, ETA: 00:03:25.3371 @ 0.418823 items / sec XY3P: 2126 / 2211 @ c=115, r=0, X145.935 Y74.520 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c115_r000.jpg 2126 / 2211, ETA: 00:03:22.9498 @ 0.418823 items / sec XY3P: 2127 / 2211 @ c=116, r=0, X146.108 Y74.516 Z-15.086 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c116_r000.jpg 2127 / 2211, ETA: 00:03:20.5626 @ 0.418822 items / sec XY3P: 2128 / 2211 @ c=117, r=0, X146.281 Y74.512 Z-15.085 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c117_r000.jpg 2128 / 2211, ETA: 00:03:18.1752 @ 0.418821 items / sec XY3P: 2129 / 2211 @ c=118, r=0, X146.453 Y74.508 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c118_r000.jpg 2129 / 2211, ETA: 00:03:15.7879 @ 0.418820 items / sec XY3P: 2130 / 2211 @ c=119, r=0, X146.626 Y74.504 Z-15.084 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c119_r000.jpg 2130 / 2211, ETA: 00:03:13.4007 @ 0.418819 items / sec XY3P: 2131 / 2211 @ c=120, r=0, X146.799 Y74.500 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c120_r000.jpg 2131 / 2211, ETA: 00:03:11.0059 @ 0.418835 items / sec XY3P: 2132 / 2211 @ c=121, r=0, X146.972 Y74.496 Z-15.083 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c121_r000.jpg 2132 / 2211, ETA: 00:03:08.6186 @ 0.418834 items / sec XY3P: 2133 / 2211 @ c=122, r=0, X147.144 Y74.492 Z-15.082 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c122_r000.jpg 2133 / 2211, ETA: 00:03:06.2314 @ 0.418834 items / sec XY3P: 2134 / 2211 @ c=123, r=0, X147.317 Y74.488 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c123_r000.jpg 2134 / 2211, ETA: 00:03:03.8442 @ 0.418833 items / sec XY3P: 2135 / 2211 @ c=124, r=0, X147.490 Y74.484 Z-15.081 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c124_r000.jpg 2135 / 2211, ETA: 00:03:01.4569 @ 0.418832 items / sec XY3P: 2136 / 2211 @ c=125, r=0, X147.663 Y74.480 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c125_r000.jpg 2136 / 2211, ETA: 00:02:59.0697 @ 0.418831 items / sec XY3P: 2137 / 2211 @ c=126, r=0, X147.835 Y74.476 Z-15.080 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c126_r000.jpg 2137 / 2211, ETA: 00:02:56.6824 @ 0.418830 items / sec XY3P: 2138 / 2211 @ c=127, r=0, X148.008 Y74.472 Z-15.079 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c127_r000.jpg 2138 / 2211, ETA: 00:02:54.2952 @ 0.418830 items / sec XY3P: 2139 / 2211 @ c=128, r=0, X148.181 Y74.468 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c128_r000.jpg 2139 / 2211, ETA: 00:02:51.9079 @ 0.418829 items / sec XY3P: 2140 / 2211 @ c=129, r=0, X148.354 Y74.465 Z-15.078 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c129_r000.jpg 2140 / 2211, ETA: 00:02:49.5206 @ 0.418828 items / sec XY3P: 2141 / 2211 @ c=130, r=0, X148.526 Y74.461 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c130_r000.jpg 2141 / 2211, ETA: 00:02:47.1333 @ 0.418827 items / sec XY3P: 2142 / 2211 @ c=131, r=0, X148.699 Y74.457 Z-15.077 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c131_r000.jpg 2142 / 2211, ETA: 00:02:44.7460 @ 0.418826 items / sec XY3P: 2143 / 2211 @ c=132, r=0, X148.872 Y74.453 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c132_r000.jpg 2143 / 2211, ETA: 00:02:42.3588 @ 0.418825 items / sec XY3P: 2144 / 2211 @ c=133, r=0, X149.045 Y74.449 Z-15.076 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c133_r000.jpg 2144 / 2211, ETA: 00:02:39.9713 @ 0.418825 items / sec XY3P: 2145 / 2211 @ c=134, r=0, X149.218 Y74.445 Z-15.075 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c134_r000.jpg 2145 / 2211, ETA: 00:02:37.5840 @ 0.418824 items / sec XY3P: 2146 / 2211 @ c=135, r=0, X149.390 Y74.441 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c135_r000.jpg 2146 / 2211, ETA: 00:02:35.1967 @ 0.418823 items / sec XY3P: 2147 / 2211 @ c=136, r=0, X149.563 Y74.437 Z-15.074 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c136_r000.jpg 2147 / 2211, ETA: 00:02:32.8093 @ 0.418823 items / sec XY3P: 2148 / 2211 @ c=137, r=0, X149.736 Y74.433 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c137_r000.jpg 2148 / 2211, ETA: 00:02:30.4219 @ 0.418822 items / sec XY3P: 2149 / 2211 @ c=138, r=0, X149.909 Y74.429 Z-15.073 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c138_r000.jpg 2149 / 2211, ETA: 00:02:28.0288 @ 0.418837 items / sec XY3P: 2150 / 2211 @ c=139, r=0, X150.081 Y74.425 Z-15.072 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c139_r000.jpg 2150 / 2211, ETA: 00:02:25.6359 @ 0.418853 items / sec XY3P: 2151 / 2211 @ c=140, r=0, X150.254 Y74.421 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c140_r000.jpg 2151 / 2211, ETA: 00:02:23.2486 @ 0.418852 items / sec XY3P: 2152 / 2211 @ c=141, r=0, X150.427 Y74.417 Z-15.071 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c141_r000.jpg 2152 / 2211, ETA: 00:02:20.8615 @ 0.418851 items / sec XY3P: 2153 / 2211 @ c=142, r=0, X150.600 Y74.413 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c142_r000.jpg 2153 / 2211, ETA: 00:02:18.4742 @ 0.418850 items / sec XY3P: 2154 / 2211 @ c=143, r=0, X150.772 Y74.409 Z-15.070 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c143_r000.jpg 2154 / 2211, ETA: 00:02:16.0870 @ 0.418850 items / sec XY3P: 2155 / 2211 @ c=144, r=0, X150.945 Y74.405 Z-15.069 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c144_r000.jpg 2155 / 2211, ETA: 00:02:13.6998 @ 0.418849 items / sec XY3P: 2156 / 2211 @ c=145, r=0, X151.118 Y74.401 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c145_r000.jpg 2156 / 2211, ETA: 00:02:11.3125 @ 0.418848 items / sec XY3P: 2157 / 2211 @ c=146, r=0, X151.291 Y74.397 Z-15.068 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c146_r000.jpg 2157 / 2211, ETA: 00:02:08.9252 @ 0.418847 items / sec XY3P: 2158 / 2211 @ c=147, r=0, X151.463 Y74.393 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c147_r000.jpg 2158 / 2211, ETA: 00:02:06.5380 @ 0.418846 items / sec XY3P: 2159 / 2211 @ c=148, r=0, X151.636 Y74.389 Z-15.067 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c148_r000.jpg 2159 / 2211, ETA: 00:02:04.1507 @ 0.418846 items / sec XY3P: 2160 / 2211 @ c=149, r=0, X151.809 Y74.385 Z-15.066 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c149_r000.jpg 2160 / 2211, ETA: 00:02:01.7635 @ 0.418845 items / sec XY3P: 2161 / 2211 @ c=150, r=0, X151.982 Y74.381 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c150_r000.jpg 2161 / 2211, ETA: 00:01:59.3761 @ 0.418844 items / sec XY3P: 2162 / 2211 @ c=151, r=0, X152.154 Y74.377 Z-15.065 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c151_r000.jpg 2162 / 2211, ETA: 00:01:56.9843 @ 0.418859 items / sec XY3P: 2163 / 2211 @ c=152, r=0, X152.327 Y74.373 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c152_r000.jpg 2163 / 2211, ETA: 00:01:54.5971 @ 0.418859 items / sec XY3P: 2164 / 2211 @ c=153, r=0, X152.500 Y74.369 Z-15.064 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c153_r000.jpg 2164 / 2211, ETA: 00:01:52.2099 @ 0.418858 items / sec XY3P: 2165 / 2211 @ c=154, r=0, X152.673 Y74.365 Z-15.063 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c154_r000.jpg 2165 / 2211, ETA: 00:01:49.8226 @ 0.418857 items / sec XY3P: 2166 / 2211 @ c=155, r=0, X152.845 Y74.361 Z-15.063 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c155_r000.jpg 2166 / 2211, ETA: 00:01:47.4354 @ 0.418856 items / sec XY3P: 2167 / 2211 @ c=156, r=0, X153.018 Y74.357 Z-15.062 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c156_r000.jpg 2167 / 2211, ETA: 00:01:45.0481 @ 0.418855 items / sec XY3P: 2168 / 2211 @ c=157, r=0, X153.191 Y74.353 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c157_r000.jpg 2168 / 2211, ETA: 00:01:42.6569 @ 0.418871 items / sec XY3P: 2169 / 2211 @ c=158, r=0, X153.363 Y74.350 Z-15.061 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c158_r000.jpg 2169 / 2211, ETA: 00:01:40.2658 @ 0.418886 items / sec XY3P: 2170 / 2211 @ c=159, r=0, X153.536 Y74.346 Z-15.060 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c159_r000.jpg 2170 / 2211, ETA: 00:01:37.8787 @ 0.418885 items / sec XY3P: 2171 / 2211 @ c=160, r=0, X153.709 Y74.342 Z-15.060 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c160_r000.jpg 2171 / 2211, ETA: 00:01:35.4916 @ 0.418885 items / sec XY3P: 2172 / 2211 @ c=161, r=0, X153.882 Y74.338 Z-15.059 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c161_r000.jpg 2172 / 2211, ETA: 00:01:33.1045 @ 0.418884 items / sec XY3P: 2173 / 2211 @ c=162, r=0, X154.054 Y74.334 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c162_r000.jpg 2173 / 2211, ETA: 00:01:30.7174 @ 0.418883 items / sec XY3P: 2174 / 2211 @ c=163, r=0, X154.227 Y74.330 Z-15.058 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c163_r000.jpg 2174 / 2211, ETA: 00:01:28.3302 @ 0.418882 items / sec XY3P: 2175 / 2211 @ c=164, r=0, X154.400 Y74.326 Z-15.057 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c164_r000.jpg 2175 / 2211, ETA: 00:01:25.9431 @ 0.418881 items / sec XY3P: 2176 / 2211 @ c=165, r=0, X154.573 Y74.322 Z-15.057 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c165_r000.jpg 2176 / 2211, ETA: 00:01:23.5560 @ 0.418881 items / sec XY3P: 2177 / 2211 @ c=166, r=0, X154.745 Y74.318 Z-15.056 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c166_r000.jpg 2177 / 2211, ETA: 00:01:21.1689 @ 0.418880 items / sec XY3P: 2178 / 2211 @ c=167, r=0, X154.918 Y74.314 Z-15.055 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c167_r000.jpg 2178 / 2211, ETA: 00:01:18.7816 @ 0.418879 items / sec XY3P: 2179 / 2211 @ c=168, r=0, X155.091 Y74.310 Z-15.055 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c168_r000.jpg 2179 / 2211, ETA: 00:01:16.3945 @ 0.418878 items / sec XY3P: 2180 / 2211 @ c=169, r=0, X155.264 Y74.306 Z-15.054 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c169_r000.jpg 2180 / 2211, ETA: 00:01:14.0073 @ 0.418877 items / sec XY3P: 2181 / 2211 @ c=170, r=0, X155.436 Y74.302 Z-15.054 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c170_r000.jpg 2181 / 2211, ETA: 00:01:11.6201 @ 0.418877 items / sec XY3P: 2182 / 2211 @ c=171, r=0, X155.609 Y74.298 Z-15.053 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c171_r000.jpg 2182 / 2211, ETA: 00:01:09.2329 @ 0.418876 items / sec XY3P: 2183 / 2211 @ c=172, r=0, X155.782 Y74.294 Z-15.053 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c172_r000.jpg 2183 / 2211, ETA: 00:01:06.8457 @ 0.418875 items / sec XY3P: 2184 / 2211 @ c=173, r=0, X155.955 Y74.290 Z-15.052 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c173_r000.jpg 2184 / 2211, ETA: 00:01:04.4584 @ 0.418874 items / sec XY3P: 2185 / 2211 @ c=174, r=0, X156.127 Y74.286 Z-15.051 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c174_r000.jpg 2185 / 2211, ETA: 00:01:02.0712 @ 0.418873 items / sec XY3P: 2186 / 2211 @ c=175, r=0, X156.300 Y74.282 Z-15.051 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c175_r000.jpg 2186 / 2211, ETA: 00:00:59.6817 @ 0.418889 items / sec XY3P: 2187 / 2211 @ c=176, r=0, X156.473 Y74.278 Z-15.050 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c176_r000.jpg 2187 / 2211, ETA: 00:00:57.2923 @ 0.418904 items / sec XY3P: 2188 / 2211 @ c=177, r=0, X156.646 Y74.274 Z-15.050 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c177_r000.jpg 2188 / 2211, ETA: 00:00:54.9052 @ 0.418903 items / sec XY3P: 2189 / 2211 @ c=178, r=0, X156.819 Y74.270 Z-15.049 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c178_r000.jpg 2189 / 2211, ETA: 00:00:52.5182 @ 0.418902 items / sec XY3P: 2190 / 2211 @ c=179, r=0, X156.991 Y74.266 Z-15.048 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c179_r000.jpg 2190 / 2211, ETA: 00:00:50.1311 @ 0.418901 items / sec XY3P: 2191 / 2211 @ c=180, r=0, X157.164 Y74.262 Z-15.048 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c180_r000.jpg 2191 / 2211, ETA: 00:00:47.7440 @ 0.418901 items / sec XY3P: 2192 / 2211 @ c=181, r=0, X157.337 Y74.258 Z-15.047 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c181_r000.jpg 2192 / 2211, ETA: 00:00:45.3569 @ 0.418900 items / sec XY3P: 2193 / 2211 @ c=182, r=0, X157.510 Y74.254 Z-15.047 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c182_r000.jpg 2193 / 2211, ETA: 00:00:42.9697 @ 0.418899 items / sec XY3P: 2194 / 2211 @ c=183, r=0, X157.682 Y74.250 Z-15.046 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c183_r000.jpg 2194 / 2211, ETA: 00:00:40.5826 @ 0.418898 items / sec XY3P: 2195 / 2211 @ c=184, r=0, X157.855 Y74.246 Z-15.045 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c184_r000.jpg 2195 / 2211, ETA: 00:00:38.1955 @ 0.418897 items / sec XY3P: 2196 / 2211 @ c=185, r=0, X158.028 Y74.242 Z-15.045 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c185_r000.jpg 2196 / 2211, ETA: 00:00:35.8083 @ 0.418896 items / sec XY3P: 2197 / 2211 @ c=186, r=0, X158.201 Y74.239 Z-15.044 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c186_r000.jpg 2197 / 2211, ETA: 00:00:33.4212 @ 0.418895 items / sec XY3P: 2198 / 2211 @ c=187, r=0, X158.373 Y74.235 Z-15.044 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c187_r000.jpg 2198 / 2211, ETA: 00:00:31.0340 @ 0.418894 items / sec XY3P: 2199 / 2211 @ c=188, r=0, X158.546 Y74.231 Z-15.043 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c188_r000.jpg 2199 / 2211, ETA: 00:00:28.6468 @ 0.418894 items / sec XY3P: 2200 / 2211 @ c=189, r=0, X158.719 Y74.227 Z-15.042 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c189_r000.jpg 2200 / 2211, ETA: 00:00:26.2596 @ 0.418893 items / sec XY3P: 2201 / 2211 @ c=190, r=0, X158.892 Y74.223 Z-15.042 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c190_r000.jpg 2201 / 2211, ETA: 00:00:23.8724 @ 0.418893 items / sec XY3P: 2202 / 2211 @ c=191, r=0, X159.064 Y74.219 Z-15.041 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c191_r000.jpg 2202 / 2211, ETA: 00:00:21.4852 @ 0.418892 items / sec XY3P: 2203 / 2211 @ c=192, r=0, X159.237 Y74.215 Z-15.041 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c192_r000.jpg 2203 / 2211, ETA: 00:00:19.0980 @ 0.418891 items / sec XY3P: 2204 / 2211 @ c=193, r=0, X159.410 Y74.211 Z-15.040 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c193_r000.jpg 2204 / 2211, ETA: 00:00:16.7108 @ 0.418890 items / sec XY3P: 2205 / 2211 @ c=194, r=0, X159.583 Y74.207 Z-15.040 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c194_r000.jpg 2205 / 2211, ETA: 00:00:14.3235 @ 0.418889 items / sec XY3P: 2206 / 2211 @ c=195, r=0, X159.755 Y74.203 Z-15.039 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c195_r000.jpg 2206 / 2211, ETA: 00:00:11.9358 @ 0.418905 items / sec XY3P: 2207 / 2211 @ c=196, r=0, X159.928 Y74.199 Z-15.038 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c196_r000.jpg 2207 / 2211, ETA: 00:00:09.5483 @ 0.418920 items / sec XY3P: 2208 / 2211 @ c=197, r=0, X160.101 Y74.195 Z-15.038 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c197_r000.jpg 2208 / 2211, ETA: 00:00:07.1612 @ 0.418919 items / sec XY3P: 2209 / 2211 @ c=198, r=0, X160.274 Y74.191 Z-15.037 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c198_r000.jpg 2209 / 2211, ETA: 00:00:04.7742 @ 0.418918 items / sec XY3P: 2210 / 2211 @ c=199, r=0, X160.446 Y74.187 Z-15.037 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c199_r000.jpg 2210 / 2211, ETA: 00:00:02.3871 @ 0.418917 items / sec XY3P: 2211 / 2211 @ c=200, r=0, X160.619 Y74.183 Z-15.036 Captured: data/scan/2026-06-17_05-51-00_waferspace1a/c200_r000.jpg 2211 / 2211, ETA: 00:00:00.0000 @ 0.418916 items / sec Cleaning up scan XY3P: returning XYZ at scan end to X126.069 Y73.367 Z-15.189 Done! Planner done! Took : 01:28:02.3232 RX planner done, result: ok